TWI484288B - Method for manufacturing dustproof film assembly - Google Patents

Description

Method for manufacturing dustproof film assembly

The present invention relates to a method of manufacturing a pellicle for a lithography which is used as a dust preventer at the time of manufacture of a semiconductor device, a printed circuit board, or a liquid crystal display.

In the manufacture of a semiconductor device or a liquid crystal display of a large-scale integrated circuit (LSI), a semiconductor wafer or a liquid crystal glass plate is patterned by light irradiation. If dust is attached to the photomask or the reticle used at this time, the problem of edge irregularities or blackening of the substrate may occur, which may cause damage in size, quality, appearance, and the like.

These operations are usually carried out in a clean room. But even so, it is difficult to keep it clean often. Thus, a method of mounting a pellicle as a dust preventer on the surface of the reticle is employed. Through the pellicle assembly, the foreign matter is not directly attached to the surface of the reticle, and is attached to the pellicle assembly, thereby causing the focus to be on the pattern of the reticle during lithography without being affected by foreign matter. Transfer.

Such a pellicle film assembly is an upper end surface of a pellicle frame composed of aluminum, stainless steel, polyethylene, etc., and generally has a good light transmission of nitrocellulose, B A transparent pellicle film made of acid cellulose or a fluorine-based resin may be air-dried by a good solvent coating, or may be followed by an adhesive such as an acrylic resin or an epoxy resin. On the lower end surface of the pellicle frame, an adhesive layer made of a polybutene resin, a polyvinyl acetate resin, an acrylic resin, or the like, and a release layer for protecting the adhesive layer are provided. Separator. Further, in a state in which the pellicle is attached to the reticle, in order to eliminate the space enclosed by the inside of the pellicle assembly and the external air pressure difference, a small hole for air pressure adjustment is formed in a part of the pellicle frame. A filter is installed to prevent intrusion of foreign matter from the air moving through the small hole.

The pellicle module has various specifications depending on the applicable light source or exposure machine, and the variety or type cannot be recognized at first glance. For this purpose, mechanical marking or laser marking is performed on the outer surface of the pellicle frame by an engraving machine or the like to put individual information such as a product number (Patent Document 1). However, the height of the general pellicle frame is only about 3 mm to 6 mm, and the space for display is small. Only a large mark such as a combination of numbers and letters can be represented by a small character of about 1 mm to 2 mm square. This is expressed as the minimum necessary content, but at first glance, the necessary individual information is still not confirmed, which is not sufficient. For this reason, the operator will misuse the unsuitable model in the attaching of the pellicle. Further, when the attachment work is performed, if the manufacturing number or the individual number of the pellicle is not recorded in some form, it is difficult to specify the target pellicle assembly in the future, and the process can be difficult to confirm.

In order to prevent these problems, the proposal has to set this on the pellicle. In the information generating unit that records the individual information related to the pellicle, the pellicle module is managed by the management device of the pellicle having the means for reading the individual information (Patent Document 2).

However, if the method of expressing these indications or information generating portions is mechanical marking or laser marking, since the surface of the pellicle frame is to be dug down for processing, a large amount of dust is generated during processing, such that These processes cannot be performed at the manufacturing stage of the pellicle assembly, and must be performed at the manufacturing stage of the pellicle frame. For this reason, it is difficult to express the information for identifying each individual pellicle module by the manufacturing number or the like given in the manufacturing process of the pellicle, and the content can be only the name or model of the manufacturer. As a result of prior knowledge, it is difficult to express detailed information about the pellicle assembly.

Prior art literature

Patent literature

Patent Document 1: Japanese Patent No. 3346205

Patent Document 2: Japanese Patent Laid-Open No. Hei 11-84632

An object of the present invention is to provide an individual information that not only displays a manufacturer's name or a model but also identifies each of the pellicle components, such as a manufacturing number, and can easily confirm individual information. At the same time, a method for producing a pellicle having high cleanliness and no problem of adhesion of dust or foreign matter, and a pellicle assembly obtained by the method are provided.

The above object can be achieved by the following technical solutions.

A method for producing a pellicle according to the present invention, characterized in that, when the individual information is processed by irradiation with a laser having a wavelength of 500 nm to 11,000 nm on the surface of the pellicle frame to which the pellicle is attached, the thunder is applied The irradiated portion of the shot is sucked and exhausted.

2. The method of manufacturing a pellicle according to the above 1, wherein the individual information indicates at least one selected from a manufacturing number, a model, a manufacturer name, and a product number.

