JPH11142345A - 検査装置及び検査方法 - Google Patents

検査装置及び検査方法

Info

Publication number
JPH11142345A
JPH11142345A JP9325296A JP32529697A JPH11142345A JP H11142345 A JPH11142345 A JP H11142345A JP 9325296 A JP9325296 A JP 9325296A JP 32529697 A JP32529697 A JP 32529697A JP H11142345 A JPH11142345 A JP H11142345A
Authority
JP
Japan
Prior art keywords
light
illumination
test object
illumination system
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9325296A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11142345A5 (enExample
Inventor
Koichiro Komatsu
宏一郎 小松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9325296A priority Critical patent/JPH11142345A/ja
Publication of JPH11142345A publication Critical patent/JPH11142345A/ja
Publication of JPH11142345A5 publication Critical patent/JPH11142345A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP9325296A 1997-11-11 1997-11-11 検査装置及び検査方法 Pending JPH11142345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9325296A JPH11142345A (ja) 1997-11-11 1997-11-11 検査装置及び検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9325296A JPH11142345A (ja) 1997-11-11 1997-11-11 検査装置及び検査方法

Publications (2)

Publication Number Publication Date
JPH11142345A true JPH11142345A (ja) 1999-05-28
JPH11142345A5 JPH11142345A5 (enExample) 2005-06-30

Family

ID=18175240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9325296A Pending JPH11142345A (ja) 1997-11-11 1997-11-11 検査装置及び検査方法

Country Status (1)

Country Link
JP (1) JPH11142345A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013051716A1 (ja) * 2011-10-06 2013-04-11 和田 香寿代 半導体ウェハの表面検査システム
JP2019028035A (ja) * 2017-08-03 2019-02-21 キヤノン株式会社 異物検査装置、異物検査方法、インプリント装置および物品製造方法
JP7537649B1 (ja) * 2022-09-22 2024-08-21 大日本印刷株式会社 エンコーダ用反射型光学式スケール、反射型光学式エンコーダおよびエンコーダ用反射型光学式スケール用積層体

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013051716A1 (ja) * 2011-10-06 2013-04-11 和田 香寿代 半導体ウェハの表面検査システム
JP2013083491A (ja) * 2011-10-06 2013-05-09 Yatomi Atsuko 半導体ウェハの表面検査システム
JP2019028035A (ja) * 2017-08-03 2019-02-21 キヤノン株式会社 異物検査装置、異物検査方法、インプリント装置および物品製造方法
JP7537649B1 (ja) * 2022-09-22 2024-08-21 大日本印刷株式会社 エンコーダ用反射型光学式スケール、反射型光学式エンコーダおよびエンコーダ用反射型光学式スケール用積層体
JP2024156948A (ja) * 2022-09-22 2024-11-06 大日本印刷株式会社 エンコーダ用反射型光学式スケール、反射型光学式エンコーダおよびエンコーダ用反射型光学式スケール用積層体

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