JP2002283208A - Cleaning device of wire saw and cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry out a cleaning/removal of a slurry deposited on a wire in the state that a cleaning ability is enhanced to the maximum limit while preventing a severance of the wire and to suppress a maintenance cost by prolonging a life of a cleaning member. SOLUTION: In the cleaning device 7, a pair of cleaning members 13, 14 forming a ring-like shape and made of an elastic material is coaxially arranged in opposed to each other at a position where they clamp the wire 5 from above and below. The respective cleaning members 13, 14 are fixed to an upper plate part 15 and a lower plate part 16 by a screw respectively. Those plate parts 15, 16 are constituted such that they are rotatable around a center axis and are vertically reciprocatory by rotating/vertically moving mechanisms 17, 18 self-containing a motor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for performing processing such as cutting and grooving on a semiconductor material, a ceramic material, and the like, and in particular, a wire in a stretched state, and a surface of the wire saw is loosely ground. The present invention relates to a cleaning device and a cleaning method for a wire saw that is made to travel while supplying slurry containing particles.

[0002]

2. Description of the Related Art In a wire saw, a wire running in a linear direction by a processing roller is pressed against a work while a slurry containing loose abrasive grains is supplied to the surface thereof, and the wire is wrapped by the rolling of the abrasive grains. Processing such as cutting the work by the action is performed. In this case, after the slurry is supplied from the slurry tank through the slurry supply nozzle, the slurry is sequentially collected in the slurry tank and used repeatedly.

At the time of working with a wire saw as described above, the slurry attached to the wire scatters around,
There is a problem that the inside of the apparatus is soiled, or the supplied slurry cannot be collected in the slurry tank, and the amount of stored slurry in the slurry tank is inadvertently reduced. In order to cope with such a problem, it has been conventionally proposed to provide a cleaning device as shown in FIGS. 6 and 7 in a traveling path of a wire.

That is, the cleaning device shown in FIG.
A plurality of air injection ports 33 are formed on a peripheral wall portion of a cylindrical guide case 32 surrounding the wire 31. By blowing air from the group of the air injection ports 33 to the wire 31 in the guide case 32, the air It is configured to clean and remove the slurry attached to the surface. The cleaning device shown in FIG. 7 is described in Japanese Patent Application Laid-Open No. H11-188598.
By disposing two cleaning members 34 in contact with the outer peripheral surface of the cleaning member 1 and providing an urging member (not shown) for pressing each cleaning member in the direction of the wire 31, the slurry adhered to the wire 31 is cleaned by the cleaning member 32 Cleaning and removing while wiping.

[0005]

In the conventional structure shown in FIG. 6, it is necessary to supply high-pressure air to the group of air injection ports 33 of the guide case 32, so that the piping structure for that is complicated. There is a problem that it is difficult to effectively clean and remove the slurry attached to the surface of the wire 31 only by blowing air.

[0006] In the conventional configuration shown in FIG.
Since the pressing force acting on the cleaning member 34 from the urging means (not shown) is always constant, there are the following disadvantages.

That is, a wire saw is generally of a type in which the wire is reciprocated, and every time the wire traveling direction is switched, the operation of decelerating and stopping the traveling speed of the wire and then re-acceleration is performed. Repeated. Therefore, in the configuration of FIG. 7, the wire 31 and the cleaning member 34
Is increased each time the wire 31 is stopped (according to the relationship of static friction count> kinetic friction count). For this reason, if the pressing force by the urging means (not shown) is set to a large value, every time the wire 31 is stopped, a large tension acts on the wire 31 and the wire 31 may be disconnected, and conversely. If the pressing force is set to a small value, the cleaning ability of the cleaning member 34 may be reduced. Therefore, the cleaning member 34
In the conventional configuration of FIG. 7 in which the pressing force acting on the wire 31 is always constant, it is very difficult to set the cleaning capability to the maximum while preventing the wire 31 from being broken. This is a practical disadvantage. In addition, wire 31
Since the contact position of the cleaning member 34 is always the same, when the cleaning performance of the cleaning member 34 is reduced due to the progress of wear of the cleaning member 34, it is necessary to replace the cleaning member 34 with a new one. That is, since the life of the cleaning member 34 is relatively short, there is a drawback that maintenance costs are increased, for example, the replacement parts cost increases and the time and labor for replacing parts increase.

The present invention has been made in view of the above circumstances, and a first object of the present invention is to remove and remove slurry attached to a wire while preventing disconnection of the wire and maximizing the cleaning ability. A second object of the present invention is to provide a cleaning apparatus and a cleaning method for a wire saw that can be performed, and a second object of the present invention is to provide a cleaning apparatus and a cleaning method for a wire saw that can prolong the life of the cleaning member and reduce the maintenance cost. Is to do.

To achieve the first object, the means described in claim 1 can be adopted. According to this means, at least one pair of cleaning members come into contact with the wire located outside the processing mechanism from different directions, and a pressing mechanism applies a pressing force in the wire direction to the cleaning member. Therefore, when the wire is running, the slurry attached to the surface of the wire is cleaned and removed by the cleaning member. In this case, since a pressure adjusting mechanism that changes the pressing force of the pressing mechanism in accordance with the traveling speed of the wire is provided, when the tension acting on the wire is large (for example, when the traveling of the wire is stopped and the traveling is resumed). By reducing the pressing force acting on the cleaning member, the disconnection of the wire is prevented, and when the tension acting on the wire is small (for example, when the wire runs at a constant speed).
By increasing the pressing force acting on the cleaning member, the cleaning ability can be maximized.

