DK1300714T3 - Omskifterindrening, især til anvendelse indenfor optikken - Google Patents

Omskifterindrening, især til anvendelse indenfor optikken

Info

Publication number
DK1300714T3
DK1300714T3 DK02079138T DK02079138T DK1300714T3 DK 1300714 T3 DK1300714 T3 DK 1300714T3 DK 02079138 T DK02079138 T DK 02079138T DK 02079138 T DK02079138 T DK 02079138T DK 1300714 T3 DK1300714 T3 DK 1300714T3
Authority
DK
Denmark
Prior art keywords
mobile element
actuating electrode
switching position
elastic member
predetermined switching
Prior art date
Application number
DK02079138T
Other languages
English (en)
Inventor
Carsten Underbjerg
Claude Bourgeois
Original Assignee
Colibrys S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Colibrys S A filed Critical Colibrys S A
Application granted granted Critical
Publication of DK1300714T3 publication Critical patent/DK1300714T3/da

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Semiconductor Lasers (AREA)
  • Gyroscopes (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Adhesives Or Adhesive Processes (AREA)
DK02079138T 2001-10-04 2002-10-03 Omskifterindrening, især til anvendelse indenfor optikken DK1300714T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP01203749 2001-10-04
EP01203752 2001-10-04

Publications (1)

Publication Number Publication Date
DK1300714T3 true DK1300714T3 (da) 2006-11-13

Family

ID=26077009

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02079138T DK1300714T3 (da) 2001-10-04 2002-10-03 Omskifterindrening, især til anvendelse indenfor optikken

Country Status (10)

