JPH1112032A - Dielectric ceramic composition and laminate - Google Patents

Dielectric ceramic composition and laminate

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Publication number
JPH1112032A
JPH1112032A JP9168639A JP16863997A JPH1112032A JP H1112032 A JPH1112032 A JP H1112032A JP 9168639 A JP9168639 A JP 9168639A JP 16863997 A JP16863997 A JP 16863997A JP H1112032 A JPH1112032 A JP H1112032A
Authority
JP
Japan
Prior art keywords
containing compound
weight
parts
dielectric
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9168639A
Other languages
Japanese (ja)
Other versions
JP3631589B2 (en
Inventor
Hideji Nakazawa
秀司 中澤
Seiichiro Hirahara
誠一郎 平原
Tatsuji Furuse
辰治 古瀬
Toyomi Kuwa
登代美 久和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
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Priority to JP16863997A priority Critical patent/JP3631589B2/en
Publication of JPH1112032A publication Critical patent/JPH1112032A/en
Application granted granted Critical
Publication of JP3631589B2 publication Critical patent/JP3631589B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain the subject composition capable of giving a ceramic free from any warpage or strain even in the case of being sintered simultaneously with a conductor predominant in Ag or Cu, and to obtain a laminate from the above composition. SOLUTION: This dielectric ceramic composition comprises 100 pts.wt. of the major component, a multiple oxide containing Mg, Ca and Ti as metallic elements, wherein the composition formula of the multiple oxide is shown as aMgO.bCaO.cTiO2 ((a), (b) and (c) satisfy the following relationships: 25.0<=(a)<=35.0, 0.3<=(b)<=7.0, 60.0<=(c)<=70.0, and (a+b+c)=100), 3-20 pts.wt. of a boron-contg. compound in terms of B2 O3 , 1-10 pts.wt. of an alkali metal- contg. compound in terms of the corresponding alkali metal carbonate, and a total of 0.2-6 pts.wt. of at least one kind among Sr-contg. compound, Al-contg. compound, Si-contg. compound, W-contg. compound, and Y-contg. compound, in terms of SrCO3 , Al2 O3 , SiO2 , WO3 , and Y2 O3 , respectively.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、高周波領域で使用
する電子回路基板や電子部品等に適用される、低温焼成
可能な誘電体磁器組成物および、例えば、共振器、コン
デンサ、フィルタ等を内蔵した基板、電子部品等の導体
を有する積層体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric porcelain composition which can be fired at a low temperature and is applied to, for example, an electronic circuit board or an electronic component used in a high-frequency region, and includes, for example, a resonator, a capacitor, and a filter. And a laminated body having a conductor such as a substrate and an electronic component.

【0002】[0002]

【従来の技術】従来、誘電体材料として各種誘電体セラ
ミックスが、共振器、コンデンサ、フィルタ等の電子部
品に使用されている。そして、近年においては、携帯電
話をはじめとする移動体通信等の発達および普及に伴
い、電子回路基板や電子部品の材料として、誘電体セラ
ミックスの需要が増大しつつある。
2. Description of the Related Art Conventionally, various dielectric ceramics have been used as dielectric materials for electronic components such as resonators, capacitors, and filters. In recent years, with the development and spread of mobile communication such as mobile phones, demand for dielectric ceramics as materials for electronic circuit boards and electronic components has been increasing.

【0003】電子回路や電子部品において、誘電体セラ
ミックスと内部導体を同時焼成するに際しては、従来の
誘電体セラミックスの焼成温度が1100℃以上という
高温であったため、導体材料としては、比較的高融点で
あるPt、Pd、W、Mo等が使用されていた。これら
高融点の導体材料は導通抵抗が大きいため、従来の電子
回路基板において、共振回路やインダクタンスのQ値が
小さくなってしまい、導体線路の伝送損失が大きくなる
等の問題があった。
In the simultaneous firing of dielectric ceramics and internal conductors in electronic circuits and electronic parts, the firing temperature of conventional dielectric ceramics was as high as 1100 ° C. or higher. , Pt, Pd, W, Mo, etc. were used. These conductive materials having a high melting point have a large conduction resistance, so that the conventional electronic circuit board has a problem that the Q value of the resonance circuit and the inductance becomes small and the transmission loss of the conductor line becomes large.

【0004】そこで、係る問題点を解決すべく、導通抵
抗の小さいAg、Cu等と同時焼成可能な、低温焼成の
誘電体セラミックスが提案されている。例えば、本出願
人が先に出願した特開平8−208330号公報に開示
された誘電体磁器組成物は、MgO、CaO、TiO2
とB2 3 、Li2 CO3 からなるものであり、900
〜1050℃の比較的低温でAgやCu等の内部導体と
同時に焼成でき、誘電体磁器の比誘電率εrが18以
上、測定周波数7GHzでのQ値が2000以上、かつ
共振周波数の温度係数τfが±40以内の優れた特性を
有し、高周波電子部品の小型化と高性能化を実現できる
ものであった。
[0004] In order to solve such a problem, there has been proposed a low-temperature-fired dielectric ceramic which can be co-fired with Ag, Cu or the like having a low conduction resistance. For example, the dielectric porcelain composition disclosed in Japanese Patent Application Laid-Open No. 8-208330, filed by the present applicant, contains MgO, CaO, and TiO 2.
And B 2 O 3 , Li 2 CO 3 , and 900
It can be fired simultaneously with an internal conductor such as Ag or Cu at a relatively low temperature of -1050 ° C, has a relative dielectric constant εr of 18 or more, a Q value at a measurement frequency of 7 GHz of 2,000 or more, and a temperature coefficient τf of a resonance frequency. Has excellent characteristics within ± 40, and can realize miniaturization and high performance of high-frequency electronic components.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、特開平
8−208330号公報に開示された誘電体磁器組成物
は、焼結における収縮開始温度が845〜960℃と高
温であるため、収縮開始温度が低温であるAgやCuを
主成分とする導体材料との収縮挙動のマッチングが悪
く、焼成された基板が反る、歪む等の問題があった。
However, the dielectric porcelain composition disclosed in Japanese Patent Application Laid-Open No. 8-208330 has a high shrinkage onset temperature of 845 to 960 ° C. in sintering. The matching of the shrinkage behavior with the conductor material containing Ag or Cu as a main component at a low temperature is poor, and there is a problem that the fired substrate is warped or distorted.

