JPH11316112A - 集積回路の交差光軸検査システム - Google Patents
集積回路の交差光軸検査システムInfo
- Publication number
- JPH11316112A JPH11316112A JP10353940A JP35394098A JPH11316112A JP H11316112 A JPH11316112 A JP H11316112A JP 10353940 A JP10353940 A JP 10353940A JP 35394098 A JP35394098 A JP 35394098A JP H11316112 A JPH11316112 A JP H11316112A
- Authority
- JP
- Japan
- Prior art keywords
- light source
- light
- camera
- optical axis
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 33
- 238000012545 processing Methods 0.000 claims description 13
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000005286 illumination Methods 0.000 claims description 6
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000007689 inspection Methods 0.000 abstract description 51
- 238000005259 measurement Methods 0.000 description 8
- 230000007547 defect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 101100028477 Drosophila melanogaster Pak gene Proteins 0.000 description 1
- 241000272168 Laridae Species 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG1997004179A SG67446A1 (en) | 1997-12-01 | 1997-12-01 | Cross optical axis inspection system for integrated circuits |
| SG9704179.2 | 1997-12-01 | ||
| US09/012,294 US6055055A (en) | 1997-12-01 | 1998-01-23 | Cross optical axis inspection system for integrated circuits |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11316112A true JPH11316112A (ja) | 1999-11-16 |
| JPH11316112A5 JPH11316112A5 (enExample) | 2006-03-23 |
Family
ID=26665163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10353940A Pending JPH11316112A (ja) | 1997-12-01 | 1998-11-27 | 集積回路の交差光軸検査システム |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6055055A (enExample) |
| EP (1) | EP0919804A1 (enExample) |
| JP (1) | JPH11316112A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011228583A (ja) * | 2010-04-22 | 2011-11-10 | Fuji Mach Mfg Co Ltd | 電子部品の撮像判定方法及び部品実装機 |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6072898A (en) * | 1998-01-16 | 2000-06-06 | Beaty; Elwin M. | Method and apparatus for three dimensional inspection of electronic components |
| US6915006B2 (en) * | 1998-01-16 | 2005-07-05 | Elwin M. Beaty | Method and apparatus for three dimensional inspection of electronic components |
| SG84530A1 (en) * | 1998-05-21 | 2001-11-20 | Agilent Technologies Inc | Cross optical axis inspection system for integrated circuits |
| US6538750B1 (en) * | 1998-05-22 | 2003-03-25 | Cyberoptics Corporation | Rotary sensor system with a single detector |
| US6243164B1 (en) * | 1998-07-13 | 2001-06-05 | Electro Scientific Industries | Method and system for determining lead coplanarity |
| AU2002232855A1 (en) * | 2000-10-25 | 2002-05-21 | Electro Scientific Industries, Inc. | Integrated alignment and calibration of optical system |
| US6532063B1 (en) | 2000-11-10 | 2003-03-11 | Semiconductor Technologies & Instruments | 3-D lead inspection |
| EP1220596A1 (en) * | 2000-12-29 | 2002-07-03 | Icos Vision Systems N.V. | A method and an apparatus for measuring positions of contact elements of an electronic component |
| WO2002054139A2 (en) * | 2001-01-02 | 2002-07-11 | Robotic Vision Systems, Inc. | Lcc device inspection module |
| US20020135757A1 (en) * | 2001-01-02 | 2002-09-26 | Robotic Vision Systems, Inc. | LCC device inspection module |
| US7181083B2 (en) * | 2003-06-09 | 2007-02-20 | Eaton Corporation | System and method for configuring an imaging tool |
| US6856694B2 (en) * | 2001-07-10 | 2005-02-15 | Eaton Corporation | Decision enhancement system for a vehicle safety restraint application |
| JP4234402B2 (ja) * | 2002-11-21 | 2009-03-04 | 富士機械製造株式会社 | 電子回路部品像取得装置 |
