JPS52127063A - Production of semiconductor ic device - Google Patents
Production of semiconductor ic deviceInfo
- Publication number
- JPS52127063A JPS52127063A JP4383876A JP4383876A JPS52127063A JP S52127063 A JPS52127063 A JP S52127063A JP 4383876 A JP4383876 A JP 4383876A JP 4383876 A JP4383876 A JP 4383876A JP S52127063 A JPS52127063 A JP S52127063A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- production
- scribe line
- porous
- cleavages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Dicing (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To reduce the width for a scribe line and prevent cracks or shell-like cleavages by forming the peripheral areas of the scribe line with porous Si or insulated porous Si.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4383876A JPS52127063A (en) | 1976-04-16 | 1976-04-16 | Production of semiconductor ic device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4383876A JPS52127063A (en) | 1976-04-16 | 1976-04-16 | Production of semiconductor ic device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52127063A true JPS52127063A (en) | 1977-10-25 |
JPS5751941B2 JPS5751941B2 (en) | 1982-11-05 |
Family
ID=12674874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4383876A Granted JPS52127063A (en) | 1976-04-16 | 1976-04-16 | Production of semiconductor ic device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52127063A (en) |
-
1976
- 1976-04-16 JP JP4383876A patent/JPS52127063A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5751941B2 (en) | 1982-11-05 |
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