【0006】即ち、導体としては、Agおよび/または
Cuを主成分とするもの、例えば、Ag、Cu、あるい
はAg、Cuに対してガラス成分やセラミック成分、P
t、Pd等の金属を添加したものがあるが、これらの導
体は、焼成時における収縮開始温度が高くとも650℃
程度であるため、上記誘電体磁器組成物の収縮開始温度
との差が大きく、これにより、基板が変形する等の問題
があった。
That is, as the conductor, a conductor containing Ag and / or Cu as a main component, for example, Ag, Cu, or a glass component, a ceramic component,
There are materials to which metals such as t and Pd are added, and these conductors have a shrinkage onset temperature of 650 ° C. at the highest during firing.
Therefore, there is a large difference between the dielectric ceramic composition and the shrinkage start temperature of the dielectric ceramic composition, thereby causing a problem that the substrate is deformed.

【0007】本発明は上記課題に鑑みなされたもので、
誘電体磁器組成物の収縮開始温度を低くして、導体の収
縮開始温度に近づけることができ、AgやCuを主成分
とする導体と同時焼成した場合でも反りや歪みのない磁
器を得ることができる誘電体磁器組成物および積層体を
提供することを目的とする。
[0007] The present invention has been made in view of the above problems,
By lowering the shrinkage start temperature of the dielectric porcelain composition, it is possible to approach the shrinkage start temperature of the conductor, and to obtain a porcelain free of warpage and distortion even when co-fired with a conductor containing Ag or Cu as a main component. It is an object of the present invention to provide a dielectric ceramic composition and a laminate that can be manufactured.

【0008】[0008]

【課題を解決するための手段】本発明の誘電体磁器組成
物は、金属元素としてMg、Ca、Tiを含有する複合
酸化物であって、これらの金属元素酸化物の重量比によ
る組成式を、aMgO・bCaO・cTiO2 と表した
時、a、b、cが25.0≦a≦35.0、0.3≦b
≦7.0、60.0≦c≦70.0、a+b+c=10
0を満足する主成分と、該主成分100重量部に対し
て、硼素含有化合物をB2 3 換算で3〜20重量部、
アルカリ金属含有化合物をアルカリ金属炭酸塩換算で1
〜10重量部、Sr含有化合物、Al含有化合物、Si
含有化合物、W含有化合物およびY含有化合物のうち少
なくとも1種をそれぞれSrCO3 、Al2 3 、Si
2、WO3 、Y2 3 換算で合計0.2〜6重量部含
有してなるものである。
The dielectric ceramic composition of the present invention is a composite oxide containing Mg, Ca, and Ti as metal elements, and has a composition formula based on the weight ratio of these metal element oxides. , when expressed as aMgO · bCaO · cTiO 2, a , b, c is 25.0 ≦ a ≦ 35.0,0.3 ≦ b
≦ 7.0, 60.0 ≦ c ≦ 70.0, a + b + c = 10
0 to 3 parts to 20 parts by weight of a boron-containing compound in terms of B 2 O 3 based on 100 parts by weight of the main component,
Alkali metal-containing compound is converted to alkali metal carbonate by 1
-10 parts by weight, Sr-containing compound, Al-containing compound, Si
At least one of the W-containing compound, the W-containing compound and the Y-containing compound is SrCO 3 , Al 2 O 3 , Si
O 2, WO 3, is in terms of Y 2 O 3 comprising a total of 0.2-6 parts by weight ones.

【0009】また、金属元素としてMg、Ca、Tiを
含有する複合酸化物であって、その組成式が(100−
x)MgTiO3 −xCaTiO3 (但し、式中xは重
量比を表し、1≦x≦15)で表される主成分と、該主
成分100重量部に対して、硼素含有化合物をB2 3
換算で3〜20重量部、アルカリ金属含有化合物をアル
カリ金属炭酸塩換算で1〜10重量部、Sr含有化合
物、Al含有化合物、Si含有化合物、W含有化合物お
よびY含有化合物のうち少なくとも1種をそれぞれSr
CO3 、Al2 3 、SiO2 、WO3 、Y2 3 換算
で合計0.2〜6重量部含有してなるものである。
A composite oxide containing Mg, Ca, and Ti as metal elements, the composition formula of which is (100-
x) MgTiO 3 -xCaTiO 3 (where x represents a weight ratio and 1 ≦ x ≦ 15), and a boron-containing compound is added to B 2 O with respect to 100 parts by weight of the main component. Three
3 to 20 parts by weight in terms of conversion, 1 to 10 parts by weight of an alkali metal-containing compound in terms of alkali metal carbonate, at least one of Sr-containing compounds, Al-containing compounds, Si-containing compounds, W-containing compounds and Y-containing compounds Each Sr
It contains 0.2 to 6 parts by weight in total in terms of CO 3 , Al 2 O 3 , SiO 2 , WO 3 and Y 2 O 3 .

