JP4905827B2 - Wire guide device - Google Patents

Description

  The present invention relates to a wire guide device, and more particularly to a wire guide device capable of cutting an ingot into a plurality of wafers by a traveling wire.

  In the wire saw, an ingot cutting wire led out from a wire feeding reel (or bobbin) of a feeding device is wound around a plurality of wire saw groove rollers in a coil shape, and then the wire winding of the winding device is performed. The device configuration is such that it is wound on a take-up reel (or bobbin). A large number of wire guide devices are disposed on each of the wire travel path from the feeding device to the groove roller and the wire travel path from the groove roller to the winding device (Patent Document 1, etc.).

  The basic structure of the wire guide device is as follows (for example, Patent Document 1). That is, as shown in FIG. 7, the wire guide device 100 has a fixed shaft 102 whose base is fixed to a body frame 101 of a wire saw. A bearing case 104 is rotatably supported at the tip of the fixed shaft 102 via a pair of bearings 103. The bearing case 104 is a cylindrical body, and a flange 104a projects from the base portion thereof. On the other hand, a bearing cap 105 that prevents the bearing 103 from popping out is fastened to the front end portion of the bearing case 104 by a bolt 106. In addition, an end cap 107 that covers the bearing cap 105 from the outside is bolted to the bearing cap 105.

  The guide roller 108 is a thick annular member made of polyurethane, and is attached to the outer periphery of the bearing case 104. On the outer peripheral surface of the guide roller 108, one wire groove 108a is formed at a position equidistant from the intermediate position in the axial direction of the guide roller 108. The inner periphery of the guide roller 108 is firmly sandwiched between the flange 104 a and the end 107 a of the outer peripheral wall of the end cap 107.

  Thus, by forming two wire grooves 108a, when it becomes necessary to replace one wire groove 108a with another wire groove 108a due to wear or the like, the guide roller 108 is extracted from the bearing case 104, and then If the guide roller 108 is reversed and attached to the bearing case 104 again, the other wire groove 108a can be used. As a result, the life of the guide roller 108 can be extended by about twice. Note that one end surface of the guide roller 108 in the axial direction is a front surface, and the other end surface is a back surface.

In FIG. 7, reference numeral 109 denotes a labyrinth collar that is fitted into an annular recess 104 b that is provided around the inner peripheral portion of the bearing case 104, and 110 denotes a main body frame 101 and labyrinth collar among the original parts of the fixed shaft 102. 109 is a cylindrical spacer that is extrapolated to a portion between 109, 111 is a bearing nut that is screwed into an external screw formed at the tip of the fixed shaft 102, and prevents the bearing 103 from jumping outward. The wire is hung on the wire groove 108a.
Japanese Patent Laid-Open No. 2002-224742

However, the conventional wire guide device 100 has the following drawbacks.
That is, as described above, only two wire grooves 108a are formed on the outer periphery of the guide roller 108. Therefore, the number of reuses of one guide roller 108 was only one (the total number of use was two), which was small. Therefore, the old and new guide rollers have to be replaced in a relatively short period, and the number of replacements of the old and new guide rollers 108 in a certain period has increased. Further, the replacement time of the guide roller 108 is longer than the work time for reusing the guide roller 108. As a result, within a certain period (for example, a month), the time for stopping the operation of the wire saw and performing maintenance has been increased. Therefore, the operation time of the wire saw has been shortened, and the number of ingots I processed in a certain period has also been reduced.

  Further, the used guide roller 108 is disposed as industrial waste. Therefore, the longer the service life (the number of times of reuse) of the guide roller 108 is, the lower the cost of processing industrial waste in a certain period. This can also be said about the purchase cost of the new guide roller 108.

Therefore, the present invention can increase the number of times the guide roller is reused with a simple configuration, thereby reducing the maintenance time of the wire saw within a certain period, and as a result, cutting the ingot within a certain period. It is an object of the present invention to provide a wire guide device that can increase the number of the guide rollers and reduce the disposal cost of used guide rollers and the purchase cost of new guide rollers within a certain period.
Another object of the present invention is to provide a wire guide device that can prevent the roller position changing member from being lost.

