JP3179373B2 - Rollers for processing wire saws - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw processing roller for cutting a workpiece made of a hard and brittle material such as a semiconductor material, a magnetic material, and a ceramic using a wire. It is.

[0002]

2. Description of the Related Art Generally, in a wire saw, a plurality of processing rollers are arranged at predetermined intervals, and a plurality of annular grooves are formed at an outer periphery of the rollers at a predetermined pitch. In addition, one wire is sequentially wound around the annular groove between the processing rollers. Then, while the wire is running, a slurry containing loose abrasive grains is supplied on the wire, and in this state, the work is pressed against and brought into contact with the wire, and the work is cut or the like. .

[0003] With the continuation of work processing, the annular groove on the processing roller gradually wears, and the accuracy of the annular groove decreases, and the processing accuracy for the work gradually decreases.
For this reason, in the conventional wire saw, each processing roller is composed of an inner roller made of a metal material and an outer roller made of a synthetic resin material such as urethane formed by molding the outer periphery of the inner roller,
An annular groove was formed on the outer peripheral surface of the outer roller using a tool. If the accuracy of the annular groove on the outer roller is reduced, the processing roller itself is removed from the cutting portion of the wire saw, the outer peripheral surface of the outer roller is ground again, and a new annular groove is formed on the outer peripheral surface. Had formed.

[0004]

However, in this conventional processing roller, when the outer roller is tightly fitted to the outer periphery of the inner roller and the annular groove is formed again on the outer peripheral surface of the outer roller. In this method, the entire processing roller is attached to and detached from the cutting portion of the wire saw. For this reason, when re-forming the annular groove, it is necessary to attach and detach both ends of the processing roller to and from the bearing mechanism. Not only this, but the inner roller is made of heavy metal, so that there is a problem that the above-mentioned work requires labor.

[0005] The present invention has been made by paying attention to such problems existing in the prior art. It is an object of the present invention to provide a wire saw processing roller in which only the outer roller can be divided and removed from the inner roller, and the work of reshaping the annular groove can be performed easily and in a short time.

[0006]

In order to achieve the above object, according to the first aspect of the present invention, the outer roller is formed by dividing the outer roller into a plurality of parts with a surface extending in the axial direction or substantially the axial direction as a boundary. the division of the outer roller at both
At the ends, they are assembled and fixed to each other with bolts, and detachably attached to the outer periphery of the inner roller.

[0007] In the invention described in 請 Motomeko 2, and have contact <br/> to claim 1, the outer peripheral surface of the split body of the outer roller are those formed of synthetic resin. The invention according to claim 3
Then, in any one of claims 1 and 2,
Roller outer surface and inner surface of the outer roller split body are flat
It is.

[0008] In the invention described in claim 4, claims 1 to 3 are provided.
In any of the formed inner roller in a quadrangular prism, the inner surface of the divided body of the outer roller, Ru shape der to fit the outer circumferential surface of the inner roller.

According to the first aspect of the present invention, when the accuracy of the annular groove on the processing roller is reduced, the fixed assembly of each of the outer roller divided members is released, and the divided members are removed. Remove from the outer circumference of the inner roller. Then, while the divided body of the outer roller is assembled and fixed to the outer periphery of a separately prepared jig, the outer peripheral surface of the outer roller is polished and an annular groove is formed again on the outer peripheral surface. Thereafter, the split body of the outer roller is removed from the outer periphery of the jig, and is fixed to the outer periphery of the inner roller on the wire saw.

[0010] Then, the divided body of the outer roller is fixed assembled to each other by bolts at both ends. Therefore, the divided body of the outer roller can be easily separated or assembled by loosening or tightening the bolt.

[0011] In the invention of claim 2, since the outer circumferential surface of the split body of the outer roller is a synthetic resin, thereby reducing the material cost. According to the third and fourth aspects of the present invention, since the outer peripheral surface of the inner roller and the inner surface of the divided body of the outer roller are formed in a flat shape, the outer peripheral surface of the inner roller and the inner surface of the divided body of the outer roller are formed. Are contact-coupled in a detented state. For this reason,
Processing of both contact surfaces does not require high dimensional accuracy, and processing of both contact surfaces can be facilitated. Further, since the coupling force is high even without firm tightening and the transmission efficiency of the surface pressure between the contact surfaces is high, the wear of both contact surfaces due to long-term use can be reduced, and the life of components can be increased.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) An embodiment of a processing roller for a wire saw according to the present invention will be described below with reference to the drawings.