In order to achieve the second object, a second aspect is provided.
Can be adopted. This means also allows the pair of cleaning members to come into contact with the wire located outside the processing mechanism from different directions, and applies a pressing force in the wire direction to the cleaning member by the pressing mechanism. When the wire travels, the slurry attached to the surface of the wire is cleaned and removed by the cleaning member. In this case, since the moving mechanism for changing the contact position of each cleaning member with the wire is provided, when the contact portion of the cleaning member with the wire is worn and the cleaning ability is reduced to a limit or more, the moving mechanism is used. ,
By changing the state in which the wire contacts the unworn portion of the cleaning member, the cleaning ability of the cleaning member can be restored. As a result, the life of the cleaning member can be prolonged, so that it is possible to prevent a situation in which the replacement part cost increases and the time and effort for the part replacement work increase, thereby suppressing the maintenance cost.

In order to simultaneously achieve the first and second objects, the means described in claim 3 can be employed. According to this means, when the tension acting on the wire is large,
By reducing the pressing force acting on the cleaning member by the pressure adjusting mechanism, the disconnection of the wire is prevented, and when the tension acting on the wire is small, the pressing force acting on the cleaning member is reduced by the pressure adjusting mechanism. By increasing it, it is possible to maximize its cleaning ability. Further, when the contacting portion of the cleaning member with the wire is worn and the cleaning ability is reduced to a limit or more, the moving mechanism changes the wire into a state of contacting the unworn portion of the cleaning member, thereby cleaning the cleaning member. Since the ability can be restored, it is possible to prevent a situation in which the replacement part cost for the cleaning member is increased and the trouble of the part replacement work is increased, and the maintenance cost can be suppressed.

According to the fourth aspect, the pressing force applied to the cleaning member from the pressing mechanism is increased as the traveling speed of the wire increases, so that a large tension acts on the wire. When the vehicle stops running or starts running,
The pressing force is set to a small state, so that disconnection of the wire can be reliably prevented. Further, when the traveling speed is high, that is, when the amount of the slurry to be removed by the cleaning member is increased, the pressing force is increased so that the cleaning ability is increased, so that the slurry can be effectively removed. Become.

According to the fifth aspect, the pressing force applied from the pressing mechanism to the cleaning member is increased or decreased based on whether or not the traveling speed of the wire has exceeded a predetermined value. Prevention of disconnection of the wire and improvement of the cleaning ability by the cleaning member can be accurately realized.

According to the sixth aspect of the present invention, the pressing force applied from the pressing mechanism to the cleaning member varies depending on the traveling direction of the wire. A large pressing force is applied to the cleaning member that comes into contact with the cleaning member that contacts the cleaning wire that contacts the wire from which the slurry has been removed (for example, the wire that travels in the backward direction). By applying a small pressing force to the member, it is possible to obtain a useful function of preventing unnecessary abrasion and damage of the cleaning member.

According to the invention, when the moving mechanism changes the contact position of the cleaning member with the wire and restores its cleaning ability, the change is made by pressing the cleaning member with the pressing mechanism. Since the cleaning is performed while the pressure is applied, the cleaning and removal of the slurry attached to the wire can be continuously performed.

According to the present invention, when the moving mechanism changes the contact position of the pair of cleaning members with the wire and restores its cleaning ability, the cleaning members are moved in opposite directions. Because it is configured to move,
Friction forces in different directions act on the wires from the respective cleaning members pressed against the traveling wires. For this reason, it is possible to prevent a situation in which the traveling position of the wire is shifted (when the paired cleaning members are moved in the same direction, the traveling position of the wire is shifted in that direction).

According to the ninth aspect of the present invention, when the moving mechanism changes the contact position of the pair of cleaning members with the wire and restores the cleaning ability thereof, the pressing mechanism includes:
Since the pressing force on the cleaning member is released once, and the pressing force is applied to the cleaning member when the contact position between the cleaning member and the wire is changed thereafter,
When the cleaning ability of the cleaning member is restored, there is no danger that the running of the wire will be hindered, and the disconnection can be prevented beforehand, and there is no danger that frictional force in a direction different from the normal direction will be applied to the cleaning member, and the careless wear of the cleaning member will be eliminated. Can be prevented beforehand.

According to a tenth aspect of the present invention, the operation of changing the contact position of the pair of cleaning members with the wire and restoring the cleaning ability by the moving mechanism is performed by setting the use history of the wire in advance. When the condition is satisfied or when the setting is performed after the elapse of an arbitrary set time, it is possible to automate the changing process and realize labor saving, and always maintain good cleaning efficiency. become able to.

According to the eleventh aspect, since the slurry removed by the cleaning member is blown off by air, it is possible to prevent the slurry from re-adhering to the wire.

According to the measures of claims 12 and 13,
The cleaning member is made of an elastic material that deforms so as to wrap the wire, or a material that is softer than the wire and is hard to be cut by the wire. Therefore, the cleaning member is easily adapted to the wire and the cleaning property of the attached slurry is improved. In addition, since the cleaning member receives less damage from the wire,
The cleaning member can be expected to have a longer life.

