JPS52120680A - Evaporation exposure method of amorphous-type semi-conductor layer - Google Patents
Evaporation exposure method of amorphous-type semi-conductor layerInfo
- Publication number
- JPS52120680A JPS52120680A JP3607476A JP3607476A JPS52120680A JP S52120680 A JPS52120680 A JP S52120680A JP 3607476 A JP3607476 A JP 3607476A JP 3607476 A JP3607476 A JP 3607476A JP S52120680 A JPS52120680 A JP S52120680A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- amorphous
- conductor layer
- exposure method
- type semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3607476A JPS52120680A (en) | 1976-04-02 | 1976-04-02 | Evaporation exposure method of amorphous-type semi-conductor layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3607476A JPS52120680A (en) | 1976-04-02 | 1976-04-02 | Evaporation exposure method of amorphous-type semi-conductor layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52120680A true JPS52120680A (en) | 1977-10-11 |
JPS5729046B2 JPS5729046B2 (US06262066-20010717-C00315.png) | 1982-06-21 |
Family
ID=12459582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3607476A Granted JPS52120680A (en) | 1976-04-02 | 1976-04-02 | Evaporation exposure method of amorphous-type semi-conductor layer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52120680A (US06262066-20010717-C00315.png) |
-
1976
- 1976-04-02 JP JP3607476A patent/JPS52120680A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5729046B2 (US06262066-20010717-C00315.png) | 1982-06-21 |
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