JPS52142977A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS52142977A
JPS52142977A JP6024276A JP6024276A JPS52142977A JP S52142977 A JPS52142977 A JP S52142977A JP 6024276 A JP6024276 A JP 6024276A JP 6024276 A JP6024276 A JP 6024276A JP S52142977 A JPS52142977 A JP S52142977A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
circuit device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6024276A
Other languages
Japanese (ja)
Inventor
Koichi Kijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6024276A priority Critical patent/JPS52142977A/en
Publication of JPS52142977A publication Critical patent/JPS52142977A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve the current gains βu, α of pnp and npn transistors and decrease power consumption as well by forming a base layer through rediffusion from substrate to the epitaxial layer on a p type substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP6024276A 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device Pending JPS52142977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6024276A JPS52142977A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6024276A JPS52142977A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS52142977A true JPS52142977A (en) 1977-11-29

Family

ID=13136504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6024276A Pending JPS52142977A (en) 1976-05-24 1976-05-24 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS52142977A (en)

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