JP2002224942A - Guide roller for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a guide roller for a wire saw which eliminates breakage of a wire generated by a slippage of rotating body part of a roller body. SOLUTION: Each guide roller 10 for the wire saw rotates as a wire W is put in and pulled out of groove rollers 12A to 12C for the wire saw. The wire W runs at a high speed, while strongly pressed to a part forming wire grooves 38a of each roller body 38. Hence, the slippage of the rotating body part which slides on a outer peripheral surface of a bearing case 34 may be generated in the roller body 38 made of polyurethane. But, since a spline structure 40 exists between the roller body 38 and the bearing case 34, the slippage of the roller body 38 is blocked. As a result, in the past, a change on a tensile force and the like of the wire W has occurred, which resulted in the cutoff of the wire W, but now the trouble is eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a guide roller for a wire saw, and more particularly to a guide roller for a wire saw for preventing the roller body from sliding against a rotating body during cutting of an ingot.

[0002]

2. Description of the Related Art In a wire saw, an ingot cutting wire derived from a wire feeding reel of a feeding device is wound around a plurality of wire saw groove rollers (hereinafter simply referred to as groove rollers) in a coil shape. The device is configured to wind up a wire winding reel of a winding device via a number of wire saw guide rollers. A large number of wire saw guide rollers (hereinafter simply referred to as guide rollers) are provided on the wire running path from the feeding device to the groove roller and on the wire running path from the groove roller to the winding device, respectively. When cutting a single-crystal silicon ingot with a wire saw, the ingot is moved relative to the wire row while reciprocating while supplying a slurry-like abrasive liquid containing free abrasive grains (hereinafter sometimes referred to as abrasive grains) to wrapping oil. Forcefully. Thereby, the ingot is cut into many wafers by the grinding action of the abrasive grains.

Next, a conventional guide roller will be described with reference to FIGS. FIG. 5 is a longitudinal sectional view of a guide roller for a wire saw according to a conventional means. FIG. 6 is a front view of a roller body incorporated in a conventional wire saw guide roller. The conventional guide roller 100 shown in FIG. 5 and FIG.
Has a fixed shaft 102 fixed thereto. This fixed shaft 1
A bearing case 104 is rotatably supported at the tip of 02 via a pair of bearings 103, 103. The bearing case 104 has a cylindrical shape, and a flange 104a is protruded from a base portion thereof. On the other hand, a bearing cap 1
05 is attached. This bearing cap 105
Prevents the abrasive fluid from entering the bearing case 104. A holding ring 106 is bolted to the end surface of the bearing case 104. An external cap 107 is fitted in a space at the center of the holding ring 106.

The roller body 108 of the guide roller 100
Are fitted around the outer periphery of the bearing case 104. This roller body 108 is a thick annular member made of polyurethane, and has two wire grooves 108a, 1
08a is formed. Thus, the wire groove 108
a and 108a are formed in two lines, so that one wire groove 1 is formed.
08a is worn, if the roller body 108 is turned over and externally fitted to the bearing case 104, the other wire groove 10
8a can be used. The inner peripheral portion of the roller body 108 is firmly held between the flange 104a and the holding ring 106. The above components 102
To 107 constitute a rotating body 109 of the roller body 108. In addition, in FIG.
2, a reference numeral 110 denotes a support cylinder externally inserted at the base of the fixed shaft 102, and a reference numeral 111 denotes the bearing case 10.
4 is a ring plate for closing the opening on the flange 104a side.

[0005]

However, in the conventional guide roller for a wire saw, the inner peripheral portion of the roller body 108 is sandwiched by the flange 104a and the holding ring 106 as described above.
8 was fixed to the rotating body 109. The roller body 1
08 is a bearing case 1 made of stainless steel (metal).
It is made of polyurethane (synthetic resin), which is a different material from that of 04.
Therefore, the roller body 108 and the bearing case 10
In the case of No. 4, it was difficult to fix firmly not only by welding but also by bonding using a special adhesive. Based on this fact, conventionally, as described above, the roller body 108 is
Was firmly sandwiched. Naturally, the fixing force of the roller body 108 to the bearing case 104 was insufficient. As a result, at the time of cutting the ingot, the roller body 108 easily slipped on the outer peripheral surface of the bearing case 104. Therefore, the tension of the wire W fluctuates during the cutting of the ingot due to the slip, and the wire W is broken.