【0010】本発明の積層体は、誘電体層を複数積層し
てなる誘電基体の内部および/または表面に、Agおよ
び/またはCuを主成分とする導体を有する積層体であ
って、前記誘電体層が、上記誘電体磁器組成物からなる
ものである。
[0010] The laminate of the present invention is a laminate having a conductor containing Ag and / or Cu as a main component inside and / or on a surface of a dielectric substrate formed by laminating a plurality of dielectric layers. The body layer is made of the above-mentioned dielectric ceramic composition.

【0011】[0011]

【作用】本発明の誘電体磁器組成物では、900〜10
50℃の比較的低温で焼成できるとともに、比誘電率ε
rやQ値が高く、かつ共振周波数の温度係数τfを比較
的小さくすることができ、積層体(高周波電子回路基板
や電子部品)の小型化と高性能化を実現できる。
According to the dielectric porcelain composition of the present invention, 900 to 10
It can be fired at a relatively low temperature of 50 ° C. and has a relative dielectric constant ε
The r and Q values are high, and the temperature coefficient τf of the resonance frequency can be made relatively small, so that the laminated body (high-frequency electronic circuit board or electronic component) can be reduced in size and improved in performance.

【0012】そして、本発明の誘電体磁器組成物では、
Sr含有化合物、Al含有化合物、Si含有化合物、W
含有化合物およびY含有化合物のうち少なくとも1種を
それぞれSrCO3 、Al2 3 、SiO2 、WO3
2 3 換算で合計0.2〜6重量部含有せしめたの
で、焼結過程における収縮開始温度を815℃以下に低
下させることができ、導体の収縮開始温度に近づけるこ
とができ、基板や電子部品において、Ag、Cuを主成
分とする導体と同時焼成した場合でも基板等の反り、歪
み等の発生を抑制することができる。
And, in the dielectric ceramic composition of the present invention,
Sr-containing compound, Al-containing compound, Si-containing compound, W
And at least one of the Y-containing compound and SrCO 3 , Al 2 O 3 , SiO 2 , WO 3 ,
Since a total of 0.2 to 6 parts by weight in terms of Y 2 O 3 is contained, the shrinkage onset temperature in the sintering process can be lowered to 815 ° C. or less, and the shrinkage onset temperature of the conductor can be brought close to the substrate. In an electronic component, even when co-fired with a conductor containing Ag and Cu as main components, it is possible to suppress occurrence of warpage, distortion, and the like of a substrate or the like.

【0013】[0013]

【発明の実施の形態】本発明の誘電体磁器組成物は、金
属元素としてMg、Ca、Tiを含有する複合酸化物で
あって、これらの金属元素酸化物の重量比による組成式
をaMgO・bCaO・cTiO2 と表した時、a、
b、cが25.0≦a≦35.0、0.3≦b≦ 7.
0、60.0≦c≦70.0、a+b+c=100で表
される主成分100重量部に対して、硼素含有化合物を
2 3 換算で3〜20重量部、アルカリ金属含有化合
物をアルカリ金属炭酸塩換算で1〜10重量部、Sr含
有化合物、Al含有化合物、Si含有化合物、W含有化
合物およびY含有化合物のうち少なくとも1種をそれぞ
れSrCO3 、Al2 3 、SiO2 、WO3 、Y2
3 換算で合計0.2〜6重量部含有してなるものであ
る。
BEST MODE FOR CARRYING OUT THE INVENTION The dielectric ceramic composition of the present invention is a composite oxide containing Mg, Ca and Ti as metal elements, and the composition formula based on the weight ratio of these metal element oxides is aMgO · When expressed as bCaO · cTiO 2 , a,
b and c are 25.0 ≦ a ≦ 35.0, 0.3 ≦ b ≦ 7.
0, 60.0 ≦ c ≦ 70.0, a + b + c = 100, 100 parts by weight of the main component, the boron-containing compound is 3 to 20 parts by weight in terms of B 2 O 3 , and the alkali metal-containing compound is alkali. 1 to 10 parts by weight in terms of metal carbonate, at least one of Sr-containing compound, Al-containing compound, Si-containing compound, W-containing compound and Y-containing compound is SrCO 3 , Al 2 O 3 , SiO 2 , WO 3 , Y 2 O
It contains 0.2 to 6 parts by weight in total in 3 conversion.

【0014】本発明において、組成式におけるMgOの
重量比aを25≦a≦35、CaOの重量比bを、0.
3≦b≦7としたのは、MgOの重量比aが25重量%
未満の場合やCaOの重量比bが7重量%を越える場合
には、共振周波数の温度係数τfが正に大きくなりすぎ
てしまうからである。逆に、MgOの重量比aが35重
量%を越える場合やCaOの重量比bが0.3重量%未
満の場合には、共振周波数の温度係数τfが負に大きく
なりすぎてしまうからである。よって、MgOの重量比
aとCaOの重量比bは、25.0≦a≦35.0、
0.3≦b≦7.0に特定され、とりわけ誘電体磁器の
共振周波数の温度係数τfの観点からは28.0≦a≦
34.0、0.4≦b≦6.5が好ましい。
In the present invention, the weight ratio a of MgO in the composition formula is 25 ≦ a ≦ 35, and the weight ratio b of CaO is 0.
The reason why 3 ≦ b ≦ 7 is that the weight ratio a of MgO is 25% by weight.
If the ratio is less than 0% or if the weight ratio b of CaO exceeds 7% by weight, the temperature coefficient τf of the resonance frequency becomes too large. Conversely, when the weight ratio a of MgO exceeds 35% by weight or the weight ratio b of CaO is less than 0.3% by weight, the temperature coefficient τf of the resonance frequency becomes too large. . Therefore, the weight ratio a of MgO and the weight ratio b of CaO are 25.0 ≦ a ≦ 35.0,
0.3 ≦ b ≦ 7.0, and especially from the viewpoint of the temperature coefficient τf of the resonance frequency of the dielectric ceramic, 28.0 ≦ a ≦
34.0, preferably 0.4 ≦ b ≦ 6.5.

