JP4510658B2 - Polishing equipment - Google Patents

Description

  The present invention relates to a double-side polishing apparatus, and more particularly to a polishing apparatus including an outer pin gear and an inner pin gear for rotating a carrier that holds a workpiece.

A double-side polishing apparatus is used as an apparatus for simultaneously polishing both surfaces of a workpiece such as a wafer. In the double-side polishing apparatus, the carrier holding the work is rotationally driven between the lower surface plate and the upper surface plate that rotate independently of each other, whereby both surfaces of the work are simultaneously polished by the upper surface plate and the lower surface plate.
As a mechanism for rotationally driving the carrier 208, a configuration using an internal gear 204 as shown in FIG. 6 and a sun gear 206 disposed almost at the center is used.
The internal gear 204 and the sun gear 206 rotate independently of each other. The plate-like carrier 208 has external teeth formed along the outer peripheral edge thereof, and the external teeth mesh with the internal teeth of the internal gear 204 and the external teeth of the sun gear 206 while rotating. Revolve around the sun gear 206.
A plurality of carriers 208 having the above-described configuration are arranged between the internal gear 204 and the sun gear 206, and furthermore, one carrier 208 has a through hole 207 for holding a workpiece to be polished. A plurality of workpieces are provided so that a large number of workpieces can be polished at a time.

By the way, the polishing apparatus having the above configuration has a problem that the internal teeth of the internal gear and the external teeth of the sun gear are heavily worn. For example, Patent Document 1 discloses a polishing apparatus that solves this problem and extends the life. There is a description.
In the double-side polishing apparatus described in Patent Document 1, an inner pin gear is arranged as a sun gear and an outer pin gear is arranged as an internal gear. The external teeth of the inner pin gear are constituted by a plurality of tooth portions disposed along the outer periphery of the inner pin gear. Further, the inner teeth of the outer pin gear are also constituted by a plurality of tooth portions arranged along the inner periphery of the outer pin gear. Then, the outer teeth of the carrier engage with the teeth of the outer pin gear and the teeth of the inner pin gear, respectively, so that the carrier is rotationally driven.

FIG. 7 is a cross-sectional view illustrating the configuration of one tooth portion 306a in the inner pin gear.
A through hole 306c is provided in the inner pin ring 306b which is a main body of the inner pin gear, and a pin body 314 is inserted into the through hole 306c from below and fixed by a nut 315. A cylindrical collar 313 is loosely fitted on the outer side of the pin body 314 to the pin body 314 protruding upward. A cap 310 having a knob portion 311 having a large diameter on the upper portion is screwed into the upper portion of the pin body 314 and serves to prevent the collar 313 from coming off.
The tooth portion of the outer pin gear has the same configuration as the tooth portion of the inner pin gear.
Since the collar 313 rotates outside the pin body 314 while engaging the outer teeth of the carrier with the teeth of the outer pin gear and the teeth of the inner pin gear configured as described above, friction against the collar 313 is reduced, Can reduce wear. Thereby, durability of an outer side pin gear and an inner side pin gear improves.

Japanese Patent Laid-Open No. 9-239657

  However, even the tooth portion having the above-described configuration cannot avoid wear, and the wear powder generated by the wear may cause damage to the workpiece.

  Therefore, the present invention has been made to solve the above-described problems, and the object of the present invention is to prevent wear of the tooth part and to prolong the life, and to prevent the work from being damaged by wear powder. It is to provide a polishing apparatus.

In order to achieve the above object, the present invention comprises the following arrangement.
That is, in the polishing apparatus according to the present invention , the outer teeth of the carrier holding the workpiece are engaged with the inner teeth of the outer pin gear and the outer teeth of the inner pin gear, respectively, so that the carrier rotates and revolves. A polishing apparatus for polishing the workpiece with an upper surface plate and a lower surface plate, wherein a plurality of inner teeth of the outer pin gear and outer teeth of the inner pin gear are provided at a constant interval in the circumferential direction of the pin ring. obtained consists teeth, wherein at least one tooth of the tooth portion and the inner pin gear of the outer pin gear, and a pin body that is rotatably supported about an axis projecting upward the pin ring, the pin A cylindrical collar that is rotatably fitted to the body, and when the collar rotates, if the collar comes into contact with the pin body, the collar rotates with the pin body and suppresses friction between them. Features.
According to this, it is possible to effectively prevent the tooth portion from being worn and to prolong the life, and to prevent the workpiece from being damaged by the wear powder.