The invention according to claim 1 is a wire guide device for guiding the introduction and withdrawal of a wire to and from a plurality of wire saw groove rollers that reciprocate a wire array for cutting an ingot. A plurality of rotatable cylindrical guide rollers formed with a plurality of annular wire grooves spaced apart from each other at equal intervals, and a roller shaft support to which the guide rollers are detachably attached and which serve as a rotation center of the guide rollers And the guide roller mounting position on the roller shaft supporting body so that each wire groove individually matches the traveling position of the wire. axially and a modifiable annular roller position changing member, said wire groove, said guide rollers axially intermediate point of the street the guide rollers of the The roller position changing member is disposed at a line-symmetrical position with a line orthogonal to the line as the axis of symmetry, the roller position changing member has the same thickness as the length of one pitch of the wire groove, and the roller shaft support is cylindrical A bearing case, and an end cap fastened to the tip of the bearing case. A flange protrudes from the base of the bearing case, and the guide roller and the roller position changing member are connected to the flange. A wire guide device sandwiched between the end caps .

According to the first aspect of the present invention, the roller position changing member is used so that the guide roller is attached to the roller shaft support so that the selected one wire groove matches the traveling position of the wire. , Change in the axial direction of the guide roller. Specifically, (1) the roller position change member is attached to and detached from the roller shaft support, (2) the attachment position of the roller position change member on the roller shaft support is changed, and (3) the roller position change member is changed. (4) Use of a plurality of roller position changing members having different thicknesses, and the like.
As a result, the guide roller can be reused with a simple configuration, in particular, more than once. Therefore, it is possible to shorten the maintenance time of the wire saw within a certain period, and as a result, it is possible to increase the number of ingots cut within a certain period, and to discard used guide rollers within a certain period. The disposal cost and the purchase cost of a new guide roller can be reduced.

The kind of wire saw in which the wire guide device of the present invention is used is arbitrary. For example, the ingot may be moved in the wire direction, pressed against and contacted with the wire row, and cut. On the contrary, the wire row may be moved to press and contact the ingot and cut. Further, the lower surface of the ingot may be in contact with the upper part of the wire row. Further, the upper surface of the ingot may be pressed against the lower part of the wire row.
The material of the ingot is arbitrary, and for example, a silicon single crystal, a compound semiconductor single crystal, a magnetic material, quartz, ceramics, or the like can be employed.
The number of wire saw groove rollers that are assembled and arranged in the wire saw may be two, for example, or three or more.

The structure of the wire guide device is arbitrary. It is only necessary to have a guide roller having a plurality of wire grooves formed on the outer peripheral surface and the roller shaft support.
The number of wire guide devices used is arbitrary. There may be one or two or more.
For example, polyurethane can be used as the material of the guide roller.
The number of wire grooves formed is two or more (for example, two, three, four, etc.).
The structure of the roller shaft support is arbitrary. For example, you may have a fixed axis | shaft fixed to the main body frame of a wire saw, the bearing extrapolated by the fixed axis | shaft, and the bearing case which accommodates a bearing. In this case, the guide roller is integrally fixed (mounted) to the outer peripheral portion of the bearing case. Further, the roller shaft support may be only the fixed shaft, or may be only the rotary shaft that is rotatably attached to the main body frame of the wire saw. In these cases, the guide roller is directly fixed to the rotating shaft without using a bearing case.

The roller position changing member is a rigid body. As the material, for example, a stainless material and an aluminum material can be employed.
The thickness of the roller position changing member is determined so that the mounting position of the guide roller with respect to the roller shaft support is adjusted according to the position of each wire groove so that each wire groove individually matches the traveling position of the wire. Any thickness can be used as long as the thickness can be changed in the axial direction.
The number of roller position changing members used is one or more. When a plurality of roller position changing members are used, the thickness of each roller position changing member may be the same or different.

Further, the wire grooves are formed in four strips at a predetermined pitch in the axial direction of the guide roller, and each wire groove is disposed in a pair at a line-symmetrical position around an intermediate point in the axial direction of the guide roller, The roller position changing member may have substantially the same thickness as the length of one pitch of the wire groove.
At this time, by turning the guide roller upside down, out of the four wire grooves, two outer (or inner) wire grooves can be used. Further, for example, by setting the attachment position of the roller position changing member in the roller shaft support body to the front side from the guide roller or from the guide roller to the front side, among the four wire grooves, the inner side (or the outer side) These two wire grooves can be used respectively. In this way, one guide roller can be reused three times by simply changing the mounting position of the guide roller with respect to the roller shaft support using the roller position changing member. In addition, since the roller position changing member is always attached to the roller shaft support, it is possible to prevent the roller position changing member from being lost.

  According to the first aspect of the present invention, by using the roller position changing member, the mounting position of the guide roller with respect to the roller shaft support is set so that the wire groove individually matches the traveling position of the wire. Since it is configured to change in the axial direction of the guide roller in accordance with the position of the wire groove, the guide roller can be reused with a simple configuration, particularly two or more times. Thereby, the maintenance time of the wire saw within a fixed period can be shortened. As a result, the number of cut ingots within a certain period can be increased, and the disposal cost of used guide rollers and the purchase cost of new guide rollers can be reduced within a certain period.

