JPH1099978A - Laser beam machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To completely avoid adhesion of foreign matters generated during the working to a surface of a base plate. SOLUTION: In a laser beam machine in which the manufacture number is engraved on a base plate installed in a part of the manufacturing process to manufacture a prescribed product by performing various kinds of film formation and patterning on the base plate through a series of working processes by a plurality of machines, the laser beam machine is provided with a machining table 7 which is moved in two directions parallel to the plane of a base plate 4 loaded thereon, and positions the engraving region where the manufacture number is engraved laser beam irradiation equipment 2 to engrave the manufacture number corresponding to the kind of the loaded substrate 4 in an engraving region 8, a fluid feed device 11 having a blow nozzle 12 to spray the fluid over the engraving region 8 of the base plate 4 loaded on the machining table 7, and an exhaust device 10 having a suction duct 9 to suck te fluid in the engraving region 8. The foreign matters generated in the engraving region 8 during the machining by the laser beam irradiation equipment 2 are removed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus, and more particularly to a laser processing apparatus for imprinting a serial number or the like on an insulating substrate such as a glass plate constituting a liquid crystal display panel.

[0002]

2. Description of the Related Art In recent years, a liquid crystal display device has been used as a so-called panel type display device for displaying various images. In particular, a color liquid crystal display device capable of displaying a full-color image has been widely used.

[0003] In this color liquid crystal display device, a liquid crystal is sandwiched between two insulating substrates, at least one of which is transparent, and a plurality of intersecting transparent electrodes are formed on each of the two insulating substrates. A simple matrix type in which pixels are formed at the intersections of the electrodes, an insulating substrate (color filter substrate: CF substrate) on which a color filter is formed, and another insulating substrate (TFT substrate) on which a number of switching elements such as thin film transistors are formed. There is known an active matrix type liquid crystal display device in which liquid crystal is sandwiched between the switching elements to form a pixel with the switching element.

[0004] The prior art of the liquid crystal display device is disclosed in, for example, Japanese Patent Publication No. 51-13666 and Japanese Patent Application Laid-Open No. 63-309921.

[0005] Since a glass substrate is generally used as the insulating substrate, the following description will be made on the assumption that the insulating substrate is a glass substrate, but the same applies to insulating substrates other than glass substrates.

[0006] In the manufacturing process of this type of liquid crystal display device, by engraving a serial number corresponding to the type of the device to be manufactured on the glass substrate, multi-type production can be efficiently performed on a common manufacturing line.

FIG. 4 is an explanatory view of a schematic manufacturing process on the color filter substrate side for explaining the manufacturing of the liquid crystal display device.

First, a glass substrate for a color filter substrate is carried into a line, and is washed to clean the surface of the glass substrate (step A). A mixed material of a black matrix (BM) film material, which is a light-shielding film of a color filter, and a photosensitive material is applied to the glass substrate, dried (step B), and exposed through an exposure mask having a black matrix pattern. (Step C). At this time, a pattern of the type information is also provided in a part outside the effective area of the exposure mask.

After the mask is exposed, it is developed and dried to form a black matrix (Step D). At this time,
At the time of exposure, type information is simultaneously formed on the black matrix film. The type information includes the type (simple matrix type, TFT type) and size of the liquid crystal panel.

[0010] Thereafter, a production number in accordance with the above-mentioned type information is stamped at a predetermined position outside the effective area of the glass substrate with a laser beam or the like (step E).

The glass substrate on which the manufacturing number is imprinted is passed to a color filter forming process for sequentially forming color filters of each color, and is made of a plurality of colors (generally three colors of red, green and blue) partitioned by a black matrix. A color filter is formed (Step F).

The color filter substrate is bonded to a separately manufactured TFT substrate (step G), and liquid crystal is injected into a gap between the two and sealed to form a liquid crystal panel (step H). A module is obtained by combining the liquid crystal panel with optical members such as a polarizing plate and a prism plate, a drive circuit board, a backlight, and other necessary components (Step I). The module is shipped after the final shipping inspection (process J).

