JPS5120259B2 - - Google Patents

Info

Publication number
JPS5120259B2
JPS5120259B2 JP48105118A JP10511873A JPS5120259B2 JP S5120259 B2 JPS5120259 B2 JP S5120259B2 JP 48105118 A JP48105118 A JP 48105118A JP 10511873 A JP10511873 A JP 10511873A JP S5120259 B2 JPS5120259 B2 JP S5120259B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48105118A
Other versions
JPS4975279A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4975279A publication Critical patent/JPS4975279A/ja
Publication of JPS5120259B2 publication Critical patent/JPS5120259B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/32—Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
JP48105118A 1972-10-24 1973-09-19 Expired JPS5120259B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00300075A US3849872A (en) 1972-10-24 1972-10-24 Contacting integrated circuit chip terminal through the wafer kerf

Publications (2)

Publication Number Publication Date
JPS4975279A JPS4975279A (ja) 1974-07-19
JPS5120259B2 true JPS5120259B2 (ja) 1976-06-23

Family

ID=23157593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48105118A Expired JPS5120259B2 (ja) 1972-10-24 1973-09-19

Country Status (7)

Country Link
US (1) US3849872A (ja)
JP (1) JPS5120259B2 (ja)
CA (1) CA985739A (ja)
DE (1) DE2351761A1 (ja)
FR (1) FR2203977B1 (ja)
GB (1) GB1437024A (ja)
IT (1) IT1014510B (ja)