According to the present invention, since the pair of cleaning members are provided so as to be opposed to each other and sandwich the wire, the cleaning member wraps the entire periphery of the wire. be able to. Therefore, the slurry attached to the surface of the wire can be reliably cleaned and removed.

[0021] In order to achieve the first object, a first aspect is provided.
The method described in No. 5 can be adopted. According to this method, one or more cleaning members are brought into contact with the wire located outside the processing mechanism from different directions, and the pressing force acting on the wire from each cleaning member is determined according to the traveling speed of the wire. When the wire is running, the slurry attached to the surface of the wire can be cleaned and removed by wiping the slurry with a cleaning member. In this case, by reducing the pressing force acting on the wire when the tension acting on the wire is large (for example, when the traveling of the wire is stopped and when the traveling is resumed), the disconnection of the wire is prevented. By increasing the pressing force acting on the wire when the tension acting on the wire is small (for example, when the wire is traveling at a constant speed), the cleaning ability can be maximized.

In order to achieve the second object, a first aspect is provided.
The method described in No. 6 can be adopted. With this method,
At least one pair of cleaning members are brought into contact with the wire located outside the processing mechanism from different directions, so that the slurry attached to the surface of the wire is wiped by the cleaning member when the wire runs. Can be cleaned and removed.
In this case, since the contact position of each cleaning member with the wire is changed at a predetermined time, the wire contact portion of the cleaning member is worn out and the cleaning performance is reduced beyond the limit. Is changed to a state in which the cleaning member contacts the unworn portion of the cleaning member, the cleaning ability of the cleaning member can be restored. As a result, the life of the cleaning member can be prolonged, so that it is possible to prevent a situation in which the replacement part cost increases and the time and effort for the part replacement work increase, thereby suppressing the maintenance cost.

In order to simultaneously achieve the first and second objects, the method according to claim 17 can be adopted. According to this method, when the tension acting on the wire is large, the pressing force acting on the cleaning member is reduced to prevent disconnection of the wire, and when the tension acting on the wire is small, the cleaning is performed. By increasing the pressing force acting on the member, it is possible to maximize its cleaning ability. In addition, when the cleaning portion of the cleaning member is worn down due to wear of the contact portion with the wire, the cleaning capability is restored by changing the state in which the wire contacts the unworn portion of the cleaning member at a time when the cleaning capability is reduced beyond the limit. Because it is possible, it is possible to prevent a situation in which the replacement part cost for the cleaning member increases and the trouble of replacing parts increases,
As a result, the maintenance cost can be reduced.

According to the method of the present invention, since the pressing force acting on the wire from the cleaning member is increased as the traveling speed of the wire increases, a large tension acts on the wire. When the traveling is stopped or when the traveling is started, the pressing force is set to a small state, so that the breaking of the wire can be reliably prevented. Further, when the traveling speed is high, that is, when the amount of the slurry to be removed by the cleaning member is increased, the pressing force is increased so that the cleaning ability is increased, so that the slurry can be effectively removed. Become.

According to the method of the nineteenth aspect, the pressing force acting on the wire from the cleaning member is increased and decreased based on whether the traveling speed of the wire has exceeded a predetermined value. Prevention of disconnection and improvement of the cleaning ability by the cleaning member can be accurately realized.

According to the twentieth aspect, the pressing force acting on the wire from the cleaning member is different depending on the traveling direction of the wire. A large pressing force is applied to the cleaning member that contacts the cleaning member that contacts the cleaning member that contacts the wire from which the slurry has been removed (for example, the wire that travels in the backward direction). On the other hand, by applying a small pressing force, it is possible to obtain a useful function of preventing unnecessary abrasion and damage of the cleaning member.

According to the method of the present invention, when restoring the cleaning ability by changing the contact position of the cleaning member with the wire, the change is caused by the pressing force acting on the wire from the cleaning member. Since the cleaning is performed in a state where the wire is kept, the cleaning and removal of the slurry attached to the wire can be continuously performed.

According to the twenty-second aspect, when changing the contact position of the pair of cleaning members with the wire and restoring the cleaning ability thereof, the cleaning members are moved in directions opposite to each other. Therefore, frictional forces in different directions act on the wires from the respective cleaning members pressed against the traveling wires. For this reason, it is possible to prevent a situation in which the traveling position of the wire is shifted (when the paired cleaning members are moved in the same direction, the traveling position of the wire is shifted in that direction).

According to the twenty-third aspect, when the contact position of the pair of cleaning members with the wire is changed and the cleaning ability is restored, the pressing force applied to the wire from the cleaning member is temporarily released. In addition, since the cleaning member applies a pressing force to the wire when the contact position between the cleaning member and the wire is changed thereafter, the running of the wire is hindered when the cleaning capability of the cleaning member is restored. This eliminates the fear and prevents the disconnection of the cleaning member from occurring, and also eliminates the possibility of applying a frictional force to the cleaning member in a direction different from that in a normal state, thereby preventing the inadvertent wear of the cleaning member.

In the operation of restoring the cleaning ability by changing the contact position of the pair of cleaning members with the wire as in the method according to the twenty-fourth aspect, the use history of the wire satisfies a preset condition. When the configuration is performed when or when an arbitrary set time elapses, the change process can be automated, saving labor and realizing good cleaning efficiency at all times. .

According to the method of claim 25, since the slurry removed by the cleaning member is blown off by air, it is possible to prevent the slurry from re-adhering to the wire.

