JP4129716B2 - Guide roller for wire saw - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a wire saw guide roller, and more specifically, in plan view, even if the length direction of the wire groove of the wire saw guide roller is displaced from the wire travel path, the wire saw guide roller automatically corrects the displacement. About.
[0002]
[Prior art]
In a wire saw, an ingot cutting wire led out from a wire feeding reel of a feeding device is wound around a plurality of wire saw groove rollers (hereinafter simply referred to as a groove roller) in a coil shape, and then used for a number of wire saws. It has a device configuration for winding on a wire winding reel of a winding device via a guide roller.
A large number of wire saw guide rollers (hereinafter simply referred to as guide rollers) are disposed on the wire travel path from the feeding device to the groove roller and the wire travel path from the groove roller to the winding device. Each guide roller includes a roller body in which an annular wire groove is formed on the outer peripheral surface, and a shaft member serving as a rotation center of the roller body. These guide rollers suppress the twisting of the wire during wire travel and stabilize the cutting accuracy of the ingot by the wire, so that the length direction of each wire groove (hereinafter referred to as the wire groove direction) matches. I'm doing it.
[0003]
When cutting a single crystal silicon ingot with a wire saw, the slurry is supplied to the wrapping oil in the form of slurry containing free abrasive grains (hereinafter sometimes referred to as abrasive grains), and the ingot is moved relative to the wire train that is traveling reciprocally. Push on. Thereby, an ingot is cut | disconnected to many wafers with the grinding effect | action of an abrasive grain. At that time, the wire hung on each guide roller on the feeding side and the wire hung on each guide roller on the take-up side run on the same plane along the wire groove of the corresponding roller body. .
[0004]
[Problems to be solved by the invention]
However, in the prior art guide roller, as described above, the wire groove of each guide roller on the feeding side and the wire groove of each guide roller on the take-up side match the length direction of each groove. , And correspondingly arranged on the same plane.
Therefore, when the wire groove of a specific guide roller does not coincide with the corresponding same plane for some reason, when the wire passes through the specific guide roller, the tension of the passing portion increases. As a result, the wire groove of the guide roller that is misaligned increases the pressing force of the wire against the groove forming portion on the opposite side of the misalignment direction, and the wire groove formed by the wire to which the free abrasive grains in the slurry adhere. The grinding power at the back of the forming part is increased. As a result, the life of this specific wire saw guide roller may be shorter than the life of other wire saw guide rollers. In addition, the wire may be derailed from the wire groove or the wire may be broken.
[0005]
Therefore, as a result of diligent research, the inventor has provided an eco-rise mechanism that can change the direction of the rotation axis of the roller body between the roller body of the wire saw guide roller and the rotating body, and tentatively guides for a specific wire saw. The present inventors have found that even if the roller wire groove is off the same plane, the eco-rise mechanism can automatically return the direction of the wire groove of the roller body to the same plane.
[0006]
OBJECT OF THE INVENTION
According to the present invention, the positional deviation of the roller main body from the preset wire traveling path can be automatically and easily corrected at low cost. As a result, the life of the guide roller for the wire saw is caused by the positional deviation. It is an object of the present invention to provide a wire saw guide roller that can eliminate the possibility that the wire is shortened or the wire is derailed or disconnected from the wire groove.
[0007]
[Means for Solving the Problems]
The invention according to claim 1 is a wire saw guide roller that guides introduction and withdrawal of a wire to a plurality of wire saw groove rollers for reciprocating a wire array for cutting an ingot, and the wire saw frame main body A shaft member projecting from the shaft, a ball integrally formed at the tip of the shaft member, a socket for rotatably holding the ball with a predetermined gap, and a projecting and rotating projecting from the socket The shaft always passes through the center of the ball and has a roller body with an annular wire groove formed on the outer peripheral surface. When the ingot is cut, the direction of the wire groove of the wire saw guide roller is preset. If the position of the wire is displaced from the wire travel path, the roller body will turn the direction of the rotation axis in the position displacement correction direction due to the tension of the wire, and this is necessary for the correction. It works, a guide roller for a wire saw in which the roller body is swingably supported as a fulcrum the ball.
[0008]
The kind of wire saw to which this invention is applied is not limited. For example, the ingot may be moved and pressed and brought into contact with the wire row to cut, or conversely, the wire row may be moved and pushed and brought into contact with the ingot to be cut. Further, the lower surface of the ingot may be in contact with the upper portion of the wire row, and further, the upper surface of the ingot may be pressed against the lower portion of the wire row.
Examples of the ingot cut by the wire saw include a silicon single crystal, a compound semiconductor single crystal, a magnetic material, quartz, and ceramics.
[0009]
The number of wire saw groove rollers assembled and arranged in the wire saw is not limited. For example, five wires may be provided for each of the feeding side wire traveling path and the winding side wire traveling path.
The structure of the wire saw groove roller is not limited. Normally, the roller body that is pivotally supported by the shaft member covers the outer peripheral surface of a cylindrical base metal with a predetermined thickness of lining material (urethane rubber), and the wire groove is engraved on the outer peripheral surface of the lining material. have.