Moreover, the collar, to name a bottomed cylindrical shape opened downwardly, and being provided detachably with respect to the pin member by fitting portions provided between the pin body.

  According to the polishing apparatus of the present invention, it is possible to prevent the tooth part from being worn and to prolong its life, and to prevent the workpiece from being damaged by the wear powder.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.
(First embodiment)
The embodiment described next is a double-side polishing apparatus that simultaneously polishes both surfaces of a workpiece such as a wafer. In the double-side polishing machine, the lower surface plate and the upper surface plate rotate independently of each other, and the carrier holding the work is rotated between them, so that both surfaces of the work are simultaneously polished by the upper surface plate and the lower surface plate. can do.
As a mechanism for rotationally driving the carrier 13, a mechanism using an outer pin gear 11 as shown in FIG. 5 and an inner pin gear 12 disposed substantially at the center is used.
The outer pin gear 11 and the inner pin gear 12 rotate independently of each other. The plate-like carrier 13 has outer teeth 13 a formed on the outer periphery thereof, and the outer teeth 13 a rotate by engaging with the inner teeth 11 a of the outer pin gear 11 and the outer teeth 12 a of the inner pin gear 12. While revolving around the inner pin gear 12.
A plurality of carriers 13 are arranged between the outer pin gear 11 and the inner pin gear 12, and each carrier 13 has a plurality of through holes 13b for holding a workpiece to be polished. It is provided so that a large number of workpieces can be polished at a time.

Next, the inner pin gear 12 will be described.
As shown in FIG. 5, the inner pin gear 12 has a plate-shaped inner pin ring (pin ring) 12 b having a circular outer periphery, which is a gear body, and the outer teeth 12 a are constituted by a plurality of tooth portions 20. Has been. The tooth portion 20 includes a pin body 22 and a collar 24, and the plurality of tooth portions 20 are provided on the inner pin ring 12b at regular intervals in the circumferential direction.
On the outer peripheral side of the inner pin ring 12b, a plurality of through-holes 21 are provided at equal intervals along the outer periphery. The position of the attachment hole 21 is a position that is inside a predetermined distance from the outer peripheral edge of the inner pin ring 12b. The pin bodies 22 constituting the tooth portion 20 are inserted into the plurality of mounting holes 21 and supported in a state of protruding upward.

FIG. 1 is a cross-sectional view showing the configuration of the tooth portion 20 of the inner pin gear 12. The pin body 22 is supported by the inner pin ring 12b so as to be rotatable about its axis A, and the collar 24 is externally fitted to the pin body 22 so as to be rotatable.
The pin body 22 is formed of metal, ceramics, synthetic resin, or the like. Further, the pin body 22 has a flange portion 22b having a large diameter formed in the middle of the axis A direction, and the upper and lower sides of the flange portion 22b are small diameter portions 22a and 22c, respectively.
On the other hand, the attachment hole 21 has an attachment upper hole 21a, a bearing hole 21b, and an attachment lower hole 21c from the upper surface side of the inner pin ring 12b, and these are formed with the same center line.
The inner diameter of the attachment upper hole 21 a is set larger than the outer diameter of the flange portion 22 b of the pin body 22.
A bearing 27 is inserted and fixed in the bearing hole 21b. The bearing 27 may be a rolling bearing or a sliding bearing.
Moreover, the attachment lower hole 21c has an inner diameter larger than the outer diameter of a nut 26 described later.

