JPH11248719A5 - - Google Patents

Info

Publication number
JPH11248719A5
JPH11248719A5 JP1998053910A JP5391098A JPH11248719A5 JP H11248719 A5 JPH11248719 A5 JP H11248719A5 JP 1998053910 A JP1998053910 A JP 1998053910A JP 5391098 A JP5391098 A JP 5391098A JP H11248719 A5 JPH11248719 A5 JP H11248719A5
Authority
JP
Japan
Prior art keywords
revolute pair
fixed
output
piezoelectric element
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998053910A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11248719A (ja
JP3897893B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP05391098A priority Critical patent/JP3897893B2/ja
Priority claimed from JP05391098A external-priority patent/JP3897893B2/ja
Publication of JPH11248719A publication Critical patent/JPH11248719A/ja
Publication of JPH11248719A5 publication Critical patent/JPH11248719A5/ja
Application granted granted Critical
Publication of JP3897893B2 publication Critical patent/JP3897893B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP05391098A 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置 Expired - Fee Related JP3897893B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05391098A JP3897893B2 (ja) 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05391098A JP3897893B2 (ja) 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置

Publications (3)

Publication Number Publication Date
JPH11248719A JPH11248719A (ja) 1999-09-17
JPH11248719A5 true JPH11248719A5 (enFirst) 2005-03-17
JP3897893B2 JP3897893B2 (ja) 2007-03-28

Family

ID=12955882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05391098A Expired - Fee Related JP3897893B2 (ja) 1998-03-05 1998-03-05 変位拡大装置およびこれを用いた微小領域走査装置

Country Status (1)

Country Link
JP (1) JP3897893B2 (enFirst)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4343879B2 (ja) * 1999-09-27 2009-10-14 キヤノン株式会社 切削加工方法
JP3815789B1 (ja) * 2005-03-11 2006-08-30 株式会社マコメ研究所 変位伝達装置
JP4958139B2 (ja) * 2006-02-14 2012-06-20 日置電機株式会社 変位最終出力端付きの変位拡大機構および該変位拡大機構を具備させた処理装置
JP5487462B2 (ja) * 2008-07-11 2014-05-07 国立大学法人秋田大学 作動変換型変位拡大装置
CN102904481A (zh) * 2012-03-08 2013-01-30 中南大学 一种螺旋型紧凑位移放大装置
CN107131404B (zh) * 2017-04-24 2019-03-19 天津大学 单驱双摆式纯转动微定位平台

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