JPH11154699A5 - - Google Patents

Info

Publication number
JPH11154699A5
JPH11154699A5 JP1997320749A JP32074997A JPH11154699A5 JP H11154699 A5 JPH11154699 A5 JP H11154699A5 JP 1997320749 A JP1997320749 A JP 1997320749A JP 32074997 A JP32074997 A JP 32074997A JP H11154699 A5 JPH11154699 A5 JP H11154699A5
Authority
JP
Japan
Prior art keywords
elastic
fitting
groove
elastic seal
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997320749A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11154699A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9320749A priority Critical patent/JPH11154699A/ja
Priority claimed from JP9320749A external-priority patent/JPH11154699A/ja
Publication of JPH11154699A publication Critical patent/JPH11154699A/ja
Publication of JPH11154699A5 publication Critical patent/JPH11154699A5/ja
Pending legal-status Critical Current

Links

JP9320749A 1997-11-21 1997-11-21 容器の封止構造 Pending JPH11154699A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9320749A JPH11154699A (ja) 1997-11-21 1997-11-21 容器の封止構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9320749A JPH11154699A (ja) 1997-11-21 1997-11-21 容器の封止構造

Publications (2)

Publication Number Publication Date
JPH11154699A JPH11154699A (ja) 1999-06-08
JPH11154699A5 true JPH11154699A5 (enrdf_load_stackoverflow) 2004-11-11

Family

ID=18124862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9320749A Pending JPH11154699A (ja) 1997-11-21 1997-11-21 容器の封止構造

Country Status (1)

Country Link
JP (1) JPH11154699A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013186912A1 (ja) * 2012-06-15 2013-12-19 ミライアル株式会社 埃などの侵入を抑制する基板収納容器
JP6376557B2 (ja) * 2014-06-12 2018-08-22 シンフォニアテクノロジー株式会社 密閉容器及び搬送システム
JP6313873B2 (ja) * 2017-02-27 2018-04-18 東京エレクトロン株式会社 密閉容器及び搬送システム
US10388547B2 (en) * 2017-06-23 2019-08-20 Applied Materials, Inc. Side storage pods, equipment front end modules, and methods for processing substrates
WO2019009065A1 (ja) * 2017-07-07 2019-01-10 信越ポリマー株式会社 基板収納容器

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5415527Y2 (enrdf_load_stackoverflow) * 1973-02-15 1979-06-22
JPS576332Y2 (enrdf_load_stackoverflow) * 1975-07-04 1982-02-05
JPS5896160U (ja) * 1981-12-24 1983-06-30 三菱重工業株式会社 二重ガスケツト
US4465201A (en) * 1983-01-28 1984-08-14 The United States Of America As Represented By The United States Department Of Energy Conical O-ring seal
JPS62186476U (enrdf_load_stackoverflow) * 1986-05-20 1987-11-27
JPS63152569A (ja) * 1986-07-01 1988-06-25 溝口　恭子 食物保存用容器
JPS63136339U (enrdf_load_stackoverflow) * 1987-02-27 1988-09-07
JPH01292838A (ja) * 1988-05-20 1989-11-27 Kondo Kogyo Kk 清浄度を保った搬送用または保管用箱
JPH047397Y2 (enrdf_load_stackoverflow) * 1989-04-13 1992-02-27
JPH06247460A (ja) * 1993-02-18 1994-09-06 Ebara Corp 密閉容器のシール装置及びシール
US5476176A (en) * 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
JP3296108B2 (ja) * 1994-08-08 2002-06-24 神鋼電機株式会社 電子基板用コンテナ
JP3180600B2 (ja) * 1995-01-09 2001-06-25 神鋼電機株式会社 密閉コンテナ
JPH08236605A (ja) * 1995-02-28 1996-09-13 Komatsu Electron Metals Co Ltd 半導体ウェハ収納ケース

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