Examples of the structure in which the direction of the rotation axis of the roller body can be changed while maintaining the connection state with the shaft member include a ball joint structure having a ball and a socket.
[0010]
The type of ball joint structure is not limited. For example, a ball holding portion (socket) for holding the ball may be formed of a plate material, or an elastic member may be interposed between the ball and the ball holding portion.
[0011]
[Action]
According to the present invention, when the direction of the wire groove of the wire saw guide roller is displaced from the preset wire travel path when the ingot is cut, the roller main body is inserted through the socket for holding the ball. The direction of the rotation axis is directed to the misalignment correction direction, and it moves by the amount necessary for the correction. Thereby, the wire groove of the roller body returns to the wire travel path. As a result, the positional deviation of the roller body can be automatically corrected. Therefore, it is possible to eliminate the possibility that the life of the wire saw guide roller is shortened or that the wire is derailed or disconnected from the wire groove due to this positional shift.
[0012]
In addition, since a ball joint structure including a ball and a socket for holding the ball is incorporated, the positional deviation of the roller body from the preset wire travel path can be corrected easily and at low cost.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a cross-sectional view of a wire saw guide roller according to an embodiment of the present invention. FIG. 2 is an overall perspective view of a wire saw incorporating a wire saw guide roller according to an embodiment of the present invention. FIG. 3A is a cross-sectional view of the wire saw guide roller according to one embodiment of the present invention before the positional deviation correction. FIG. 3B is a cross-sectional view of the wire saw guide roller according to one embodiment of the present invention after positional deviation correction.
In FIG. 2, reference numeral 10 denotes a wire saw guide roller (hereinafter referred to as a guide roller) according to an embodiment of the present invention. This guide roller 10 is made of a plurality of single crystal silicon ingots I pulled up by the CZ method. It is incorporated in a wire saw 11 for cutting a wire on a wafer.
[0014]
The wire saw 11 has three groove rollers 12A, 12B, and 12C arranged in an inverted triangle shape when viewed from the front. Between these groove rollers 12A, 12B, 12C, one wire W is wound in parallel with each other at a constant pitch. As a result, the wire row Wa appears between the groove rollers 12A, 12B, and 12C. The wire row Wa is reciprocated between the three groove rollers 12A, 12B, 12C. The middle of the two groove rollers 12A, 12B arranged on the upper side is an ingot cutting position a of the wire row Wa that cuts the ingot I. A pair of abrasive liquid supply nozzles N for continuously supplying the abrasive liquid onto the wire row Wa are disposed above both sides of the ingot cutting position a.
The outer peripheral surfaces of these three groove rollers 12A, 12B, and 12C are covered with a lining material having a predetermined thickness made of urethane rubber. A number of wire grooves are formed on the outer peripheral surface of each lining material.
[0015]
The wire W is unwound from the reel 20 of the unwinding device 13 and is wound around the groove rollers 12A, 12B, and 12C through a large number of unwinding guide rollers 10 (including the dancer roller 10A). It is wound around the reel 21 of the winding device 15 through a large number of guide rollers 10 (including the dancer roller 10B) on the side. The wire grooves of the many guide rollers 10 on the feeding side and the wire grooves of the many guide rollers 10 on the lead-out side are respectively arranged on the same planes (vertical surfaces) P and P corresponding in plan view. The rotating shafts of the feeding device 13 and the winding device 15 are connected to the output shafts of the drive motors 16 and 17, respectively. When the drive motors 16 and 17 are periodically driven, the reels 20 and 21 rotate in the forward direction or the reverse direction around the axis, and the wire W reciprocates.
In FIG. 2, reference numeral 18 denotes a lifting platform for the ingot I, and reference numeral 18 a denotes a carbon bed for fixing the ingot I to the lifting platform 18. Reference numeral 19 denotes a lift motor that lifts the lift 18 and 42 denotes a rotary motor that rotates the groove roller 12C. Furthermore, 43 is an end material box for recovering the end material of the ingot I.
[0016]
Next, the guide roller 10 will be described in detail with reference to FIGS. 1 and 3.
The guide roller 10 shown in FIGS. 1 and 3 includes a shaft member 32 fixed to the body frame 35 of the wire saw 11, a roller body 33 pivotally supported by the shaft member 32, and the shaft member 32 and the roller body 33. An eco-rise mechanism 34 is provided between the roller body 33 and the direction of the rotation axis of the roller body 33 to be variable.
The base portion of the shaft member 32 is screwed into the main body frame 35 of the wire saw 11. A ball 36 is integrally formed at the tip of the shaft member 32.