3. The method of manufacturing a pellicle according to the above 1 or 2, wherein the individual information is a barcode.

4. The method of manufacturing a pellicle according to any one of the above 1 to 3, wherein the processing is imprinting.

5. The method of manufacturing a pellicle according to the above 4, wherein the depth of the imprinting process is at most 0.05 mm based on the surface of the pellicle frame.

The method for producing a pellicle according to any one of the above-mentioned items 1 to 5, wherein the dye film contained in the pellicle frame or the film on the surface thereof is decolored or discolored to be discolored to perform the processing. .

A pellicle film assembly produced by the production method according to any one of 1 to 6.

According to the method of manufacturing a pellicle according to the present invention, on the surface of the pellicle frame to which the pellicle is attached, not only the information known in advance at the stage of manufacture of the pellicle frame, but also the detailed manufacture of the individual pellicle assembly Individual information such as information that identifies each of the pellicle components can also be processed. The damage to the surface on which the individual information is processed is extremely small, and since the suction and exhaust are performed, it can be performed in the step of manufacturing the pellicle having high cleanliness. Therefore, in the state in which the pellicle film is attached to the pellicle frame, the individual information can be processed without the adhesion of foreign matter or dust before the pellicle is attached, and the cleaning can be performed in any case. High degree of pellicle assembly. With the individual information thus processed, it is possible to easily confirm the detailed information of the individual pellicle components to identify the individual pellicle components.

Further, according to the production method, the individual information can be formed by discoloration or discoloration, so that the visibility is excellent and the readability is also good. Further, the individual information can be represented by a bar code, thereby indicating a large amount of information, and the information can be read by an automatic machine.

The pellicle film assembly of the present invention can easily confirm or recognize individual information of each pellicle film assembly while being a highly clean pellicle film assembly, and can reduce work errors in the puff film assembly attachment work or the like. Work efficiency is improved.

1‧‧‧Plastic membrane assembly

2‧‧‧Plastic membrane assembly frame

3‧‧‧Plastic film

4‧‧‧ditch

5‧‧‧Individual information

6‧‧‧ barcode

7‧‧‧Printing

8‧‧‧ Mask adhesive layer

9‧‧‧Fractal layer

10‧‧‧ recessed hole

11‧‧‧Ventilation filter

12‧‧‧Clean room

20‧‧‧Exhaust hood

21‧‧‧ openings

22‧‧‧Exhaust passage

23‧‧‧Laser processing machine

24‧‧‧Sports Department

25‧‧‧Laser

A‧‧‧Airflow direction of the clean room

B‧‧‧ suction

C‧‧‧Exhaust

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a pellicle assembly to which the present invention is applied.

Figure 2 is a cross-sectional view showing the processing steps of the manufacturing method to which the present invention is applied.

Hereinafter, specific embodiments of the present invention will be described in detail, but the scope of the present invention is not limited to these.

As shown in Fig. 1, the pellicle film assembly according to the manufacturing method of the present invention is used for the pellicle film 3 on the upper end surface of the pellicle frame 2 of the rectangular frame body formed of the long side and the short side. The agent is then taut attached. The outer surface of the pellicle frame 2 is imprinted with a bar code 6 and a print 7 to identify the individual information 5 of each pellicle. Further, the lower end surface of the pellicle frame 2 is formed with a mask adhesive layer 8 having a release layer 9 for protecting the mask adhesive layer 8 on its surface as needed. Further, on the outer surface of the long-side pellicle frame 2 of the individual information 5, a concave hole 10 as a non-penetrating circular hole, a vent filter 11, and the like, and an outer side surface of the short-side pellicle frame are formed. A semicircular groove 4 is formed for the purpose of operation.

The individual information 5 has at least one selected from the manufacturing number, the model, the manufacturer name, and the product number as its presentation content. In addition to these, you can add other manufacturing information or user-required information.

The individual information 5, based on the representation, may be information for identifying each of the individual pellicle components, and as a means for expressing the same, a printing 7 composed of a bar code 6, a number or a letter may be used. The individual information 5 may be only the barcode 6, or a combination of the barcode 6 and the number 7 or the letter 7 of the letter, or a combination with other tokens.

As the barcode 6, the content of the individual information may include all of the content or a part of the content. In addition, the barcode 6 can be a general one-dimensional or two-dimensional. The minimum line width indicated is preferably 0.1 mm or more from the viewpoint of stability of reading.

