JPH11271341A - カンチレバー変位検出装置 - Google Patents
カンチレバー変位検出装置Info
- Publication number
- JPH11271341A JPH11271341A JP7392198A JP7392198A JPH11271341A JP H11271341 A JPH11271341 A JP H11271341A JP 7392198 A JP7392198 A JP 7392198A JP 7392198 A JP7392198 A JP 7392198A JP H11271341 A JPH11271341 A JP H11271341A
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- light
- displacement
- displacement detection
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 60
- 238000001514 detection method Methods 0.000 title claims abstract description 21
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 8
- 239000000523 sample Substances 0.000 description 55
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7392198A JPH11271341A (ja) | 1998-03-23 | 1998-03-23 | カンチレバー変位検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7392198A JPH11271341A (ja) | 1998-03-23 | 1998-03-23 | カンチレバー変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11271341A true JPH11271341A (ja) | 1999-10-08 |
| JPH11271341A5 JPH11271341A5 (enExample) | 2005-08-11 |
Family
ID=13532114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7392198A Pending JPH11271341A (ja) | 1998-03-23 | 1998-03-23 | カンチレバー変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11271341A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006090593A1 (ja) * | 2005-02-24 | 2006-08-31 | Sii Nanotechnology Inc. | 走査型プローブ顕微鏡用変位検出機構およびこれを用いた走査型プローブ顕微鏡 |
-
1998
- 1998-03-23 JP JP7392198A patent/JPH11271341A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006090593A1 (ja) * | 2005-02-24 | 2006-08-31 | Sii Nanotechnology Inc. | 走査型プローブ顕微鏡用変位検出機構およびこれを用いた走査型プローブ顕微鏡 |
| US7614287B2 (en) | 2005-02-24 | 2009-11-10 | Sii Nanotechnology Inc. | Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same |
| JP5305650B2 (ja) * | 2005-02-24 | 2013-10-02 | 株式会社日立ハイテクサイエンス | 走査型プローブ顕微鏡用変位検出機構およびこれを用いた走査型プローブ顕微鏡 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Effective date: 20050126 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050126 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060627 |
|
| A521 | Written amendment |
Effective date: 20060721 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20070313 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Effective date: 20070724 Free format text: JAPANESE INTERMEDIATE CODE: A02 |