JPH11309662A - Groove roller for wire saw and assembly structure thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the damage of the fit surface of an uneven fit part provided on a groove roller end and a spindle end. SOLUTION: In this assembly structure, the ring shape groove 40b for receiving a wire is engaraved on the taper surface of the projecting fit part 40a of a groove roller 12, even if the wire 11a is broken or derailed, on the way of moving to the tip side along the taper surface of the projecting fit part 40a, the wire 11a is fit in the hollow ring shape groove 40b for wire receiving. Consequently, it can be prevented that the wire 11a is crawled into the fit clearance of really fitted uneven fit parts 35a, 40a. Thereby, the anxiety for the damage on respective fit surfaces of the uneven fit parts 35a, 40a can be dissolved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw groove roller and an assembling structure thereof, and more particularly, to a structure in which a wire dropped from the wire saw groove roller enters between the wire saw groove roller and the spindle to damage the portion. Field of the Invention The present invention relates to a wire saw groove roller to be prevented and an assembling structure thereof.

[0002]

2. Description of the Related Art In a wire saw, a wire for cutting an ingot derived from a pay-out bobbin (or a reel) is wound around a plurality of groove rollers in a coil shape and then wound on a winding bobbin. The device configuration is as follows. Therefore, for example, when cutting an ingot such as single crystal silicon, loose abrasive (hereinafter, referred to as lapping oil)
(In some cases simply referred to as abrasive grains) while continuously supplying a predetermined amount of a slurry-like abrasive liquid to the ingot, while relatively pressing one ingot against the reciprocating wire row, the abrasive action of the abrasive grains causes A book ingot is cut into many wafers. Specifically, when the wire train reciprocates, the free abrasive grains in the abrasive liquid are shaved while being pressed against the bottom of the cut groove of the ingot by each wire. The groove roller is formed by lining urethane rubber having a predetermined thickness on the outer peripheral surface of a cylindrical base metal, and engraving a roller groove on the outer peripheral surface of the urethane rubber. Each wire saw groove roller is assembled between a pair of rotatable spindles that are arranged opposite to each other. As an example of a specific assembling structure, a tapered convex fitting portion protruding from both end surfaces of the wire saw groove roller and a concave fitting portion formed on the roller-side end surface of each spindle are combined. In addition, there is a structure in which the spindle is pressed from both sides.

[0003]

By the way, when the wire wound around the roller groove of the wire saw groove roller is disconnected or derailed, it tends to cause inconvenience in an assembly portion between the wire saw groove roller and the spindle. That is, the broken wire falls from the outer end of the wire saw groove roller. Thereafter, the wire slides toward the spindle using the tapered surface of the convex fitting portion protruding from the roller end surface as an inclined guide. Then, there is a possibility that the fitting surfaces of these concave and convex fitting portions may be damaged by sneaking into the fitting gap between the biconcave and convex fitting portions. In the case of damage, the tapered portion needs to be corrected to take this damage.

[0004] The inventors of the present invention have conducted intensive studies, and as a result, have gradually tapered the outer peripheral surface of the roller end of the wire saw groove roller or a part of an assembly portion of the wire saw groove roller and the spindle. If the wire receiving annular groove is engraved or the wire receiving convex portion is protruded from the tapered convex fitting portion, the wire dropped from the roller end of the wire saw groove roller is attached to the mounting portion. It has been ascertained that it is possible to prevent the part from getting into the fitting gap between the concave and convex fitting parts and to damage this part, thus completing the present invention.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to prevent a wire from entering a fitting gap between a concave and a convex fitting portion, which is an assembling portion between a groove roller for a wire saw and a spindle, which damages a fitting surface of the concave and convex fitting portions. It is an object of the present invention to provide a groove roller for a wire saw and an assembling structure thereof, which can prevent the occurrence of the groove roller. SUMMARY OF THE INVENTION It is an object of the present invention to provide a wire saw groove roller capable of preventing the slurry clogging of the wire receiving annular groove while achieving the above object and an assembling structure thereof. SUMMARY OF THE INVENTION It is an object of the present invention to provide a wire saw groove roller assembling structure that can prevent a wire from entering a fitting gap between a concave and a convex fitting portion through a wire receiving annular groove.