Country Link
US (1) US6701039B2 (da)
EP (1) EP1300714B1 (da)
JP (1) JP4238132B2 (da)
KR (1) KR100944203B1 (da)
AT (1) ATE333105T1 (da)
AU (1) AU2002362541B2 (da)
CA (1) CA2462812C (da)
DE (1) DE60213051T2 (da)
DK (1) DK1300714T3 (da)
WO (1) WO2003029874A2 (da)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7417782B2 (en) * 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US7250611B2 (en) * 2003-12-02 2007-07-31 3M Innovative Properties Company LED curing apparatus and method
JP2005227591A (ja) * 2004-02-13 2005-08-25 Murata Mfg Co Ltd 静電型アクチュエータ
KR100586967B1 (ko) * 2004-05-28 2006-06-08 삼성전기주식회사 회전형 빗살 구동 액츄에이터 및 이를 이용한 가변 광감쇄기
US7119942B2 (en) * 2004-06-30 2006-10-10 Northrop Gruman Corporation Side spring micro-mirror
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
CN103336362B (zh) * 2005-02-23 2015-10-14 皮克斯特隆尼斯有限公司 用于作动显示器的方法和装置
US7742016B2 (en) * 2005-02-23 2010-06-22 Pixtronix, Incorporated Display methods and apparatus
EP1859311B1 (en) * 2005-02-23 2008-11-19 Pixtronix Inc. Light modulator and method for manufature thereof
US8159428B2 (en) * 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US7675665B2 (en) 2005-02-23 2010-03-09 Pixtronix, Incorporated Methods and apparatus for actuating displays
US7405852B2 (en) * 2005-02-23 2008-07-29 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7304785B2 (en) * 2005-02-23 2007-12-04 Pixtronix, Inc. Display methods and apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US7502159B2 (en) * 2005-02-23 2009-03-10 Pixtronix, Inc. Methods and apparatus for actuating displays
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7271945B2 (en) * 2005-02-23 2007-09-18 Pixtronix, Inc. Methods and apparatus for actuating displays
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7746529B2 (en) 2005-02-23 2010-06-29 Pixtronix, Inc. MEMS display apparatus
US7304786B2 (en) * 2005-02-23 2007-12-04 Pixtronix, Inc. Methods and apparatus for bi-stable actuation of displays
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US20080158635A1 (en) * 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7755582B2 (en) * 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US7468572B2 (en) * 2005-03-28 2008-12-23 Maurice Thomas Versatile digitally controlled micro-mechanical actuator
US7656568B2 (en) * 2005-05-18 2010-02-02 The Regents Of The University Of California Optical switch using frequency-based addressing in a microelectromechanical systems array
JP2007074826A (ja) * 2005-09-07 2007-03-22 Fujifilm Corp 微小電気機械素子及び微小電気機械素子アレイ
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7876489B2 (en) * 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
EP2080045A1 (en) 2006-10-20 2009-07-22 Pixtronix Inc. Light guides and backlight systems incorporating light redirectors at varying densities
US7852546B2 (en) 2007-10-19 2010-12-14 Pixtronix, Inc. Spacers for maintaining display apparatus alignment
US20100188443A1 (en) * 2007-01-19 2010-07-29 Pixtronix, Inc Sensor-based feedback for display apparatus
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US7832948B1 (en) * 2007-09-13 2010-11-16 Tessera MEMS Technologies, Inc. Impulse actuated MEMS devices
TWI418850B (zh) * 2007-11-09 2013-12-11 尼康股份有限公司 微致動器、光學設備、顯示裝置、曝光裝置及設備製造方法
CN103399399A (zh) * 2008-02-12 2013-11-20 皮克斯特隆尼斯有限公司 带有应力梁的机械式光调制器
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
US7920317B2 (en) 2008-08-04 2011-04-05 Pixtronix, Inc. Display with controlled formation of bubbles
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
KR20120139854A (ko) 2010-02-02 2012-12-27 픽스트로닉스 인코포레이티드 디스플레이 장치를 제어하기 위한 회로
CN102834763B (zh) 2010-02-02 2015-07-22 皮克斯特罗尼克斯公司 用于制造填充冷密封流体的显示装置的方法
EP2545544A1 (en) 2010-03-11 2013-01-16 Pixtronix, Inc. Reflective and transflective operation modes for a display device
TWI563328B (en) 2010-12-20 2016-12-21 Snaptrack Inc Display, method for manufacturing the same, and system for modulating light
US8749538B2 (en) 2011-10-21 2014-06-10 Qualcomm Mems Technologies, Inc. Device and method of controlling brightness of a display based on ambient lighting conditions
US9385634B2 (en) * 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
JP5714517B2 (ja) * 2012-01-30 2015-05-07 シャープ株式会社 バックライト、および該バックライトを備えた液晶表示装置、ならびにバックライト点灯方法
US9183812B2 (en) 2013-01-29 2015-11-10 Pixtronix, Inc. Ambient light aware display apparatus
US9170421B2 (en) 2013-02-05 2015-10-27 Pixtronix, Inc. Display apparatus incorporating multi-level shutters
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US20150355458A1 (en) * 2014-06-10 2015-12-10 Shuyun (Steve) Wu Micro-machined optical mirror switch
US10132699B1 (en) 2014-10-06 2018-11-20 National Technology & Engineering Solutions Of Sandia, Llc Electrodeposition processes for magnetostrictive resonators
US9703094B2 (en) 2015-01-05 2017-07-11 Edward Pakhchyan MEMS light modulator for display
US9703095B2 (en) 2015-01-05 2017-07-11 Edward Pakhchyan Light modulator for MEMS display
US11009650B2 (en) 2015-01-05 2021-05-18 Edward Pakhchyan MEMS display
US9606349B2 (en) 2015-01-05 2017-03-28 Edward Pakhchyan MEMS display
JP6953118B2 (ja) * 2016-07-04 2021-10-27 エドワード・パクチャン ディスプレイのためのｍｅｍｓ光変調器
EP3532766A4 (en) 2016-10-29 2020-06-24 Philippe Roe FIBER OPTIC SECURITY SYSTEM
DE102018207783B4 (de) 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement
CN110725773B (zh) * 2019-11-06 2020-09-04 北京纳米能源与系统研究所 水下能量收集装置及水下作业设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4224600A1 (de) * 1992-07-23 1994-01-27 Somatel Sondermaschinenbau Tel Elektrostatische Positionierungseinrichtung
US5367585A (en) * 1993-10-27 1994-11-22 General Electric Company Integrated microelectromechanical polymeric photonic switch
FR2726135B1 (fr) * 1994-10-25 1997-01-17 Suisse Electronique Microtech Dispositif de commutation
WO2000025170A1 (de) * 1998-10-28 2000-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches bauelement mit schwingkörper
US6396976B1 (en) * 1999-04-15 2002-05-28 Solus Micro Technologies, Inc. 2D optical switch
US6396975B1 (en) * 2000-01-21 2002-05-28 Jds Uniphase Corporation MEMS optical cross-connect switch
US6587612B1 (en) * 2000-09-06 2003-07-01 Southwest Research Institute Thermally actuated spectroscopic optical switch
US6597048B1 (en) * 2000-12-26 2003-07-22 Cornell Research Foundation Electrostatically charged microstructures
US6944361B2 (en) * 2001-04-13 2005-09-13 Gazillion Bits, Inc. Electrically controllable integrated optical cross-connect
US6701037B2 (en) * 2001-07-03 2004-03-02 Pts Corporation MEMS-based noncontacting free-space optical switch
US6577785B1 (en) * 2001-08-09 2003-06-10 Sandia Corporation Compound semiconductor optical waveguide switch

Also Published As

Publication number Publication date
CA2462812C (en) 2010-12-14
EP1300714A1 (en) 2003-04-09
DE60213051T2 (de) 2007-07-05
EP1300714B1 (en) 2006-07-12
WO2003029874A2 (en) 2003-04-10
JP2005504355A (ja) 2005-02-10
WO2003029874A3 (en) 2004-03-25
CA2462812A1 (en) 2003-04-10
KR20040051598A (ko) 2004-06-18
US6701039B2 (en) 2004-03-02
AU2002362541B2 (en) 2007-07-05
JP4238132B2 (ja) 2009-03-11
DE60213051D1 (de) 2006-08-24
KR100944203B1 (ko) 2010-02-26
ATE333105T1 (de) 2006-08-15
US20030068118A1 (en) 2003-04-10

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