JPS52103965A - Electron beam projector unit - Google Patents
Electron beam projector unitInfo
- Publication number
- JPS52103965A JPS52103965A JP1977276A JP1977276A JPS52103965A JP S52103965 A JPS52103965 A JP S52103965A JP 1977276 A JP1977276 A JP 1977276A JP 1977276 A JP1977276 A JP 1977276A JP S52103965 A JPS52103965 A JP S52103965A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- projector unit
- beam projector
- keeping
- shift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977276A JPS52103965A (en) | 1976-02-25 | 1976-02-25 | Electron beam projector unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977276A JPS52103965A (en) | 1976-02-25 | 1976-02-25 | Electron beam projector unit |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9002879A Division JPS5536990A (en) | 1979-07-16 | 1979-07-16 | Apparatus for applying electron beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52103965A true JPS52103965A (en) | 1977-08-31 |
JPS5334465B2 JPS5334465B2 (ja) | 1978-09-20 |
Family
ID=12008614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1977276A Granted JPS52103965A (en) | 1976-02-25 | 1976-02-25 | Electron beam projector unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52103965A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5545513A (en) * | 1978-09-22 | 1980-03-31 | Daihen Corp | Charged particle beam machining device |
JPS562632A (en) * | 1979-06-12 | 1981-01-12 | Philips Nv | Device for writing pattern |
JPS5627663U (ja) * | 1979-07-06 | 1981-03-14 | ||
JPS57100228U (ja) * | 1981-10-29 | 1982-06-19 | ||
JPS5940529A (ja) * | 1982-08-31 | 1984-03-06 | Toshiba Corp | 電子ビ−ム転写装置 |
JPS63254649A (ja) * | 1987-04-11 | 1988-10-21 | Hitachi Ltd | 走査電子顕微鏡による観察装置 |
JP2020198310A (ja) * | 2020-08-13 | 2020-12-10 | 株式会社ホロン | オートフォーカス装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497700A (ja) * | 1972-05-26 | 1974-01-23 | ||
JPS4924519A (ja) * | 1972-06-30 | 1974-03-05 |
-
1976
- 1976-02-25 JP JP1977276A patent/JPS52103965A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497700A (ja) * | 1972-05-26 | 1974-01-23 | ||
JPS4924519A (ja) * | 1972-06-30 | 1974-03-05 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5545513A (en) * | 1978-09-22 | 1980-03-31 | Daihen Corp | Charged particle beam machining device |
JPS6233034B2 (ja) * | 1978-09-22 | 1987-07-17 | Daihen Corp | |
JPS562632A (en) * | 1979-06-12 | 1981-01-12 | Philips Nv | Device for writing pattern |
JPH026216B2 (ja) * | 1979-06-12 | 1990-02-08 | Fuiritsupusu Furuuiranpenfuaburiken Nv | |
JPS5627663U (ja) * | 1979-07-06 | 1981-03-14 | ||
JPS57100228U (ja) * | 1981-10-29 | 1982-06-19 | ||
JPS5833702Y2 (ja) * | 1981-10-29 | 1983-07-28 | 日本電信電話株式会社 | 電子ビ−ム露光装置 |
JPS5940529A (ja) * | 1982-08-31 | 1984-03-06 | Toshiba Corp | 電子ビ−ム転写装置 |
JPS63254649A (ja) * | 1987-04-11 | 1988-10-21 | Hitachi Ltd | 走査電子顕微鏡による観察装置 |
JP2020198310A (ja) * | 2020-08-13 | 2020-12-10 | 株式会社ホロン | オートフォーカス装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5334465B2 (ja) | 1978-09-20 |
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