【0015】さらに、TiO2 の重量比cを60≦c≦
70としたのは、TiO2 の重量比cが60重量%未満
あるいは70重量%を越える場合にはQ値が低下するか
らである。よって、TiO2 の重量比cは60≦c≦7
0に特定され、とりわけ誘電体磁器のQ値の観点から6
4≦c≦68が好ましい。
Further, the weight ratio c of TiO 2 is set to 60 ≦ c ≦
The reason for setting it to 70 is that when the weight ratio c of TiO 2 is less than 60% by weight or more than 70% by weight, the Q value decreases. Therefore, the weight ratio c of TiO 2 is 60 ≦ c ≦ 7.
0 from the viewpoint of the Q value of the dielectric porcelain.
4 ≦ c ≦ 68 is preferred.

【0016】また、出発原料をMgTiO3 とCaTi
3 にすることにより、さらにQ値を向上させ、温度係
数の制御が容易となる。つまり、(100−x)MgT
iO3 −xCaTiO3 (但し、式中xは重量比を表
し、1≦x≦15)で表される主成分100重量部に対
して、硼素含有化合物をB2 3 換算で3〜20重量
部、アルカリ金属含有化合物をアルカリ金属炭酸塩換算
で1〜10重量部、Sr含有化合物、Al含有化合物、
Si含有化合物、W含有化合物およびY含有化合物のう
ち少なくとも1種をそれぞれSrCO3 、Al2 3
SiO2 、WO3 、Y2 3 換算で合計0.2〜6重量
部含有した場合である。
The starting materials are MgTiO 3 and CaTi
By using O 3 , the Q value is further improved, and the control of the temperature coefficient becomes easy. That is, (100-x) MgT
3 to 20 parts by weight of a boron-containing compound in terms of B 2 O 3 with respect to 100 parts by weight of a main component represented by iO 3 -xCaTiO 3 (where x represents a weight ratio and 1 ≦ x ≦ 15) Parts, 1 to 10 parts by weight of an alkali metal-containing compound in terms of alkali metal carbonate, an Sr-containing compound, an Al-containing compound,
At least one of the Si-containing compound, the W-containing compound and the Y-containing compound is SrCO 3 , Al 2 O 3 ,
This is a case where the total content is 0.2 to 6 parts by weight in terms of SiO 2 , WO 3 , and Y 2 O 3 .

【0017】ここで、主成分中のCaTiO3 の重量比
を1≦x≦15としたのは、CaTiO3 の重量比が1
重量%未満の場合には、共振周波数の温度係数τfがマ
イナス側に大きくずれ、また、前記重量比が15重量%
を越える場合には共振周波数の温度係数τfがプラス側
に大きくずれるからである。よって、CaTiO3 の重
量比xは1〜15重量%に特定され、とりわけ、誘電体
磁器の共振周波数の温度係数τfの観点からは1〜10
重量%が好ましい。
Here, the weight ratio of CaTiO 3 in the main component is set to 1 ≦ x ≦ 15 because the weight ratio of CaTiO 3 is 1
If the weight ratio is less than 15% by weight, the temperature coefficient τf of the resonance frequency greatly shifts to the minus side, and the weight ratio is 15% by weight.
Is exceeded, the temperature coefficient τf of the resonance frequency is greatly shifted to the plus side. Therefore, the weight ratio x of CaTiO 3 is specified to be 1 to 15% by weight, and in particular, from the viewpoint of the temperature coefficient τf of the resonance frequency of the dielectric porcelain, 1 to 10%.
% By weight is preferred.

【0018】また、本発明では、上記主成分100重量
部に対して、硼素含有化合物をB23 換算で3〜20
重量部、アルカリ金属含有化合物を該アルカリ金属炭酸
塩換算で1〜10重量部、Sr含有化合物、Al含有化
合物、Si含有化合物、W含有化合物およびY含有化合
物のうち少なくとも1種をそれぞれSrCO3 、Al2
3 、SiO2 、WO3 、Y2 3 換算で合計0.2〜
6重量部含有するものである。
In the present invention, the boron-containing compound is added in an amount of 3 to 20 in terms of B 2 O 3 based on 100 parts by weight of the main component.
Parts, 1 to 10 parts by weight of alkali metal-containing compound in said alkali metal carbonate terms, Sr-containing compound, Al-containing compound, Si-containing compounds, W-containing compound and Y at least one of each of the containing compounds SrCO 3, Al 2
O 3 , SiO 2 , WO 3 , Y 2 O 3 conversion: 0.2 to total
It contains 6 parts by weight.