[0006]

According to the first aspect of the present invention, a wire is wound around an outer peripheral surface of a roller in a coil shape.
Further, in a wire saw groove roller assembled between a pair of spindles via a roller assembly structure having a tapered convex fitting portion gradually tapered and a concave fitting portion fitted thereto, An annular groove for receiving a wire is engraved and / or a convex portion for projecting a wire is protruded at an end of an outer peripheral surface of a roller to be wound, and a wire dropped from an end of the outer peripheral surface of the roller is used for the wire saw groove roller and This is a groove roller for a wire saw that prevents the spindle from getting into the fitting gap between the concave and convex fitting portions of the spindle.

The wire saw to which the present invention is applied may be of any type. For example, the ingot may be moved and pressed against the wire row, and cut by contacting the wire row.
Conversely, the wire row may be moved to press and contact the ingot to cut it. Further, the lower surface of the ingot may be in contact with the upper portion of the wire array, or the upper surface of the ingot may be pressed against the lower portion of the wire array.
As an abrasive used for cutting, for example, an average particle diameter of 10
A well-known material including abrasive grains such as 50 μm SiC can be used. Examples of the ingot cut by the wire saw include a silicon single crystal, a compound semiconductor single crystal, a magnetic material, quartz, and ceramics.
Also, the wire saw groove roller and the spindle are formed with either a gradually tapered convex fitting portion or a concave fitting portion which fits into the tapered convex fitting portion, which constitutes an assembling structure portion of both. Have been.

In the case of an annular groove for receiving a wire, the groove width is
Generally, there is no limitation as long as a wire for cutting a wafer having a diameter of 0.16 to 0.20 mm can enter. The depth of the groove is not limited as long as the wire stops in the groove without easily jumping out.
As described above, these matters also correspond to claim 2. Normal,
On the outer peripheral surfaces of both ends of the wire saw groove roller, there are smooth portions where no wire grooves are formed at both ends. According to the first aspect of the present invention, the smooth portion is provided with a wire receiving annular groove, a wire receiving convex portion, or both of them, which prevent the wire from dropping from the roller end. The number (number) of the formed annular grooves for wire reception and the projections for wire reception is not limited. In addition, the wire receiving protrusion may be a partial protrusion or an annular protrusion provided on the entire outer peripheral surface of the roller. Further, the end of the outer peripheral surface of the groove roller for a wire saw here may be one end or both ends.

According to a second aspect of the present invention, there is provided a wire saw groove roller having a coil wound around an outer peripheral surface of the roller.
In the assembling structure of the wire saw groove roller assembled between the pair of spindles via the tapered convex fitting portion gradually tapered and the concave fitting portion fitted thereto, the gradually tapered convex fitting is used. An annular groove for wire receiving and / or a convex portion for wire receiving are formed in a portion of the outer peripheral surface of the portion exposed at the time of fitting, so that the wire receiving groove falls from an end of the roller outer peripheral surface of the wire saw groove roller. This is an assembling structure of the wire saw groove roller for preventing the outer wire from entering the fitting gap between the concave and convex fitting portions.

If the annular groove for wire receiving engraved on the tapered surface (outer peripheral surface) of the convex fitting portion is provided over the entire circumference of this tapered surface, the number of engraved lines may be one or plural. Good. On the other hand, even if one or more partial protrusions are formed on the tapered surface of the convex fitting portion of the wire receiving convex portion, as in the case of the wire receiving annular groove,
One or a plurality of annular projections may be provided over the entire circumference of the tapered surface of the convex fitting portion. In addition, these wire-receiving annular grooves and wire-receiving protrusions may be provided side by side. Further, for example, by combining the first and second aspects, an annular groove for receiving a wire or a convex portion for receiving a wire is provided at an end of the outer peripheral surface of the roller. In addition, a wire receiving annular groove or a wire receiving convex portion is provided in the convex fitting portion. Such a thing may be used. If the looseness of the wire is small, the wire is captured by the wire receiving annular groove or the wire receiving protrusion on the roller end side. On the other hand, if the looseness of the wire is large, the wire is captured by the wire-receiving annular groove or the wire-receiving convex portion of the convex fitting portion.

