JPH1168114A5 - - Google Patents

Info

Publication number
JPH1168114A5
JPH1168114A5 JP1997246066A JP24606697A JPH1168114A5 JP H1168114 A5 JPH1168114 A5 JP H1168114A5 JP 1997246066 A JP1997246066 A JP 1997246066A JP 24606697 A JP24606697 A JP 24606697A JP H1168114 A5 JPH1168114 A5 JP H1168114A5
Authority
JP
Japan
Prior art keywords
thin film
semiconductor thin
impurity element
substrate
ntft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1997246066A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1168114A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP24606697A priority Critical patent/JPH1168114A/ja
Priority claimed from JP24606697A external-priority patent/JPH1168114A/ja
Publication of JPH1168114A publication Critical patent/JPH1168114A/ja
Publication of JPH1168114A5 publication Critical patent/JPH1168114A5/ja
Withdrawn legal-status Critical Current

Links

JP24606697A 1997-08-26 1997-08-26 半導体装置およびその作製方法 Withdrawn JPH1168114A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24606697A JPH1168114A (ja) 1997-08-26 1997-08-26 半導体装置およびその作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24606697A JPH1168114A (ja) 1997-08-26 1997-08-26 半導体装置およびその作製方法

Publications (2)

Publication Number Publication Date
JPH1168114A JPH1168114A (ja) 1999-03-09
JPH1168114A5 true JPH1168114A5 (cg-RX-API-DMAC10.html) 2005-06-09

Family

ID=17142966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24606697A Withdrawn JPH1168114A (ja) 1997-08-26 1997-08-26 半導体装置およびその作製方法

Country Status (1)

Country Link
JP (1) JPH1168114A (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100620888B1 (ko) * 2004-01-29 2006-09-13 네오폴리((주)) 비정질 반도체 박막의 결정화 방법을 이용한 박막 트랜지스터의 제조방법
JP5201841B2 (ja) * 2007-01-25 2013-06-05 株式会社半導体エネルギー研究所 表示装置の作製方法

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