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JPS5271986A (en) * 1975-12-11 1977-06-15 Nec Corp Beam lead type semiconductor device
US4180772A (en) * 1977-05-31 1979-12-25 Fujitsu Limited Large-scale integrated circuit with integral bi-directional test circuit
JPS5649536A (en) * 1979-09-28 1981-05-06 Hitachi Ltd Semiconductor device
US4288911A (en) * 1979-12-21 1981-09-15 Harris Corporation Method for qualifying biased integrated circuits on a wafer level
JPS576366U (ja) * 1980-06-12 1982-01-13
US4413271A (en) * 1981-03-30 1983-11-01 Sprague Electric Company Integrated circuit including test portion and method for making
US4489478A (en) * 1981-09-29 1984-12-25 Fujitsu Limited Process for producing a three-dimensional semiconductor device
JPS5861639A (ja) * 1981-10-08 1983-04-12 Toshiba Corp 半導体装置
JPS593950A (ja) * 1982-06-30 1984-01-10 Fujitsu Ltd ゲ−トアレイチツプ
JPS59126268A (ja) * 1982-12-27 1984-07-20 Fujitsu Ltd 集積回路チップ
US4628272A (en) * 1984-10-01 1986-12-09 Motorola, Inc. Tuned inductorless active phase shift demodulator
US4778771A (en) * 1985-02-14 1988-10-18 Nec Corporation Process of forming input/output wiring areas for semiconductor integrated circuit
GB2177254B (en) * 1985-07-05 1988-09-01 Stc Plc Testing integrated circuits
US5829128A (en) 1993-11-16 1998-11-03 Formfactor, Inc. Method of mounting resilient contact structures to semiconductor devices
US5476211A (en) 1993-11-16 1995-12-19 Form Factor, Inc. Method of manufacturing electrical contacts, using a sacrificial member
DE3623470A1 (de) * 1986-07-11 1988-01-21 Gerd Teepe Integrierte schaltung mit mehreren schaltungsmoduln gleicher funktion
JPS62169344A (ja) * 1986-09-19 1987-07-25 Hitachi Ltd 半導体装置の試験方法
US4819038A (en) * 1986-12-22 1989-04-04 Ibm Corporation TFT array for liquid crystal displays allowing in-process testing
US4868634A (en) * 1987-03-13 1989-09-19 Citizen Watch Co., Ltd. IC-packaged device
JP3151203B2 (ja) * 1988-11-23 2001-04-03 テキサス インスツルメンツ インコーポレイテツド 集積回路の自己検査装置
US5142224A (en) * 1988-12-13 1992-08-25 Comsat Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals
JP2585799B2 (ja) * 1989-06-30 1997-02-26 株式会社東芝 半導体メモリ装置及びそのバーンイン方法
US5047711A (en) * 1989-08-23 1991-09-10 Silicon Connections Corporation Wafer-level burn-in testing of integrated circuits
US5377124A (en) * 1989-09-20 1994-12-27 Aptix Corporation Field programmable printed circuit board
JPH0758725B2 (ja) * 1990-01-19 1995-06-21 株式会社東芝 半導体ウェハ
US5239191A (en) * 1990-01-19 1993-08-24 Kabushiki Kaisha Toshiba Semiconductor wafer
US5905382A (en) * 1990-08-29 1999-05-18 Micron Technology, Inc. Universal wafer carrier for wafer level die burn-in
US7511520B2 (en) * 1990-08-29 2009-03-31 Micron Technology, Inc. Universal wafer carrier for wafer level die burn-in
US5214657A (en) * 1990-09-21 1993-05-25 Micron Technology, Inc. Method for fabricating wafer-scale integration wafers and method for utilizing defective wafer-scale integration wafers
EP0494782B1 (en) * 1991-01-11 1997-04-23 Texas Instruments Incorporated Wafer burn-in and test system and method of making the same
US5576554A (en) * 1991-11-05 1996-11-19 Monolithic System Technology, Inc. Wafer-scale integrated circuit interconnect structure architecture
US5498990A (en) * 1991-11-05 1996-03-12 Monolithic System Technology, Inc. Reduced CMOS-swing clamping circuit for bus lines
US5831467A (en) * 1991-11-05 1998-11-03 Monolithic System Technology, Inc. Termination circuit with power-down mode for use in circuit module architecture
US5279975A (en) * 1992-02-07 1994-01-18 Micron Technology, Inc. Method of testing individual dies on semiconductor wafers prior to singulation
US5424651A (en) * 1992-03-27 1995-06-13 Green; Robert S. Fixture for burn-in testing of semiconductor wafers, and a semiconductor wafer
US5241266A (en) * 1992-04-10 1993-08-31 Micron Technology, Inc. Built-in test circuit connection for wafer level burnin and testing of individual dies
US5648661A (en) * 1992-07-02 1997-07-15 Lsi Logic Corporation Integrated circuit wafer comprising unsingulated dies, and decoder arrangement for individually testing the dies
US5389556A (en) * 1992-07-02 1995-02-14 Lsi Logic Corporation Individually powering-up unsingulated dies on a wafer
US5442282A (en) * 1992-07-02 1995-08-15 Lsi Logic Corporation Testing and exercising individual, unsingulated dies on a wafer
DE69331061T2 (de) * 1992-08-10 2002-06-06 Monolithic System Tech Inc Fehlertolerantes hierarchisiertes Bussystem
FR2700063B1 (fr) * 1992-12-31 1995-02-10 Sgs Thomson Microelectronics Procédé de test de puces de circuit intégré et dispositif intégré correspondant.