The engraving processing of the individual information 5 is based on the surface of the pellicle frame 2, and the imprinting depth is preferably 0.05 mm or less.

An embodiment of the method for manufacturing the pellicle assembly will be described in detail.

In the method for manufacturing a pellicle according to the present invention, the laser beam having a wavelength of 500 nm to 11,000 nm is irradiated on the surface of the pellicle frame 2, and the irradiated portion is suctioned and exhausted, and the laser 25 is irradiated. A method of disposing the pellicle frame 2 to thereby process the individual information 5.

The procedure for processing the individual information 5 will be described with reference to FIG. 2 . 2 is a cross-sectional view showing the steps of processing the individual information 5 on the pellicle frame 2.

In the clean room 12 indicated by the two-dotted line, the pellicle film 1 is placed on the upper end surface of the pellicle frame 2 through the pellicle film adhesive agent, and the pellicle film 3 is indicated by a dotted line A. The airflow direction of the clean room is arranged in a slightly parallel direction. In general, the airflow in the clean room is supported by a support means (not shown) at a vertical or a close angle to the surface of the pellicle frame 2 due to vertical flow from the top to the bottom, so that the processing of the individual information 5 is performed. The face is the lower side.

On the underside of the pellicle assembly 1, opening with the necessary minimum opening A laser processing machine 23 is housed in the exhaust hood 20 of the mouth portion 21 and an exhaust means (not shown) that is connected to the exhaust passage 22. The laser beam 25 emitted from the emitting portion 24 of the laser processing machine 23 is emitted in a substantially vertical upward direction, and the laser beam is scanned to irradiate the pellicle frame 2 with the laser 25 to cause the individual of the pellicle module 1 to be irradiated. Information 5 was processed. At this time, the opening portion 21 of the hood 20 is disposed in the vicinity of the processing surface of the pellicle frame 2, while the processing faces of the laser processing machine 23 and the pellicle frame 2 are made to be in focus with the laser 25 The distance is configured in a consistent manner. The emitted laser beam 25 reaches the processing surface of the pellicle frame 2 by the opening portion 21 disposed near the processing surface.

At the time of the irradiation of the laser 25, an exhaust means (not shown) is provided at the irradiation site to perform suction and exhaustion simultaneously with the irradiation. In Fig. 2, as the air flow generated by the suction of the exhaust gas, the suction direction is indicated by an arrow B of a two-dotted line, and the direction of the exhaust is indicated by an arrow C of a two-dotted line. Preferably, the suction exhaust gas is exhausted by an exhaust means (not shown) connected to the exhaust passage 22 (see an arrow C), and the exhaust cover 20 is provided from the vicinity of the irradiation portion of the processed surface of the pellicle frame 2 The opening 21 is suctioned (see arrow B).

In the suction exhaust gas, the exhaust speed is preferably in the opening portion 21 of the exhaust hood 20, and has a linear velocity of 50 mm/s or more. There is no particular upper limit for this exhaust speed, and it is preferably 1000 mm/s or less in consideration of the ability of a practical exhaust means.

As the processing of the individual information 5 by the laser 25, the irradiated laser 25 is absorbed by the processed surface of the pellicle frame 2, and the short-wavelength light energy has two effects such as deterioration (deterioration) of the surface and heat generation. In this irradiation, the irradiation time is short, Therefore, it is mainly based on heat. In the case of a general aluminum alloy pellicle frame, depending on the material, the surface of the pellicle frame is made of an organic anodized aluminum, such as heating, decolorization of an organic dye, and whitening. In the case of a pellicle frame which is not made of an aluminum alloy, for example, a resin pellicle frame, in order to blacken the pellicle frame, a coating film or the like is provided on the surface thereof, and the coating film is also discolored to perform the discoloration. Processing of individual information 5.

The processing of the individual information 5 is influenced by the amount of dust or the depth of the imprinting process depending on the wavelength or output of the laser used.

The wavelength of the irradiated laser 25 is preferably 500 nm to 11,000 nm. Generally, the aluminum alloy pellicle frame is preferably a laser having a wavelength of 500 nm to 11,000 nm, and is not a frame of a pellicle for an aluminum alloy. For example, in the case of a resin pellicle frame, it is preferable to select a mine having a wavelength of 500 nm to 1100 nm. Shoot.

