KR20130094682A - Method of manufacturing pellicle - Google Patents

Abstract

PURPOSE: A method for manufacturing a pellicle is provided to improve efficiency by enabling the individual information of each pellicle to be easily confirmed or recognized. CONSTITUTION: A pellicle (1) manufacturing method absorbs or exhausts a part in which laser is irradiated by irradiating laser of 500 to 11000nm wavelength on the surface of a pellicle frame (2) where a pellicle layer (3) is attached when processing the information (5) of an individual. The information of the individual indicates at least one selected from a lot number, a format, a manufacturer name and a serial number. The information of the individual is a bar code (6). The processing is an imprinting process.

Description

Manufacturing method of the pellicle {METHOD OF MANUFACTURING PELLICLE}

TECHNICAL FIELD This invention relates to the manufacturing method of the pellicle for lithography used as a dust shield when manufacturing a semiconductor device, a printed board, a liquid crystal display, etc.

In manufacture of a semiconductor device, a liquid crystal display, etc. of an LSI, light is irradiated to a semiconductor wafer or the glass original plate for liquid crystals, and a pattern is produced. At this time, if dust is attached to the photo mask or reticle used, the edges may be uneven or the soil may be contaminated with black, thereby causing damage to dimensions, quality, and appearance.

Their work is usually done in clean rooms. Nevertheless, it is difficult to keep the photo mask clean at all times, and a method of attaching a pellicle as a dust film on the surface of the photo mask has been taken. Since the pellicle is attached to the pellicle instead of directly on the surface of the photo mask, the pellicle can be transferred without being affected by the foreign material by focusing on the pattern of the photo mask during lithography.

Such a pellicle can be adhered to the transparent pellicle film made of nitrocellulose, cellulose acetate, or fluorine resin which usually transmits light well on the upper surface of the pellicle frame made of aluminum, stainless steel, polyethylene, etc. It is bonded with an adhesive such as epoxy resin. At the lower end of the pellicle frame, a pressure-sensitive adhesive layer made of polybdenum resin, polyvinyl acetate resin, acrylic resin, or the like for attachment to a photomask, and a release layer (separator) for the purpose of protecting the pressure-sensitive adhesive layer are provided. Also, foreign matters from the air moving through the small holes are formed by forming a small hole for adjusting the air pressure in a part of the pellicle frame for the purpose of eliminating the pressure difference between the space enclosed inside the pellicle and the outside in the state where the pellicle is attached with the photomask. Some filters are provided to prevent intrusion.

There are various specifications of the pellicle depending on the light source and the exposure machine to be applied, so the variety and type cannot be identified at first glance. For this reason, individual information such as product number is displayed on the outer surface of the pellicle frame by mechanical engraving or laser engraving by a engraving machine or the like (Patent Document 1). However, in general, the height of the pellicle frame is only about 3 to 6 mm, and the space available for display is small. Therefore, only a small symbol of 1 to 2 mm angle is used to display a form made of simple symbols consisting of a combination of numbers and alphabets. . Although the minimum required content is shown in this display, it was not sufficient because the required individual information could not be identified at first glance. For this reason, pellicles other than the type that the operator applies by mistake in the pellicle attachment work have been used. In addition, if the production number or the individual number of the pellicle is not recorded in any form during the attaching operation, there is a problem that it is difficult to specify the target pellicle when a trouble occurs later and the history cannot be confirmed.

In order to prevent these problems, the method of managing a pellicle by the pellicle management apparatus provided with the information generation part which recorded the individual information about the said pellicle in a pellicle, and means for reading the individual information is proposed (patent document) 2).

However, since both mechanical marking and laser marking, which is a method of marking these markings or information generating parts, are made by digging into the surface of the pellicle frame, there is a large amount of oscillation during processing, so that the pellicle frame is manufactured instead of the pellicle manufacturing process. These processing must be done in. For this reason, it is difficult to display information identifying each pellicle object such as a manufacturing number given in the manufacturing process of the pellicle, and the content of the display remains in the display of information known in advance such as the manufacturer name and format, and thus detailed information about the pellicle Was not shown.

Japanese Patent 3346205 Japanese Patent Laid-Open No. 11-84632

The present invention has been made to solve the above problems, and individual information identifying each pellicle such as a manufacturing number as well as a manufacturer's name and type is displayed. It is an object of the present invention to provide a method for producing a pellicle without adhesion of and a pellicle obtained by the method.