Therefore, as a result of a long-term study, the inventor of the present invention has found that if a non-slip structure of the roller body such as a spline structure or a serration structure is provided between the roller body and the rotating body, the roller body during ingot cutting can be provided. It has been found that slippage around the rotating body can be prevented, and the present invention has been completed.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to provide a guide roller for a wire saw capable of eliminating cutting of a wire due to slippage of a roller body around a rotating body.

[0008]

According to the first aspect of the present invention, there is provided a wire saw guide roller for guiding a wire into and out of a plurality of wire saw groove rollers for reciprocating an ingot cutting wire row. hand,
A roller body having an annular wire groove formed on an outer peripheral surface thereof; and a rotating body serving as a rotation center of the roller body, wherein the roller body slides around the rotating body between the roller body and the rotating body. This is a wire saw guide roller provided with a non-slip structure for preventing the occurrence of slip.

The type of wire saw to which the present invention is applied is not limited. For example, the ingot may be moved to press and contact the wire row to cut it, or conversely, the wire row may be moved to press and contact the ingot to cut it. Further, the lower surface of the ingot may be in contact with the upper portion of the wire array, and the upper surface of the ingot may be pressed against the lower portion of the wire array. Examples of the ingot cut by the wire saw include a silicon single crystal, a compound semiconductor single crystal, a magnetic material, quartz, and ceramics.

The number of groove rollers for the wire saw to be assembled and arranged on the wire saw may be plural. For example, the number may be two or three or more. The structure of the groove roller for a wire saw is not limited. Usually, the outer peripheral surface of a cylindrical base metal is coated with a lining material (urethane rubber) having a predetermined thickness, and a wire groove is formed on the outer peripheral surface of the lining material. The number of guide rollers for the wire saw is not limited. One or two or more may be used. The structure of the guide roller for the wire saw is not limited. In short, what is necessary is just to have the roller main body in which the wire groove was formed in the outer peripheral surface, and its rotating body.

The number of wire grooves formed in the roller body is not limited. One article or a plurality of articles may be used. The material of the roller body is not limited. Usually, polyurethane. The structure of the rotating body is not limited. For example, it may have a fixed shaft attached to the body frame of the wire saw, a bearing extrapolated to the fixed shaft, and a bearing case for housing the bearing. In this case, the roller body
It is externally fitted integrally with the bearing case. Alternatively, a rotating shaft rotatably attached to the body frame of the wire saw may be used. In this case, the roller body is directly fixed to the rotating shaft without the intervention of the bearing case. The type of the non-slip structure is not limited. For example, the spline structure or the serration structure according to claim 2 can be adopted. In addition, a key structure including a key and a key groove can be adopted.

The invention according to claim 2 is the guide roller for a wire saw according to claim 1, wherein the non-slip structure is a spline structure or a serration structure.

[0013]

According to the present invention, at the time of cutting the ingot, the wire is introduced into or taken out of the groove roller for the wire saw,
The wire saw guide roller rotates. At this time, the wire is strongly pressed against the portion of the roller body where the wire groove is formed and runs at high speed, so that the roller body easily slips around the rotating body with the outer circumferential surface of the rotating body as a sliding surface.
However, a non-slip structure is provided between the roller body and the rotating body. Therefore, even if the roller body is made of a material (for example, synthetic resin) different from the material (for example, metal) of the rotating body, the roller body is prevented from slipping. As a result, in the related art, during the cutting of the ingot, the tension of the wire fluctuates due to the slippage, and the wire is broken. However, the present invention can solve the problem.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of a guide roller for a wire saw according to one embodiment of the present invention. FIG.
1 is an overall perspective view of a wire saw incorporating a wire saw guide roller according to an embodiment of the present invention. FIG.
1 is a front view of a roller main body incorporated in a wire saw guide roller according to an embodiment of the present invention. FIG. 4 is a front view of a roller main body incorporated in a wire saw guide roller according to another embodiment of the present invention. In FIG. 2, reference numeral 10 denotes a guide roller for a wire saw according to an embodiment of the present invention.
Is incorporated in a wire saw 11 for cutting a single crystal silicon ingot I pulled up by the CZ method into a large number of wafers.