【0019】このように主成分100重量部に対して、
硼素含有化合物をB2 3 換算で3〜20重量部添加し
たのは、B2 3 の添加量が3重量部未満の場合には1
100℃でも焼結せず、AgまたはCuとの同時焼成が
できなくなり、逆に20重量部を越える場合には結晶相
が変化し、Q値が低下するからである。よって硼素含有
化合物の添加量は、主成分に対してB2 3 換算で3〜
20重量部に特定され、とりわけ誘電体磁器のQ値の観
点からは3〜9重量部が望ましい。硼素含有化合物とし
ては、金属硼素、B2 3 、コレマナイト、CaB2
4 等がある。
Thus, for 100 parts by weight of the main component,
The boron-containing compound was added 3 to 20 parts by weight terms of B 2 O 3 is 1 if the added amount of B 2 O 3 is less than 3 parts by weight
This is because sintering does not occur even at 100 ° C., and simultaneous sintering with Ag or Cu cannot be performed. Conversely, if the amount exceeds 20 parts by weight, the crystal phase changes and the Q value decreases. Therefore, the addition amount of the boron-containing compound is 3 to 3 in terms of B 2 O 3 with respect to the main component.
The specific amount is specified as 20 parts by weight, and particularly, from 3 to 9 parts by weight is desirable from the viewpoint of the Q value of the dielectric porcelain. Examples of boron-containing compounds include metallic boron, B 2 O 3 , colemanite, CaB 2 O
There are 4 magnitudes.

【0020】また、アルカリ金属含有化合物を該アルカ
リ金属炭酸塩換算で1〜10重量部添加したのは、アル
カリ金属含有化合物、例えばリチウム含有化合物の添加
量が1重量部未満の場合には1100℃でも焼結せず、
AgまたはCuとの同時焼成ができなくなり、逆に、1
0重量部を越える場合には結晶相が変化し、Q値が低下
するからである。よって、アルカリ金属含有化合物の添
加量は、主成分100重量部に対してアルカリ金属炭酸
塩換算、例えばLi2 CO3 換算で1〜10重量部に特
定され、とりわけ誘電体磁器のQ値の観点からは3〜7
重量部が望ましい。
The reason why the alkali metal-containing compound is added in an amount of 1 to 10 parts by weight in terms of the alkali metal carbonate is that when the addition amount of the alkali metal-containing compound, for example, lithium-containing compound is less than 1 part by weight, 1100 ° C. But without sintering
Simultaneous firing with Ag or Cu is no longer possible.
If the amount exceeds 0 parts by weight, the crystal phase changes and the Q value decreases. Therefore, the addition amount of the alkali metal-containing compound is specified to be 1 to 10 parts by weight in terms of alkali metal carbonate, for example, in terms of Li 2 CO 3 , based on 100 parts by weight of the main component. From 3 to 7
Parts by weight are desirable.

【0021】アルカリ金属としては、Li、Na、Kを
例示することができ、この中でもLiが特に望ましい。
アルカリ金属含有化合物としては、上記アルカリ金属の
炭酸塩、酸化物等を例示することができる。
Examples of the alkali metal include Li, Na and K. Among them, Li is particularly desirable.
Examples of the alkali metal-containing compound include the above-mentioned alkali metal carbonates and oxides.

【0022】本発明の誘電体磁器組成物では、主成分1
00重量部に対して、さらにSr含有化合物、Al含有
化合物、Si含有化合物、W含有化合物およびY含有化
合物のうち少なくとも1種をそれぞれSrCO3 、Al
2 3 、SiO2 、WO3 、Y2 3 換算で合計0.2
〜6重量部含有するものである。これらが0.2重量部
未満の場合には、誘電体磁器の焼結過程における収縮開
始温度が約840℃程度と高く、添加の効果が得られな
いからである。一方、該添加物が6重量部を超えると、
誘電体磁器の比誘電率εrあるいはQ値が低下するから
である。誘電体磁器の比誘電率εrあるいはQ値の観点
からは、合計0.7〜4重量部が望ましい。
In the dielectric porcelain composition of the present invention, the main component 1
Further, at least one of Sr-containing compound, Al-containing compound, Si-containing compound, W-containing compound and Y-containing compound was added to SrCO 3 , Al
2 O 3 , SiO 2 , WO 3 , Y 2 O 3 conversion, total 0.2
-6 parts by weight. If the content is less than 0.2 parts by weight, the shrinkage start temperature in the sintering process of the dielectric ceramic is as high as about 840 ° C., and the effect of addition cannot be obtained. On the other hand, when the additive exceeds 6 parts by weight,
This is because the relative permittivity εr or Q value of the dielectric porcelain decreases. From the viewpoint of the relative permittivity εr or Q value of the dielectric ceramic, a total of 0.7 to 4 parts by weight is desirable.

【0023】尚、本発明においては、誘電特性に悪影響
を及ぼさない範囲でSi、Zn、Mn、Zr等の酸化物
を添加含有しても良く、この場合さらに低温焼成が可能
となる。
In the present invention, oxides such as Si, Zn, Mn, and Zr may be added and contained as long as the dielectric properties are not adversely affected. In this case, firing at a lower temperature is possible.

【0024】本発明の誘電体磁器組成物は、例えば、M
gCO3 、CaCO3 、TiO2 の各原料粉末を所定量
となるように秤量し、混合粉砕し、これを1100〜1
300℃の温度で大気中で1〜3時間仮焼する。得られ
た仮焼物に、例えばB2 3とLi2 CO3 の各粉末、
およびSrCO3 、Al2 3 、SiO2 、WO3 、Y
2 3 のうち少なくとも1種の粉末を所定量となるよう
に秤量し、混合粉砕し、プレス成形やドクターブレード
法等の周知の方法により所定形状に成形した後、大気中
等の酸化性雰囲気または窒素雰囲気中等の非酸化性雰囲
気において、900〜1050℃において0.5〜2.
0時間焼成することにより得られる。
The dielectric porcelain composition of the present invention may be, for example,
Each raw material powder of gCO 3 , CaCO 3 , and TiO 2 was weighed so as to have a predetermined amount, mixed and pulverized.
Calcination is performed in air at a temperature of 300 ° C. for 1 to 3 hours. To the obtained calcined material, for example, each powder of B 2 O 3 and Li 2 CO 3 ,
And SrCO 3 , Al 2 O 3 , SiO 2 , WO 3 , Y
At least one kind of powder of 2 O 3 is weighed to a predetermined amount, mixed and pulverized, formed into a predetermined shape by a known method such as press molding or a doctor blade method, and then oxidized atmosphere such as in the air or 0.5 to 2.degree. C. at 900 to 1050.degree. C. in a non-oxidizing atmosphere such as a nitrogen atmosphere.
It is obtained by firing for 0 hours.

