JPH11261122A5 - - Google Patents

Info

Publication number
JPH11261122A5
JPH11261122A5 JP1998063211A JP6321198A JPH11261122A5 JP H11261122 A5 JPH11261122 A5 JP H11261122A5 JP 1998063211 A JP1998063211 A JP 1998063211A JP 6321198 A JP6321198 A JP 6321198A JP H11261122 A5 JPH11261122 A5 JP H11261122A5
Authority
JP
Japan
Prior art keywords
electrode material
layer
layers
holes
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998063211A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11261122A (ja
JP3867823B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP6321198A priority Critical patent/JP3867823B2/ja
Priority claimed from JP6321198A external-priority patent/JP3867823B2/ja
Priority to US09/251,494 priority patent/US6291932B1/en
Publication of JPH11261122A publication Critical patent/JPH11261122A/ja
Priority to US09/597,727 priority patent/US6668437B1/en
Priority to US10/700,852 priority patent/US6951048B2/en
Publication of JPH11261122A5 publication Critical patent/JPH11261122A5/ja
Application granted granted Critical
Publication of JP3867823B2 publication Critical patent/JP3867823B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP6321198A 1998-02-17 1998-03-13 積層圧電素子の製造方法 Expired - Fee Related JP3867823B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6321198A JP3867823B2 (ja) 1998-03-13 1998-03-13 積層圧電素子の製造方法
US09/251,494 US6291932B1 (en) 1998-02-17 1999-02-17 Stacked piezoelectric element and producing method therefor
US09/597,727 US6668437B1 (en) 1998-02-17 2000-06-19 Method for producing a stacked piezoelectric element
US10/700,852 US6951048B2 (en) 1998-02-17 2003-11-05 Method for producing a stacked piezoelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6321198A JP3867823B2 (ja) 1998-03-13 1998-03-13 積層圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JPH11261122A JPH11261122A (ja) 1999-09-24
JPH11261122A5 true JPH11261122A5 (https=) 2005-06-30
JP3867823B2 JP3867823B2 (ja) 2007-01-17

Family

ID=13222649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6321198A Expired - Fee Related JP3867823B2 (ja) 1998-02-17 1998-03-13 積層圧電素子の製造方法

Country Status (1)

Country Link
JP (1) JP3867823B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5031153B2 (ja) * 2001-07-31 2012-09-19 キヤノン株式会社 積層電気−機械エネルギー変換素子および振動波駆動装置
DE10307825A1 (de) * 2003-02-24 2004-09-09 Epcos Ag Elektrisches Vielschichtbauelement und Schichtstapel
JP5074674B2 (ja) * 2005-07-04 2012-11-14 キヤノン株式会社 積層圧電素子および振動波モータ

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