JPS51123577A - Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor - Google Patents

Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor

Info

Publication number
JPS51123577A
JPS51123577A JP50048189A JP4818975A JPS51123577A JP S51123577 A JPS51123577 A JP S51123577A JP 50048189 A JP50048189 A JP 50048189A JP 4818975 A JP4818975 A JP 4818975A JP S51123577 A JPS51123577 A JP S51123577A
Authority
JP
Japan
Prior art keywords
vertica
typ
circuit including
integrating circuit
epitaxial base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50048189A
Other languages
English (en)
Japanese (ja)
Inventor
Hajime Sawazaki
Hiroshi Mochizuki
Kazuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50048189A priority Critical patent/JPS51123577A/ja
Priority to IT49110/76A priority patent/IT1058177B/it
Priority to DE19762617521 priority patent/DE2617521A1/de
Priority to GB16301/76A priority patent/GB1496306A/en
Priority to FR7611931A priority patent/FR2309040A1/fr
Publication of JPS51123577A publication Critical patent/JPS51123577A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/67—Complementary BJTs
    • H10D84/673—Vertical complementary BJTs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
JP50048189A 1975-04-22 1975-04-22 Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor Pending JPS51123577A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP50048189A JPS51123577A (en) 1975-04-22 1975-04-22 Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor
IT49110/76A IT1058177B (it) 1975-04-22 1976-04-21 Circuito semiconduttore integrato comprendente un transistor verticale a base epitassiale
DE19762617521 DE2617521A1 (de) 1975-04-22 1976-04-22 Integrierte halbleiterschaltung
GB16301/76A GB1496306A (en) 1975-04-22 1976-04-22 Semiconductor integrated circuit including an epitaxial base type vertical transistor
FR7611931A FR2309040A1 (fr) 1975-04-22 1976-04-22 Circuit integre comportant un transistor vertical a base epitaxiale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50048189A JPS51123577A (en) 1975-04-22 1975-04-22 Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor

Publications (1)

Publication Number Publication Date
JPS51123577A true JPS51123577A (en) 1976-10-28

Family

ID=12796429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50048189A Pending JPS51123577A (en) 1975-04-22 1975-04-22 Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor

Country Status (5)

Country Link
JP (1) JPS51123577A (enrdf_load_stackoverflow)
DE (1) DE2617521A1 (enrdf_load_stackoverflow)
FR (1) FR2309040A1 (enrdf_load_stackoverflow)
GB (1) GB1496306A (enrdf_load_stackoverflow)
IT (1) IT1058177B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917409A (ja) * 1982-07-21 1984-01-28 Nissan Motor Co Ltd 搬送用ハンガ−
JPS6377144A (ja) * 1986-09-19 1988-04-07 Sanyo Electric Co Ltd 半導体集積回路

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1101096B (it) * 1978-12-22 1985-09-28 Ates Componenti Elettron Perfezionamento al procedimento per produrre dispositivi integrati a semiconduttore e prodotto risultante
JP2835116B2 (ja) * 1989-09-29 1998-12-14 株式会社東芝 電力用ｉｃおよびその製造方法
JP3653963B2 (ja) * 1997-12-25 2005-06-02 ソニー株式会社 半導体装置およびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841675A (enrdf_load_stackoverflow) * 1971-09-28 1973-06-18

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842685A (enrdf_load_stackoverflow) * 1971-09-30 1973-06-21
JPS5942463B2 (ja) * 1972-09-22 1984-10-15 ソニー株式会社 半導体集積回路装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841675A (enrdf_load_stackoverflow) * 1971-09-28 1973-06-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917409A (ja) * 1982-07-21 1984-01-28 Nissan Motor Co Ltd 搬送用ハンガ−
JPS6377144A (ja) * 1986-09-19 1988-04-07 Sanyo Electric Co Ltd 半導体集積回路

Also Published As

Publication number Publication date
DE2617521A1 (de) 1976-11-04
GB1496306A (en) 1977-12-30
IT1058177B (it) 1982-04-10
FR2309040B1 (enrdf_load_stackoverflow) 1979-01-12
FR2309040A1 (fr) 1976-11-19

Similar Documents

Publication Publication Date Title
JPS51128268A (en) Semiconductor unit
JPS51123577A (en) Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor
JPS5244186A (en) Semiconductor intergrated circuit device
JPS51123579A (en) Semiconductor integrating circuit
JPS5247686A (en) Semiconductor device and process for production of same
JPS51123578A (en) Semiconductor integrating circuit including epitaxial base typ vertica l directional transistor
JPS5314579A (en) Semiconductor integrated circuit and its production
JPS5215255A (en) Integrated semiconductor logical circuit
JPS53120383A (en) Production of semiconductor device
JPS5272586A (en) Production of semiconductor device
JPS5263080A (en) Production of semiconductor integrated circuit device
JPS5231677A (en) Production method of semiconductor device
JPS5265689A (en) Semiconductor integrated circuit and its production
JPS52154388A (en) Semiconductor integrated circuit device and its production
JPS5235584A (en) Manufacturing process of semiconductor device
JPS53108778A (en) Transistor
JPS52142977A (en) Production of semiconductor integrated circuit device
JPS5246783A (en) Process for production of semiconductor integrated circuit
JPS5321583A (en) Production of semiconductor device
JPS51135367A (en) Semiconductor device
JPS5217768A (en) Production method of semi-conductor device
JPS538580A (en) Semiconductor device
JPS5272587A (en) Semiconductor integrated circuit
JPS52153675A (en) Production of semiconductor device
JPS526090A (en) Semiconductor integrated circuit