JPS51119289A - Method of determining the heterogenous sample of micro-particles - Google Patents

Method of determining the heterogenous sample of micro-particles

Info

Publication number
JPS51119289A
JPS51119289A JP49138059A JP13805974A JPS51119289A JP S51119289 A JPS51119289 A JP S51119289A JP 49138059 A JP49138059 A JP 49138059A JP 13805974 A JP13805974 A JP 13805974A JP S51119289 A JPS51119289 A JP S51119289A
Authority
JP
Japan
Prior art keywords
micro
particles
determining
rays
heterogenous sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49138059A
Other languages
English (en)
Japanese (ja)
Inventor
Kimio Okumura
Tatsunori Soya
Hirosuke Kawachi
Hideyuki Oi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
National Institute of Advanced Industrial Science and Technology AIST
NTT Inc
Original Assignee
Agency of Industrial Science and Technology
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Agency of Industrial Science and Technology
Priority to JP49138059A priority Critical patent/JPS51119289A/ja
Priority to US05/633,233 priority patent/US4037101A/en
Priority to GB48469/75A priority patent/GB1525488A/en
Priority to FR7536563A priority patent/FR2292976A1/fr
Publication of JPS51119289A publication Critical patent/JPS51119289A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP49138059A 1974-11-29 1974-11-29 Method of determining the heterogenous sample of micro-particles Pending JPS51119289A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP49138059A JPS51119289A (en) 1974-11-29 1974-11-29 Method of determining the heterogenous sample of micro-particles
US05/633,233 US4037101A (en) 1974-11-29 1975-11-19 Method and apparatus for analyzing fine grained substances
GB48469/75A GB1525488A (en) 1974-11-29 1975-11-25 Method and apparatus for spectrometric analysis of fine grained minerals and other substances using an electron bea
FR7536563A FR2292976A1 (fr) 1974-11-29 1975-11-28 Procede et dispositif pour analyser des mineraux a grain fin et autres substances

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49138059A JPS51119289A (en) 1974-11-29 1974-11-29 Method of determining the heterogenous sample of micro-particles

Publications (1)

Publication Number Publication Date
JPS51119289A true JPS51119289A (en) 1976-10-19

Family

ID=15213008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49138059A Pending JPS51119289A (en) 1974-11-29 1974-11-29 Method of determining the heterogenous sample of micro-particles

Country Status (4)

Country Link
US (1) US4037101A (enExample)
JP (1) JPS51119289A (enExample)
FR (1) FR2292976A1 (enExample)
GB (1) GB1525488A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003707A1 (en) * 1980-06-11 1981-12-24 Commw Scient Ind Res Org Method and apparatus for material analysis
JPS60135847A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp 面分析装置
JPS6162850A (ja) * 1984-07-18 1986-03-31 Nippon Steel Corp 自動多機能分析装置の濃度分析処理方式
JPS6162849A (ja) * 1984-07-18 1986-03-31 Nippon Steel Corp 自動多機能分析装置の濃度線分析方式
JP2014071092A (ja) * 2012-10-02 2014-04-21 Jeol Ltd 試料分析装置