The above-described steps are merely examples, and the contents of each step vary.

In the above-mentioned serial number engraving step, the laser processing apparatus for performing engraving by irradiating a laser beam has a processing table for performing engraving while holding the glass substrate transferred from the previous step at a predetermined position. .

This processing table is composed of a plurality of support rods erected so that the glass substrate carried horizontally by the plurality of erected support rods is supported on the lower surface thereof, and the peripheral edge of the substrate is brought into contact with the peripheral edge of the substrate. And a positioning device including a plurality of positioning pins for moving back and forth in parallel with the processing table to position the substrate at a predetermined position.

The marking of the serial number is performed by irradiating a laser beam onto a marking area provided in a part of the periphery of the black matrix formed on the glass substrate, cutting out the black matrix layer in the part, and forming a required character and numeral. Form.

FIG. 5 is a plan view of a glass substrate for explaining an example of an engraved area of a serial number.
Are four liquid crystal panels (color filter substrates) (A,
B, C, D) panel area, 8 is a serial number engraved area, 8
Reference numeral a denotes a product type display area in which product code and processing condition data are displayed.

The production number is stamped by controlling the laser irradiation apparatus according to the type of the display area 8a such as the type displayed on the glass substrate 4 conveyed from the previous process. Is engraved.

FIG. 6 is a schematic diagram for explaining the configuration of a conventional laser processing apparatus for marking a serial number, wherein 1 is a laser control device, 2 is a laser irradiation device, 2a is an objective lens, 3 is a laser beam, Is a glass substrate, 5 is a black matrix, 6 is a support rod planted on a processing table, 7 is a processing table, and 8 is a serial number marking area. The processing table is an XY table that moves the glass substrate 4 in two directions parallel to the plane and adjusts the position of the laser engraving by the laser beam 3 and the position of the serial number engraving area 8.

In FIG. 1, a glass substrate 4 is carried in horizontally from a previous process and is placed on a plurality of support rods 6 set on a processing table 7. Thereafter, the positioning pins (not shown) arranged on the side face move toward the glass substrate 4,
The glass substrate 4 is brought into contact with the four peripheral edges of the glass substrate 4 and pushed to position the glass substrate 4 at a predetermined position.

In this state, the laser control device 1 controls the laser irradiating device 2 to imprint a production number corresponding to the data such as the kind displayed on a part of the black matrix of the glass substrate 4 with the production number of the black matrix 5. Mark area 8.

In the engraving process, required characters and numbers are formed by exposing the glass substrate surface by engraving the black matrix 5 with a laser beam. , Dust, etc.). If you leave this dust etc.
It remains as a foreign substance on the surface of the glass substrate 4 and causes deterioration of the characteristics of the liquid crystal display device.

In the conventional laser processing apparatus, a suction duct 9 is installed near a processing surface (engraved area) of the glass substrate 4 to suck out dust and the like generated, and the dust is discharged to the outside of the apparatus by an exhaust device 10 to be used. Harmless treatment.

[0024]

In the above prior art, a suction duct is installed near the processing surface of a substrate (glass substrate), and only dust and the like generated in the engraving work are sucked and discharged. The soared dust or the like is not completely removed, and a part of the dust may adhere to the surface of the glass substrate as a foreign substance, which causes a problem that the performance of the liquid crystal display device as a product is deteriorated.

Note that such a problem occurs not only in a glass substrate for a liquid crystal display panel, but also in a similar substrate or the like which refuses to adhere foreign substances generated during processing.

An object of the present invention is to solve the above-mentioned problems of the prior art, and to completely prevent foreign matter generated during processing from adhering to the surface of various substrates such as a glass substrate to be processed. An object of the present invention is to provide a processing device.

