JPH10214973A5 - - Google Patents

Info

Publication number
JPH10214973A5
JPH10214973A5 JP1997029552A JP2955297A JPH10214973A5 JP H10214973 A5 JPH10214973 A5 JP H10214973A5 JP 1997029552 A JP1997029552 A JP 1997029552A JP 2955297 A JP2955297 A JP 2955297A JP H10214973 A5 JPH10214973 A5 JP H10214973A5
Authority
JP
Japan
Prior art keywords
film
insulating film
forming
semiconductor device
active layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997029552A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10214973A (ja
JP3696710B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP02955297A priority Critical patent/JP3696710B2/ja
Priority claimed from JP02955297A external-priority patent/JP3696710B2/ja
Priority to US09/014,639 priority patent/US6355509B1/en
Priority to KR1019980003625A priority patent/KR19980071177A/ko
Priority to KR1019980003635A priority patent/KR19980071187A/ko
Publication of JPH10214973A publication Critical patent/JPH10214973A/ja
Publication of JPH10214973A5 publication Critical patent/JPH10214973A5/ja
Application granted granted Critical
Publication of JP3696710B2 publication Critical patent/JP3696710B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP02955297A 1997-01-28 1997-01-28 半導体装置の作製方法 Expired - Fee Related JP3696710B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP02955297A JP3696710B2 (ja) 1997-01-28 1997-01-28 半導体装置の作製方法
US09/014,639 US6355509B1 (en) 1997-01-28 1998-01-28 Removing a crystallization catalyst from a semiconductor film during semiconductor device fabrication
KR1019980003625A KR19980071177A (ko) 1997-01-28 1998-01-30 반도체 장치의 제작 방법
KR1019980003635A KR19980071187A (ko) 1997-01-28 1998-01-31 액체운송 장치 및 액체운송 펌프의 제어방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02955297A JP3696710B2 (ja) 1997-01-28 1997-01-28 半導体装置の作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2004276793A Division JP4317105B2 (ja) 2004-09-24 2004-09-24 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JPH10214973A JPH10214973A (ja) 1998-08-11
JPH10214973A5 true JPH10214973A5 (https=) 2004-12-24
JP3696710B2 JP3696710B2 (ja) 2005-09-21

Family

ID=12279316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02955297A Expired - Fee Related JP3696710B2 (ja) 1997-01-28 1997-01-28 半導体装置の作製方法

Country Status (2)

Country Link
JP (1) JP3696710B2 (https=)
KR (1) KR19980071177A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4712156B2 (ja) * 1999-05-10 2011-06-29 株式会社半導体エネルギー研究所 半導体装置の作製方法
US6858480B2 (en) 2001-01-18 2005-02-22 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device

Similar Documents

Publication Publication Date Title
JP2008277371A (ja) 半導体装置、電子機器、および半導体装置の製造方法
TW200614855A (en) Organic thin film transistor array and manufacturing method thereof
KR920008851A (ko) 반도체장치 및 그 제조방법
WO2003058723A1 (fr) Transistor a film mince organique et son procede de fabrication
JP2003142692A5 (https=)
JPH03157974A (ja) 縦型電界効果トランジスタ
TW200505274A (en) Electro-luminescence device including a thin film transistor and method of fabricating an electro-luminescence device
TW200607094A (en) Semiconductor device and method of manufacturing thereof
CN107623087A (zh) 柔性oled显示面板及其制备方法
JPH11307782A5 (https=)
US8004176B2 (en) Organic light emitting display having reduced manufacturing shorts and method of fabricating the same
JPH11103066A5 (ja) 半導体装置の作製方法
JPH10214973A5 (https=)
TW200623419A (en) Organic thin film transistor array panel and manufacturing method thereof
KR100552976B1 (ko) 유기 전계 발광 표시 장치
CN107179644B (zh) 一种显示基板、其制作方法及显示装置
JP2006128638A5 (https=)
JPH10214786A5 (https=)
DE60236657D1 (de) Em soi-substrat
JP2003318402A5 (https=)
JPH11177105A5 (https=)
KR101351402B1 (ko) 박막 트랜지스터의 제조 방법 및 이를 이용한 표시 장치의제조 방법
JPS6414967A (en) Manufacture of semiconductor device
JP2004304210A5 (https=)
JPH1197703A5 (ja) 半導体装置の作製方法