JPS51111694A - Ohmic electrode of compound semiconductor - Google Patents

Ohmic electrode of compound semiconductor

Info

Publication number
JPS51111694A
JPS51111694A JP3556275A JP3556275A JPS51111694A JP S51111694 A JPS51111694 A JP S51111694A JP 3556275 A JP3556275 A JP 3556275A JP 3556275 A JP3556275 A JP 3556275A JP S51111694 A JPS51111694 A JP S51111694A
Authority
JP
Japan
Prior art keywords
compound semiconductor
ohmic electrode
contact resistance
ohmic
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3556275A
Other languages
Japanese (ja)
Inventor
Kiyohiko Funakoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3556275A priority Critical patent/JPS51111694A/en
Publication of JPS51111694A publication Critical patent/JPS51111694A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/02—Alloys based on gold

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Conductive Materials (AREA)

Abstract

PURPOSE:Ohmic electrode material of compound semiconductor which exhibits an ohmic contact at a relatively low temperature, a low contact resistance with little variation and little change of contact resistance due to heat treatment time.
JP3556275A 1975-03-26 1975-03-26 Ohmic electrode of compound semiconductor Pending JPS51111694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3556275A JPS51111694A (en) 1975-03-26 1975-03-26 Ohmic electrode of compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3556275A JPS51111694A (en) 1975-03-26 1975-03-26 Ohmic electrode of compound semiconductor

Publications (1)

Publication Number Publication Date
JPS51111694A true JPS51111694A (en) 1976-10-02

Family

ID=12445171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3556275A Pending JPS51111694A (en) 1975-03-26 1975-03-26 Ohmic electrode of compound semiconductor

Country Status (1)

Country Link
JP (1) JPS51111694A (en)

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