JPH11228292A5 - - Google Patents

Info

Publication number
JPH11228292A5
JPH11228292A5 JP1998299292A JP29929298A JPH11228292A5 JP H11228292 A5 JPH11228292 A5 JP H11228292A5 JP 1998299292 A JP1998299292 A JP 1998299292A JP 29929298 A JP29929298 A JP 29929298A JP H11228292 A5 JPH11228292 A5 JP H11228292A5
Authority
JP
Japan
Prior art keywords
fluoride
producing
raw material
crystals according
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998299292A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11228292A (ja
JP3969865B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP29929298A priority Critical patent/JP3969865B2/ja
Priority claimed from JP29929298A external-priority patent/JP3969865B2/ja
Publication of JPH11228292A publication Critical patent/JPH11228292A/ja
Publication of JPH11228292A5 publication Critical patent/JPH11228292A5/ja
Application granted granted Critical
Publication of JP3969865B2 publication Critical patent/JP3969865B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP29929298A 1997-10-24 1998-10-21 フッ化物結晶の製造方法 Expired - Fee Related JP3969865B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29929298A JP3969865B2 (ja) 1997-10-24 1998-10-21 フッ化物結晶の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP29305097 1997-10-24
JP9-293050 1997-10-24
JP29929298A JP3969865B2 (ja) 1997-10-24 1998-10-21 フッ化物結晶の製造方法

Publications (3)

Publication Number Publication Date
JPH11228292A JPH11228292A (ja) 1999-08-24
JPH11228292A5 true JPH11228292A5 (https=) 2004-11-18
JP3969865B2 JP3969865B2 (ja) 2007-09-05

Family

ID=26559237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29929298A Expired - Fee Related JP3969865B2 (ja) 1997-10-24 1998-10-21 フッ化物結晶の製造方法

Country Status (1)

Country Link
JP (1) JP3969865B2 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3596337B2 (ja) 1998-03-25 2004-12-02 住友電気工業株式会社 化合物半導体結晶の製造方法
US6537372B1 (en) 1999-06-29 2003-03-25 American Crystal Technologies, Inc. Heater arrangement for crystal growth furnace
US6602345B1 (en) 1999-06-29 2003-08-05 American Crystal Technologies, Inc., Heater arrangement for crystal growth furnace
JP2001244188A (ja) 2000-03-02 2001-09-07 Optron Inc 真空紫外用光学部材およびこれを用いた露光装置ならびにデバイス製造方法
DE10010485C2 (de) * 2000-03-03 2002-10-02 Schott Glas Verfahren zur Herstellung von hochhomogenen, grossformatigen Einkristallen aus Calciumfluorid sowie deren Verwendung
EP1371119A4 (en) * 2001-03-02 2006-10-11 Corning Inc UV EXCIMER LASER WITH HIGH REPLACEMENT RATE
DE102004008749A1 (de) * 2004-02-23 2005-09-08 Schott Ag Verfahren zur Herstellung eines großvolumigen CaF2-Einkristalles mit geringer Streuung und verbesserter Laserstabilität, sowie ein solcher Kristall und dessen Verwendung
JP2005289776A (ja) 2004-04-05 2005-10-20 Canon Inc 結晶製造方法および結晶製造装置
KR20110030425A (ko) * 2008-05-16 2011-03-23 가부시끼가이샤 도꾸야마 전처리 금속 불화물 및 불화물 결정의 제조 방법
CN102616745B (zh) * 2012-04-06 2016-12-14 周俊和 一种氟化盐生产方法
JP6407604B2 (ja) * 2014-07-25 2018-10-17 岩谷産業株式会社 蛍石の製造方法
CN114622279A (zh) * 2022-03-18 2022-06-14 四川奇峰景行光学科技有限公司 一种用于氟化物多晶原料处理装置及方法
CN116673273B (zh) * 2023-08-03 2023-10-27 北京奇峰蓝达光学科技发展有限公司 一种氟化钙原料表面去杂方法及其装置

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