JPS5218163A - Exposure meter of electronic microscope - Google Patents

Exposure meter of electronic microscope

Info

Publication number
JPS5218163A
JPS5218163A JP9394775A JP9394775A JPS5218163A JP S5218163 A JPS5218163 A JP S5218163A JP 9394775 A JP9394775 A JP 9394775A JP 9394775 A JP9394775 A JP 9394775A JP S5218163 A JPS5218163 A JP S5218163A
Authority
JP
Japan
Prior art keywords
electronic microscope
exposure meter
section
exposure
throgu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9394775A
Other languages
Japanese (ja)
Inventor
Sunao Sueyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9394775A priority Critical patent/JPS5218163A/en
Publication of JPS5218163A publication Critical patent/JPS5218163A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: In order to obtain the best photography of the section desirable to pickup, throgu determining the exposure after selecting an optional section, by means of dividing the field of vision into plural numbers of sections, thereby implanting each independent detector to each section.
COPYRIGHT: (C)1977,JPO&Japio
JP9394775A 1975-08-01 1975-08-01 Exposure meter of electronic microscope Pending JPS5218163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9394775A JPS5218163A (en) 1975-08-01 1975-08-01 Exposure meter of electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9394775A JPS5218163A (en) 1975-08-01 1975-08-01 Exposure meter of electronic microscope

Publications (1)

Publication Number Publication Date
JPS5218163A true JPS5218163A (en) 1977-02-10

Family

ID=14096620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9394775A Pending JPS5218163A (en) 1975-08-01 1975-08-01 Exposure meter of electronic microscope

Country Status (1)

Country Link
JP (1) JPS5218163A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221763A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Electronic microscope
WO1996031897A1 (en) * 1995-04-07 1996-10-10 Hitachi, Ltd. Electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221763A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Electronic microscope
WO1996031897A1 (en) * 1995-04-07 1996-10-10 Hitachi, Ltd. Electron microscope

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