The method for producing a pellicle according to claim 1, which is made to achieve the above object, is characterized in that the laser is irradiated with a laser light having a wavelength of 500 to 11000 nm on the surface of the pellicle frame to which the pellicle film is attached to process the individual information. It is characterized by sucking and exhausting the irradiation part of light.

The method for producing a pellicle according to claim 2 is described in claim 1, characterized in that the individual information indicates at least one selected from a production number, a type, a manufacturer name, and an article number.

The manufacturing method of the pellicle of Claim 3 is a thing of Claim 1 or 2, The said individual information is a barcode, It is characterized by the above-mentioned.

The manufacturing method of the pellicle of Claim 4 is as described in any one of Claims 1-3, The said process is a stamping process, It is characterized by the above-mentioned.

The manufacturing method of the pellicle of Claim 5 is a thing of Claim 4, It is characterized in that the depth of the said stamping process is 0.05 mm at the maximum based on the surface of the said pellicle frame.

The method for producing a pellicle according to claim 6 is the method according to any one of claims 1 to 5, characterized in that the processing is performed by discoloring or discoloring the dye contained in the pellicle frame or the surface coating thereof.

The pellicle of Claim 7 is manufactured by the manufacturing method of any one of Claims 1-6, It is characterized by the above-mentioned.

According to the method for manufacturing a pellicle of the present invention, the individual information for identifying each pellicle, such as detailed manufacturing information of each pellicle, is not limited to information previously found in the manufacturing of the pellicle frame on the surface of the pellicle frame to which the pellicle film is attached. It can be processed. The individual information can be processed even during a pellicle manufacturing process that requires high cleanliness because the individual information is suppressed to extremely low damage and processed by suction and exhaust. Therefore, even if the pellicle film is adhered to the pellicle frame or before the adhesion, the individual information can be processed without fear of foreign matter attachment or dust generation, thereby providing a highly clean pellicle in any case. The detailed information of the individual pellicles can be easily confirmed by the processed individual information, and each pellicle individual can be identified.

In addition, according to this manufacturing method, since the individual information is discolored due to discoloration or fading, it is excellent in visibility and good in readability. By displaying the individual information as a bar code, more information can be included and displayed, and information can be read by an automatic machine.

The pellicle of the present invention is a pellicle with high cleanliness, and can easily check or recognize individual information of each pellicle, which helps to reduce work miss and improve work efficiency in pellicle attachment work.

1 is a perspective view of a pellicle to which the present invention is applied.
2 is a sectional view of a machining step in the manufacturing method to which the present invention is applied.

EMBODIMENT OF THE INVENTION Hereinafter, although the form for implementing this invention is demonstrated in detail, the scope of the present invention is not limited to these forms.

In the pellicle obtained by the manufacturing method to which the present invention is applied, the pellicle film 3 is tensioned and adhered to the upper end surface of the pellicle frame 2, which is a rectangular frame having a long side and a short side, as shown in FIG. . On the outer surface of the pellicle frame 2, the bar code 6 and the printing 7 are carved by the individual information 5 which enables identification of each pellicle. Moreover, the mask adhesion layer 8 is formed in the lower end surface of the pellicle frame 2 as needed, and the separator 9 which protects the mask adhesion layer 8 is attached to the surface. And the outer surface of the long side pellicle frame 2 in which the individual information 5 was carved was formed the recessed hole 10 which is a non-penetrating round hole, the ventilation filter 11, etc., and the outer surface of the short side pellicle frame. The semi-circular groove 4 is formed in the handle for the purpose of handling.

The individual information 5 indicates at least one selected from a production number, a form, a manufacturer name, and an article number as the display contents. In addition to these, other manufacturing information, information required on the user side, etc. may be contained.

The individual information 5 can confirm the information which identifies each pellicle individual by the display, and the bar code 6 and the printing factor 7 by number and alphabet are used as the display means. This individual information 5 may be only the bar code 6, the combination of the bar code 6 and the printing factor 7 by a number and the alphabet may be sufficient, and the other notation may be combined.

The bar code 6 may include all the display contents among the display contents indicated by the individual information, or may consist of some display contents. In addition, this barcode 6 may be a general one-dimensional thing or a two-dimensional thing. The minimum line width of the display is preferably 0.1 mm or more from the viewpoint of the stability of the reading.