As shown in FIG. 2 and FIG.
Are mounted on the device frame 12. The cutting mechanism 11 includes a processing drive roller 13 and a processing driven roller 14 extending in parallel, and has an annular groove 13a,
14a are formed at a predetermined pitch. In the drawings, to facilitate understanding, the annular grooves 13a, 14a
Are drawn less than they actually are.

A wire 15 made of one wire is continuously wound around each of the annular grooves 13a and 14a of the processing rollers 13 and 14. The wire running motor 16 is disposed on the apparatus frame 12, and the processing drive roller 13 is directly rotated by the motor 16 and the driven roller 14 is rotated via the wire 15. The rotation of the processing rollers 13 and 14 causes the wire 15 to travel in one direction or both directions at a predetermined traveling speed.

A work supporting mechanism 19 is supported by the frame 12 above the cutting mechanism 11 so as to be vertically movable.
A work 20 made of a hard and brittle material is detachably set at a lower portion thereof. The work lifting motor 21 is mounted on the frame 12
The work support mechanism 19 is mounted on a column 50 disposed above, and the motor 21 vertically moves the work support mechanism 19 via a ball screw (not shown).

During operation of the wire saw, the work supporting mechanism 19 is lowered toward the cutting mechanism 11 while the wire 15 is running between the processing rollers 13 and 14 of the cutting mechanism 11. At this time, a slurry containing loose abrasive grains is supplied onto the wire 15 and the wire 15
The workpiece 20 is pressed against and contacts the workpiece 20, and the workpiece 20 is sliced by the lapping action.

The reel mechanism 22 for supplying the wire 15 is mounted on the frame 12 and includes a reel 23 for reeling out the wire 15 and a winding reel 24 for winding up the wire 15. I have. The respective reel rotation motors 25 and 26 are disposed on the frame 12, and reels 23 and 24 are connected to their motor shafts. A traverse mechanism 27 for guiding the wire 15 is mounted on the frame 12 adjacent to the reel mechanism 22, and traverses up and down the feeding of the wire 15 from the feeding reel 23 and the winding of the wire 15 to the take-up reel 24. While guiding.

The two reels 2 of the reel mechanism 22
By the rotation of the reels 3 and 24, the wire 15 is fed from the feed reel 23 to the cutting mechanism 11, and the processed wire 15 is wound on the take-up reel 24. Note that the functions of the pay-out reel and the take-up reel are alternated by changing the traveling direction of the wire 15.

The tension applying mechanism 28 and the guide mechanism 29
It is arranged between the reel mechanism 22 and the cutting mechanism 11. Then, the processing rollers 13 and 14 of the cutting mechanism 11
Both ends of the wire 15 wound between them are mounted on the tension applying mechanism 28 via the respective guide rollers 30 of the guide mechanism 29. In this state, a predetermined tension is applied to the wire 15 between the processing rollers 13 and 14 by the tension applying mechanism 28.

The tension reducing mechanism 31 is disposed between the reel mechanism 22 and the tension applying mechanism 28, and includes a pair of rotating rollers 32. The wire 15 is wound around these rotating rollers 32, and by rotating both rotating rollers 32, the tension applying mechanism 28 is moved from the reel mechanism 22 to the reel mechanism 22.
The tension of the wire 15 spreading to the reels 23 and 24 is reduced.

Next, the configuration of the processing rollers 13 and 14 will be described in detail. As shown in FIGS. 1 and 4,
The processing rollers 13 and 14 include an inner roller 35 made of an iron-based metal material, a metal hollow hollow tube mounted on the inner roller 35, and an outer roller 36 made of urethane resin on the outer peripheral surface. It is composed of
The annular grooves 13a and 14a are formed at a predetermined pitch on the outer peripheral surface of the urethane resin of the outer roller 36.

The inner roller 35 has a central large diameter portion 35a, a medium diameter portion 35b, and small diameter portions 35c protruding from both ends thereof. The position regulating surfaces 37 are formed on both end surfaces of the large diameter portion 35a in order to regulate the mounting position of the outer roller 36 with respect to the inner roller 35 in the axial direction.

The outer roller 36 is arranged in its axial direction or
Is divided into two divided bodies 36 by a surface extending substantially in the axial direction.
A and 36B, and are detachably attached to the outer periphery of the inner roller 35. Each of the divided bodies 36A and 36B is made of a metal half-pipe hollow circular pipe 3.
6a, and a small-diameter end portion 36b following the small-diameter end portion 36a, so as to engage with the large-diameter portion 35a and the middle-diameter portion 35b of the inner roller 35.