[0027]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a fluid delivery device for injecting a fluid such as air onto a surface near a processing region of an insulating substrate such as a glass substrate to be processed, and the fluid delivery device with respect to the processing region. This is achieved by providing a suction duct for sucking a fluid on the opposite side of the apparatus to blow off dust and the like generated in the processing from the processing area and at the same time suck and remove the dust and the like.

That is, according to the first aspect of the present invention, a manufacturing process of manufacturing a predetermined product by performing various film forming processes and patterning on a substrate through a series of processing steps by a plurality of processing machines. A laser processing apparatus for engraving a serial number on a substrate installed on a part of a substrate, a processing table for positioning an engraved area for engraving the serial number by moving in two directions parallel to the plane of the mounted substrate; A laser irradiation device for imprinting a production number corresponding to the type of the substrate placed on the marking region, a fluid delivery device having a blow nozzle for ejecting a fluid to the marking region on the substrate placed on the processing table, and the marking region An exhaust device having a suction duct for sucking the fluid, and removing foreign matter generated in the marking area by processing of the laser irradiation device.

With this configuration, by simultaneously ejecting the fluid to the laser processing area and sucking the fluid, it is possible to prevent dust and the like generated by the processing from adhering to the surface of the substrate as foreign matter.

According to a second aspect of the present invention, there is provided a manufacturing process in which a predetermined product is manufactured by performing various film forming processes and patterning on a substrate through a series of processing steps by a plurality of processing machines. A laser processing apparatus for engraving a serial number on a substrate installed on a part of a substrate, a processing table for positioning an engraved area for engraving a serial number by moving in two directions parallel to the plane of the mounted substrate; A laser irradiator for engraving the serial number corresponding to the type of substrate placed on the engraved area, and a laser beam from the laser irradiator installed between the laser irradiator and the substrate and passing through the engraved area A dustproof cover having a window that allows the fluid to be sent from the fluid delivery device to the marking area, and a suction duct that sucks the fluid in the marking area by an exhaust device. Provided, and removing the foreign materials generated in the marking area by the processing of the laser irradiation apparatus.

With this configuration, the engraved area is isolated from the surrounding atmosphere by the dustproof cover, and the suction of the suction duct is performed in the limited space defined by the dustproof cover, so that dust and the like generated by the processing are effectively exhausted. Also, it does not adhere to the surface of the substrate as a foreign substance.

The number of blow nozzles and suction ducts in each of the above inventions is not limited to one, and may be two or more, and the suction ducts in the first invention may also be used as the second dustproof cover. Can also.

[0033]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to embodiments.

FIG. 1 is a schematic view of a main part of a laser processing apparatus according to an embodiment of the present invention.
Similarly, 1 is a laser control device, 2 is a laser irradiation device, 2a is an objective lens, 3 is a laser beam, 4 is a glass substrate, 5 is a black matrix, 6 is a support rod erected on a processing table, 7 is A processing table, 8 is a serial number marking area, 9 is a suction duct, and 10 is an exhaust device. Also, 1
1 is a fluid delivery device, and 12 is a blow nozzle.

In the figure, a plurality of support rods 6 are provided in a glass substrate mounting area of a processing table 7 which is an XY table movable in two directions parallel to the plane of the glass substrate 4 to be processed. It is planted.

The black matrix 5 is formed on the surface of the glass substrate 4 in the previous step, and the glass substrate 4 is loaded onto the processing table 7 with the black matrix forming surface facing upward.

The glass substrate 4 is placed on the support rod 6, and the processing table is finely adjusted by a positioning device (not shown) so that the manufacturing number engraved area 8 coincides with the irradiation position of the laser beam.

The laser controller 1 is positioned in a state where the irradiation position of the laser beam 3 and the serial number marking area 8 are positioned.
Supplies the production number information to the laser irradiation device 2 based on the type of the glass substrate or the like, and irradiates the laser light 3 to the engraved area to execute engraving of the production number.

At this time, the fluid delivery device 11 sends out the pressurized air to the blow nozzle 12 to eject the pressurized air near the marking region, and the exhaust device 10 suctions the air near the marking region by the suction duct 9. I do.