For example, four wire grooves are formed at a predetermined pitch in the axial direction of the guide roller, and each wire groove is disposed at a line-symmetrical position centered on an intermediate point in the axial direction of the guide roller, and the roller position changing member By configuring the thickness to be substantially the same as the length of one pitch of the wire groove , the roller position changing member is used to simply change the mounting position of the guide roller with respect to the roller shaft support. Thus, one guide roller can be reused three times. Further, since the roller position changing member is always attached to the roller shaft support, it is possible to prevent the roller position changing member from being lost.

  Examples of the present invention will be specifically described below.

  In FIG. 2, reference numeral 11 denotes a wire saw in which the wire guide device 10 according to the first embodiment of the present invention is incorporated. This wire saw 11 is a single crystal silicon ingot I pulled up by a CZ method to a number of wafers. A device for cutting. The wire saw 11 has three wire saw groove rollers (hereinafter referred to as groove rollers) 12A to 12C arranged in an inverted triangle shape when viewed from the front. Between these groove rollers 12A to 12C, one wire W is wound at a constant pitch so as to be parallel to each other. As a result, the wire row Wa appears between the groove rollers 12A to 12C.

The wire row Wa is reciprocated by the main motor 42 between the three groove rollers 12A to 12C. The middle of the two groove rollers 12A and 12B arranged on the upper side is the cutting position a of the ingot I. Above the both side portions of the cutting position a, a pair of abrasive liquid supply units N that continuously supply the abrasive liquid onto the wire row Wa are disposed.
The wire W is led out from the bobbin 20 of the feeding device 13 and is passed over the groove rollers 12A to 12C via the wire guide devices 10 and 10A on the supply side, and then the wire guide devices 10 and 10B on the lead side are passed through. Through the bobbin 21 of the winding device 15.

The rotation shafts of the feeding device 13 and the winding device 15 are connected to the output shafts of the drive motors 16 and 17, respectively. When the drive motors 16 and 17 are periodically driven, the bobbins 20 and 21 pivotally supported by the pair of bearings rotate around the respective axes in the clockwise direction or the counterclockwise direction in FIG. The wire W travels back and forth.
In FIG. 2, reference numeral 18 denotes a lifting platform for the ingot I, and reference numeral 18 a denotes a carbon bed for fixing the ingot I to the lifting platform 18. Reference numeral 19 denotes an elevating motor for moving the elevating table 18 up and down, and 43 denotes an end material recovery box for recovering the end material of the ingot I.

Next, the wire guide device 10 will be described in detail with reference to FIG.
As shown in FIG. 1, the wire guide device 10 has a fixed shaft 32 fixed to a main body frame 31 of the wire saw 11. A stainless steel bearing case 34 is supported at the tip of the fixed shaft 32 through a pair of bearings 33, 33 so as to be rotatable about the fixed shaft 32. A labyrinth collar 37 that is fitted into the annular recess 34 b of the bearing case 34 is provided around the inner peripheral portion of the bearing case 34 on the base side.

  An external thread is formed at the tip of the fixed shaft 32, and a bearing nut 52 for positioning the bearings 33 and 33 is screwed into the external thread. The bearing case 34 has a cylindrical shape, and a flange 34a projects from the base portion thereof. On the other hand, a bearing cap 35 is fastened with a bolt 50 at the tip of the bearing case 34. The bearing cap 35 is a member that prevents the bearings 33 and 33 from protruding from the bearing case 34 and prevents the abrasive fluid from entering the bearing case 34. An end cap 36 is fastened to the front end surface of the bearing case 34 with a bolt (not shown).

  A guide roller 38 is fitted in the outer peripheral portion of the bearing case 34 so as to be freely inserted and removed (detachable). The guide roller 38 is a thick ring member made of polyurethane, and four wire grooves 38a to 38d are formed on the outer peripheral surface. Therefore, even if one wire groove 38a is worn, another wire grooves 38b to 38d can be used by reversing the front and back surfaces of the guide roller 38. The inner peripheral portion of the guide roller 38 is firmly sandwiched between the flange 34 a and the end portion 36 a of the outer peripheral wall of the end cap 36.

  In FIG. 1, reference numeral 54 denotes a cylindrical spacer that is extrapolated to a portion between the main body frame 31 and the labyrinth collar 37 in the base portion of the fixed shaft 32. The component parts 32 to 37, 50, and 52 constitute a roller shaft support 39 that rotatably supports the guide roller 38.