The hollow circular tube 36a of each divided body 36A, 36B
Contact surfaces 38 are formed on inner surfaces of both ends of the inner roller 35 so as to engage with the position regulating surfaces 37 of the inner roller 35. The pair of mounting seats 39 at each end are divided into 36A and 36B.
Extending on both sides of each small-diameter end portion 36b,
When A and 36B are mounted on the outer periphery of the inner roller 35, the mounting seats 39 of the two divided bodies 36A and 36B are joined to each other by bolts 43.

The insertion hole 42 is formed in the mounting seat 39 of each of the divided bodies 36A and 36B. And the divided body 36
When A and 36B are attached to the outer periphery of the inner roller 35, the insertion holes 42 of the divided bodies 36A and 36B are aligned with each other. The pair of bolts 43 is inserted into the insertion holes 42 of the two divided bodies 36A and 36B, and a nut 44 is screwed into the tip of the two bolts 43 to thereby form the two divided bodies 36A and 36B.
A and 36B are tightened and fixed to the mounting position on the inner roller 35.

A detent bolt 60 is screwed into the small-diameter end 36b of one of the divided bodies 36A, and a flat end 60a of the bolt 60 is balanced with a flat portion 35d formed on the middle-diameter portion 35b of the inner roller 35. Combine. Lock nut 60b
, The outer roller 36 and the inner roller 35 are prevented from rotating.

In this wire saw, the wire 15 is paid out from the pay-out reel 23 of the reel mechanism 22, travels between the processing rollers 13 and 14 of the cutting mechanism 11, and is taken up by the take-up reel 24. The workpiece 20 is pressed against the wire 15 while the slurry containing loose abrasive grains is supplied onto the wire 15 between the processing rollers 13 and 14. Thereby, the work 20 is cut into a predetermined thickness.

With the processing operation, the processing rollers 13,
If the annular grooves 13a, 14a on the wear roller 14 are worn, the bolts 43 and the detent bolts 60 at both ends of the outer roller 36 are loosened to release the assembly and fixing of the two divided bodies 36A, 36B. 36A and 36B can be easily removed from the outer periphery of the inner roller 35.

Then, the new divided body 36A, 36B of the outer roller 36 is connected to the inner roller 35 on the wire saw.
Bolt 43 and detent bolt 6
Tighten and fix with 0. Further, the contact surfaces 38 of the divided bodies 36A, 36B of the outer roller 36 engage with the position regulating surfaces 37 of the inner roller 35, and the inner roller 35
The mounting position of the outer roller 36 with respect to the axial direction is restricted.

Thereafter, the divided bodies 36A and 36B of the outer roller 36 which have been removed by abrasion are assembled and fixed to the outer periphery of a separately prepared jig. In this state, the outer peripheral surface of the outer roller 36 is polished and the outer peripheral surface thereof is polished. The annular groove 13a,
13b is reformed. The jig has the same shape as the inner roller 35.

As described above, when the accuracy of the annular grooves 13a, 14a on the processing rollers 13, 14 is reduced, only the outer roller 36 is connected to the inner roller 35 without removing the entire processing rollers 13, 14 from the wire saw. Remove it from. Furthermore, the work of reshaping the annular grooves 13a and 14a can be performed easily and in a short time, and the work efficiency can be improved.

The effects that can be expected from the above embodiment will be described below. (A) The outer roller 36 is in the axial direction or almost axial line
It is divided into a plurality of parts with a surface extending in the direction as a boundary, and is detachably attached to the outer periphery of the inner roller 35. Therefore, when the accuracy of the annular grooves 13a and 14a on the processing rollers 13 and 14 is reduced, only the outer roller 36 is removed from the inner roller 35 without removing the entire processing rollers 13 and 14 from the wire saw. The work of reforming the annular grooves 13a and 14a on the outer periphery of the outer roller 36 can be performed easily and in a short time.

(B) Divided body 36 of outer roller 36
A and 36B are bolts 43 and nuts 44 at both ends.
Are fixed to each other. Therefore, the divided bodies 36A and 36B of the outer roller 36 can be easily separated or assembled by loosening or tightening the bolts 43 and the nuts 44.