The wire saw 11 has three groove rollers 12A, 12B and 12C arranged in an inverted triangle shape when viewed from the front. These groove rollers 12A, 12B, 12C
In between, one wire W is wound around at a constant pitch in parallel with each other. Thereby, the groove rollers 12A,
A wire row Wa appears between 12B and 12C. The wire row Wa reciprocates between the three groove rollers 12A, 12B, and 12C. Two groove rollers 12 arranged on the upper side
The middle between A and 12B is the ingot cutting position a of the wire row Wa for cutting the ingot I. Above both sides of the ingot cutting position a, a pair of abrasive liquid supply nozzles N for continuously supplying the abrasive liquid onto the wire row Wa are provided. These three groove rollers 12A, 12
The outer peripheral surfaces of B and 12C are covered with a lining material of a predetermined thickness made of urethane rubber. Numerous wire grooves are engraved on the outer peripheral surface of each lining material.

The wire W is connected to the reel 20 of the feeding device 13.
After being wound around these groove rollers 12A, 12B, and 12C via a number of guide rollers 10 (including dancer rollers 10A) on the introduction side, a number of guide rollers 10 (dance roller 10B Is wound up on the reel 21 of the winding device 15. The rotating shafts of the feeding device 13 and the winding device 15 are connected to output shafts of drive motors 16 and 17, respectively. When each of the drive motors 16 and 17 is periodically driven, each of the reels 20 and 21 rotates in the forward or reverse direction about its axis, and the wire W reciprocates. In FIG. 2, reference numeral 18 denotes a lift for raising and lowering the ingot I, and 18 a denotes a carbon bed for fixing the ingot I to the lift 18. Reference numeral 19 denotes an elevating motor for elevating the elevating table 18, and reference numeral 42 denotes a rotating motor for rotating the groove roller 12C. Reference numeral 43 denotes a scrap box for collecting scraps of the ingot I.

Next, the guide roller 10 will be described in detail with reference to FIGS. The guide roller 10 shown in FIGS. 1 and 3 has a fixed shaft 32 fixed to a main body frame 31 of the wire saw 11. A stainless steel bearing case 34 is attached to the front end of the fixed shaft 32 via a pair of bearings 33, 33.
It is supported rotatably about 2. The bearing case 34 has a cylindrical shape, and a flange 34a protrudes from its base. On the other hand, a bearing cap 35 is fitted into the tip of the bearing case 34. The bearing cap 35 is a member that prevents the abrasive fluid from entering the bearing case 34. Also, bearing case 3
A holding ring 36 is bolted to the front end surface of the pin 4. An external cap 37 is fitted in the internal space of the holding ring 36.

The roller body 38 of the guide roller 10 is fitted around the outer periphery of the bearing case 34. The roller body 38 is a thick ring member made of polyurethane, and has two wire grooves 38a, 38a formed on the outer peripheral surface.
Therefore, even if one of the wire grooves 38a is worn, the other wire groove 38a can be used by reversing the front and back surfaces of the roller body 38 and mounting the roller body 38 on the bearing case 34. The inner peripheral portion of the roller body 38 is firmly held between the flange 34 a and the holding ring 36. A rotating body 39 of the roller body 38 is configured by the above components 32 to 37. In FIG. 1, reference numeral 32a denotes an oil supply passage formed inside the fixed shaft 32;
a is a support cylinder inserted outside the base of the fixed shaft 32; 39b is a ring plate for closing the opening of the bearing case 34 on the flange 34a side.

The feature of the present invention is that the bearing case 34
A spline structure (anti-slip structure) 40 is provided between the roller body 38 and the roller body 38. That is, four splines 41 are formed on the outer peripheral surface of the bearing case 34 at intervals of 90 degrees in the circumferential direction. On the other hand, on the inner peripheral surface of the roller body 38, four boss grooves 42 having a rectangular cross section, which are removably fitted to the splines 41, are formed. The boss grooves 42 are formed at 90-degree intervals in the circumferential direction of the bearing case 34 corresponding to the splines 41. By the way, as the non-slip structure, a type other than the spline structure 40 may be adopted. For example, a serration structure 50 as shown in FIG. More specifically, a large number of serrations 51 are formed on the outer peripheral surface of the bearing case 34 in the circumferential direction, while the inner peripheral surface of the roller body 38 has a triangular cross section in the circumferential direction. The multiple boss grooves 52 are formed. The operation and effect of the serration structure 50 are substantially the same as those of the spline structure 40.

