JPS51112179A - Processing method of the semiconductor - Google Patents

Processing method of the semiconductor

Info

Publication number
JPS51112179A
JPS51112179A JP50025992A JP2599275A JPS51112179A JP S51112179 A JPS51112179 A JP S51112179A JP 50025992 A JP50025992 A JP 50025992A JP 2599275 A JP2599275 A JP 2599275A JP S51112179 A JPS51112179 A JP S51112179A
Authority
JP
Japan
Prior art keywords
semiconductor
area
processing method
junction
impurity density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50025992A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5420395B2 (cs
Inventor
Yutaka Misawa
Hideyuki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50025992A priority Critical patent/JPS51112179A/ja
Publication of JPS51112179A publication Critical patent/JPS51112179A/ja
Publication of JPS5420395B2 publication Critical patent/JPS5420395B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
JP50025992A 1975-03-05 1975-03-05 Processing method of the semiconductor Granted JPS51112179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50025992A JPS51112179A (en) 1975-03-05 1975-03-05 Processing method of the semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50025992A JPS51112179A (en) 1975-03-05 1975-03-05 Processing method of the semiconductor

Publications (2)

Publication Number Publication Date
JPS51112179A true JPS51112179A (en) 1976-10-04
JPS5420395B2 JPS5420395B2 (cs) 1979-07-23

Family

ID=12181199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50025992A Granted JPS51112179A (en) 1975-03-05 1975-03-05 Processing method of the semiconductor

Country Status (1)

Country Link
JP (1) JPS51112179A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51123069A (en) * 1975-04-21 1976-10-27 Hitachi Ltd High voltage rating semiconductor device
JPH02298073A (ja) * 1989-05-12 1990-12-10 Nippon Soken Inc 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51123069A (en) * 1975-04-21 1976-10-27 Hitachi Ltd High voltage rating semiconductor device
JPH02298073A (ja) * 1989-05-12 1990-12-10 Nippon Soken Inc 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5420395B2 (cs) 1979-07-23

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