According to a third aspect of the present invention, there is provided the wire saw groove roller assembling according to the second aspect, wherein a plurality of the annular grooves for wire receiving are formed on the outer peripheral surface of the tapered roller of the convex fitting portion. Structure. The interval between the wire-receiving annular grooves engraved on the outer peripheral surface of the convex fitting portion may be arbitrary.

[0012]

According to the present invention, when the wire wound around the wire saw groove roller is disconnected or derailed, the wire falls from the outer end of the wire saw groove roller and the wire saw groove roller and the spindle are assembled. An attempt is made to slide along the tapered surface of the convex fitting portion which gradually protrudes from the end face of the groove roller or the spindle which constitutes a part thereof, into the fitting gap therebetween. However, in the case of the first aspect, the annular groove for wire receiving and / or the convex portion for wire receiving are provided at the end of the outer peripheral surface of the roller. In the case of the second and third aspects, an annular groove for receiving a wire and / or a convex portion for receiving a wire are provided on the outer peripheral surface of the convex fitting portion.

Therefore, in the case of the first aspect, the broken wire is fitted in the recessed groove for receiving the roller at the roller end and is caught or caught by the protruding projection for receiving the wire. In the case of claims 2 and 3,
The wire is caught by the wire-receiving annular groove or the wire-receiving protrusion while moving toward the distal end side of the convex fitting portion of the assembly structure. As a result, the wire is prevented from penetrating into the fitting gap of the part where the concave and convex fitting portions are actually fitted, and as a result, each fitting surface of the concave and convex fitting portions may be damaged. Can be eliminated.

In particular, according to the third aspect of the present invention, since a plurality of wire receiving annular grooves are formed on the tapered outer peripheral surface of the convex fitting portion, the concave and convex portions constituting the assembly structure are formed. At the time of fitting of the fitting portion, of the plurality of wire receiving annular grooves engraved on the convex fitting portion, a part of the wire receiving annular groove on the distal end side temporarily assumes a bi-concave, convex fitting portion. Even if the wire straddles the fitting range, the wire falls into and is caught by the other annular groove for receiving the wire which is exposed to the outside. As a result, the wire is prevented from penetrating into the fitting gap between the concave and convex fitting portions through the wire receiving annular groove.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of a main part of a wire saw to which a groove roller for a wire saw (hereinafter simply referred to as a groove roller) according to a first embodiment of the present invention is applied. FIG. 2 is an enlarged cross-sectional view of the vicinity of an assembly portion of the groove roller.

In FIG. 1, reference numeral 10 denotes a wire saw to which the groove roller of the first embodiment is applied.
Is a device for cutting a single crystal silicon ingot I pulled up by the CZ method into a number of wafers. The wire saw 10 has a wire row 11 in which a number of wires are bundled in a horizontal row. Wire row 11
Is reciprocated by a drive motor between three groove rollers 12 arranged in an inverted triangle shape when viewed from the front. The middle of the two groove rollers 12 arranged on the upper side is the cutting position of the ingot I. Above both sides of this cutting position,
For example, a pair of non-illustrated polishing liquid supply units for continuously supplying the polishing liquid onto the wire array 11 is provided. Each groove roller 12 is made of SUS (stainless steel).

The wire 11a is led out from the bobbin 20 of the pay-out reel 13, is wound around these groove rollers 12, and is wound on the bobbin 21 of the take-up reel 15. The rotation shafts of the supply reel 13 and the take-up reel 15 are connected to output shafts of drive motors 16 and 17, respectively. When the drive motors 16 and 17 are driven and rotated,
Each of the bobbins 20, 21 pivotally supported by the pair of bearings 18 rotates clockwise or counterclockwise in FIG. 1 about the axis thereof, and the wire 11a reciprocates. In FIG. 1, reference numeral 19 denotes a carbon bed for fixing the ingot I, and 19a denotes a lift for the ingot I.