The pin body 22 is supported by a bearing 27 fixed in the mounting hole 21 so as to be rotatable about its axis A. The mounting structure of the pin body 22 will be described in detail.
The pin body 22 is inserted into the bearing 27 from above the inner pin ring 12b. At this time, the flange portion 22 b of the pin body 22 is located in the mounting upper hole 21 a and abuts on the upper surface of the bearing 27. A nut 26 is screwed into the small diameter portion 22c below the flange portion 22b of the pin body 22. The upper side of the nut 26 enters the attachment lower hole 21c. Thus, the pin 27 is prevented from coming off from the inner pin ring 12b by sandwiching the bearing 27 in the vertical direction between the nut 26 and the flange portion 22b of the pin body. Further, the pin body 22 is supported by a small-diameter portion 22a on the upper side of the flange portion 22b protruding upward from the inner pin ring 12b.

  Further, a seal member 28 is disposed on the upper surface side of the inner pin ring 12b so as to close a gap between the inner pin ring 12b and the pin body 22, and a liquid such as an abrasive or the like in the mounting hole 21 is disposed. Prevents entry of slurry. The ring-shaped seal member 28 is disposed in the mounting upper hole 21a in a state of being fitted on the flange portion 22b. At this time, the upper surface of the seal member 28, the upper surface of the flange portion 22b, and the upper surface of the inner pin ring 12b are aligned. When the pin body 22 rotates about its axis A, it slides with respect to the seal member 28 fixed in the mounting upper hole 21a.

A cylindrical collar 24 is rotatably fitted on a portion of the pin body 22 that protrudes upward from the upper surface of the inner pin ring 12b. The collar 24 is made of synthetic resin, ceramics, metal, or the like.
The collar 24 is formed so that its outer diameter is substantially the same as the outer diameter of the flange portion 22 b of the pin body 22. When the collar 24 is attached by being externally fitted to the pin body 22, the lower end surface of the collar 24 comes into contact with the upper surface of the flange portion 22 b without contacting the seal member 28.
The fixing member 25 formed in a bolt shape is screwed into the upper side of the pin body 22 and has a function of preventing the collar 24 from coming off from the pin body 22 by a large-diameter portion 25a formed to project to the side. ing.

Next, the outer pin gear 11 will be described. As shown in FIGS. 1 and 5, the inner teeth 11 a of the outer pin gear 11 also include a plurality of tooth portions 30 having a pin body and a collar.
The outer pin gear 11 has a plate-like outer pin ring (pin ring) 11b in which the inner side which is a gear body is wound in a circle. On the inner peripheral side of the outer pin ring 11b, a plurality of through holes 31 are provided at equal intervals along the inner periphery. The position of the mounting hole 31 is a position outside a predetermined distance from the inner peripheral edge of the outer pin ring 11b. The plurality of attachment holes 31 are respectively provided with tooth portions 30, and the plurality of tooth portions 30 are provided on the outer pin ring 11b at regular intervals in the circumferential direction. And as the tooth part 30 of the outer side pin gear 11, the thing similar to the tooth part 20 of the inner side pin gear demonstrated using FIG. 1 is used.

In this embodiment, the following effects can be obtained.
When the external teeth 13a of the carrier 13 are engaged with the teeth 20 of the inner pin gear 12 and the teeth 30 of the outer pin gear 11, respectively, the respective collars 24 that directly contact the external teeth 13a are outside the pin body 22. Thus, the friction between the outer teeth 13a of the carrier 13 and the collars 24 can be reduced, and the wear of the collars 24 can be prevented.
Conventionally, as described with reference to FIG. 7, the pin body 314 is fixed to the pin ring 306b. Therefore, the collar 313 that rotates by engaging with the external teeth of the carrier 13 is also worn by friction with the pin body 314. On the other hand, in the above embodiment, the pin body 22 is rotatably supported by the pin rings 11b and 12b. Therefore, when the collar 24 rotates, the pin body 22 is brought into contact with the collar 24 and the pin body 22 due to contact. Turn around. Thereby, the mutual wear due to the friction between the collar 24 and the pin body 22 can be reduced.
As described above, according to the above embodiment, the wear of the tooth portions 20 and 30 is reduced, the life of the outer pin gear and the inner pin gear is increased, and the workpieces are damaged by the wear powder of the tooth portions 20 and 30. Can be prevented.
Further, since the collar 24 is detachable from the pin body 22, only the collar 24 that is more easily worn than the pin body 22 can be removed from the pin rings 11b and 12b and replaced.

