JPS52120680A - Evaporation exposure method of amorphous-type semi-conductor layer - Google Patents

Evaporation exposure method of amorphous-type semi-conductor layer

Info

Publication number
JPS52120680A
JPS52120680A JP3607476A JP3607476A JPS52120680A JP S52120680 A JPS52120680 A JP S52120680A JP 3607476 A JP3607476 A JP 3607476A JP 3607476 A JP3607476 A JP 3607476A JP S52120680 A JPS52120680 A JP S52120680A
Authority
JP
Japan
Prior art keywords
evaporation
amorphous
conductor layer
exposure method
type semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3607476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5729046B2 (US06262066-20010717-C00315.png
Inventor
Okio Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3607476A priority Critical patent/JPS52120680A/ja
Publication of JPS52120680A publication Critical patent/JPS52120680A/ja
Publication of JPS5729046B2 publication Critical patent/JPS5729046B2/ja
Granted legal-status Critical Current

Links

JP3607476A 1976-04-02 1976-04-02 Evaporation exposure method of amorphous-type semi-conductor layer Granted JPS52120680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3607476A JPS52120680A (en) 1976-04-02 1976-04-02 Evaporation exposure method of amorphous-type semi-conductor layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3607476A JPS52120680A (en) 1976-04-02 1976-04-02 Evaporation exposure method of amorphous-type semi-conductor layer

Publications (2)

Publication Number Publication Date
JPS52120680A true JPS52120680A (en) 1977-10-11
JPS5729046B2 JPS5729046B2 (US06262066-20010717-C00315.png) 1982-06-21

Family

ID=12459582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3607476A Granted JPS52120680A (en) 1976-04-02 1976-04-02 Evaporation exposure method of amorphous-type semi-conductor layer

Country Status (1)

Country Link
JP (1) JPS52120680A (US06262066-20010717-C00315.png)

Also Published As

Publication number Publication date
JPS5729046B2 (US06262066-20010717-C00315.png) 1982-06-21

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