[0017]
The roller body 33 has a small disk shape. A thick ring member 37 made of polyurethane is fixed to the outer peripheral surface of the roller body 33. A single wire groove 37 a around which one wire W is wound is formed on the outer peripheral surface of the ring member 37. Further, a roller holding socket 38 is provided at the center of the back surface of the roller body 33 so as to project the ball 36 from the outside in a rotatable manner. The swing angle θ of the roller body 33 in a state where the ball 36 is held in the socket 38 is 45 degrees. A slight gap is formed between the ball 36 and the socket 38. The length of the gap is such that the roller body 33 can swing around the ball 36 and the roller body 33 can move slightly in the axial direction of the socket 38. The eco-rise mechanism 34 includes a ball 36 and a socket 38.
[0018]
Next, a method for cutting the ingot I by the wire saw 11 will be described.
As shown in FIG. 2, in the wire saw 11, the abrasive liquid is supplied from the abrasive liquid nozzle N to the wire row Wa, and the reel 20 of the feeding device 13 is rotated by the drive motor 16, so that a large number of wires W are introduced on the introduction side. Are supplied to the groove rollers 12A, 12B, and 12C through the guide roller 10. On the other hand, the reel 21 of the winding device 15 is rotated by the drive motor 17, and the wire W is wound through the groove rollers 12 </ b> A, 12 </ b> B, 12 </ b> C and the many guide rollers 10 on the lead-out side. And the wire W is reciprocated by changing the rotation direction of each reel 20 and 21 suitably. Along with this, the other two groove rollers 12A and 12B rotate, and the respective guide rollers 10 also rotate. At this time, the groove roller 12C is rotated by the rotation motor 42 to assist the reciprocating travel of the wire row Wa.
[0019]
When the wire row Wa reciprocates, the ingot I is pressed against the wire row Wa from above. Thereby, the ingot I is cut into several wafers. That is, when the wire row Wa reciprocates, the loose abrasive grains in the abrasive liquid are rubbed against the bottom of each cutting groove by each wire W of the wire row Wa, so that the bottom portion is gradually scraped, and finally a large number Cut into thin wafers. At this time, the end material of the ingot I remaining after cutting is collected in the end material box 43.
[0020]
At the time of cutting the ingot, each guide roller 10 rotates as the wire W reciprocates. At that time, the dancer rollers 10A and 10B give a constant tension to the traveling wire W. At this time, it is assumed that for some reason, a positional deviation has occurred from the same plane P in the direction a of the wire groove 37a in plan view of the specific guide roller 10 (FIG. 3A). In such a case, the roller body 33 is moved by an amount necessary for the correction by the eco-rise mechanism 34 with the direction of the rotation axis of the roller main body 33 directed to the misalignment correction direction. Thereby, the positional deviation is automatically corrected, and the wire groove 37a of the roller body 33 returns to the same plane P (FIG. 3B). As a result, the possibility that the life of the guide roller 10 is shortened due to this positional shift is eliminated. In addition, the derailment of the wire W from the wire groove 37a or the disconnection of the wire W, which may occur due to this displacement, can be eliminated.
In this embodiment, since the ball joint structure is adopted as the eco-rise mechanism 34, the eco-rise mechanism 34 can be easily and inexpensively incorporated between the roller body 33 and the shaft member 32.
[0021]
【The invention's effect】
According to the present invention, since the eco-rise mechanism for changing the direction of the rotation axis of the roller main body is provided between the roller main body and the shaft member, the positional deviation of the roller main body can be automatically corrected. As a result, it is possible to eliminate the possibility that the life of the wire saw guide roller is shortened due to this positional shift, and that the wire is derailed or disconnected from the wire groove.
[0022]
In addition, since a ball joint structure including a ball and a socket for holding the ball is incorporated, the positional deviation of the roller body from the preset wire travel path can be corrected easily and at low cost.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a wire saw guide roller according to an embodiment of the present invention.
FIG. 2 is an overall perspective view of a wire saw incorporating a wire saw guide roller according to an embodiment of the present invention.
FIG. 3 (a) is a cross-sectional view of the wire saw guide roller according to one embodiment of the present invention before positional deviation correction.
(B) is a cross-sectional view after the positional deviation correction of the wire saw guide roller according to one embodiment of the present invention.
[Explanation of symbols]
10 Wire saw guide roller,
12A, 12B, 12C Groove roller for wire saw,
32 shaft member,
33 balls (ball joint structure),
34 Eco Rise Organization,
37 Roller body,
37a wire groove,
38 Socket (ball joint structure),
I ingot,
W wire,
Wa wire train.

Claims (1)

A wire saw guide roller that guides the introduction and withdrawal of a wire with respect to a plurality of wire saw groove rollers that reciprocate a wire array for cutting an ingot,
A shaft member projecting from the frame body of the wire saw,
A ball integrally formed at the tip of the shaft member;
A socket for rotatably holding the ball with a predetermined gap;
Protruding from this socket, the rotating shaft always passes through the center of the ball, and has a roller body in which an annular wire groove is formed on the outer peripheral surface,
When cutting the ingot, if the direction of the wire groove of the wire saw guide roller is displaced from the preset wire travel path, the roller body causes the direction of the rotation axis to be displaced by the wire tension. A wire saw guide roller in which the roller body is swingably supported with the ball as a fulcrum so that the roller body moves by an amount necessary for the correction .

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