As a result, dust and the like generated during the engraving operation are removed by the exhaust device 10 without adhering to the surface of the substrate 4, and reach a harm removal device (not shown), where the harm is removed.

According to this embodiment, it is possible to prevent dust accompanying the engraving of the serial number from adhering to the glass substrate, and to manufacture a high quality liquid crystal panel.

FIG. 2 is a schematic view of a principal part for explaining the configuration of another embodiment of the laser processing apparatus according to the present invention, wherein 13 is a dustproof cover, 13a is an entrance window, 13b is an exit window, and the same reference numerals as those in FIG. Correspond to the same part.

This embodiment has the same configuration as that of FIG. 1 except that a dust cover 13 is disposed between the laser irradiation device 2 and the glass substrate 4.

The dust cover 13 is provided between the laser irradiating device 2 and the glass substrate 4, and an entrance window 13 a for inputting the laser beam 3 from the laser irradiating device 2 and an emission window for irradiating the glass substrate 4 with the laser height 3. A window 13b is provided to cover the area around the marking area, and a part thereof is
1 is provided with a blow nozzle 12 for injecting the air flow from 1 and a suction duct 9 connected to an exhaust device for sucking air in the marking area together with dust and the like.

Similarly, in this embodiment, the glass substrate 4 is mounted on the support rod 6, and the processing table is finely adjusted by a positioning device (not shown) so that the serial number marking area 8 coincides with the irradiation position of the laser beam. .

The laser controller 1 is positioned in a state where the irradiation position of the laser beam 3 and the serial number marking area 8 are positioned.
Supplies the production number information to the laser irradiation device 2 based on the type of the glass substrate or the like, and irradiates the laser light 3 to the engraved area to execute engraving of the production number.

At this time, the fluid delivery device 11 sends out the pressurized air to the blow nozzle 12 attached to the dustproof cover 13 to eject the pressurized air near the marking area in the dustproof cover 13, and the exhaust device 10 sucks the air. The duct 9 sucks air near the marking area together with dust and the like.

As a result, dust and the like generated during the engraving operation are removed by the exhaust device 10 without adhering to the surface of the substrate 4, and reach a harm removal device (not shown), where the harm is removed.

According to this embodiment, since the jet of the air flow and the suction of the air flow are performed in the limited space, the dust accompanying the stamp of the serial number is more effectively prevented from adhering to the glass substrate, and the high quality is achieved. A liquid crystal panel can be manufactured.

The marking of the serial number is performed in accordance with the type data input to the laser control device 1. The type data may be input manually or at a predetermined position of the black matrix 5 of the glass substrate 4. In this case, the data in the display area for product type etc., which is formed simultaneously, is automatically read, and the read data is input to the laser control device 1.

FIG. 3 is an exploded perspective view for explaining a configuration example of a liquid crystal display module assembled by using a liquid crystal panel manufactured and stamped with a serial number using the laser processing apparatus according to the present embodiment. 20 is the upper frame, 20a
Is a display window, 21 is a color liquid crystal panel, 22a, 22b,
22c is a printed circuit board, 23a and 23b are spacers, 24 is a light shielding sheet, 25 is a light guide, 26 is a backlight lamp, 27 is a lamp cover, 28 is an intermediate mold, 29 is a lower frame, 30 is a cut and raised piece, 31 is a notch hole.

Around the color liquid crystal panel 21, printed circuit boards 22a, 22b, 2
2c is attached.

Then, a light guide 25 is laminated on the back surface,
A backlight lamp 26 is installed on one side thereof, and the backlight cover 2 and the light shielding sheet 24 are used to form the backlight lamp 2.
6 is prevented from leaking to the color liquid crystal panel 21 side.