| WO2004049267A1 (de) * | 2002-11-23 | 2004-06-10 | Odas Gmbh | Verfahren zur fotografischen aufnahme eines zylinderförmigen, insbesondere plattenförmigen gegenstandes |
| US6944527B2 (en) * | 2003-11-07 | 2005-09-13 | Eaton Corporation | Decision enhancement system for a vehicle safety restraint application |
| US7532749B2 (en) * | 2003-11-18 | 2009-05-12 | Panasonic Corporation | Light processing apparatus |
| US7701564B2 (en) * | 2005-05-18 | 2010-04-20 | Hitachi Global Storage Technologies Netherlands B.V. | System and method for angular measurement |
| US8300921B2 (en) * | 2008-01-25 | 2012-10-30 | Panasonic Corporation | Inspection apparatus and inspection method |
| US8294760B2 (en) | 2009-04-21 | 2012-10-23 | Samsung Techwin Co., Ltd. | Electronic part recognition apparatus and chip mounter having the same |
| US8461532B2 (en) * | 2009-11-05 | 2013-06-11 | The Aerospace Corporation | Refraction assisted illumination for imaging |
| US8450688B2 (en) | 2009-11-05 | 2013-05-28 | The Aerospace Corporation | Refraction assisted illumination for imaging |
| US8138476B2 (en) | 2009-11-05 | 2012-03-20 | The Aerospace Corporation | Refraction assisted illumination for imaging |
| US9402036B2 (en) * | 2011-10-17 | 2016-07-26 | Rudolph Technologies, Inc. | Scanning operation with concurrent focus and inspection |
| US9007454B2 (en) | 2012-10-31 | 2015-04-14 | The Aerospace Corporation | Optimized illumination for imaging |
| EP3341712B1 (en) | 2015-08-26 | 2024-04-03 | ABB Schweiz AG | Object multi-perspective inspection apparatus and method therefor |
| JP7199241B2 (ja) * | 2019-02-07 | 2023-01-05 | 株式会社東芝 | 半導体検査システム及び半導体検査装置 |
| US11941797B2 (en) | 2021-03-03 | 2024-03-26 | Battelle Memorial Institute | Systems and methods for inspection of IC devices |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60247106A (ja) * | 1984-05-22 | 1985-12-06 | Fujitsu Ltd | 形状検査装置 |
| US4696047A (en) * | 1985-02-28 | 1987-09-22 | Texas Instruments Incorporated | Apparatus for automatically inspecting electrical connecting pins |
| JPH0359446A (ja) * | 1989-07-28 | 1991-03-14 | Nec Corp | 集積回路パッケージピン検査装置 |
| JPH03203399A (ja) * | 1989-12-29 | 1991-09-05 | Matsushita Electric Ind Co Ltd | 部品装着装置 |
| JPH03210410A (ja) * | 1990-01-12 | 1991-09-13 | Fujitsu Ltd | ピングリッドアレイ検査装置 |
| US5185811A (en) * | 1990-12-27 | 1993-02-09 | International Business Machines Corporation | Automated visual inspection of electronic component leads prior to placement |
| US5173796A (en) * | 1991-05-20 | 1992-12-22 | Palm Steven G | Three dimensional scanning system |
| US5563703A (en) * | 1994-06-20 | 1996-10-08 | Motorola, Inc. | Lead coplanarity inspection apparatus and method thereof |
-
1998
- 1998-01-23 US US09/012,294 patent/US6055055A/en not_active Expired - Fee Related
- 1998-11-17 EP EP98309393A patent/EP0919804A1/en not_active Withdrawn
- 1998-11-27 JP JP10353940A patent/JPH11316112A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011228583A (ja) * | 2010-04-22 | 2011-11-10 | Fuji Mach Mfg Co Ltd | 電子部品の撮像判定方法及び部品実装機 |
Also Published As
| Publication number | Publication date |
|---|---|
| US6055055A (en) | 2000-04-25 |
| EP0919804A1 (en) | 1999-06-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20051005 |
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| RD02 | Notification of acceptance of power of attorney |
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| A521 | Request for written amendment filed |
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| A621 | Written request for application examination |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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| A02 | Decision of refusal |
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