JPH11271341A5 - - Google Patents

Info

Publication number
JPH11271341A5
JPH11271341A5 JP1998073921A JP7392198A JPH11271341A5 JP H11271341 A5 JPH11271341 A5 JP H11271341A5 JP 1998073921 A JP1998073921 A JP 1998073921A JP 7392198 A JP7392198 A JP 7392198A JP H11271341 A5 JPH11271341 A5 JP H11271341A5
Authority
JP
Japan
Prior art keywords
light
cantilever
displacement detection
detection device
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998073921A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11271341A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP7392198A priority Critical patent/JPH11271341A/ja
Priority claimed from JP7392198A external-priority patent/JPH11271341A/ja
Publication of JPH11271341A publication Critical patent/JPH11271341A/ja
Publication of JPH11271341A5 publication Critical patent/JPH11271341A5/ja
Pending legal-status Critical Current

Links

JP7392198A 1998-03-23 1998-03-23 カンチレバー変位検出装置 Pending JPH11271341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7392198A JPH11271341A (ja) 1998-03-23 1998-03-23 カンチレバー変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7392198A JPH11271341A (ja) 1998-03-23 1998-03-23 カンチレバー変位検出装置

Publications (2)

Publication Number Publication Date
JPH11271341A JPH11271341A (ja) 1999-10-08
JPH11271341A5 true JPH11271341A5 (enExample) 2005-08-11

Family

ID=13532114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7392198A Pending JPH11271341A (ja) 1998-03-23 1998-03-23 カンチレバー変位検出装置

Country Status (1)

Country Link
JP (1) JPH11271341A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305650B2 (ja) 2005-02-24 2013-10-02 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡用変位検出機構およびこれを用いた走査型プローブ顕微鏡

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