JPH1064803A5 - - Google Patents

Info

Publication number
JPH1064803A5
JPH1064803A5 JP1996235878A JP23587896A JPH1064803A5 JP H1064803 A5 JPH1064803 A5 JP H1064803A5 JP 1996235878 A JP1996235878 A JP 1996235878A JP 23587896 A JP23587896 A JP 23587896A JP H1064803 A5 JPH1064803 A5 JP H1064803A5
Authority
JP
Japan
Prior art keywords
light
opening
exposure
optical system
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996235878A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1064803A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8235878A priority Critical patent/JPH1064803A/ja
Priority claimed from JP8235878A external-priority patent/JPH1064803A/ja
Publication of JPH1064803A publication Critical patent/JPH1064803A/ja
Publication of JPH1064803A5 publication Critical patent/JPH1064803A5/ja
Pending legal-status Critical Current

Links

JP8235878A 1996-08-19 1996-08-19 光測定装置および該装置を備えた露光装置 Pending JPH1064803A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8235878A JPH1064803A (ja) 1996-08-19 1996-08-19 光測定装置および該装置を備えた露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8235878A JPH1064803A (ja) 1996-08-19 1996-08-19 光測定装置および該装置を備えた露光装置

Publications (2)

Publication Number Publication Date
JPH1064803A JPH1064803A (ja) 1998-03-06
JPH1064803A5 true JPH1064803A5 (enExample) 2004-11-04

Family

ID=16992590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8235878A Pending JPH1064803A (ja) 1996-08-19 1996-08-19 光測定装置および該装置を備えた露光装置

Country Status (1)

Country Link
JP (1) JPH1064803A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101319639B1 (ko) * 2011-12-19 2013-10-17 삼성전기주식회사 광조도와 광량 측정 모듈 및 이를 이용한 멀티 채널 측정기

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