(C) Divided body 36 of outer roller 36
A and 36B are positioned at predetermined assembly positions by engagement of the engagement pins and the engagement holes at both ends. For this reason, despite the simple structure, the divided bodies 36A and 36B of the outer roller 36 can be easily and reliably positioned at predetermined positions and assembled.

(D) Each divided body 36 of the outer roller 36
A, the abutment surface 38 of the 36B, Ri by the engagement of the position regulating surface 37 of the inner roller 35, the mounting position of the axial direction of the outer roller 36 is adapted to be regulated with respect to the inner roller 35. Therefore, the divided bodies 36A, 36B of the outer roller 36 can be easily and reliably positioned at the predetermined position in the axial direction with respect to the inner roller 35 and assembled.

(E) Since the processing rollers 13 and 14 are formed of urethane resin, material costs can be reduced. (Second Embodiment) Next, a second embodiment of the present invention will be described.

As shown in FIGS. 5 and 6, the inner roller 71 has a central prism 71a,
1b and a small-diameter portion 71 protruding from the corner piece 71b.
c. The prism portion 71a and the corner piece 71b are formed in a square cross section. The small diameter portion 71c is formed in a columnar shape. The position regulating surfaces 73 are formed on both end surfaces of the prism 71a.

The outer roller 72 is, as in the first embodiment , bounded by a surface extending in the axial direction or substantially in the axial direction.
And is divided into two divided bodies 72A and 72B . The inside of the large-diameter central portion 72a made of metal of each of the divided bodies 72A and 72B conforms to the shape of the prismatic portion 71a of the inner roller 71, and is formed in a V-shape. Similarly, the small-diameter end portion 72b is also shaped according to the shape of the square piece 71b of the inner roller 35, and is formed in a V-shape.

Other configurations are the same as those of the first embodiment. Then, similarly to the first embodiment, the divided body 7
When 2A and 72B are mounted on the outer periphery of the inner roller 71, the mounting seats 75 face each other and the mounting seats 7
The respective insertion holes 42 of No. 5 match each other. Next, a pair of bolts 43 are inserted from above into the insertion holes 42 that match each other, and the nuts 44 are screwed into their ends, whereby the two divided bodies 72 </ b> A and 72 </ b> B are tightened to the mounting position on the inner roller 71. Fixed. At this time, the inside of the large-diameter central portion 72a of the divided bodies 72A and 72B is in surface contact with the prismatic portion 71a of the inner roller 71. Further, the inner roller 71 and the divided bodies 72A and 72B are assembled in a state where a slight gap is formed between the square piece 71b and the small diameter part 71c and the small diameter end 72b of the divided bodies 72A and 72B. I have.

Hereinafter, the effects of the present embodiment will be described. (A) In the present embodiment, the surfaces of the inner roller 71 and the outer roller 72 that are in contact with each other are flat.

Therefore, the accuracy of the surfaces where the inner roller 71 and the outer roller 72 are in contact with each other can be easily ensured as compared with a curved surface. Therefore, processing for manufacturing the inner roller 71 and the outer roller 72 is facilitated.

[0042] (b) according to the present embodiment, in order to shift and gas data does not occur between the inner roller 71 and outer roller 72, prevention means is not required. That is, the detent bolt 60 and the locking nut 60 in the first embodiment
b becomes unnecessary. For this reason, the number of parts can be reduced, and the number of manufacturing steps for the processing roller can be reduced.

Each of the above embodiments may be modified as follows, and the same operation and effect can be obtained in such a case. (1) In the first embodiment, the processing rollers 13 and 14
The outer roller 36 in its axial direction or almost axial direction.
It is formed by dividing into three or more pieces with a surface extending in the direction as a boundary .

(2) Each divided body 36 of the outer roller 36
A, 36B or each divided body 72 of the outer roller 72
A and 72B are configured to be tightened and fixed by a fixing means such as a fixing band, which is different from the bolt 43 and the nut 44 of each of the above embodiments.

(3) The outer rollers 36 and 72 are formed of a synthetic resin other than urethane resin, for example, polypropylene, polyester or the like. (4) The shapes of the prism portion 71a and the large-diameter central portion 72a are changed to a shape other than a square pillar, for example, a hexagonal pillar shape or an octagonal pillar shape.

(5) Between the large-diameter portion 35a and the half-pipe hollow circular tube 36a made of metal, the prism portion 71a and the large-diameter central portion 72a
Are provided between the outer roller 36 and the outer roller 72 to prevent rotation of the outer roller 36 and the outer roller 72.
It is configured to be performed at the small-diameter end portion 72b.