Next, the groove roller 12 according to the first embodiment will be described in detail with reference to FIG. Here, two of the three groove rollers and the driven groove roller are taken as an example.
The driving roller has the same basic structure. FIG.
As shown in FIG. 3, each groove roller 12 according to the first embodiment has a pair of bearings 30, 3 arranged at a predetermined interval.
It is supported between one. Each bearing 30, 31 has a cylindrical casing 32 fixed to an external member via a connecting plate (arm) 32a. An inner sleeve 33 is fitted in the cylindrical casing 32. Spindles 35 and 36 are mounted inside the inner sleeve 33 via six bearings 34 so as to be rotatable in the circumferential direction. A water-cooling jacket is provided between the outer surface of the inner sleeve 33 and the connection plate (or arm) 32a to prevent heating of these.

The groove roller 12 has a thick cylindrical base metal 12A made of SUS. On the outer peripheral surface of the base metal 12A,
Many wire grooves 12a, which are parallel grooves having a short pitch,
It is formed by lining a urethane rubber 12c having a thickness of 5 to 20 mm. A relatively thin roller reinforcing tubular member 39 is fitted inside the base metal 12A from the center to the vicinity of both ends. In addition, this roller reinforcing tubular member 39
Is not necessary. Further, SUS sleeve end plates 40 are also fitted inside both ends of the base metal 12A. At the center of the outer end face of each sleeve end plate 40, a tapered convex fitting portion 40a that is gradually tapered is integrally formed. On the outer peripheral surface of the convex fitting portion 40a, only one wire receiving annular groove 40b having a width of 5 mm and a depth of 5 mm is formed. The biconvex fitting portion 40a is provided with the spindles 35 and 36.
Are fitted into the concave fitting portions 35a and 36a which are depressed and formed at the center of the end surface on the side of the groove roller 12. Thereby, the left and right spindles 35 and 36 and the center groove roller 12 rotate integrally. In addition, a concave fitting portion may be formed to be depressed on the sleeve end plate 40 side, and a convex fitting portion may protrude from the spindle 35, 36 side.

In FIG. 2, reference numeral 41 denotes a bearing 3
4 is an inner lid ring for preventing the outside from falling off. An outer lid ring 42 is engaged with the inner lid ring 41. A stop ring 43 is screwed to the spindle 35 to fix the inner lid ring 42. Reference numerals 44 and 45 denote cover rings for preventing the bearing 34 from protruding outside to the groove roller 12 side. Reference numeral 46 denotes a thick cap that is fitted around the cylindrical casing 32 on the bearing 31 side and covers the head of the spindle 36.

Next, a method of cutting the ingot I by the wire saw 10 provided with the groove rollers 12 will be described.
As shown in FIG. 1, the wire saw 10 rotates the bobbin 20 of the pay-out reel 13 by the drive motor 16 while supplying the abrasive fluid from the abrasive fluid supply unit, and draws out the wire 11 a, while the wire saw 10 is wound by the drive motor 17. The bobbin 21 of the take-up reel 15 is rotated to take up the wire 11a. And
By appropriately changing the rotation direction of each bobbin 20, 21,
The wire 11a is reciprocated. At this time, the drive side groove roller 12 is rotated by a rotation motor (not shown), and the wire row 11 is reciprocated. Accordingly, the other two driven-side groove rollers 12 are rotated between the bearings 30 and 31. When the wire train 11 reciprocates, the ingot I
Is pressed against the wire row 11. Thus, the ingot I is cut into a number of wafers. That is, when the wire train 11 reciprocates, the free abrasive grains in the abrasive liquid are removed from the wire train 1.
By rubbing the bottom of the cutting groove with one wire 11a, the bottom is gradually scraped off, and finally a large number of thin wafers are cut.

In the first embodiment, the wire 11 wound around the groove roller 12 of the wire saw 10 is used.
a may be disconnected or derailed. At this time, as shown in the partial enlarged view of FIG. 2, the wire 11a may fall from the outer end of the groove roller 12 toward the convex fitting portion 40a. At this time, the wire 11a slides toward the distal end side of the tapered surface of the gradually fitting convex fitting portion 40a. On the way, the wire 11a fits into the wire-receiving annular groove 40b formed on the outer peripheral surface of the convex fitting portion 40a.

