JPS52119871A - Manufacture of semi-conductor device - Google Patents
Manufacture of semi-conductor deviceInfo
- Publication number
- JPS52119871A JPS52119871A JP3660676A JP3660676A JPS52119871A JP S52119871 A JPS52119871 A JP S52119871A JP 3660676 A JP3660676 A JP 3660676A JP 3660676 A JP3660676 A JP 3660676A JP S52119871 A JPS52119871 A JP S52119871A
- Authority
- JP
- Japan
- Prior art keywords
- semi
- manufacture
- conductor device
- perforate
- windows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To perforate windows for FET source and a drain electrode without use of a masking material.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3660676A JPS606106B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3660676A JPS606106B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52119871A true JPS52119871A (en) | 1977-10-07 |
JPS606106B2 JPS606106B2 (en) | 1985-02-15 |
Family
ID=12474446
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3660676A Expired JPS606106B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS606106B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0485307U (en) * | 1990-11-30 | 1992-07-24 |
-
1976
- 1976-03-31 JP JP3660676A patent/JPS606106B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS606106B2 (en) | 1985-02-15 |
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