JPS52127063A - Production of semiconductor ic device - Google Patents

Production of semiconductor ic device

Info

Publication number
JPS52127063A
JPS52127063A JP4383876A JP4383876A JPS52127063A JP S52127063 A JPS52127063 A JP S52127063A JP 4383876 A JP4383876 A JP 4383876A JP 4383876 A JP4383876 A JP 4383876A JP S52127063 A JPS52127063 A JP S52127063A
Authority
JP
Japan
Prior art keywords
semiconductor
production
scribe line
porous
cleavages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4383876A
Other languages
Japanese (ja)
Other versions
JPS5751941B2 (en
Inventor
Kazutoshi Nagano
Kosei Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4383876A priority Critical patent/JPS52127063A/en
Publication of JPS52127063A publication Critical patent/JPS52127063A/en
Publication of JPS5751941B2 publication Critical patent/JPS5751941B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To reduce the width for a scribe line and prevent cracks or shell-like cleavages by forming the peripheral areas of the scribe line with porous Si or insulated porous Si.
COPYRIGHT: (C)1977,JPO&Japio
JP4383876A 1976-04-16 1976-04-16 Production of semiconductor ic device Granted JPS52127063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4383876A JPS52127063A (en) 1976-04-16 1976-04-16 Production of semiconductor ic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4383876A JPS52127063A (en) 1976-04-16 1976-04-16 Production of semiconductor ic device

Publications (2)

Publication Number Publication Date
JPS52127063A true JPS52127063A (en) 1977-10-25
JPS5751941B2 JPS5751941B2 (en) 1982-11-05

Family

ID=12674874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4383876A Granted JPS52127063A (en) 1976-04-16 1976-04-16 Production of semiconductor ic device

Country Status (1)

Country Link
JP (1) JPS52127063A (en)

Also Published As

Publication number Publication date
JPS5751941B2 (en) 1982-11-05

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