It is preferable to suppress the marking depth of the individual information 5 to 0.05 mm or less on the basis of the surface of the pellicle frame 2 as a reference.

An example in the manufacturing method of this pellicle is demonstrated in detail.

In the method for producing a pellicle according to the present invention, the surface of the pellicle frame 2 is irradiated with laser light 25 having a wavelength of 500 to 11000 nm, suctioned and exhausted the irradiated portion, and the pellicle frame is irradiated with the laser light 25. It is a method which has a process of discoloring (2) and processing the individual information 5.

The process of processing this individual information 5 is demonstrated with reference to FIG. 2 is a cross-sectional view of a step of processing the individual information 5 in the pellicle frame 2.

In the clean room 12 shown by the two-dot dashed line, the pellicle 1 is attached to the upper surface of the pellicle frame 2 through the pellicle film adhesive. It is arrange | positioned so that it may become substantially parallel with the airflow direction of the clean room shown by the broken line A. FIG. In general, since the airflow of the clean room flows vertically from the upper side to the lower side, the support means (not shown) at an angle perpendicular to or close to the lower side of the surface of the pellicle frame 2 for processing the individual information 5. Supported by).

The laser processing machine 23 housed in the exhaust hood 20 which has the opening part 21 opened to the minimum minimum which is necessary for this pellicle 1, and has exhaust means (not shown) connected to the exhaust duct 22. FIG. Install). By irradiating the laser light 25 from the output part 24 of this laser processing machine 23 substantially vertically upward and scanning it, the pellicle frame 2 is irradiated with the laser light 25, and the individual information of the pellicle 1 ( 5) process. At this time, the opening 21 of the exhaust hood 20 is disposed near the processing surface of the pellicle frame 2, and the processing surface of the laser processing machine 23 and the pellicle frame 2 is the focal point of the laser light 25. Place it to match the distance. The emitted laser light 25 passes through the opening 21 arranged near the processing surface and reaches the processing surface of the pellicle frame 2.

When irradiating the laser light 25, it is sucked and exhausted by an exhaust means (not shown) at the irradiation site with the irradiation. In FIG. 2, the suction direction is indicated by the arrow B of the two-dot broken line and the exhaust direction is indicated by the arrow C of the two-dot broken line as the flow of air generated by the suction exhaust. As the suction exhaust, the exhaust hood 20 (see arrow C) is exhausted by exhaust means (not shown) connected to the exhaust duct 22, and the exhaust hood 20 is provided near the irradiation site of the processing surface of the pellicle frame 2. It is preferable to perform suction (refer to the arrow B) from the opening portion 21 of the.

It is preferable that the exhaust velocity in this suction exhaust is a line speed of 50 mm / s or more in the opening part 21 of the exhaust hood 20. Although there is no upper limit in this exhaust speed in particular, it is preferable that it is 1000 mm / s or less in consideration of the size of practical exhaust means, etc.

As the processing of the individual information 5 by the laser light 25, the processed surface of the pellicle frame 2 absorbs the irradiated laser light 25 so that the surface of the surface is deteriorated (deterioration) due to the short-wavelength optical energy and the heat is generated. There are two effects. In this investigation, heat is important because the irradiation time is short. In the case of a general aluminum alloy pellicle frame, since the surface of the pellicle frame is black alumite using an organic dye, the organic dye discolors when heated and whitening occurs. Even in the case of a pellicle frame which is not made of an aluminum alloy, for example, a resin pellicle frame, in order to blacken the pellicle frame, a coating film or the like is provided on the surface thereof to discolor the coating film in the same manner to process the individual information 5. It is possible.

The processing of the individual information 5 is influenced by the amount of dust and the engraving depth at the time of processing by the wavelength and the output of the laser to be used.

It is preferable that the wavelength of the laser light 25 to irradiate is 500-11000 nm. It is preferable to select a laser having a wavelength of 500 to 11000 nm for a pellicle frame made of an aluminum alloy generally used, and to select a laser having a wavelength of 500 to 1100 nm for a pellicle frame that is not made of an aluminum alloy, for example, a pellicle frame made of an aluminum alloy. It is preferable.

When the laser light 25 of this wavelength is used, the material itself of the pellicle frame 2 or the dye in the surface coating covering the surface can be discolored or discolored in a short time, so that the processing of the individual information 5 clearly. In addition to this, it is possible to drastically reduce the scattering of foreign objects. In addition, since the foreign matter a little generated by the action of the exhaust hood 20 and the exhaust means (not shown) is sucked off, it is possible to process the foreign matter not only on the processing surface of the pellicle frame 2 but also on other parts thereof. Become.

