JP7450272B2 - 重なり合うボンドワイヤのループ高さの測定 - Google Patents
重なり合うボンドワイヤのループ高さの測定 Download PDFInfo
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- JP7450272B2 JP7450272B2 JP2021169139A JP2021169139A JP7450272B2 JP 7450272 B2 JP7450272 B2 JP 7450272B2 JP 2021169139 A JP2021169139 A JP 2021169139A JP 2021169139 A JP2021169139 A JP 2021169139A JP 7450272 B2 JP7450272 B2 JP 7450272B2
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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Description
(付記1)
多積層ダイまたは同様の物品上にボンディングされたワイヤのZ高さおよびプロファイルを検査するための装置であって、
高分解能のエンコーダに結合したX、Y、およびZ軸において移動することができる手段に取り付けられ、異なる平面におけるボンディングワイヤ上の合焦点の画像ならびに前記合焦点のそれぞれのX、Y、およびZ位置を取り込む撮像装置であって、所定の焦点深度を有するレンズに光学的に結合している撮像装置と、
照明されたボンディングされたワイヤの画像の取り込みを可能にして、密接して位置するボンディングされたワイヤの画像ノイズを排除するために、所定の角度を有しているストロボ照明手段と、
検査対象の物体を照明して、バックライト画像の取り込みを可能にするために、台座に取り付けられた第2の照明手段と
を備える装置。
(付記2)
前記撮像装置によって眺められる関心領域の背後に暗領域を生成する第3の照明手段をさらに備える、付記1に記載の装置。
(付記3)
前記画像取り込み装置に結合した高速な合焦を可能にするための液体レンズをさらに備える、付記1に記載の装置。
(付記4)
2つ以上の積層された半導体チップのパッドと基板のパッドとの間にボンディングされたワイヤのZ高さおよびプロファイルを測定するための方法であって、
画像取り込みシステムをX、Y、およびZ方向に移動させて、前記ボンディングされたワイヤ上の予め設定された複数の点へと前記画像取り込みシステムの焦点を合わせるステップと、
ストロボ照明を使用して、複数のZ軸平面において、前記所望のボンディングワイヤ上の前記複数の点の画像を取り込むステップと、
前記一組のボンディングワイヤ上の各点のエンコーダ位置を読み取り、それらのそれぞれのX、Y、およびZ点を表にするステップと、
積層ダイ半導体チップの全体を巡って前記ボンディングワイヤの前記表にされたすべての点の高さおよび横変位を計算し、各点をそれらの隣接する点へと線形補間して、すべてのボンディングワイヤの角度プロファイルを形成するステップと、
前記表にされた点を使用して3Dグラフをプロットするステップと、
前記3Dグラフを分析して、X、Y、またはZ位置において密接に近接するボンディングワイヤを検出し、予め設定されたパラメータと比較して、前記ボンディングされた多積層ダイを不合格または合格にするステップと、
その結果および分析されたパラメータを外部インターフェースへと通信するステップとを含む方法。
(付記5)
前記3Dグラフを分析して、前記共通のボンディング平面が前記ボンディングワイヤの両端において同じであると判断するステップをさらに含む、付記4に記載の方法。
Claims (5)
- 多積層ダイ上に重なり合ってボンディングされたワイヤのZ高さおよびプロファイルを検査するための装置であって、
高分解能のエンコーダに結合したX、Y、およびZ軸において移動することができる手段に取り付けられ、異なる平面における重なり合うボンディングワイヤ上の合焦点の画像ならびに前記合焦点のそれぞれのX、Y、およびZ位置を取り込む撮像装置であって、所定の焦点深度を有するレンズに光学的に結合している撮像装置と、
撮像された画像を分析し、重なり合うボンディングワイヤ上の前記合焦点高さおよび横方向の変位を計算し、各点のX、Y、およびZ座標を隣接する点に線形補間して、重なり合うボンディングワイヤの角度プロファイルを形成するように配置された、撮像デバイスに関連付けられたプロセッサと、
照明され重なり合ってボンディングされたワイヤの画像の取り込みを可能にして、密接して位置し、重なり合ってボンディングされたワイヤの画像ノイズを排除するために、所定の角度を有しているストロボ照明手段と、
検査対象の、重なり合ってボンディングされたワイヤを照明して、バックライト画像の取り込みを可能にするために、台座に取り付けられた第2の照明手段と
を備える装置。 - 前記撮像装置によって眺められる関心領域の背後に暗領域を生成するように構成された第3の照明手段をさらに備える、請求項1に記載の装置。
- 前記画像取り込み装置に結合した高速な合焦を可能にするための液体レンズをさらに備える、請求項1に記載の装置。
- 2つ以上の積層された半導体チップのパッドと基板のパッドとの間で重なり合うボンディングワイヤのZ高さおよびプロファイルを測定するための方法であって、
画像取り込みシステムをX、Y、およびZ方向に移動させて、前記重なり合うボンディングワイヤ上の予め設定された複数の点へと前記画像取り込みシステムの焦点を合わせるステップと、
ストロボ照明を使用して、複数のZ軸平面において、所望の前記重なり合うボンディングワイヤ上の前記複数の点の画像を取り込むステップと、
一組の前記重なり合うボンディングワイヤ上の各点のエンコーダ位置を読み取り、それらのそれぞれのX、Y、およびZ点を表にするステップと、
積層ダイ半導体チップの全体を巡って前記重なり合うボンディングワイヤの前記表にされたすべての点の高さおよび横変位を計算し、各点のX、Y、およびZ座標をそれらの隣接する点へと線形補間して、すべての重なり合うボンディングワイヤの角度プロファイルを形成するステップと、
前記表にされた点を使用して3Dグラフをプロットするステップと、
前記3Dグラフを分析して、X、Y、またはZ位置において密接に近接し、重なり合うボンディングワイヤを検出し、予め設定されたパラメータと比較して、前記ボンディングされた多積層ダイを不合格または合格にするステップと、
分析の結果および分析されたパラメータを外部インターフェースへと通信するステップと
を含む方法。 - 前記線形補間するステップは、ブロックされた領域において重なり合うボンディングワイヤのプロファイルを決定するために、ブロックされた領域に最も近いX、Y、およびZ座標を補間するステップをさらに含む、請求項4に記載の方法。
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