JPH11237731A - ポジ型電着フオトレジスト組成物及びパターンの製造方法 - Google Patents
ポジ型電着フオトレジスト組成物及びパターンの製造方法Info
- Publication number
- JPH11237731A JPH11237731A JP33506198A JP33506198A JPH11237731A JP H11237731 A JPH11237731 A JP H11237731A JP 33506198 A JP33506198 A JP 33506198A JP 33506198 A JP33506198 A JP 33506198A JP H11237731 A JPH11237731 A JP H11237731A
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- group
- compound
- parts
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 239000002904 solvent Substances 0.000 description 12
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
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- Compositions Of Macromolecular Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33506198A JPH11237731A (ja) | 1997-10-07 | 1998-10-01 | ポジ型電着フオトレジスト組成物及びパターンの製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9-289218 | 1997-10-07 | ||
| JP28921897 | 1997-10-07 | ||
| JP33506198A JPH11237731A (ja) | 1997-10-07 | 1998-10-01 | ポジ型電着フオトレジスト組成物及びパターンの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11237731A true JPH11237731A (ja) | 1999-08-31 |
| JPH11237731A5 JPH11237731A5 (https=) | 2005-11-10 |
Family
ID=26557515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33506198A Pending JPH11237731A (ja) | 1997-10-07 | 1998-10-01 | ポジ型電着フオトレジスト組成物及びパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11237731A (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6670100B1 (en) | 1999-05-20 | 2003-12-30 | Kansai Paint Co., Ltd. | Positive type actinic ray-curable dry film and pattern-forming method by use of the same |
| JP2007056131A (ja) * | 2005-08-24 | 2007-03-08 | Arakawa Chem Ind Co Ltd | 粘着付与樹脂エマルジョン、その製造方法および水性粘接着剤組成物 |
-
1998
- 1998-10-01 JP JP33506198A patent/JPH11237731A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6670100B1 (en) | 1999-05-20 | 2003-12-30 | Kansai Paint Co., Ltd. | Positive type actinic ray-curable dry film and pattern-forming method by use of the same |
| JP2007056131A (ja) * | 2005-08-24 | 2007-03-08 | Arakawa Chem Ind Co Ltd | 粘着付与樹脂エマルジョン、その製造方法および水性粘接着剤組成物 |
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