(Second Embodiment)
In FIG. 4, the structure of the tooth parts 20 and 30 in 2nd Embodiment is shown.
In the present embodiment, the same configuration as in the first embodiment is adopted except that the tooth portion 20 of the inner pin gear 12 and the tooth portion 30 of the outer pin gear 11 of the first embodiment are changed as follows. Is done.
The collar 24 is formed in a bottomed cylindrical shape that opens downward. As for the pin body 22, the corner | angular part of the upper surface periphery is chamfered. The collar 24 is mounted so as to be rotatably fitted to the pin body 22 with the bottom portion 24a facing upward. At this time, the collar 24 is supported by the pin body 22 with its bottom 24 a abutting against the top of the pin body 22. That is, the collar 24 is attached to the pin body 22 with the inner surface of the bottom portion 24a abutting against the upper surface of the pin body 22 and a slight gap between the lower end surface 24b and the flange portion 22b or the pin rings 11b and 12b. The
Alternatively, the collar 24 may be configured to be supported by the pin body 22 or the pin rings 11b and 12b, with the lower end surface 24b abutting against the pin rings 11b and 12b or the flange portion 22b. That is, the collar 24 may have a configuration in which the lower end surface 24b abuts on the pin rings 11b and 12b or the flange portion 22b and there is a slight gap between the inner surface of the bottom portion 24a and the upper surface of the pin body 22.

  The collar 24 is prevented from being detached from the pin body 22 by a fitting portion 35 provided between the collar 24 and the pin body 22. The fitting part 35 consists of a fitting convex part and a fitting concave part. The collar 24 may be provided with a fitting convex portion, the pin body 22 may be provided with a fitting concave portion, the collar 24 may be provided with a fitting concave portion, and the pin body 22 may be provided with a fitting convex portion. In any case, the fitting convex portion may be fitted in a state where there is play in the fitting concave portion. The fitting portion 35 prevents the collar 24 from significantly rising from the pin body 22 without preventing the collar 24 from rotating when engaged with the external teeth 13 a of the carrier 13. Further, a fitting portion 35 is provided so that the collar 24 can be attached to and detached from the pin body 22.

The fitting part 35 of the tooth parts 20 and 30 shown in FIG. 4 includes a fitting convex part 32 provided on the pin body 22 and a fitting concave part 33 provided on the collar 24.
The fitting convex portion 32 provided on the pin body 22 is formed so as to protrude from the outer peripheral surface of the pin body 22. The fitting convex portion 32 may be formed over one circumference of the outer periphery of the pin body 22. For example, the fitting convex portion 32 is formed to project from the outer peripheral surface of the pin body 22 in a ring shape. Alternatively, the fitting convex portion 32 may be formed so as to partially protrude at several positions at intervals in the circumference of the outer periphery of the pin body 22.
Further, when the fitting convex portion 32 is provided at the lower side of the portion protruding from the pin rings 11b and 12b of the pin body 22, the collar can be easily attached.

On the other hand, a fitting recess 33 is formed on the inner peripheral surface of the collar 24 at a position opposite to the fitting protrusion 32 of the pin body 22. The fitting recess 33 is formed in a state where the inner peripheral surface of the collar 24 is cut out by one turn in a ring shape.
When the collar 24 is attached to the pin body 22, the collar 24 is put on the pin body 22 and pushed down, and the fitting convex portion 32 of the pin body 22 is inserted into and fitted into the fitting concave portion 33 of the collar 24.
As a result, the collar 24 is externally fitted to the pin body 22 so as to be rotatable while being prevented from being detached by the fitting portion 35.
Then, with the pin body 22 in a state of being prevented from being detached from the pin rings 11b and 12b, the fitting concave portion 33 and the fitting convex portion 32 are disengaged by lifting the collar 24 upward, so that the collar 24 can be removed from the pin body 22.

