JPS52119188A - Manufacture of semiconductor - Google Patents
Manufacture of semiconductorInfo
- Publication number
- JPS52119188A JPS52119188A JP3565576A JP3565576A JPS52119188A JP S52119188 A JPS52119188 A JP S52119188A JP 3565576 A JP3565576 A JP 3565576A JP 3565576 A JP3565576 A JP 3565576A JP S52119188 A JPS52119188 A JP S52119188A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacture
- considaration
- slippage
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain the column-type FET for the high frequency large electric power in the self-matching system without the considaration of the slippage by the use of only one sheet of mask for the photo etching.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3565576A JPS5854512B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3565576A JPS5854512B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52119188A true JPS52119188A (en) | 1977-10-06 |
JPS5854512B2 JPS5854512B2 (en) | 1983-12-05 |
Family
ID=12447881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3565576A Expired JPS5854512B2 (en) | 1976-03-31 | 1976-03-31 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5854512B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06232419A (en) * | 1993-01-29 | 1994-08-19 | Shodenryoku Kosoku Tsushin Kenkyusho:Kk | Recessed gate type electrostatic induction transistor and its manufacture |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06137875A (en) * | 1991-12-24 | 1994-05-20 | Sumitomo Electric Ind Ltd | On-vehicle optical fiber gyroscope |
-
1976
- 1976-03-31 JP JP3565576A patent/JPS5854512B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06232419A (en) * | 1993-01-29 | 1994-08-19 | Shodenryoku Kosoku Tsushin Kenkyusho:Kk | Recessed gate type electrostatic induction transistor and its manufacture |
Also Published As
Publication number | Publication date |
---|---|
JPS5854512B2 (en) | 1983-12-05 |
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