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4331872A (en) * 1979-06-29 1982-05-25 Nippon Steel Corporation Method for measurement of distribution of inclusions in a slab by electron beam irradiation
US4453226A (en) * 1981-07-15 1984-06-05 United Technologies Corporation Method and apparatus for particle size determination in a host material
US4591984A (en) * 1981-08-10 1986-05-27 Tokyo Shibaura Denki Kabushiki Kaisha Radiation measuring device
AU549193B2 (en) * 1981-09-01 1986-01-16 Commonwealth Scientific And Industrial Research Organisation Method and apparatus for image formation
US4616134A (en) * 1984-07-17 1986-10-07 Chevron Research Company High resolution geologic sample scanning apparatus and process of scanning geologic samples
JPH0676975B2 (ja) * 1984-09-26 1994-09-28 新技術事業団 表面原子配列構造の観察方法
EP0196531B1 (de) * 1985-03-28 1991-01-16 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Verfahren zur indirekten Bestimmung der Intensitätsverteilung der in einem Korpuskularstrahl-Messgerät erzeugten Korpuskularstrahlpulse
US4697080A (en) * 1986-01-06 1987-09-29 The United States Of America As Represented By The United States Department Of Energy Analysis with electron microscope of multielement samples using pure element standards
US4717826A (en) * 1986-06-26 1988-01-05 Spectro-Scan, Inc. Method for determining intracellular mineral levels
JPS6417369A (en) * 1987-07-10 1989-01-20 Jeol Ltd Spectrum display unit in x-ray microanalyzer and the like
US5210414A (en) * 1991-03-29 1993-05-11 The United States Of America As Represented By The Department Of Health And Human Services Differential surface composition analysis by multiple-voltage electron beam X-ray spectroscopy
JP3455306B2 (ja) * 1994-10-24 2003-10-14 三菱電機株式会社 異物分析装置及び半導体製造制御装置並びに異物分析方法及び半導体製造制御方法
US5798525A (en) * 1996-06-26 1998-08-25 International Business Machines Corporation X-ray enhanced SEM critical dimension measurement
US6140643A (en) * 1999-03-09 2000-10-31 Exxonmobil Upstream Research Company Method for identification of unknown substances
US6787773B1 (en) * 2000-06-07 2004-09-07 Kla-Tencor Corporation Film thickness measurement using electron-beam induced x-ray microanalysis
US7490009B2 (en) 2004-08-03 2009-02-10 Fei Company Method and system for spectroscopic data analysis
AU2009212187B2 (en) 2008-02-06 2014-05-01 Fei Company A method and system for spectrum data analysis
US8664595B2 (en) 2012-06-28 2014-03-04 Fei Company Cluster analysis of unknowns in SEM-EDS dataset
US9188555B2 (en) 2012-07-30 2015-11-17 Fei Company Automated EDS standards calibration
US9091635B2 (en) 2012-10-26 2015-07-28 Fei Company Mineral identification using mineral definitions having compositional ranges
US9778215B2 (en) 2012-10-26 2017-10-03 Fei Company Automated mineral classification
US8937282B2 (en) 2012-10-26 2015-01-20 Fei Company Mineral identification using mineral definitions including variability
US9048067B2 (en) 2012-10-26 2015-06-02 Fei Company Mineral identification using sequential decomposition into elements from mineral definitions
US9194829B2 (en) 2012-12-28 2015-11-24 Fei Company Process for performing automated mineralogy
US9714908B2 (en) 2013-11-06 2017-07-25 Fei Company Sub-pixel analysis and display of fine grained mineral samples
US20170345616A1 (en) * 2016-05-31 2017-11-30 EDAX, Incorporated Systems and methods for adaptive scanning
US11610757B2 (en) * 2019-08-28 2023-03-21 Kla Corporation Sensor module for scanning electron microscopy applications
CN115356363B (zh) * 2022-08-01 2023-06-20 河南理工大学 一种基于宽离子束抛光-扫描电镜的孔隙结构表征方法
JP7743387B2 (ja) * 2022-11-02 2025-09-24 日本電子株式会社 分析方法および分析装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3204095A (en) * 1960-12-21 1965-08-31 Hitachi Ltd Electron probe microanalyzer with means to eliminate the effect of surface irregularities
US3229087A (en) * 1961-09-25 1966-01-11 First Pennsylvania Banking And Electron microanalyzer and monitoring system
AT279943B (de) * 1965-07-14 1970-03-25 Boehler & Co Ag Geb Einrichtung zur Elektronenstrahl-Mikroanalyse heterogen aufgebauter metallischer oder nichtmetallischer Stoffe
US3733484A (en) * 1969-10-29 1973-05-15 Walter C Mc Crone Associates I Control for electron microprobe
GB1303136A (enExample) * 1970-02-27 1973-01-17
US3909612A (en) * 1971-04-20 1975-09-30 Image Analysing Computers Ltd Electron beam specimen analysis

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003707A1 (en) * 1980-06-11 1981-12-24 Commw Scient Ind Res Org Method and apparatus for material analysis
JPS60135847A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp 面分析装置
JPS6162850A (ja) * 1984-07-18 1986-03-31 Nippon Steel Corp 自動多機能分析装置の濃度分析処理方式
JPS6162849A (ja) * 1984-07-18 1986-03-31 Nippon Steel Corp 自動多機能分析装置の濃度線分析方式
JP2014071092A (ja) * 2012-10-02 2014-04-21 Jeol Ltd 試料分析装置

Also Published As

Publication number Publication date
GB1525488A (en) 1978-09-20
FR2292976A1 (fr) 1976-06-25
FR2292976B1 (enExample) 1978-05-12
US4037101A (en) 1977-07-19

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