JPH11269636A5 - - Google Patents

Info

Publication number
JPH11269636A5
JPH11269636A5 JP1998078958A JP7895898A JPH11269636A5 JP H11269636 A5 JPH11269636 A5 JP H11269636A5 JP 1998078958 A JP1998078958 A JP 1998078958A JP 7895898 A JP7895898 A JP 7895898A JP H11269636 A5 JPH11269636 A5 JP H11269636A5
Authority
JP
Japan
Prior art keywords
positions
return electrode
insulating tube
cross
electron return
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998078958A
Other languages
English (en)
Japanese (ja)
Other versions
JP4074370B2 (ja
JPH11269636A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP07895898A priority Critical patent/JP4074370B2/ja
Priority claimed from JP07895898A external-priority patent/JP4074370B2/ja
Priority to TW88112473A priority patent/TW473553B/zh
Publication of JPH11269636A publication Critical patent/JPH11269636A/ja
Publication of JPH11269636A5 publication Critical patent/JPH11269636A5/ja
Application granted granted Critical
Publication of JP4074370B2 publication Critical patent/JP4074370B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP07895898A 1998-03-26 1998-03-26 真空成膜装置 Expired - Lifetime JP4074370B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP07895898A JP4074370B2 (ja) 1998-03-26 1998-03-26 真空成膜装置
TW88112473A TW473553B (en) 1998-03-26 1999-07-22 Vacuum coating forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07895898A JP4074370B2 (ja) 1998-03-26 1998-03-26 真空成膜装置

Publications (3)

Publication Number Publication Date
JPH11269636A JPH11269636A (ja) 1999-10-05
JPH11269636A5 true JPH11269636A5 (enrdf_load_html_response) 2005-07-21
JP4074370B2 JP4074370B2 (ja) 2008-04-09

Family

ID=13676413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07895898A Expired - Lifetime JP4074370B2 (ja) 1998-03-26 1998-03-26 真空成膜装置

Country Status (1)

Country Link
JP (1) JP4074370B2 (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4287936B2 (ja) * 1999-02-01 2009-07-01 中外炉工業株式会社 真空成膜装置
JP5350911B2 (ja) * 2008-07-31 2013-11-27 キヤノンアネルバ株式会社 プラズマ発生装置及び成膜装置並びに成膜方法及び表示素子の製造方法
JP5421438B1 (ja) 2012-08-15 2014-02-19 中外炉工業株式会社 プラズマ処理装置

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