【0025】また、本発明の積層体は、誘電体層を複数
積層してなる誘電基体の内部および/または表面に、A
gおよび/またはCuを主成分とする導体を有するもの
であり、誘電体層として、上記した誘電体磁器組成物を
用いたものである。
Further, the laminate of the present invention has a structure in which a dielectric substrate formed by laminating a plurality of dielectric layers has A
It has a conductor containing g and / or Cu as a main component, and uses the above-described dielectric ceramic composition as a dielectric layer.

【0026】導体としては、Agおよび/またはCuを
主成分とするもの、例えば、Ag、Cu、あるいはA
g、Cuに対してガラス成分やセラミック成分、Pt、
Pd等の金属を添加したものも含まれる。これらの金属
に対してガラス成分やセラミック成分を添加した導体は
内部導体として、また、Ptを添加した導体は表面導体
として好適に用いられる。このような導体は、焼成時に
おける収縮開始温度は高くとも650℃程度である。
As the conductor, one containing Ag and / or Cu as a main component, for example, Ag, Cu, or A
g, Cu, glass component or ceramic component, Pt,
A material to which a metal such as Pd is added is also included. A conductor obtained by adding a glass component or a ceramic component to these metals is suitably used as an internal conductor, and a conductor obtained by adding Pt is suitably used as a surface conductor. Such a conductor has a shrinkage onset temperature of at most about 650 ° C. during firing.

【0027】本発明の誘電体磁器組成物は、Sr含有化
合物、Al含有化合物、Si含有化合物、W含有化合物
およびY含有化合物のうち少なくとも1種をそれぞれS
rCO3 、Al2 3 、SiO2 、WO3 、Y2 3
算で合計0.2〜6重量部含有することにより、収縮開
始温度を815℃以下にすることができるため、導体の
収縮開始温度に近づけることができる。
The dielectric porcelain composition of the present invention comprises at least one of an Sr-containing compound, an Al-containing compound, a Si-containing compound, a W-containing compound and a Y-containing compound.
By containing rCO 3 , Al 2 O 3 , SiO 2 , WO 3 , and Y 2 O 3 in a total amount of 0.2 to 6 parts by weight, the shrinkage starting temperature can be 815 ° C. or less, so that the conductor shrinks. The starting temperature can be approached.

【0028】[0028]

【実施例】【Example】

実施例1 先ず、純度99%以上のMgCO3 、CaCO3 、Ti
2 の各原料粉末を表1〜3に示す量となるように秤量
し、該原料粉末に媒体として純水を加えて24時間、Z
rO2 ボールを用いたボールミルにて混合した後、該混
合物を乾燥し、次いで該乾燥物を大気中において120
0℃の温度で1時間仮焼した。
Example 1 First, MgCO 3 , CaCO 3 , Ti with a purity of 99% or more
Each raw material powder of O 2 was weighed to the amount shown in Tables 1 to 3, and pure water was added as a medium to the raw material powder, and Z was added for 24 hours.
After mixing in a ball mill using rO 2 balls, the mixture is dried and then the dried
Calcination was performed at a temperature of 0 ° C. for 1 hour.

【0029】得られた仮焼物にB2 3 、Li2
3 、SrCO3 、Al2 3 、SiO2 、WO3 、Y
2 3 の粉末を表1〜3に示す割合となるように秤量
し、上記ボールミルにて24時間、混合した後、バイン
ダーとしてポリビニルアルコールを1重量%加えてから
造粒し、該造粒物を約1t/cm2 の加圧力でプレス成
形して直径約12mm、高さ10mmの円柱状の成形体
を作製した。
B 2 O 3 , Li 2 C
O 3 , SrCO 3 , Al 2 O 3 , SiO 2 , WO 3 , Y
The powder of 2 O 3 was weighed so as to have a ratio shown in Tables 1 to 3 and mixed for 24 hours in the above-mentioned ball mill, and then 1% by weight of polyvinyl alcohol was added as a binder, followed by granulation. Was press-formed at a pressure of about 1 t / cm 2 to produce a columnar molded body having a diameter of about 12 mm and a height of 10 mm.

【0030】[0030]

【表1】 [Table 1]

【0031】[0031]

【表2】 [Table 2]

【0032】[0032]

【表3】 [Table 3]

【0033】その後、前記成形体を大気中、400℃の
温度で4時間加熱して脱バインダー処理し、引き続き大
気中において表4〜6に示す各温度で60分間焼成し
た。得られた円柱体の両端面を平面研磨し、誘電体特性
評価用試料を作製した。
Thereafter, the molded body was heated at a temperature of 400 ° C. for 4 hours in the air to remove the binder, and then calcined at a temperature shown in Tables 4 to 6 for 60 minutes in the air. Both end faces of the obtained cylindrical body were polished to prepare a sample for dielectric property evaluation.