According to the method described in claims 26 and 27,
A cleaning member made of an elastic material that deforms to wrap the wire or a material that is softer than the wire and is hard to be cut by the wire is configured to contact the wire. The cleaning property of the slurry is improved. In addition, since the cleaning member receives less damage from the wire, a longer life of the cleaning member can be expected.

According to the method of the twenty-eighth aspect, the pair of cleaning members are disposed so as to face each other and sandwich the wire, so that the entire circumference of the wire is wrapped by the cleaning members. be able to. Therefore, the slurry attached to the surface of the wire can be reliably cleaned and removed.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A plurality of embodiments of a wire saw cleaning apparatus and a wire saw cleaning method according to the present invention will be described below with reference to the drawings. (First Embodiment) FIGS. 1 and 2 show a first embodiment of the present invention. First, in FIG. 2 schematically showing a schematic structure of a wire saw, a cutting mechanism 1 (corresponding to a processing mechanism in the present invention) of a wire saw (multi-wire saw) has three triangularly arranged parallel arrangements. The processing rollers 2 to 4 and one wire 5 are provided, and the wire 5 has a large number of annular grooves (not shown) formed in parallel at a predetermined pitch on the outer peripheral surface of each of the processing rollers 2 to 4. Continuously wound. In this case, both ends of the wire 5 pulled out from the cutting mechanism unit 1 are guided by a group of guide rollers 6 into a cleaning device 7, which will be described later, and then wound around a winding and unwinding reel (not shown). . still,
Although not shown, a predetermined tension is applied to the wire 5 through a tension applying mechanism.

The processing roller 2 functions as a driving roller that is driven to rotate by a wire traveling motor 8.
The other processing rollers 3 and 4 are configured to function as driven rollers that are rotated via wires 5. And
A work table 9 is disposed in a region corresponding to a region between the processing rollers 3 and 4 so as to be vertically movable, and a work 10 set on the work table 8 (corresponding to a work material: for example, a single crystal) The semiconductor ingot) is moved in the direction of the arrow A in the figure according to the feed operation of the work table 9 during the operation of the cutting mechanism 1. When the cutting mechanism 1 is operated, the wire 5 is reciprocated in a straight line between the processing rollers 3 and 4 and is pressed against and contacts the work 10. In this case, loose abrasive grains such as diamond powder are used. Is supplied from the slurry tank to the surface of the wire 5 through a slurry supply nozzle (neither is shown). Thereby, the work 10 is sliced by the lapping action of the loose abrasive particles attached to the surface of the wire 5. In addition, the reciprocation of the wire 5 is such that the wire 5 travels forward in a single direction by repeating an operation in which the wire 5 travels in a forward direction and then travels in a backward direction by a smaller amount. Will be

FIG. 1 shows the external structure of the cleaning device 7, which will be described below. The main body case 11 of the cleaning device 7 has openings (only the front opening 11a is shown) on the front surface and the rear surface through which the wire 5 passes, and the cover 12 shown by a two-dot chain line so as to close these. Are respectively mounted.
The cover 12 has a slit 12a formed by cutting out a portion through which the wire 5 passes.

The wire 5 is routed so as to penetrate substantially the center of the main body case 11, and an annular shape (thick short cylindrical shape) is sandwiched between the wires 5 from above and below. A pair of cleaning members 13 and 14 made of an elastic material are coaxially opposed to each other. In this case, each cleaning member 1
Reference numerals 3 and 14 are arranged so that the wire 5 passes through a position corresponding to the central axis. That is,
The cleaning members 13 and 14 are provided so as to face each other and sandwich the wire 5. The material used for the cleaning member 13 is desirably urethane rubber. However, if the slurry attached to the wire 5 can be removed,
An elastic material such as felt, silicon rubber, or soft metal may be used. In short, a material that is deformed so as to enclose the wire 5 and that is softer than the wire 5 and hard to be cut by the wire 5 is preferable.

The cleaning members 13 and 14 are fixed to the disk-shaped upper plate portion 15 and lower plate portion 16 by screws. The upper plate portion 15 is configured to be rotatable about a central axis and reciprocable in the vertical direction by a rotation / up / down movement mechanism 17 (equivalent to a pressing mechanism, a pressure adjustment mechanism, and a movement mechanism in the present invention) incorporating a motor. It has been. Further, the lower plate portion 16 is also rotatable about the central axis and reciprocable in the vertical direction by a rotation / up / down movement mechanism 18 (equivalent to a pressing mechanism, a pressure adjustment mechanism, and a movement mechanism) incorporating a motor. It has been. As a result of the provision of the rotation / up / down movement mechanisms 17 and 18, the cleaning members 13 and 14 can be brought into press contact with the wire 5 from above and below. In such a contact state, the cleaning members 13 and 14 adhere to the surface of the wire 5. The slurry that has been cleaned is removed according to the traveling. Further, during such a cleaning operation of the wire 5, the rotation / up / down movement mechanism 1
By changing the amount of vertical movement of the upper plate portion 15 and the lower plate portion 16 by using the cleaning members 13 and 18,
And 14, the pressure applied to the wire 5 can be adjusted.