When the laser beam 25 of the wavelength is used, the material of the pellicle frame 2 itself or the dye in the surface film covering the surface can be discolored or discolored to cause discoloration, and the individual information 5 can be clearly performed. At the same time of processing, the scattering of foreign matter is greatly reduced. Further, due to the action of the exhaust hood 20 and the exhaust means (not shown), foreign matter which is rarely generated is also sucked and removed, and not only the processed surface of the pellicle frame 2 but also other portions are not adhered to by foreign matter.

As the laser of these wavelengths, a carbon dioxide laser, a YVO4 solid laser, and a YVO4 solid laser (second harmonic) can be suitably used.

Here, in the case where the given laser output is large, the pellicle frame is provided. The processing surface of 2 will be excitable and localized by thermal expansion, which will destroy and scatter and become rough. In addition, it can be burnt black depending on the material. In such a state of destruction or scorching of the surface, a large amount of dust is generated and a large amount of contamination is caused in the surroundings, whereby the processing of the individual information 5 in the manufacturing process of the pellicle is remarkably unsuitable. For this reason, it is preferable to adjust the output of the laser so that the processed surface of the individual information 5 is in a state of no cutting at all, or a state without step, in the marking process, the depth of the engraving is based on the surrounding surface. Preferably, it is at most 0.05 mm. These conditions can be achieved by appropriately selecting the wavelength or output of the laser used in the laser processing machine 23.

The individual information of the processing 5, the combination of the barcode 6 and the printing 7 in Fig. 1 can be respectively indicated by black, but the general pellicle frame 2 is black, and in fact, when the laser 25 is irradiated, the representation is white.

The processing position of the individual information 5 is the long side or the outer side surface of the short side in the pellicle frame 2, which is appropriate from the viewpoint of workability and visibility, and preferably, there is no vent filter 11 or recess 10 in the vicinity. The field in which the jig hole or the like is formed is preferable. Further, in the case where the processing is performed at the position of the center of the side of the pellicle frame 2, it is preferable to easily determine the position during processing or reading.

Further, the individual information 5 is not limited to the outer surface of the pellicle frame 2, and can be processed on the upper end surface of the pellicle frame 2 and the back surface of the pellicle 3. The use of the dust-proof film on the back surface is particularly good for confirmability and readability, but when the dust-proof film is processed on the back surface, it is dust-proof due to the laser 25 In the case where the film adhesive is damaged, it is necessary to carry out improvement according to the processing method. For example, in order to prevent damage of the dust-proof film adhesive due to the laser 25, it is necessary to process the individual information 5 before applying the dust-proof film adhesive, by using the laser 25 which processes the dust-proof film 3 and the dust-proof film adhesive. The damage of the material whose wavelength is not absorbed can be prevented.

Further, the lower end surface of the pellicle frame 2 has a field in which the masking layer 8 is not formed, and it is also possible to perform processing in this portion. Since there is no optical adverse effect such as stray light, and after the pellicle is attached to the reticle, the processed individual information 5 is concealed, does not appear on the surface, is difficult to confirm from the reticle side, and is suitable for indicating to the user Not the necessary information.

With such a configuration, in the manufacturing process of the pellicle assembly requiring high cleanliness, damage to the pellicle film 3 and the subsequent portion of the pellicle frame 2 is not caused, and foreign matter is not attached to the pellicle. The necessary information content in each stage of manufacturing, work, and use can be appropriately selected, and the individual information 5 can be processed. As a result, the manufacturing number or the like of the pellicle film 1 to be applied in the production can be expressed, which is extremely useful for the use and management of the pellicle film assembly 1.

The exhaust means is not particularly limited, and specifically, a sirocco fan, a propeller fan, a vortex blower, a diaphragm pump, or the like can be used.

Further, as in the embodiment of Fig. 2, the pellicle film 3 may be vertically disposed, and the laser processing machine 23 may be provided on the lower side of the pellicle film assembly 1. Set. As another embodiment, all of these systems are laid flat at 90 degrees, and the pellicle film 3 is horizontally disposed, and the pellicle frame 2 can be processed by the laser 25 from the lateral direction. The embodiment of Fig. 2 is more preferable from the viewpoint of preventing adhesion of foreign matter to the pellicle. However, it is possible to make a more appropriate selection according to steps such as transportation or machine configuration.

In addition, in the embodiment of FIGS. 1 and 2, in the pellicle frame 2, the outer surface of the long side is processed by the laser 25, but the surface of the opposite side or the other side or surface may be applied to the pellicle assembly 1. The position is changed and the same processing is performed.