【0034】誘電体特性の評価は、前記評価用試料を用
いて誘電体円柱共振器法により、共振周波数を6〜8G
Hzに設定して各試料の比誘電率εrと7GHzにおけ
る1/tanδ、即ちQ値を測定するとともに、−40
〜+85℃の温度範囲における共振周波数の温度係数τ
fを測定した。
The evaluation of the dielectric characteristics is performed by using the above-mentioned sample for evaluation and setting the resonance frequency to 6 to 8 G by the dielectric cylinder resonator method.
Hz, and the relative dielectric constant εr of each sample and 1 / tan δ at 7 GHz, that is, the Q value were measured.
Temperature coefficient τ of resonance frequency in the temperature range of ~ + 85 ° C
f was measured.

【0035】[0035]

【表4】 [Table 4]

【0036】[0036]

【表5】 [Table 5]

【0037】[0037]

【表6】 [Table 6]

【0038】表4〜6によれば、本発明の誘電体磁器組
成物では、焼結過程における収縮の開始温度が815℃
以下、焼成温度が900〜1050℃と比較的低温であ
り、さらに、比誘電率εrが18以上、7GHzにおけ
るQ値が2000以上、かつ共振周波数の温度係数τf
が±40以内の優れた特性を有することができることが
わかる。尚、試料No.15、16はLi2 CO3 の代わ
りにNa2 CO3 を用いた。
According to Tables 4 to 6, in the dielectric ceramic composition of the present invention, the onset temperature of shrinkage in the sintering process is 815 ° C.
Hereinafter, the firing temperature is relatively low at 900 to 1050 ° C., the relative dielectric constant εr is 18 or more, the Q value at 7 GHz is 2000 or more, and the temperature coefficient τf of the resonance frequency.
It can be understood that excellent characteristics within ± 40 can be obtained. Samples Nos. 15 and 16 used Na 2 CO 3 instead of Li 2 CO 3 .

【0039】実施例2 先ず、純度99%以上のMgTiO3 、CaTiO3
各原料粉末を表7、8に示す量となるように秤量し、該
原料粉末に媒体として純水を加えて24時間、ZrO2
ボールを用いたボールミルにて混合した後、該混合物を
乾燥し、次いで該乾燥物を大気中1200℃の温度で1
時間仮焼した。
Example 2 First, raw material powders of MgTiO 3 and CaTiO 3 having a purity of 99% or more were weighed to the amounts shown in Tables 7 and 8, and pure water was added to the raw material powder for 24 hours. , ZrO 2
After mixing in a ball mill using a ball, the mixture is dried, and then the dried product is dried at 1200 ° C. in air for 1 hour.
It was calcined for hours.

【0040】得られた仮焼物にB2 3 、Li2
3 、SrCO3 、Al2 3 、SiO2 、WO3 、Y
2 3 の粉末を表7、8に示す割合となるように秤量
し、上記ボールミルにて24時間、混合した後、バイン
ダーとしてポリビニルアルコールを1重量%加えてから
造粒し、該造粒物を約1t/cm2 の加圧力でプレス成
形して直径約12mm、高さ10mmの円柱状の成形体
を作製した。
B 2 O 3 , Li 2 C
O 3 , SrCO 3 , Al 2 O 3 , SiO 2 , WO 3 , Y
The powder of 2 O 3 was weighed so as to have the ratios shown in Tables 7 and 8, and mixed in the ball mill for 24 hours. Then, 1% by weight of polyvinyl alcohol was added as a binder, and the mixture was granulated. Was press-formed at a pressure of about 1 t / cm 2 to produce a columnar molded body having a diameter of about 12 mm and a height of 10 mm.

【0041】[0041]

【表7】 [Table 7]

【0042】[0042]

【表8】 [Table 8]

【0043】その後、前記成形体を大気中、400℃の
温度で4時間加熱して脱バインダー処理し、引き続き表
9、10に示す各温度で大気中60分間焼成した。かく
して得られた円柱体の両端面を平面研磨し、誘電体特性
評価用試料を作製した。誘電体特性の評価は、上記と同
様にして求め、その結果を表9、10に記載した。
Thereafter, the molded body was heated at 400 ° C. for 4 hours in the air to remove the binder, and then calcined at the temperatures shown in Tables 9 and 60 for 60 minutes in the air. Both end surfaces of the thus obtained cylindrical body were polished to obtain a dielectric property evaluation sample. The dielectric properties were evaluated in the same manner as described above, and the results are shown in Tables 9 and 10.

【0044】[0044]

【表9】 [Table 9]

【0045】[0045]

【表10】 [Table 10]

【0046】この表9、10によれば、本発明の誘電体
磁器組成物では、焼結過程における収縮の開始温度が8
15℃以下、焼成温度が1050℃以下と比較的低温で
あり、さらに、比誘電率εrが18以上、Q値が300
0以上、かつ共振周波数の温度係数τfが±30以内の
優れた特性を有することがわかる。
According to Tables 9 and 10, in the dielectric ceramic composition of the present invention, the shrinkage starting temperature in the sintering process is 8
The temperature is relatively low, such as 15 ° C. or less, and the firing temperature is 1050 ° C. or less, and the relative dielectric constant εr is 18 or more and the Q value is 300
It can be seen that it has excellent characteristics in which the temperature coefficient τf of the resonance frequency is 0 or more and within ± 30.

【0047】[0047]

【発明の効果】本発明の誘電体磁器組成物では、焼結過
程における収縮の開始温度を815℃以下と導体の収縮
開始温度に近づけることができ、また、焼成温度も10
50℃以下と比較的低温であるため、AgやCu等と同
時に焼成でき、かつ、同時焼成したとしても反りや歪み
のない積層体(基板や電子部品)を得ることができる。
According to the dielectric porcelain composition of the present invention, the onset temperature of shrinkage in the sintering process can be close to the shrinkage onset temperature of the conductor at 815 ° C. or less, and the firing temperature can be as low as 10 ° C.
Since the temperature is relatively low, such as 50 ° C. or lower, a laminate (substrate or electronic component) that can be fired simultaneously with Ag, Cu, or the like and has no warpage or distortion even when fired simultaneously can be obtained.