The feature of the present invention is that, as described above, four wire grooves 38a to 38d are formed around the outer peripheral surface of the guide roller 38 at a pitch a (a = 5 mm) in the axial direction of the guide roller 38. The wire grooves 38a to 38d are arranged at a line-symmetrical position centered on the intermediate point in the axial direction of the guide roller 38, and the mounting position of the guide roller 38 in the bearing case 34 is set on the outer periphery of the bearing case 34. One point is that one ring-shaped roller position changing member 55 that can be changed in the axial direction of the guide roller 38 according to the positions of the wire grooves 38a to 38d is attached.
The roller position changing member 55 has the same thickness a (5 mm) as the length of one pitch a of the wire grooves 38a to 38d. Of the four strips, the wire W hung on any one of the wire grooves 38a is always separated from the surface of the main body frame 31 on the side of the wire guide device 10 by the length L (L = 30 mm) by the cylindrical spacer 54. At this time, the length from the surface of the main body frame 31 on the wire guide device 10 side to the surface of the flange 34a on the end cap 36 side is 20 mm.

Next, a method for cutting the ingot I by the wire saw 11 will be described.
As shown in FIG. 2, in the wire saw 11, the abrasive liquid is supplied from the abrasive liquid nozzle N to the wire row Wa and the groove roller 12 </ b> C is rotated forward and backward by the main motor 42 to reciprocate the wire row Wa. In addition, the reel 20 of the feeding device 13 is rotated by the drive motor 16, and the wire W is supplied to the groove rollers 12A to 12C via the multiple wire guide devices 10 and 10A on the introduction side. On the other hand, the reel 21 of the winding device 15 is rotated by the drive motor 17, and the wire W is wound through the groove rollers 12A to 12C and the many wire guide devices 10 and 10B on the lead-out side. And the rotation direction of each reel 20 and 21 is changed suitably. Along with this, the other two groove rollers 12A and 12B rotate, and the respective wire guide devices 10, 10A and 10B also rotate.

  During reciprocation of the wire row Wa, the ingot I is pressed against the wire row Wa from above. Thereby, the ingot I is cut into several wafers. That is, during the reciprocating travel of the wire row Wa, loose abrasive grains in the abrasive liquid are rubbed against the bottom of each cutting groove by each wire W of the wire row Wa. As a result, the bottom is gradually scraped off and finally cut into a large number of thin wafers. At this time, the end material of the ingot I remaining after cutting is collected in the end material box 43.

  When the ingot is cut, the guide roller 38 rotates in each wire guide device 10 as the wire W reciprocates. At that time, the dancer rollers 10A and 10B give a constant tension to the traveling wire W. At this time, each guide roller 38 is mounted on the outer peripheral portion of the bearing case 34, and the inner peripheral portion of the guide roller 38 is firmly sandwiched between the flange 34 a and the end portion 36 a of the outer peripheral wall of the end cap 36. (Fig. 1). In this state, the first guide groove 38a disposed at one end of the guide roller 38 in the axial direction is positioned at the traveling position of the wire W (each guide groove is in order from the right end in FIG. 3 in order. 1 guide groove 38a to 4th guide groove 38d). In the axial direction of the guide roller 38, the first guide groove 38 a side is the front side of the guide roller 38, and the fourth guide groove 38 d side is the back side of the guide roller 38.

Next, referring to FIG. 3 to FIG. 6, the roller position changing member 55 is used, and the attachment position of the guide roller 38 to the roller shaft support 39 (specifically, the bearing case 34) is set to the wire grooves 38 a to 38 d. A method of changing in the axial direction of the guide roller 38 according to the position of each of the wire grooves 38a to 38d will be described so as to individually match the traveling position of the wire W.
(1) As shown in FIG. 3, when the first guide groove 38a is used, the guide roller 38 is mounted on the bearing case 34 with the front side of the guide roller 38 facing the main body frame 31 side. At this time, the roller position changing member 55 is disposed between the flange 34 a of the bearing case 34 and the front side of the inner peripheral portion of the guide roller 38. As a result, the first guide groove 38a is disposed at a position separated from the main body frame 31 by the length L (traveling position of the wire W). As a result, the wire W can be hooked in the first guide groove 38a.