Spacers 23a and 23b are interposed between the color liquid crystal panel 21 and the upper frame 20, and the light guide 25
And backlight lamp 26 and color liquid crystal panel 21
Is attached to the intermediate frame 28, and the cut-and-raised pieces 30 formed in the upper frame 20 are inserted and fixed in the cutout holes 31 formed in the lower frame 29 to assemble the integrated color liquid crystal display module.

The liquid crystal display module assembled in this manner is used as an image display device for personal computers, word processors, and other electronic devices.

In the above embodiments, the laser processing is described as engraving the serial number on the color filter substrate of the liquid crystal panel. However, the present invention is not limited to this, and the TFT glass forming the liquid crystal panel is not limited to this. It can be applied to various processing steps of substrates in the same way, and is applied not only to liquid crystal display devices, but also to the positioning of insulating substrates in the processing of various panel display elements or various electronic devices manufactured on a common manufacturing line. be able to.

[0057]

As described above, according to the present invention,
When a production number is engraved on a substrate such as a glass substrate to be processed by laser processing, a fluid is spouted into the engraved area, and the fluid is simultaneously sucked, so that dust generated by the processing becomes foreign matter. It is possible to prevent the liquid crystal display device from adhering to the surface of the substrate, and to prevent deterioration in performance due to the adhesion of foreign matter, thereby manufacturing a high-quality liquid crystal display device.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a main part illustrating a configuration of an embodiment of a laser processing apparatus according to the present invention.

FIG. 2 is a schematic diagram of a main part for explaining the configuration of another embodiment of the laser processing apparatus according to the present invention.

FIG. 3 is an exploded perspective view illustrating a configuration example of a liquid crystal display module assembled using a liquid crystal panel manufactured by engraving a serial number or the like using the laser processing apparatus according to the present embodiment.

FIG. 4 is an explanatory diagram of a schematic manufacturing process on the color filter substrate side for explaining the manufacturing of the liquid crystal display device.

FIG. 5 is a plan view of a glass substrate for explaining an example of an engraved area of a production number.

FIG. 6 is a schematic diagram illustrating a configuration of a conventional laser processing apparatus that performs production number stamping.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Laser control apparatus 2 Laser irradiation apparatus 2a Objective lens 3 Laser beam 4 Glass substrate 5 Black matrix 6 Support bar laid on a processing table 7 Processing table 8 Serial number marking area 9 Suction duct 10 Exhaust device 11 Fluid delivery device 12 Blow Nozzle 13 dust cover 13a entrance window 13b exit window.

Claims (2)

[Claims] 1. A serial number is imprinted on a substrate installed in a part of a manufacturing process of manufacturing a predetermined product by performing various film forming processes and patterning on the substrate through a series of processing steps by a plurality of processing machines. In the laser processing apparatus, a processing table that moves in two directions parallel to the plane of the mounted substrate and positions a marking area for marking a serial number, and a serial number corresponding to the type of the mounted substrate is described above. A laser irradiating device for marking the marking region, a fluid delivery device having a blow nozzle for ejecting a fluid to the marking region of the substrate placed on the processing table, and an exhaust device having a suction duct for sucking the fluid in the marking region And a foreign matter generated in the engraved region by processing of the laser irradiation device. 2. A serial number is imprinted on a substrate installed in a part of a manufacturing process of manufacturing a predetermined product by performing various film forming processes and patterning on the substrate through a series of processing steps by a plurality of processing machines. In the laser processing apparatus, a processing table that moves in two directions parallel to the plane of the mounted substrate and positions a marking area for marking a serial number, and a serial number corresponding to the type of the mounted substrate is described above. A laser irradiator for engraving an engraved area, a window provided between the laser irradiator and the substrate to allow a laser beam from the laser irradiator to pass through the engraved area, and a fluid delivery device for the engraved area A dustproof cover provided with a blow nozzle for injecting fluid from the nozzle and a suction duct for sucking the fluid in the marking area by an exhaust device, and processing the laser irradiation device. Laser processing apparatus characterized by removing foreign matter more generated in the marking area.