US20020053734A1 (en) 1993-11-16 2002-05-09 Formfactor, Inc. Probe card assembly and kit, and methods of making same
US5831918A (en) 1994-02-14 1998-11-03 Micron Technology, Inc. Circuit and method for varying a period of an internal control signal during a test mode
US6587978B1 (en) 1994-02-14 2003-07-01 Micron Technology, Inc. Circuit and method for varying a pulse width of an internal control signal during a test mode
US5532174A (en) * 1994-04-22 1996-07-02 Lsi Logic Corporation Wafer level integrated circuit testing with a sacrificial metal layer
US5655113A (en) 1994-07-05 1997-08-05 Monolithic System Technology, Inc. Resynchronization circuit for a memory system and method of operating same
US5991214A (en) * 1996-06-14 1999-11-23 Micron Technology, Inc. Circuit and method for varying a period of an internal control signal during a test mode
US5942766A (en) * 1997-09-17 1999-08-24 Lucent Technologies, Inc. Article and method for in-process testing of RF products
JP3053012B2 (ja) * 1998-03-02 2000-06-19 日本電気株式会社 半導体装置の試験回路および試験方法
US6664628B2 (en) 1998-07-13 2003-12-16 Formfactor, Inc. Electronic component overlapping dice of unsingulated semiconductor wafer
DE59900130D1 (de) * 1998-11-02 2001-07-26 Atg Test Systems Gmbh Vorrichtung zum prüfen von leiterplatten
US6456099B1 (en) 1998-12-31 2002-09-24 Formfactor, Inc. Special contact points for accessing internal circuitry of an integrated circuit
US6194739B1 (en) 1999-11-23 2001-02-27 Lucent Technologies Inc. Inline ground-signal-ground (GSG) RF tester
US6827584B2 (en) * 1999-12-28 2004-12-07 Formfactor, Inc. Interconnect for microelectronic structures with enhanced spring characteristics
US6844751B2 (en) * 2000-09-30 2005-01-18 Texas Instruments Incorporated Multi-state test structures and methods
US6624651B1 (en) * 2000-10-06 2003-09-23 International Business Machines Corporation Kerf circuit for modeling of BEOL capacitances
JP2004526319A (ja) * 2001-03-23 2004-08-26 ソリッド・ステート・メジャメンツ・インコーポレイテッド 半導体ウェハにおけるキャリアドーズ量の検出方法
US6910268B2 (en) 2001-03-27 2005-06-28 Formfactor, Inc. Method for fabricating an IC interconnect system including an in-street integrated circuit wafer via
DE10125029B4 (de) * 2001-05-22 2008-08-21 Qimonda Ag Verwendung einer Halbleitervorrichtung mit Nebenschaltung im Kerf-Bereich und Verfahren
CN1329985C (zh) * 2001-09-28 2007-08-01 皇家飞利浦电子股份有限公司 制造集成电路的方法、该方法获得的集成电路、提供有该方法获得的集成电路的晶片和包括由该方法获得的集成电路的系统
US6759311B2 (en) 2001-10-31 2004-07-06 Formfactor, Inc. Fan out of interconnect elements attached to semiconductor wafer
US6917194B2 (en) * 2003-08-27 2005-07-12 International Business Machines Corporation External verification of package processed linewidths and spacings in semiconductor packages
JP4515143B2 (ja) * 2004-05-10 2010-07-28 三菱電機株式会社 感熱式流量検出素子の製造方法
JP2006261504A (ja) * 2005-03-18 2006-09-28 Fujitsu Ltd 半導体装置及びその試験方法
DE102005022600A1 (de) * 2005-05-10 2006-11-23 Atmel Germany Gmbh Integrierter Schaltkreis mit Abgleichelementen und Verfahren zu seiner Herstellung
US7274201B2 (en) * 2005-05-19 2007-09-25 Micron Technology, Inc. Method and system for stressing semiconductor wafers during burn-in
US8457920B2 (en) * 2010-05-28 2013-06-04 International Business Machines Corporation Performance improvement for a multi-chip system via kerf area interconnect
US9304166B2 (en) 2010-07-16 2016-04-05 Infineon Technologies Ag Method and system for wafer level testing of semiconductor chips
US10134670B2 (en) 2015-04-08 2018-11-20 International Business Machines Corporation Wafer with plated wires and method of fabricating same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL298196A (ja) * 1962-09-22
GB1162759A (en) * 1966-05-09 1969-08-27 Motorola Inc Monolithic Integrated Circuit
FR1064185A (fr) * 1967-05-23 1954-05-11 Philips Nv Procédé de fabrication d'un système d'électrodes
US3633268A (en) * 1968-06-04 1972-01-11 Telefunken Patent Method of producing one or more large integrated semiconductor circuits
DE1949484B2 (de) * 1969-10-01 1978-02-23 Ibm Deutschland Gmbh, 7000 Stuttgart Leitungskreuzung fuer monolithisch integrierte halbleiterschaltungen und deren verwendung in einer speichermatrix
US3634731A (en) * 1970-08-06 1972-01-11 Atomic Energy Commission Generalized circuit
US3742254A (en) * 1971-01-27 1973-06-26 Texas Instruments Inc Automatic mos grounding circuit

Also Published As

Publication number Publication date
FR2203977B1 (ja) 1979-01-05
IT1014510B (it) 1977-04-30
FR2203977A1 (ja) 1974-05-17
JPS4975279A (ja) 1974-07-19
DE2351761A1 (de) 1974-04-25
US3849872A (en) 1974-11-26
CA985739A (en) 1976-03-16
GB1437024A (en) 1976-05-26

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