Next, a method of cutting the ingot I by the wire saw 11 will be described. As shown in FIG. 2, in the wire saw 11, the abrasive liquid is supplied to the wire row Wa from the abrasive liquid nozzle N, and the feed motor 1
3 by rotating the reel 20, the wire W passes through a number of guide rollers 10 on the introduction side, and the groove rollers 12A, 12B,.
Supply 12C. On the other hand, the reel 21 of the winding device 15 is rotated by the drive motor 17, and the groove rollers 12A,
The wire W is wound around 12B, 12C and a number of guide rollers 10 on the outlet side. And, as appropriate, each reel 2
The wire W is caused to reciprocate by changing the rotation directions of 0 and 21. Accordingly, the other two groove rollers 12A, 1
2B rotates, and each guide roller 10
Also rotate. At this time, the groove roller 12C is rotated by the rotation motor 42 to assist the reciprocation of the wire array Wa.

During the reciprocation of the wire row Wa, the ingot I is pressed against the wire row Wa from above. Thus, the ingot I is cut into a number of wafers. That is, during the reciprocation of the wire row Wa, the loose abrasive grains in the abrasive liquid are rubbed against the bottom of each cutting groove by each wire W of the wire row Wa, so that the bottom is gradually scraped off, and finally a large number of Cut into thin wafers. At this time, the scraps of the ingot I remaining after the cutting are collected in the scrap box 43.

At the time of cutting the ingot, each guide roller 10 rotates as the wire W reciprocates. At this time, the dancer rollers 10A and 10B apply a constant tension to the traveling wire W. At this time, as shown in FIG. 1, the roller body 38 is fitted around the outer periphery of the bearing case 34,
Moreover, the inner peripheral portion is held between the flange 34a and the holding ring 36. However, the roller body 38
It is made of polyurethane which is hard to be joined to the stainless steel bearing case 34. Moreover, the wire W is strongly pressed against the portion of each roller body 38 where the wire groove 38a is formed, and runs at high speed. From the above, during the cutting of the ingot, the roller main body 38 rotates in a state where slipping around the rotating body easily occurs on the outer peripheral surface of the bearing case 34. However, in this embodiment, even if the roller body 38 tries to slide around the rotating body, the spline structure 4 is provided between the bearing case 34 and the roller body 38.
Since there is a zero, the formation of each fitted boss groove 42 and each spline 41 surely prevent the sliding. As a result, the disconnection of the wire W caused by the fluctuation of the tension of the wire W caused by the slip when cutting the ingot is conventionally solved.

[0023]

According to the present invention, since the non-slip structure is provided between the roller body and the rotating body, the roller body does not slip around the rotating body. It is possible to eliminate the disconnection of the wire during the cutting of the ingot.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a guide roller for a wire saw according to an embodiment of the present invention.

FIG. 2 is an overall perspective view of a wire saw incorporating a wire saw guide roller according to an embodiment of the present invention.

FIG. 3 is a front view of a roller main body incorporated in the guide roller for a wire saw according to one embodiment of the present invention.

FIG. 4 is a front view of a roller body incorporated in a wire saw guide roller according to another embodiment of the present invention.

FIG. 5 is a longitudinal sectional view of a conventional wire saw guide roller.

FIG. 6 is a front view of a roller main body incorporated in a conventional wire saw guide roller.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Wire saw guide roller, 11 wire saw, 12A, 12B, 12C Wire saw groove roller, 38 roller body, 38a wire groove, 39 rotating body, 40 spline structure (non-slip structure), 50 serration structure (non-slip structure), I Ingot, W wire, Wa wire row.

Claims (2)

[Claims] 1. A wire saw guide roller for guiding the introduction and extraction of a wire to and from a plurality of wire saw groove rollers for reciprocating an ingot wire row, wherein an annular wire groove is formed on an outer peripheral surface. A wire saw guide, comprising: a roller body; and a rotating body serving as a rotation center of the roller body, wherein a non-slip structure is provided between the roller body and the rotating body to prevent slippage of the roller body around the rotating body. roller. 2. The guide roller for a wire saw according to claim 1, wherein the non-slip structure is a spline structure or a serration structure.