JP2006292647A - ボンディングワイヤ検査装置 - Google Patents
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Abstract
【解決手段】 ワイヤ部分を垂直上方から落射照明する同軸照明装置6と、ワイヤ部分を垂直上方から撮像する第1のCCDカメラ4と、ワイヤ部分を斜め上方から照明する斜め照明装置11と、ワイヤ部分を斜め上方から撮像する第2のCCDカメラ10と、第1および第2のCCDカメラによって撮像された画像を用いてワイヤ3のループ頂点位置のワイヤ高さを画像処理により算出する画像処理部15とを備え、第2のCCDカメラ10の画像上でループ頂点位置とボールの位置とが同時に認識できる場合は、第2のCCDカメラの画像のみを用いてワイヤ高さを算出し、第2のCCDカメラの画像上でループ頂点位置が認識できない場合は、第1および第2のCCDカメラの両方の画像を用いてワイヤ高さを算出する。
【選択図】 図1
Description
図1に、本発明に係るボンディングワイヤ検査装置の一実施の形態を示す。
図において、1は水平面(X−Y面)内において任意の位置に移動自在とされたXYステージである。このXYステージ1上に、以下に述べるような種々の機構が載置され、XYステージ1を移動制御することよってその位置を自在に変えることができるように構成されている。
なお、検査台上の定位置にセットされた半導体チップ2の位置座標やボンディングされている各ワイヤ3のボンディング点の位置座標は、予め検査装置単体でティーチングされているか、あるいは図示しないワイヤボンディング装置から信号線を介してまたは記憶媒体などを利用して検査装置に入力され、予め内部メモリに記憶されているものとする。
X=Lcosα (1)
Y=Hsinθ+(Lsinθ)sinα (2)
となる。
2 半導体チップ
3 ボンディングワイヤ
4 第1のCCDカメラ(第1の撮像手段)
4a 第1のCCDカメラのレンズ
6 同軸照明装置(第1の照明手段)
7 リング照明装置
8 回転支持体
8a 開口部
9 回転駆動機構
10 第2のCCDカメラ(第2の撮像手段)
10a 第2のCCDカメラのレンズ
11 斜め照明装置(第2の照明手段)
12,13 反射ミラー(プリズム)
14 画像処理部
15 制御部
16 ボール
17 パッド
18 チャンファ痕
19 第2のCCDカメラの撮像面
20 リード
Claims (3)
- 検査対象とする半導体チップの検査すべきワイヤ部分を垂直上方から落射照明する第1の照明手段と、
該第1の照明手段によって照明されたワイヤ部分を垂直上方から撮像して画像信号を得る第1の撮像手段と、
検査すべき前記ワイヤ部分を斜め上方から照明する第2の照明手段と、
該第2の照明手段によって照明されたワイヤ部分を斜め上方から撮像して画像信号を得る第2の撮像手段と、
前記第1の撮像手段によって撮像された垂直上方からの画像信号と前記第2の撮像手段によって撮像された斜め上方からの画像信号を用いてワイヤのループ頂点位置のワイヤ高さを画像処理により算出する画像処理部とを備え、
前記第2の撮像手段で撮像した斜め上方からの画像上においてワイヤのループ頂点位置とボールの位置とが同時に認識できる場合は、第2の撮像手段で撮像した斜め上方からの画像のみを用いてループ頂点位置のワイヤ高さを算出し、
第2の撮像手段で撮像した斜め上方からの画像上においてワイヤのループ頂点位置が認識できない場合は、前記第1の撮像手段で撮像した垂直上方からの画像と、前記第2の撮像手段で撮像した斜め上方からの画像の両方を用いてループ頂点位置のワイヤ高さを算出するようにしたこと
を特徴とするボンディングワイヤ検査装置。 - 前記第2の撮像手段と第2の照明手段を前記第1の撮像手段のレンズ光軸を中心として180度反対側の位置に対向配置し、該第2の撮像手段と第2の照明手段をその位置関係を保ったままで前記第1の撮像手段のレンズ光軸まわりに回動自在に配置したこと特徴とする請求項1記載のボンディングワイヤ検査装置。
- 前記第1,第2の撮像手段と前記第1,第2の照明手段を水平面内で移動自在とされたXYテーブル上に載置し、垂直上方から撮像する第1の撮像手段のレンズ光軸が検査対象とする半導体チップの検査すべきボンディングワイヤの直上に位置するように移動制御することを特徴とする請求項2記載のボンディングワイヤ検査装置。
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016142986A1 (ja) * | 2015-03-06 | 2016-09-15 | 富士機械製造株式会社 | 認識装置および、認識方法 |
WO2017026802A1 (ko) * | 2015-08-11 | 2017-02-16 | (주)다원넥스뷰 | 프로브 본딩장치 및 이를 이용한 프로브 본딩방법 |
JP2017040472A (ja) * | 2015-08-17 | 2017-02-23 | ヴィスコ・テクノロジーズ株式会社 | 画像検査装置 |
CN107199406A (zh) * | 2017-06-05 | 2017-09-26 | 武汉比天科技有限责任公司 | 一种锡丝精密焊接装置及控制方法 |
CN113363186A (zh) * | 2021-06-02 | 2021-09-07 | 苏州有道芯量智能科技有限公司 | 一种芯片封测金线检测装置及其使用方法 |
-
2005
- 2005-04-14 JP JP2005116498A patent/JP2006292647A/ja active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016142986A1 (ja) * | 2015-03-06 | 2016-09-15 | 富士機械製造株式会社 | 認識装置および、認識方法 |
JPWO2016142986A1 (ja) * | 2015-03-06 | 2017-12-21 | 富士機械製造株式会社 | 認識装置および、認識方法 |
WO2017026802A1 (ko) * | 2015-08-11 | 2017-02-16 | (주)다원넥스뷰 | 프로브 본딩장치 및 이를 이용한 프로브 본딩방법 |
CN108351370A (zh) * | 2015-08-11 | 2018-07-31 | 多元来思微株式会社 | 探针焊接装置及利用其的探针焊接方法 |
US10641794B2 (en) | 2015-08-11 | 2020-05-05 | Dawon Nexview Co., Ltd. | Probe bonding device and probe bonding method using the same |
CN108351370B (zh) * | 2015-08-11 | 2020-10-09 | 多元来思微株式会社 | 探针焊接装置及利用其的探针焊接方法 |
JP2017040472A (ja) * | 2015-08-17 | 2017-02-23 | ヴィスコ・テクノロジーズ株式会社 | 画像検査装置 |
CN107199406A (zh) * | 2017-06-05 | 2017-09-26 | 武汉比天科技有限责任公司 | 一种锡丝精密焊接装置及控制方法 |
CN113363186A (zh) * | 2021-06-02 | 2021-09-07 | 苏州有道芯量智能科技有限公司 | 一种芯片封测金线检测装置及其使用方法 |
CN113363186B (zh) * | 2021-06-02 | 2024-04-30 | 苏州有道芯量智能科技有限公司 | 一种芯片封测金线检测装置及其使用方法 |
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