[Examples]

Hereinafter, the embodiments of the present invention will be described in detail, but the scope of the present invention is not limited by the embodiments.

(Example)

In the clean room 12 of class 10, a pellicle assembly 1 having a shape as shown in Fig. 1 was produced. The prepared pellicle film assembly 1 uses a black anodized aluminum alloy pellicle frame 2 having an outer dimension of 904.5 mm × 750 mm, an inner dimension of 894.5 mm × 736 mm, and a height of a mask adhesive layer having a thickness of 1.3 mm. 8 is 7 mm, and the corner is the outer dimension R6 and the inner dimension R2.

Here, the dust-proof film 3 is a fluorine-based polymer (trade name: CYTOP, manufactured by Asahi Glass Co., Ltd.), and the mask adhesive 8 and the dust-proof film adhesive are an anthrone adhesive (trade name KR3700, manufactured by Shin-Etsu Chemical Co., Ltd.) A vent filter 11 made of PTFE is attached to the outer surface of the pellicle frame 2 . Enter In one step, the surface of the adhesive layer 8 is covered, and the release layer 9 which protects the adhesive layer 8 of the mask is mounted. Further, for the purpose of operation, a semicircular groove 4 having a height of 1.5 mm and a depth of 1.5 mm is provided on the short side surface of the pellicle frame 2, and a recessed hole having a diameter of 2.5 mm and a depth of 2 mm and a non-penetrating circular hole is provided on the long side surface. 10.

The pellicle film assembly 1 is disposed as shown in Fig. 2, and the pellicle frame 2 is supported substantially vertically by a bracket (not shown) so that one of the long side outer sides is the lower side, and the laser processing machine 23 is used. The laser 25 emitted from Matsushita Electric Industrial Co., Ltd. (wavelength: 10600 nm) processes the barcode 6 and the printing 7. The contents indicated by the barcode 6 are the manufacturer name, the product number, and the manufacturing number. Adjustment is made so that the minimum line width of the barcode 6 is 0.15 mm. At this time, the opening portion 21 of the hood 20 is a rectangle having a width of 7 mm and a length of 80 mm, and is exhausted by a multi-blade fan (not shown) connected to the exhaust passage 22 to set the wind speed to 100 mm/s. Processing.

Thereafter, the foreign matter of the pellicle film assembly 1 is inspected in the dark room, not only in the vicinity of the processed individual information 5 (barcode 6 and printing 7), but also in the entire pellicle assembly 1, foreign matter or dirt. In addition, the barcode 6 can be suitably read by a code reader. Further, the bar code 6 was observed by enlarging with a stereoscopic microscope, and the surrounding surface and step were completely absent, and only the discoloration of the black dye in the anodized aluminum layer was confirmed.

[Industrial availability]

The method for manufacturing the pellicle according to the present invention is not in the manufacturing stage of the pellicle frame, but may be in the stage of manufacturing the pellicle. Individual information such as information on the manufacture of the pellicle is indicated, and no individual or dirt is attached, and individual information can be recognized. In addition, the pellicle film assembly obtained by the above-described production method is effective in the recognition of the type of the pellicle film, the type of the pellicle, or the like, and the management of the information of each pellicle module, and can be widely used.

1‧‧‧Plastic membrane assembly

2‧‧‧Plastic membrane assembly frame

3‧‧‧Plastic film

4‧‧‧ditch

5‧‧‧Individual information

6‧‧‧ barcode

7‧‧‧Printing

8‧‧‧ Mask adhesive layer

9‧‧‧Fractal layer

10‧‧‧ recessed hole

11‧‧‧Ventilation filter

Claims (2)

A method for producing a pellicle film, characterized in that a pellicle film formed of a material that does not absorb a laser having a wavelength of 500 nm to 11,000 nm is dust-proofed by an adhesive formed of a material that does not absorb a laser having a wavelength of 500 nm to 11,000 nm. On the surface of the film module frame, when the individual information of the pellicle is processed by irradiation with a laser having a wavelength of 500 nm to 11,000 nm, a portion of the pellicle frame to which the pellicle is attached is covered as the laser. The irradiated portion is suctioned and exhausted from the same side as the irradiated portion. A pellicle assembly comprising a pellicle frame, a pellicle, an adhesive layer for attaching the pellicle to the pellicle frame, an adhesive layer for attaching the mask, and a release layer for protecting the adhesive layer According to the configuration, the individual information of the pellicle is processed by laser on the surface of the pellicle frame that is covered by the pellicle.