On the other hand, the slurry removed from the wire 5 accumulates at the contact positions of the cleaning members 13 and 14 with the wire 5, so that when the wire 5 subsequently travels in the backward direction, the wire 5 There is a risk of redeposition. Therefore, in order to eliminate the retained slurry,
An air nozzle 19 (corresponding to an air supply device) is provided. The air nozzle 19 is provided so as to blow air toward the position where the wire 5 contacts the cleaning members 13 and 14 from the cutting mechanism 1 side. Specifically, in FIG. 1, the cleaning members 13 and 1
4 shows only the air nozzle 19 provided at a position where the wire 5 comes into contact with the cutting mechanism 1 from the outer peripheral edge, but in actuality, the wire 5 of the inner peripheral edge of the cleaning members 13 and 14 is not shown. An air nozzle (not shown) for blowing air is also provided at a position (a position corresponding to the central space between the cleaning members 13 and 14) that comes into contact with the cutting mechanism 1 side.

Since the slurry blown off by the above-described blowing of the air falls onto the support plate 20 provided below, the support plate 20 has an inclined portion 20a for guiding the slurry to the front opening. The blown slurry is returned from the inclined portion 20a to a slurry tank (not shown). As described above, since the cover 12 having the slit 12a formed by cutting out the portion through which the wire 5 passes is attached to the opening 11a of the main body case 11, the blowing direction of the air nozzle 19 is appropriate. Even if it deviates from
The situation in which the blown-out slurry is scattered to the outside can be effectively prevented by the cover 12.

The rotation / up / down movement mechanisms 17 and 18 of the cleaning device 7 are configured to operate as follows.

When the wire 5 is pulled inside, the upper plate 15 and the lower plate 16 are moved downward and upward, respectively, so that the cleaning members 13 and 1 are moved.
A pressing force is applied to the wire 4 in the direction of contact with the wire 5 (the wire 5 is sandwiched between the cleaning members 13 and 14 from above and below). At this time, in a state where the wire 5 having the slurry attached to the surface travels in the direction of arrow B in FIG. 1 (this is referred to as the forward direction), the cleaning members 13 and 14 do not hinder the travel of the wire 5 and the slurry 5 And an appropriate level of pressing force that can sufficiently remove the toner. Also,
In a state where the wire 5 travels in the direction indicated by the arrow B (backward direction), that is, in a state where the slurry hardly adheres to the surface of the wire 5, the pressing force level is smaller than when the wire 5 travels in the direction of the arrow B. I do.

When the traveling direction of the wire 5 is reversed, when the traveling speed of the wire 5 becomes less than a predetermined value due to the reversal, the pressing force acting on the wire 5 from the cleaning members 13 and 14 is reduced. The pressing force is set to zero when the wire 5 stops running. After this, wire 5
When the traveling in the reverse direction is started, when the traveling speed becomes a predetermined value or more, the pressing force acting on the wire 5 from the cleaning members 13 and 14 is adjusted to a level corresponding to the traveling direction of the wire 5. (See above). However, when the traveling of the wire 5 is stopped, it is not necessary to set the pressing force to zero, and the pressing force may be set to a pressing force that can prevent the wire 5 from being disconnected due to excessive tension. It depends on the wire diameter of the wire 5 and the set wire tension. In short, the pressing force applied to the cleaning members 13 and 14 may be controlled so as to increase as the traveling speed of the wire 5 increases.

When the usage history of the wire 5 (for example, the total driving time, or the total driving time corrected in consideration of the traveling speed or the traveling direction) satisfies a preset condition, or an arbitrary set time has elapsed. At this time, the contact positions of the cleaning members 13 and 14 with the wire 5 are changed by rotating the upper plate portion 15 and the lower plate portion 16 by a predetermined angle. In this case, in the present embodiment, when the upper plate portion 15 and the lower plate portion 16 are rotated as described above, the rotation is performed while the pressing force is applied to the wire 5 from the cleaning members 13 and 14. It is done in. Further, in this embodiment, when the upper plate portion 15 and the lower plate portion 16 are rotated as described above, they are rotated in different directions (directions of arrows C and C ′), that is, the cleaning members 13 and 14 are rotated. Are rotated in directions opposite to each other.

Therefore, according to the above-described embodiment, the following operations and effects can be obtained. That is, the pair of cleaning members 13 and 14 are brought into contact with the wire 5 traveling outside the cutting mechanism 11 from both sides, and the pressing force acting on the wire 5 from each of the cleaning members 13 and 14 is applied to the wire 5. Therefore, when the wire 5 travels, the slurry adhered to the surface of the wire 5 can be effectively cleaned and removed by wiping it with the cleaning members 13 and 14. In this case, the pressing force acting on the wire 5 from the cleaning members 13 and 14 is changed to the tension acting on the wire 5 such as when the traveling speed of the wire 5 becomes less than a predetermined value (when traveling is stopped and traveling is resumed). Is reduced or set to zero when is large, it is possible to effectively prevent the wire 5 from being disconnected due to excessive tension. Further, when the running speed of the wire 5 returns to a predetermined value or more thereafter, the pressing force acting on the wire 5 is increased, so that the cleaning ability is enhanced, so that the slurry can be effectively removed. Therefore, the cleaning ability can be maximized. And like this,
Since the increase and decrease of the pressing force acting on the wire 5 are performed based on whether or not the traveling speed of the wire 5 is equal to or higher than a predetermined value, it is possible to prevent disconnection of the wire 5 and improve the cleaning ability by the cleaning member accurately. It becomes feasible.

