JPS52108776A - Pattern sticking device - Google Patents

Pattern sticking device

Info

Publication number
JPS52108776A
JPS52108776A JP2462776A JP2462776A JPS52108776A JP S52108776 A JPS52108776 A JP S52108776A JP 2462776 A JP2462776 A JP 2462776A JP 2462776 A JP2462776 A JP 2462776A JP S52108776 A JPS52108776 A JP S52108776A
Authority
JP
Japan
Prior art keywords
sticking device
pattern sticking
pattern
interval
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2462776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5319901B2 (enrdf_load_stackoverflow
Inventor
Kazue Yoshida
Hideho Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP2462776A priority Critical patent/JPS52108776A/ja
Publication of JPS52108776A publication Critical patent/JPS52108776A/ja
Publication of JPS5319901B2 publication Critical patent/JPS5319901B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2462776A 1976-03-09 1976-03-09 Pattern sticking device Granted JPS52108776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2462776A JPS52108776A (en) 1976-03-09 1976-03-09 Pattern sticking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2462776A JPS52108776A (en) 1976-03-09 1976-03-09 Pattern sticking device

Publications (2)

Publication Number Publication Date
JPS52108776A true JPS52108776A (en) 1977-09-12
JPS5319901B2 JPS5319901B2 (enrdf_load_stackoverflow) 1978-06-23

Family

ID=12143368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2462776A Granted JPS52108776A (en) 1976-03-09 1976-03-09 Pattern sticking device

Country Status (1)

Country Link
JP (1) JPS52108776A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571229A (en) * 1980-05-02 1982-01-06 Perkin Elmer Corp Device for automatically positioning wafer
JPS59107515A (ja) * 1982-12-13 1984-06-21 Hitachi Ltd Ｘ線露光装置
JPS60108913A (ja) * 1983-11-18 1985-06-14 Canon Inc 電歪素子制御装置
JPS6187334A (ja) * 1985-10-18 1986-05-02 Tokyo Erekutoron Kk ウエハ露光方法
JPS63107022A (ja) * 1986-10-24 1988-05-12 Hitachi Ltd マスクとウエハ間の間隙測定装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012583U (ja) * 1983-07-05 1985-01-28 象印チエンブロツク株式会社 吊下げクランプ
JPS61169705U (enrdf_load_stackoverflow) * 1985-04-10 1986-10-21

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571229A (en) * 1980-05-02 1982-01-06 Perkin Elmer Corp Device for automatically positioning wafer
JPS59107515A (ja) * 1982-12-13 1984-06-21 Hitachi Ltd Ｘ線露光装置
JPS60108913A (ja) * 1983-11-18 1985-06-14 Canon Inc 電歪素子制御装置
JPS6187334A (ja) * 1985-10-18 1986-05-02 Tokyo Erekutoron Kk ウエハ露光方法
JPS63107022A (ja) * 1986-10-24 1988-05-12 Hitachi Ltd マスクとウエハ間の間隙測定装置

Also Published As

Publication number Publication date
JPS5319901B2 (enrdf_load_stackoverflow) 1978-06-23

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