JPS5399785A - Multi-contact resistor - Google Patents

Multi-contact resistor

Info

Publication number
JPS5399785A
JPS5399785A JP1448277A JP1448277A JPS5399785A JP S5399785 A JPS5399785 A JP S5399785A JP 1448277 A JP1448277 A JP 1448277A JP 1448277 A JP1448277 A JP 1448277A JP S5399785 A JPS5399785 A JP S5399785A
Authority
JP
Japan
Prior art keywords
contact resistor
resistor
resistnace
secure
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1448277A
Other languages
Japanese (ja)
Inventor
Tetsuo Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP1448277A priority Critical patent/JPS5399785A/en
Publication of JPS5399785A publication Critical patent/JPS5399785A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To secure a continuous change of the resistnace value, by forming the electric contact parts via an insulator film uniformly on the resistor which is formed on the substrate.
JP1448277A 1977-02-11 1977-02-11 Multi-contact resistor Pending JPS5399785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1448277A JPS5399785A (en) 1977-02-11 1977-02-11 Multi-contact resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1448277A JPS5399785A (en) 1977-02-11 1977-02-11 Multi-contact resistor

Publications (1)

Publication Number Publication Date
JPS5399785A true JPS5399785A (en) 1978-08-31

Family

ID=11862259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1448277A Pending JPS5399785A (en) 1977-02-11 1977-02-11 Multi-contact resistor

Country Status (1)

Country Link
JP (1) JPS5399785A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123350U (en) * 1983-02-08 1984-08-20 三洋電機株式会社 semiconductor pressure sensor
JPS6219760U (en) * 1985-07-20 1987-02-05
US5191798A (en) * 1988-09-30 1993-03-09 Kabushiki Kaisha Komatsu Seisakusho Pressure sensor
JP2001281085A (en) * 2000-03-28 2001-10-10 Toyoda Mach Works Ltd Semiconductor, pressure sensor and manufacturing method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123350U (en) * 1983-02-08 1984-08-20 三洋電機株式会社 semiconductor pressure sensor
JPS6219760U (en) * 1985-07-20 1987-02-05
US5191798A (en) * 1988-09-30 1993-03-09 Kabushiki Kaisha Komatsu Seisakusho Pressure sensor
JP2001281085A (en) * 2000-03-28 2001-10-10 Toyoda Mach Works Ltd Semiconductor, pressure sensor and manufacturing method thereof

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