With this configuration, it is not necessary to increase the surface accuracy of the prism portion 71a and the large-diameter central portion 72a. that's all,
Although each embodiment has been described, technical ideas other than the claims that can be grasped from each embodiment will be described below together with their effects.

(A) Inner roller 35 or inner roller 71 and outer roller 36 or outer roller 72
The processing roller according to any one of claims 1 to 3 , wherein positioning means is provided between the processing roller and the processing roller.

With this configuration, the outer roller 3
6 or the outer roller 72 can be accurately assembled to the inner roller 35 or the inner roller 71. (B) Positioning means are formed on both end surfaces of the inner roller 35 or the inner roller 71 and both end portions of the outer roller 36 or the outer roller 72.
The processing roller according to the above (1), wherein the rollers 1, 36 or 72 are positioned in their axial direction.

With this configuration, the outer roller divided bodies 36A and 36B can be positioned in their axial direction.

[0051]

The present invention is configured as described above, and has the following effects. According to the invention described in claim 1, when the annular groove on the processing roller is worn,
Without removing the entire processing roller from the wire saw,
Remove only the outer roller from the inner roller,
The work of reshaping the annular groove can be performed easily and in a short time.

[0052] Also, the divided body of the outer roller, by relaxation or tightening of the bolt at both ends, can be easily separated or assembled. According to the second aspect of the present invention, material costs can be reduced.

According to the third or fourth aspect of the present invention, since the outer peripheral surface of the inner roller and the inner surface of the divided body of the outer roller are formed in a planar shape and the two are contact-coupled in a detented state. In addition, high dimensional accuracy is not required for processing both contact surfaces, and processing can be facilitated. Further, by reducing the number of parts for preventing rotation, man-hours for manufacturing the processing roller can be reduced. Further, even if the inner roller and the outer roller are not firmly tightened, the coupling force is high, and the efficiency of transmitting the surface pressure between the contact surfaces of the inner roller and the outer roller can be increased. For this reason,
Wear of the outer peripheral surface of the inner roller and the inner peripheral surface of the outer roller due to long-term use can be reduced, and the life of components can be extended.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a processing roller of a wire saw according to a first embodiment of the present invention.

FIG. 2 is a front view of the wire saw of the first embodiment.

FIG. 3 is a plan view of the wire saw of the first embodiment.

FIG. 4 is an enlarged sectional view of a main part of a processing roller of the wire saw according to the first embodiment.

FIG. 5 is an exploded perspective view showing a processing roller of the wire saw according to the second embodiment.

FIG. 6 is a side view of the wire saw according to the second embodiment.

[Explanation of symbols]

11: Cutting mechanism, 13: Processing drive roller, 14: Processing driven roller, 13a, 14a: Annular groove, 15: Wire, 19: Work support / slurry supply mechanism, 20: Work, 35, 71: Inner roller, 36, 72: outer roller, 36A, 36B: divided body, 39: mounting seat,
42 ... insertion hole, 43 ... bolt, 44 ... nut.

Continuation of the front page (56) References Japanese Utility Model Sho 54-150201 (JP, U) Japanese Utility Model Sho 55-45138 (JP, Y2) (58) Fields investigated (Int. Cl. ⁷ , DB name) B24B 27 / 06 F16C 13/00

Claims (4)

(57) [Claims] 1. A wire saw processing roller for supporting a workpiece cutting wire at a predetermined pitch, comprising: an inner roller; and a roller mounted on the inner roller.
And an outer roller formed with a plurality of annular grooves for winding a wire on the outer peripheral surface , and the outer roller is divided into a plurality of parts with a surface extending in the axial direction or substantially the axial direction as a boundary, The divided body of the outer roller
Attach and fix each other with bolts at both ends,
A processing roller for wire saws that is detachably attached to the outer periphery of the inner roller. The outer peripheral surface of the split body wherein A Utarora is if
Processing rollers of a wire saw according to Tei Ru claim 1 is formed by synthetic resin. The inner surface of wherein the outer peripheral surface of the inner roller and the outer roller division of the processing rollers of the wire saw according to one of the planar shape der Ru claim 1 or claim 2. 4. The inner roller has a quadrangular prism shape, and the inner surface of the divided body of the outer roller is the outer periphery of the inner roller.
Processing rollers of a wire saw according to the shape der Ru claim 3 fit surface.