As lasers of these wavelengths, a carbon dioxide gas laser, a YVO 4 solid state laser, and a YVO 4 solid state laser (second harmonic) can be suitably used.

In this case, when the power of the laser to be supplied is large, the processing surface of the pellicle frame 2 is broken and scattered by rapid and local thermal expansion, and the surface is dug up and the processing is performed. In addition, blackening occurs by burning. In such a situation where the surface is destroyed or burned and pressed, a large amount of dust is generated and greatly contaminates the surroundings, so that the processing of the individual information 5 during the pellicle manufacturing process becomes remarkably inadequate. Therefore, it is preferable to adjust the output of the laser so that the processed surface on which the individual information 5 is processed is not cut at all or there is no step. It is preferable to set it as 0.05 mm at maximum as a reference. These conditions can be achieved by appropriately selecting the wavelength and output of the laser used in the laser processing machine 23.

The processed individual information 5 is shown in black respectively by the combination of the barcode 6 and the print 7 in FIG. 1, but in general, the pellicle frame 2 is black and actually irradiated with the laser light 25. At that time, the display becomes white.

The position at which the individual information 5 is processed is suitable from the viewpoint of workability and visibility if the outer surface of the long side or the short side of the pellicle frame 2 is suitable, and among them, a jig such as the ventilation filter 11 or the concave hole 10 in the vicinity. A region where no hole or the like is formed is preferable. In addition, when processing to the center position of the side of the pellicle frame 2, it is preferable to specify a position at the time of processing and reading easily.

In addition, the individual information 5 is not limited to the outer surface of the pellicle frame 2 and can be processed on the upper surface of the pellicle frame 2 and the adhesive surface of the pellicle film 3. By using a pellicle film adhesive surface, especially visibility and readability become favorable. When processing a pellicle film adhesive surface, the pellicle film adhesive may be damaged by the laser light 25, and therefore, research according to the processing method is required. For example, in order to prevent damage of the pellicle film adhesive by the laser light 25, the individual information 5 must be processed before the pellicle film adhesive is applied, but the laser light processed on the pellicle film 3 and the pellicle film adhesive ( The damage can be prevented by using a material that does not absorb the wavelength of 25).

In addition, when there is an area | region in which the mask adhesion layer 8 formed in the lower surface of the pellicle frame 2 is not provided, you may process to this part. There is no optical adverse effect such as stray light, and after the pellicle is attached to the photo mask, the processed individual information 5 is concealed and does not appear on the surface, and it is difficult to see from the photo mask side. It is good.

With this configuration, even during the pellicle manufacturing process where high cleanliness is required, the adhesive portion of the pellicle film 3 and the pellicle frame 2 is not damaged or foreign matter adheres to the pellicle 1, and during manufacturing, The individual information 5 can be processed by appropriately selecting the necessary information content in each step such as in use. As a result, it is possible to display the production number of the pellicle 1 attached during manufacture and the like, which is extremely useful for the use and management of the pellicle 1.

It does not specifically limit as an exhaust means, Specifically, a sirocco fan, a propeller fan, a vortex blower, a diaphragm pump, etc. can be used.

In addition, in this embodiment of FIG. 2, the pellicle film 3 is installed vertically, and the laser processing machine 23 is arrange | positioned under the pellicle 1, As another embodiment, all these apparatus are rotated 90 degrees, and a pellicle It is also possible to arrange | position so that the film | membrane 3 may become horizontal, and to process with the laser beam 25 with respect to the pellicle frame 2 from a horizontal direction. Although the embodiment of FIG. 2 is more preferable from the viewpoint of preventing foreign matter from adhering to the pellicle 1, it is appropriately selected according to process circumstances such as conveyance and arrangement of the apparatus.

In addition, although the laser beam 25 is processed with respect to the outer surface of the long side of the pellicle frame 2 in embodiment of FIG. 1 and FIG. 2, the position of the pellicle 1 is also made to the surface of the other side or the other side or surface. It can be processed similarly by replacing and reinstalling.

Hereinafter, although the Example of this invention is described in detail, the scope of the present invention is not limited to these Examples.