(2) As shown in FIG. 4, when the second guide groove 38 b is used, the guide roller 38 is mounted on the bearing case 34 with the front side of the guide roller 38 facing the main body frame 31. Next, the roller position changing member 55 is disposed between the back side of the guide roller 38 and the end portion 36 a of the outer peripheral wall of the end cap 36. As a result, the second guide groove 38b is disposed at a position separated from the main body frame 31 by the length L. Therefore, the wire W can be hung on the second guide groove 38b.
(3) As shown in FIG. 5, when the third guide groove 38c is used, the guide roller 38 is turned upside down so that the back side of the guide roller 38 faces the main body frame 31 and the guide roller 38 is attached to the bearing case 34. Installing. Next, the roller position changing member 55 is disposed between the front side of the guide roller 38 and the end portion 36 a of the outer peripheral wall of the end cap 36. As a result, the third guide groove 38 c is disposed at a position separated from the main body frame 31 by the length L. As a result, the wire W can be hooked in the third guide groove 38c.

  (4) As shown in FIG. 6, when the fourth guide groove 38d is used, the guide roller 38 is mounted on the bearing case 34 with the back side of the guide roller 38 facing the main body frame 31 side. At this time, the roller position changing member 55 is disposed between the flange 34 a of the bearing case 34 and the front side of the inner peripheral portion of the guide roller 38. As a result, the fourth guide groove 38d is disposed at a position spaced apart from the main body frame 31 by the length L, and the wire W can be hung on the fourth guide groove 38d.

  In this way, the roller position changing member 55 is used here, and the mounting position of the guide roller 38 with respect to the roller shaft support 39 is set so that the wire grooves 38a to 38d individually match the traveling position of the wire W. The guide roller 38 is changed in the axial direction in accordance with the positions of the wire grooves 38a to 38d. Therefore, the guide roller 38 can be reused with such a simple configuration. As a result, the maintenance time of the wire saw 11 within a certain period can be shortened. As a result, the number of cut ingots I within a certain period can be increased, and the disposal cost of the used guide roller 38 and the purchase cost of a new guide roller 38 can be reduced within the certain period. .

  In the first embodiment, four wire grooves 38 a to 38 d are formed at a pitch a in the axial direction of the guide roller 38, and each of the wire grooves 38 a to 38 d is centered on an intermediate point in the axial direction of the guide roller 38. Pairs are arranged at line symmetry positions. Moreover, the roller position changing member 55 is configured to have the same thickness a as the length of one pitch a of the wire grooves 38a to 38d. Therefore, one guide roller 38 can be reused three times by simply changing the mounting position of the guide roller 38 relative to the roller shaft support 39. Further, since the roller position changing member 55 is always attached to the roller shaft support 39, the roller position changing member 55 can be prevented from being lost.

It is a longitudinal cross-sectional view of the wire guide apparatus which concerns on Example 1 of this invention. It is a perspective view of the wire saw with which the wire guide apparatus which concerns on Example 1 of this invention was integrated. It is a longitudinal cross-sectional view which shows the use condition of the 1st wire groove in the wire guide apparatus which concerns on Example 1 of this invention. It is a longitudinal cross-sectional view which shows the use condition of the 2nd wire groove in the wire guide apparatus which concerns on Example 1 of this invention. It is a longitudinal cross-sectional view which shows the use condition of the 3rd wire groove | channel in the wire guide apparatus which concerns on Example 1 of this invention. It is a longitudinal cross-sectional view which shows the use condition of the 4th wire groove | channel in the wire guide apparatus which concerns on Example 1 of this invention. It is a longitudinal cross-sectional view of the wire guide apparatus which concerns on a conventional means.

Explanation of symbols

10 Wire guide device,
12A-12C Groove roller for wire saw,
38 guide rollers,
38a-38d wire groove,
39 Roller shaft support,
55 Roller position changing member,
I ingot,
W wire,
Wa wire train.

Claims (1)

A wire guide device that guides the introduction and withdrawal of a wire with respect to a plurality of wire saw groove rollers that reciprocate a wire array for cutting an ingot,
A rotatable cylindrical guide roller having a plurality of annular wire grooves formed at equal intervals around the outer peripheral surface;
A roller shaft supporting body to which the guide roller is detachably attached and which serves as a rotation center of the guide roller;
The guide roller is attached to the roller shaft support body in a detachable manner, and the guide roller mounting position on the roller shaft support body is set in the axial direction of the guide roller so that each wire groove individually matches the traveling position of the wire. A ring-shaped roller position changing member that can be changed ,
The wire groove is disposed at a line-symmetrical position with a line passing through an intermediate point in the axial direction of the guide roller and orthogonal to the axis of the guide roller as an axis of symmetry,
The roller position changing member has the same thickness as the length of one pitch of the wire groove,
The roller shaft support includes a cylindrical bearing case,
An end cap fastened to the tip of the bearing case,
A flange protrudes from the base of the bearing case,
A wire guide device in which the guide roller and the roller position changing member are sandwiched between the flange and the end cap .

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