In this case, the pair of cleaning members 13 and 14
Are provided so as to face each other and sandwich the wire 5 therebetween, so that the entire periphery of the wire 5 can be wrapped by the cleaning members 13 and 14. Therefore, the slurry attached to the surface of the wire 5 can be reliably cleaned and removed. Moreover, since the cleaning members 13 and 14 are made of an elastic material that deforms so as to wrap the wire 5 or a material that is softer than the wire 5 and hard to be cut by the wire 5, the cleaning members 13 and 14 It is easy to adjust to, and the cleaning property of the adhered slurry is enhanced. Further, the cleaning member 13
And 14 also receive less damage from the wire 5, so that a longer life can be expected. Further, since the slurry removed by the cleaning members 13 and 14 is blown off by air, it is possible to prevent the slurry from adhering to the wire 5 beforehand.

The pressing force acting on the wire 5 from the cleaning members 13 and 14 differs according to the running direction of the wire 5, specifically, the wire 5 having the surface on which the slurry adheres.
When the wire 5 travels in the direction of arrow B in FIG. 1, a relatively large pressing force acts. Is reduced. As a result, a large pressing force is applied to the cleaning members 13 and 14 that come into contact with the wire 5 to which the slurry has adhered, thereby ensuring sufficient cleaning performance, and the cleaning members 13 and 14 that come into contact with the wire 5 from which the slurry has been removed. By applying a small pressing force to the cleaning member 14, a useful function of preventing unnecessary cleaning and damage of the cleaning members 13 and 14 can be obtained, and the life of the cleaning members 13 and 14 can be extended.

At a predetermined time, that is, when the wire 5
When the usage history of the cleaning member 13 satisfies a preset condition or when an arbitrary set time has elapsed, each cleaning member 13
And 14, the contact position with the wire 5 in the cleaning member 13 and 14 is changed. Therefore, when the contact portion of the cleaning members 13 and 14 with the wire 5 is worn and the cleaning ability is reduced to a limit or more, the cleaning member 13 5 in and 5
The contact position is changed to an unworn part, and the cleaning ability is restored. As a result, the life of the cleaning members 13 and 14 can be prolonged, so that it is possible to prevent a situation in which the replacement part cost increases and the time and effort for the part replacement work increase, thereby suppressing the maintenance cost. become. Of course, it is not necessary to replace the cleaning member during the cutting process by the cutting mechanism 1, so that the cutting process can be performed efficiently. Also, like this:
According to the configuration in which the contact position of each of the cleaning members 13 and 14 with the wire 5 is changed when the usage history of the wire 5 satisfies a preset condition or when an arbitrary set time has elapsed, the change step is omitted. It is possible to achieve automation and save labor, and to always maintain good cleaning efficiency.

In this case, when restoring the cleaning ability by changing the contact positions of the cleaning members 13 and 14 with the wire 5 as described above, the change is made by the cleaning members 13 and 14 Since the cleaning is performed while the pressing force is acting, the slurry attached to the wire 5 can be continuously cleaned and removed, which is beneficial in always exerting the cleaning effect. Moreover, at this time, since the cleaning members 13 and 14 are configured to be rotated in directions opposite to each other, the cleaning members 13 and 14 pressed against the traveling wire 5 move in the opposite direction to the wire 5. Frictional force acts. Therefore, it is possible to prevent a situation in which the traveling position of the wire 5 shifts (when the pair of cleaning members 13 and 14 are rotated in the same direction, the traveling position of the wire 5 is shifted in that direction).

An air nozzle 19 for preventing the slurry 5 from reattaching to the wire 5 is provided, an inclined portion 20a for returning the blown slurry to the slurry tank, and a cover 12 for preventing the slurry from scattering to the outside. Is provided, the amount of recovered slurry is increased, and wasteful cost increase can be suppressed. Incidentally, two cleaning devices 7 according to the present embodiment are prepared and arranged as shown in FIG. 2, and the cutting operation of the work 10 by the cutting mechanism 1 is performed for 15 hours. , About 5 liters of slurry was reduced, but in this example, about 50 milliliters was reduced.

(Second Embodiment) In the first embodiment described above, the cleaning members 13 and 14 having a ring shape are arranged coaxially and opposed to each other, and are rotated around the central axis. As shown in FIG. 3 showing the second embodiment of the present invention, rectangular cleaning members 21 and 22 are prepared, and they are arranged so as to be in contact with the wire 5 from both sides, and the pressing force in the direction of the wire 5 is reduced. The cleaning member 2
When the contact positions of the wires 1 and 22 with the wire 5 are changed, they may be moved by a predetermined amount in the directions of arrows D and D 'opposite to each other as shown in FIG.

(Third Embodiment) FIG. 4 shows a third embodiment of the present invention. In FIG. 4, the cleaning members 23 and 24 having a ring shape are respectively provided with disks 25 and 26, respectively.
It is supported on the outer periphery. In this case, disks 25 and 26
Are arranged in parallel with the running direction of the wire 5, so that the outer peripheral surfaces of the cleaning members 23 and 24 contact the wire 5 from both sides, and the cleaning members 23 and 24 move in the direction of the wire 5 through the disks 25 and 26. The configuration is such that a pressing force is applied. Then, when changing the contact positions of the cleaning members 23 and 24 with the wire 5, they are rotated by a predetermined angle in the directions of the arrows E and E 'opposite to each other as shown in FIG.