The pin body 22 having such a configuration may be formed of metal, synthetic resin, or the like. The collar 24 is preferably formed of metal, synthetic resin, ceramics, or the like. When the collar 24 is formed of an elastic material, the collar 24 can be easily attached to and detached from the pin body 22. In particular, the collar 24 may be formed of an elastic synthetic resin.
Alternatively, the pin body 22 is made of metal, and the collar 24 is made of ceramic. And the fitting convex part 32 provided in the pin body 22 protrudes in the ring shape from the outer peripheral surface of the pin body 22 with the synthetic resin or synthetic rubber which has elasticity. If the pin body 22 and the collar 24 are formed of a material having no elasticity such as metal or ceramics, it may be difficult to fit the fitting portion 35. Therefore, by forming either the collar 24 having the fitting recess 33 or the fitting projection 32 of the pin body 22 with an elastic material, for example, a synthetic resin having elasticity, The fitting convex portion 32 can be easily fitted and removed, and the collar 23 can be easily attached to and detached from the pin body 22.

According to the present embodiment, the following effects can be obtained as well as the effects of the first embodiment.
In this embodiment, a cap for preventing the collar 24 from being removed becomes unnecessary, the number of parts can be reduced, the apparatus can be simplified, and the collar 24 can be easily replaced.
Further, in the conventional tooth portion 306a (see FIG. 7), a liquid or slurry such as a polishing liquid enters between the collar 313 and the pin body 314 via the gap B between the collar 313 and the cap 310 to be solidified. In some cases, the rotation of the collar 313 is prevented. However, since this structure is a structure in which the pin body 22 is covered with the bottomed cylindrical collar 24, it is possible to prevent liquid and slurry from entering the gap between the collar 24 and the pin body 22.
Further, when the lower end surface 24b of the collar 24 is in contact with the flange portion 22b or the pin rings 11b and 12b, the gap between the collar 24 and the pin body 22 does not open outward, so that the gap is more sure. Intrusion of liquid or slurry into the tank can be prevented.

(Third embodiment)
2 and 3 show the configuration of the tooth portions 20 and 30 in the third embodiment.
In the present embodiment, the same configuration as in the second embodiment is adopted except that the tooth portion 20 of the inner pin gear 12 and the tooth portion 30 of the outer pin gear 11 of the second embodiment are changed as follows. Is done.
The tooth portions 20 and 30 have a configuration in which the pin body 22 and the collar 24 of the second embodiment are integrated. In other words, the pin shafts 34 that are supported by the pin rings 11b and 12b so as to be rotatable about the axis are the tooth portions 20 and 30, respectively. The pin shaft 34 protrudes upward and is supported by the pin rings 11b and 12b. The plurality of pin shafts 34 are provided on the pin rings 11b and 12b at regular intervals in the circumferential direction. Such a pin shaft 34 is preferably formed of metal, synthetic resin, ceramics, or the like.

  The attachment structure of the pin shaft 34 to the pin rings 11b and 12b, such as the arrangement of the seal member 28, is the same as the attachment structure of the pin body 22 of the first embodiment. Specifically, the pin shaft 34 is roughly divided into two parts, a large diameter part 34a and a small diameter part 34b. On the other hand, the attachment holes 21 and 31 have the same configuration as that of the embodiment described with reference to FIG. The pin shaft 34 is supported by the pin rings 11b and 12b with the small diameter portion 34b inserted into the mounting holes 21 and 31 and the large diameter portion 34a protruding upward from the pin rings 11b and 12b. At this time, the step surface 34 c between the large diameter portion 34 a and the small diameter portion 34 b is in contact with the upper surface of the bearing 27. In this way, the pin 27 is prevented from coming off from the gear bodies 11b and 12b by sandwiching the bearing 27 from above and below by the nut 26 and the stepped surface 34c screwed on the lower side of the small diameter portion 34b. In addition, a seal member 28 is disposed on the upper surface side of the pin rings 11b and 12b so as to close a gap between the pin rings 11b and 12b and the pin shaft 34.