(Example)

In the clean room 12 of Class 10, the pellicle 1 of the shape as shown in FIG. 1 was produced. The produced pellicle (1) used a pellicle frame (2) made of aluminum alloy subjected to black anodized treatment, and included a mask adhesive layer (8) having an outer dimension of 904.5 x 750 mm, an inner dimension of 894.5 x 736 mm, and a height of 1.3 mm. As a result, 7 mm and the corner portion were the outer teeth R6 and the inner dimensions R2.

Here, the pellicle film 3 is made of a fluorine-based polymer [trade name, manufactured by Asahi Glass Co., Ltd.], the mask adhesive material 8, and the pellicle film adhesive is made of a silicone adhesive [trade name KR3700, manufactured by Shin-Etsu Chemical Co., Ltd.]. ], And the ventilation filter 11 made from PTFE was installed in the outer surface of the pellicle frame 2. As shown in FIG. And the separator 9 which protects the mask adhesion layer 8 was provided in the surface of the mask adhesion layer 8. Further, for handling purposes, a semicircular groove 4 having a height of 1.5 mm and a depth of 1.5 mm is formed on the short side of the pellicle frame 2, and a concave hole that is a non-penetrating round hole of 2.5 mm in diameter and 2 mm in depth on the long side. (10) was formed.

The pellicle 1 is erected almost vertically using a stand (not shown) so that one direction of the long side outer surface of the pellicle frame 2 is lowered in the arrangement as shown in Fig. 2, and the laser processing machine 23 (Panasonic The barcode 6 and the printing 7 were processed by the laser light 25 emitted from Denko SUNX Co., Ltd., wavelength 10600 nm]. The content displayed on the bar code 6 was a manufacturer name, an article number, and a manufacture number. The minimum line width of the barcode 6 was adjusted to be 0.15 mm. At this time, the opening 21 of the exhaust hood 20 has a rectangular shape having a width of 7 mm and a length of 80 mm, while exhausting by a sirocco fan (not shown) connected to the exhaust duct 22 so as to have a wind speed of 100 mm / s. Processing was performed.

Subsequently, the foreign material inspection of the pellicle 1 was carried out in the dark room, but the adhesion of the foreign matter or contaminants to the whole pellicle 1 as well as the vicinity of the processed individual information 5 (barcode 6 and printing 7) Not seen at all. In addition, the barcode 6 could be suitably read by a reader. In addition, although the barcode 6 was magnified and observed with a stereomicroscope, there was no step with the surrounding surface at all, and only the discoloration of the black dye in the alumite layer was confirmed.

In the method of manufacturing a pellicle of the present invention, the individual information such as the manufacturing information of each pellicle can be displayed in the step of manufacturing the pellicle, not in the step of manufacturing the pellicle frame. Is used for the production of pellicles. Moreover, the pellicle obtained by this manufacturing method is effective and widely used for identification of the kind of a pellicle, a kind, etc., the management of the information of each pellicle individual, etc.

1: pellicle 2: pellicle frame
3: pellicle membrane 4: groove
5: object information 6: barcode
7: Factor 8: Mask adhesive layer
9 separator 10 concave hole
11: ventilation filter 12: clean room
20: exhaust hood 21: opening
22: exhaust duct 23: laser processing machine
24: exit section 25: laser light
A: direction of air flow in the clean room B: suction
C: exhaust

Claims (7)

A method for producing a pellicle, wherein the irradiated portion of the laser light is sucked and exhausted when irradiating laser light with a wavelength of 500 to 11000 nm to the surface of the pellicle frame to which the pellicle film is attached. The method of claim 1,
And the individual information indicates at least one selected from a manufacturing number, a type, a manufacturer name, and an article number. 3. The method according to claim 1 or 2,
Method for producing a pellicle, characterized in that the individual information is a barcode. The method according to any one of claims 1 to 3,
The said process is a stamping process, The manufacturing method of the pellicle characterized by the above-mentioned. 5. The method of claim 4,
The depth of the said stamping process is a maximum of 0.05 mm based on the surface of the said pellicle frame, The manufacturing method of the pellicle. 6. The method according to any one of claims 1 to 5,
A method for producing a pellicle, characterized in that the processing is performed by discoloring or discoloring the dye contained in the pellicle frame or its surface coating. It is manufactured by the manufacturing method of the pellicle in any one of Claims 1-6, The pellicle characterized by the above-mentioned.

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