(Fourth Embodiment) FIG. 5 shows a fourth embodiment of the present invention. In FIG. 5, the pair of cleaning members 27 and 28 are formed in a long sheet shape, and both ends are wound around corresponding winding shafts 27a, 27b and 28a, 28b. Cleaning member 2
The wires 7 and 28 are arranged crosswise on both sides of the wire 5, and have a configuration in which an intermediate portion is brought into contact with the wire 5 by a pair of pressing rollers 29 and 30. When changing the contact position of each of the cleaning members 27 and 28 with the wire 5, as shown in FIG.
Is wound up by a predetermined amount in the directions of the arrows F and F 'opposite to each other.

(Other Embodiments) The present invention is not limited to the above-described embodiments, but can be modified or expanded as follows. In the first embodiment, the operation of changing the contact position of the cleaning members 13 and 14 with the wire 5 (the operation of rotating the upper plate portion 15 and the lower plate portion 16) is performed by the cleaning members 13 and 14 from the wire 5.
, While the pressing force is acting on the cleaning members 13 and 14 by the rotation / up / down movement mechanisms 17 and 18.
And once release the pressing force acting on the wire 5,
After that, when the contact position of the cleaning members 13 and 14 with the wire 5 is changed, the above-mentioned pressing may be applied again (in this case, the rotation directions of the upper plate portion 15 and the lower plate portion 16 are the same. May be). According to such a configuration, when restoring the cleaning ability of the cleaning members 13 and 14, there is no possibility that the running of the wire 5 is obstructed, and the disconnection can be prevented beforehand. The frictional force in the direction (circumferential direction) different from the direction (diameter direction) is not applied, so that careless wear can be prevented beforehand. A plurality of pairs of cleaning members 13 and 14, 21 and 22, 23 and 24, 27 and 28 may be provided. According to this configuration, the cleaning property can be further improved.

[Brief description of the drawings]

FIG. 1 is a perspective view of a cleaning device showing a first embodiment of the present invention.

FIG. 2 is a perspective view schematically showing a schematic structure of a wire saw.

FIG. 3 is a perspective view of a main part showing a second embodiment of the present invention.

FIG. 4 is a perspective view of a main part showing a third embodiment of the present invention.

FIG. 5 is a perspective view of a main part showing a fourth embodiment of the present invention.

FIG. 6 is a sectional view of a main part for explaining a conventional example.

FIG. 7 is a perspective view of a main part for explaining a different conventional example.

[Explanation of symbols]

1 is a cutting mechanism (processing mechanism), 2 to 4 are processing rollers, 5 is a wire, 7 is a cleaning device, 10 is a work (workpiece), 11 is a main body case, 12 is a cover, 12a is a slit, 13 and 14 are cleaning members, 17 and 18 are rotation / up / down movement mechanisms (pressing mechanism, pressure adjustment mechanism, movement mechanism), 19
Are air nozzles (air supply devices), 21, 22, 23, 2
Reference numerals 4, 27 and 28 denote cleaning members.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Michio Kameyama 1-1-1, Showa-cho, Kariya-shi, Aichi Prefecture Inside Denso Corporation (72) Inventor Masaki Matsui 1-1-1, Showa-cho, Kariya-shi, Aichi Co., Ltd. F term in DENSO (reference) 3B116 AA07 AB37 AB53 BA01 BA12 BB21 BB88 3C047 FF09 HH00 3C058 AA05 AC05 BA04 BA05 BC02 CB03 CB05 DA03 DA17 3C069 AA01 BA06 CA03 EA01 EA03

Claims (28)