Thus, the pin shaft 34 is pivotally supported by the bearing 27 fixed to the pin rings 11b and 12b so as to be rotatable about its axis. The bearing 27 that rotatably supports the pin shaft 34 may be a sliding bearing (see FIG. 2) or a rolling bearing (see FIG. 3).
In the present embodiment, when the external teeth 13a of the carrier 13 engage with the tooth portions 20 of the inner pin gear 12 and the tooth portions 30 of the outer pin gear 11, the respective pin shafts 34 directly contact the outer teeth 13a. Then rotate. As a result, the wear of the tooth portions 20 and 30 due to the friction between the tooth portions 20 and 30 and the external teeth 13a of the carrier 13 can be reduced, and the life can be extended. It is possible to prevent scratches on the workpiece.
In addition, the apparatus can be simplified by reducing the number of parts.

While the present invention has been described in detail with reference to a preferred embodiment, the present invention is not limited to this embodiment, and it goes without saying that many modifications can be made without departing from the spirit of the invention. is there.
For example, the polishing apparatus in which the lower surface plate and the upper surface plate rotate independently has been described, but a polishing apparatus having an upper surface plate that is stationary without rotating and a lower surface plate that rotates may be used. .
Further, the polishing apparatus may be configured such that the upper surface plate, the lower surface plate, the outer pin gear and the inner pin gear are rotationally driven by a drive source such as a motor provided separately, or one drive source The rotational force may be transmitted to each via a gear and a clutch to rotate.
Moreover, the grinding | polishing apparatus comprised by the tooth | gear part which consists of the internal tooth of an outer side pin gear and the outer tooth of an inner side pin gear with the said structure of this invention may be sufficient.

It is sectional drawing which shows the structure of a tooth | gear part. It is sectional drawing which shows the other structure of a tooth | gear part. It is sectional drawing which shows the other structure of a tooth | gear part. It is sectional drawing which shows the other structure of a tooth | gear part. It is a top view which shows the structure of an inner side pin gear, a carrier, and an outer side pin gear. It is a top view which shows the structure of the conventional sun gear, a carrier, and an internal gear. It is sectional drawing explaining the structure of the conventional tooth part.

Explanation of symbols

11 outer pin gear 11b outer pin ring 12 inner pin gear
12b Inner pin ring 13 Carrier 20 Tooth part 21 Mounting hole 22 Pin body 24 Collar 27 Bearing 30 Tooth part 34 Pin shaft

Claims (3)

The outer teeth of the carrier holding the workpiece engage with the inner teeth of the outer pin gear and the outer teeth of the inner pin gear, respectively, so that the carrier rotates and revolves, and the workpiece is moved between the upper surface plate and the lower surface plate. A polishing apparatus for polishing,
The inner teeth of the outer pin gear and the outer teeth of the inner pin gear are composed of a plurality of tooth portions provided at a certain interval in the circumferential direction on the pin ring,
At least one of the teeth of the outer pin gear and the teeth of the inner pin gear is
A pin body which is rotatably supported about an axis projecting upward the pin ring,
A cylindrical collar that is rotatably fitted to the pin body;
A polishing apparatus characterized in that, when the collar rotates, when the collar comes into contact with the pin body, the collar rotates with the pin body and suppresses friction between them . The collar, to name a bottomed cylindrical shape opened downwards, according to claim 1, characterized in that detachably attached to the pin member by fitting portions provided between the pin member Polishing equipment. The polishing apparatus according to claim 2, wherein the fitting portion includes a fitting concave portion provided in the collar and a fitting convex portion provided in the pin body.

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