As a result, it is possible to prevent the wire 11a from sneaking into the fitting gap between the actually fitted concave fitting portions 35a and 36a and the tip of the convex fitting portion 40a. Thereby, the concave and convex fitting portions 35a, 36a, 40a
The possibility of damaging each of the fitting surfaces is eliminated. Moreover, since the wire-receiving annular groove 40b is a relatively wide and shallow groove having a width of 5 mm and a depth of 5 mm, the wire-receiving annular groove 40b may be clogged with slurry containing fine abrasive grains. Can be prevented.

Next, a groove roller for a wire saw according to a second embodiment of the present invention will be described with reference to FIG. FIG. 3 is a partially enlarged cross-sectional view of the vicinity of an assembly portion of a groove roller according to a second embodiment. As shown in FIG. 3, the groove roller 50 of the second embodiment is an example in which two wire-receiving annular grooves 40d are formed on the tapered surface of the convex fitting portion 40c of the sleeve end plate 40A. When the concave and convex fitting portions 35a and 40c are fitted, a part of the groove 40d on the distal end side of the two wire receiving annular grooves 40d which are temporarily engraved in the convex fitting portion 40c has both ends. Even if it straddles the fitting range of the concave and convex fitting portions 35a, 36a, and 40c, the wire 11a is hooked in the original wire receiving annular groove 40d that is entirely exposed. As a result, the wire 11a is prevented from sneaking into the fitting gap between the concave and convex fitting portions 35a and 40c through the wire receiving annular groove 40d on the front side which is arranged so as to straddle the fitting range. can do. Other configurations, operations, and effects are the same as those in the first embodiment, and thus description thereof is omitted.

Next, a groove roller for a wire saw according to a third embodiment of the present invention will be described with reference to FIG. FIG. 4 is a partially enlarged cross-sectional view of the vicinity of an assembly portion of a groove roller according to a third embodiment. As shown in FIG. 4, the groove roller 60 according to the third embodiment is an example in which a wire receiving convex portion 40f is integrally provided on a tapered surface of a convex fitting portion 40e of a sleeve end plate 40B. The derailed or disconnected wire 11a is blocked by the wire receiving protrusion 40f. As a result, the wire 11a is prevented from getting into the fitting gap between the concave and convex fitting portions 35a and 40e. If the height of the wire receiving projection 40f is reduced to about 5 mm, the first
In the embodiment and the second embodiment, the wire receiving annular grooves 40b,
As in the case of 40d, the slurry containing fine abrasive grains can be prevented from being clogged and blocked by the wire receiving projection 40f. Other configurations, operations, and effects are the same as those in the first embodiment, and thus description thereof is omitted.

Next, a groove roller for a wire saw according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a partially enlarged cross-sectional view of the vicinity of an assembly portion of a groove roller according to a fourth embodiment. As shown in FIG. 5, the groove roller 70 according to the fourth embodiment is an example in which an annular wire receiving convex portion 12d is protrudingly provided at both smooth end portions of the outer peripheral surface of the base metal 12A. The wire 11a that has been derailed or disconnected is blocked by the wire receiving protrusion 12d before falling from the end of the groove roller 70. The convex fitting portion 40g of the sleeve end plate 40C is an ordinary gradually tapered tapered convex fitting portion having no irregularities on the tapered surface. Other configurations,
The operation and effect are the same as those of the third embodiment, and the description is omitted.

Next, a groove roller for a wire saw according to a fifth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a partially enlarged cross-sectional view of the vicinity of an assembly portion of a groove roller according to a fifth embodiment. As shown in FIG. 6, the groove roller 80 according to the fifth embodiment is an example in which annular grooves 12e for receiving wires are provided at both smooth end portions of the outer peripheral surface of the base metal 12A. The derailed or broken wire 11a is captured by the wire receiving annular groove 12e before falling from the end of the groove roller 80. Other configurations, operations, and effects are the same as those of the fourth embodiment, and a description thereof will not be repeated.