[Claims] 1. A wire saw having a processing mechanism for cutting a workpiece by running a wire while supplying a slurry containing free abrasive grains to a surface thereof, wherein the wire saw is different from a wire located outside the processing mechanism. A pair of cleaning members contacted from different directions, a pressing mechanism for applying a pressing force in the wire direction to the cleaning members, and a pressure adjustment for changing the pressing force by the pressing mechanism in accordance with the traveling speed of the wire. A wire saw cleaning device comprising a mechanism. 2. A wire saw provided with a processing mechanism for cutting a workpiece by running a wire while supplying a slurry containing free abrasive grains to a surface thereof, wherein the wire saw is different from a wire located outside the processing mechanism. A pair of cleaning members that are contacted from different directions, a pressing mechanism that applies a pressing force in the wire direction to the cleaning members, and a moving mechanism that changes a contact position of the cleaning members with the wires. An apparatus for cleaning a wire saw. 3. A wire saw provided with a processing mechanism for cutting a workpiece by running a wire while supplying a slurry containing free abrasive grains to a surface thereof, wherein the wire saw differs from a wire located outside the processing mechanism. A pair of cleaning members contacted from different directions, a pressing mechanism for applying a pressing force in the wire direction to the cleaning members, and a pressure adjustment for changing the pressing force by the pressing mechanism in accordance with the traveling speed of the wire. A wire saw cleaning device, comprising: a mechanism; and a moving mechanism that changes a contact position of each of the cleaning members with the wire. 4. The wire saw cleaning device according to claim 1, wherein the pressure adjusting mechanism increases the pressing force of the pressing mechanism as the traveling speed of the wire increases. Cleaning device. 5. The cleaning device for a wire saw according to claim 4, wherein the pressure adjusting mechanism increases the pressing force by the pressing mechanism when the traveling speed of the wire becomes equal to or higher than a predetermined value. An apparatus for cleaning a wire saw, wherein a pressing force by a pressing mechanism is reduced when the pressure is increased. 6. The wire saw cleaning device according to claim 1, wherein the pressure adjusting mechanism varies a pressing force of the pressing mechanism according to a traveling direction of the wire. A cleaning device for a wire saw. 7. The cleaning device for a wire saw according to claim 2, wherein the moving mechanism contacts the cleaning member with the wire in a state where a pressing force by the pressing mechanism is applied to the cleaning member. A wire saw cleaning device characterized by changing a position. 8. The wire saw cleaning device according to claim 7, wherein the moving mechanism moves the cleaning members in opposite directions when changing a contact position of the pair of cleaning members with the wire. An apparatus for cleaning a wire saw. 9. The cleaning device for a wire saw according to claim 2, wherein the pressing mechanism releases a pressing force on the cleaning member when the moving mechanism performs an operation of changing a contact position with the wire. And a pressing force applied to the cleaning member when the position of contact with the wire is changed by the moving mechanism thereafter. 10. The wire saw cleaning device according to claim 2, wherein the moving mechanism satisfies a condition in which a use history of the wire satisfies a preset condition, or An apparatus for cleaning a wire saw, wherein an operation of changing a contact position of the cleaning member with the wire is performed when an arbitrary set time has elapsed. 11. The air supply device according to claim 1, further comprising an air supply device that blows air toward a position where the wire contacts the cleaning member from a side of the processing mechanism. Wire saw cleaning device. 12. The wire saw cleaning apparatus according to claim 1, wherein the cleaning member is made of an elastic material that deforms so as to surround the wire. 13. The cleaning apparatus according to claim 12, wherein the cleaning member is made of a material that is softer than the wire and hard to be cut by the wire. 14. The wire saw cleaning apparatus according to claim 1, wherein said pair of cleaning members are disposed so as to face each other and sandwich said wire. 15. A wire saw provided with a processing mechanism for cutting a workpiece by running a wire while supplying a slurry containing free abrasive grains to a surface of the wire, wherein a wire located outside the processing mechanism is provided. A method for cleaning a wire saw, comprising: bringing a pair of cleaning members into contact with each other from different directions; and changing a pressing force applied to the wire from each of the cleaning members according to a traveling speed of the wire. 16. A wire saw provided with a processing mechanism for cutting a workpiece by running a wire while supplying a slurry containing free abrasive grains to the surface thereof, wherein the wire is located outside the processing mechanism. A method for cleaning a wire saw, comprising: bringing a pair of cleaning members into contact with each other from different directions, and changing a contact position of each cleaning member with the wire at a predetermined time. 17. A wire saw provided with a processing mechanism for cutting a workpiece by running a wire while supplying a slurry containing free abrasive grains to a surface of the wire, wherein the wire is positioned outside the processing mechanism. A pair of cleaning members are brought into contact with each other from different directions, and the pressing force applied to the wire from each of the cleaning members is changed according to the traveling speed of the wire. A method for cleaning a wire saw, comprising: changing a contact position of a wire saw. 18. The wire saw cleaning method according to claim 15, wherein the pressing force applied to the wire from the cleaning member is increased as the traveling speed of the wire increases. Method. 19. The method for cleaning a wire saw according to claim 18, wherein a pressing force acting on the wire from the cleaning member when the traveling speed of the wire becomes equal to or more than a predetermined value,
A method for cleaning a wire saw, comprising: reducing a pressing force acting on a wire from the cleaning member when the cleaning force is less than a predetermined value. 20. The method for cleaning a wire saw according to claim 15, wherein a pressing force acting on the wire from the cleaning member is made different according to a traveling direction of the wire. A method for cleaning a wire saw. 21. The method for cleaning a wire saw according to claim 16 or 17, wherein a contact position of the cleaning member with the wire is changed in a state where a pressing force is acting on the wire from the cleaning member. A method for cleaning a wire saw. 22. The method for cleaning a wire saw according to claim 21, wherein when changing a contact position of the pair of cleaning members with the wire, the cleaning members are moved in opposite directions. How to clean the wire saw. 23. The method for cleaning a wire saw according to claim 16, wherein when changing a contact position of the cleaning member with the wire, a pressing force acting on the wire from the cleaning material is released, and thereafter, A pressing force is applied from the cleaning member to the wire when the contact position of the cleaning member with the wire is changed. 24. The method of claim 16, 17, 21, 22, or 23.
In the wire saw cleaning method according to any one of the above, when the usage history of the wire satisfies a preset condition, or when an arbitrary set time has elapsed, a contact position of the cleaning member with the wire is changed. A method for cleaning a wire saw, comprising: 25. The wire saw cleaning method according to claim 15, wherein air is blown toward the cleaning member at a position where the wire comes into contact with the processing mechanism from the processing mechanism side. 26. The method for cleaning a wire saw according to claim 15, wherein a cleaning member made of an elastic material that deforms so as to surround the wire is brought into contact with the wire. 27. The method for cleaning a wire saw according to claim 26, wherein a cleaning member made of a material softer than the wire and hard to be cut by the wire is brought into contact with the wire. 28. The cleaning of a wire saw according to claim 15, wherein said pair of cleaning members are arranged to face each other and abut against said wire while sandwiching said pair of cleaning members. Method.