JPS52119871A - Manufacture of semi-conductor device - Google Patents

Manufacture of semi-conductor device

Info

Publication number
JPS52119871A
JPS52119871A JP3660676A JP3660676A JPS52119871A JP S52119871 A JPS52119871 A JP S52119871A JP 3660676 A JP3660676 A JP 3660676A JP 3660676 A JP3660676 A JP 3660676A JP S52119871 A JPS52119871 A JP S52119871A
Authority
JP
Japan
Prior art keywords
semi
manufacture
conductor device
perforate
windows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3660676A
Other languages
Japanese (ja)
Other versions
JPS606106B2 (en
Inventor
Masanao Itoga
Moritaka Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3660676A priority Critical patent/JPS606106B2/en
Publication of JPS52119871A publication Critical patent/JPS52119871A/en
Publication of JPS606106B2 publication Critical patent/JPS606106B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To perforate windows for FET source and a drain electrode without use of a masking material.
COPYRIGHT: (C)1977,JPO&Japio
JP3660676A 1976-03-31 1976-03-31 Manufacturing method of semiconductor device Expired JPS606106B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3660676A JPS606106B2 (en) 1976-03-31 1976-03-31 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3660676A JPS606106B2 (en) 1976-03-31 1976-03-31 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52119871A true JPS52119871A (en) 1977-10-07
JPS606106B2 JPS606106B2 (en) 1985-02-15

Family

ID=12474446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3660676A Expired JPS606106B2 (en) 1976-03-31 1976-03-31 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS606106B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0485307U (en) * 1990-11-30 1992-07-24

Also Published As

Publication number Publication date
JPS606106B2 (en) 1985-02-15

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