【0048】さらに、高周波領域において高い比誘電率
(18以上)を有するとともに、Q値(2000以上)
も高く、かつ共振周波数の温度特性(±40以内)にも
優れ、高周波電子回路基板や電子部品のより一層の小型
化と高性能化が実現できる。
Further, it has a high relative dielectric constant (18 or more) in a high frequency region and a Q value (2,000 or more).
It is also excellent in temperature characteristics of resonance frequency (within ± 40), and further downsizing and high performance of high frequency electronic circuit boards and electronic components can be realized.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 久和 登代美 鹿児島県国分市山下町1番4号 京セラ株 式会社総合研究所内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toshiro Hisa 1-4-4 Yamashita-cho, Kokubu-shi, Kagoshima Inside the Kyocera Research Institute

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】金属元素としてMg、Ca、Tiを含有す
る複合酸化物であって、これらの金属元素酸化物の重量
比による組成式を aMgO・bCaO・cTiO2 と表した時、前記a、b、cが 25.0≦a≦35.0 0.3≦b≦ 7.0 60.0≦c≦70.0 a+b+c=100 を満足する主成分と、該主成分100重量部に対して、
硼素含有化合物をB2 3 換算で3〜20重量部、アル
カリ金属含有化合物をアルカリ金属炭酸塩換算で1〜1
0重量部、Sr含有化合物、Al含有化合物、Si含有
化合物、W含有化合物およびY含有化合物のうち少なく
とも1種をそれぞれSrCO3 、Al2 3 、Si
2 、WO3 、Y2 3 換算で合計0.2〜6重量部含
有してなることを特徴とする誘電体磁器組成物。
1. A Mg as the metal element, Ca, a composite oxide containing Ti, when expressed as aMgO · bCaO · cTiO 2 the formula by weight ratio of the metal element oxides, wherein a, b and c satisfy 25.0 ≦ a ≦ 35.0 0.3 ≦ b ≦ 7.0 60.0 ≦ c ≦ 70.0 a + b + c = 100 and 100 parts by weight of the main component ,
The boron-containing compound is 3 to 20 parts by weight in terms of B 2 O 3 , and the alkali metal-containing compound is 1 to 1 parts in terms of alkali metal carbonate.
0 parts by weight, at least one of Sr-containing compound, Al-containing compound, Si-containing compound, W-containing compound and Y-containing compound is SrCO 3 , Al 2 O 3 , Si
O 2, WO 3, Y 2 O 3 dielectric ceramic composition characterized in total 0.2 to 6 by containing parts by weight basis.
【請求項2】金属元素としてMg、Ca、Tiを含有す
る複合酸化物であって、その組成式が(100−x)M
gTiO3 −xCaTiO3 (但し、式中xは重量比を
表し、1≦x≦15)で表される主成分と、該主成分1
00重量部に対して、硼素含有化合物をB2 3 換算で
3〜20重量部、アルカリ金属含有化合物をアルカリ金
属炭酸塩換算で1〜10重量部、Sr含有化合物、Al
含有化合物、Si含有化合物、W含有化合物およびY含
有化合物のうち少なくとも1種をそれぞれSrCO3
Al2 3 、SiO2 、WO3 、Y2 3 換算で合計
0.2〜6重量部含有してなることを特徴とする誘電体
磁器組成物。
2. A composite oxide containing Mg, Ca, and Ti as metal elements, the composition formula of which is (100-x) M
gTiO 3 -xCaTiO 3 (where x represents a weight ratio and 1 ≦ x ≦ 15);
3 to 20 parts by weight of the boron-containing compound in terms of B 2 O 3 , 1 to 10 parts by weight of the alkali metal-containing compound in terms of alkali metal carbonate, Sr-containing compound, Al
At least one of the containing compound, the Si-containing compound, the W-containing compound and the Y-containing compound is SrCO 3 ,
Al 2 O 3, SiO 2, WO 3, Y 2 O 3 dielectric ceramic composition characterized in total 0.2 to 6 by containing parts by weight basis.
【請求項3】誘電体層を複数積層してなる誘電基体の内
部および/または表面に、Agおよび/またはCuを主
成分とする導体を有する積層体であって、前記誘電体層
が、請求項1記載の誘電体磁器組成物からなることを特
徴とする積層体。
3. A laminate having a conductor containing Ag and / or Cu as a main component inside and / or on a surface of a dielectric substrate formed by laminating a plurality of dielectric layers. Item 10. A laminate comprising the dielectric ceramic composition according to Item 1.
【請求項4】誘電体層を複数積層してなる誘電基体の内
部および/または表面に、Agおよび/またはCuを主
成分とする導体を有する積層体であって、前記誘電体層
が、請求項2記載の誘電体磁器組成物からなることを特
徴とする積層体。
4. A laminate having a conductor containing Ag and / or Cu as a main component inside and / or on a surface of a dielectric substrate formed by laminating a plurality of dielectric layers. Item 3. A laminate comprising the dielectric ceramic composition according to Item 2.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002338333A (en) * 2001-05-17 2002-11-27 Tdk Corp Sintering assistant

Cited By (1)

* Cited by examiner, † Cited by third party
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JP2002338333A (en) * 2001-05-17 2002-11-27 Tdk Corp Sintering assistant

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