[0028]

According to the present invention, the edge of the outer peripheral surface of the wire saw groove roller (claim 1) or the tapered surface of the convex fitting portion on either side of the wire saw groove roller or the spindle (claim 1). Since the wire receiving annular groove or the wire receiving convex portion is protrudingly provided in claim 2 or claim 3, even if the wire of the wire saw groove roller is disconnected or derailed, the wire is formed on the outer peripheral surface of the roller. While being moved to the distal end side along the end portion or the tapered surface of the convex fitting portion, it is caught by the concave annular groove for receiving the wire or the protruding convex portion for receiving the wire. As a result, it is possible to eliminate the possibility that the wire enters the fitting gap between the concave and convex fitting portions and damages the respective fitting surfaces of the double concave and convex fitting portions.

In particular, according to the third aspect of the present invention, a plurality of annular grooves for wire receiving are formed on the tapered outer peripheral surface of the convex fitting portion. At the time of mating,
Even if a part of the annular groove for receiving the wire on the distal end side straddles the fitting range of the biconcave or convex fitting portion, the broken wire is not used for the other exposed annular ring for receiving the wire. Get caught in the groove. As a result, it is possible to prevent the wire from sneaking into the fitting gap between the concave and convex fitting portions through the wire receiving annular groove.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a main part of a wire saw to which a groove roller for a wire saw according to a first embodiment of the present invention is applied.

FIG. 2 is an enlarged sectional view of the vicinity of an assembly portion of a wire saw groove roller according to the first embodiment of the present invention.

FIG. 3 is an enlarged cross-sectional view around an assembly portion of a groove roller for a wire saw according to a second embodiment of the present invention.

FIG. 4 is an enlarged cross-sectional view around an assembly portion of a groove roller for a wire saw according to a third embodiment of the present invention.

FIG. 5 is an enlarged sectional view of the vicinity of an assembly portion of a wire saw groove roller according to a fourth embodiment of the present invention.

FIG. 6 is an enlarged sectional view of the vicinity of an assembly portion of a wire saw groove roller according to a fifth embodiment of the present invention.

[Description of Signs] 10 wire saw, 11a wire, 12, 50, 60, 70, 80 groove roller for wire saw, 12e, 40b, 40d annular groove for receiving wire, 12d, 40f convex portion for receiving wire, 40a, 40c, 40e , 40g convex fitting portion, 35, 36 spindle, 35a, 36a concave fitting portion, I ingot.

Claims (3)

[Claims] A wire is wound around an outer peripheral surface of a roller in a coil shape, and furthermore, a roller assembling structure portion having a tapered convex fitting portion gradually tapered and a concave fitting portion fitted to the convex fitting portion. A groove roller for wire saw assembled between a pair of spindles, wherein an annular groove for wire receiving and / or a projecting portion for wire receiving is formed at an end of the outer peripheral surface of the roller around which the coil is wound; A wire saw groove roller for preventing a wire dropped from an end of the roller outer peripheral surface from sneaking into a fitting gap between the concave and convex fitting portions of the wire saw groove roller and the spindle. 2. A wire saw groove roller in which a coil is wound around an outer peripheral surface of a roller through a tapered convex fitting portion that is gradually tapered and a concave fitting portion that fits into the tapered convex fitting portion. In the assembling structure of the wire saw groove roller to be assembled between the pair of spindles, a wire receiving annular groove is engraved and / or formed in a portion of the outer peripheral surface of the gradually tapered convex fitting portion exposed at the time of fitting.
Alternatively, the wire dropped from the end of the roller outer peripheral surface of the wire saw groove roller by projecting a wire receiving convex portion,
An assembling structure of a groove roller for a wire saw which prevents the concave and convex fitting portions from getting into the fitting gap. 3. The assembling structure of a wire saw groove roller according to claim 2, wherein a plurality of said wire receiving annular grooves are formed on a tapered outer peripheral surface of said convex fitting portion.