JPH10178241A - Printed wiring board and method for manufacturing the same - Google Patents

Printed wiring board and method for manufacturing the same

Info

Publication number
JPH10178241A
JPH10178241A JP33663296A JP33663296A JPH10178241A JP H10178241 A JPH10178241 A JP H10178241A JP 33663296 A JP33663296 A JP 33663296A JP 33663296 A JP33663296 A JP 33663296A JP H10178241 A JPH10178241 A JP H10178241A
Authority
JP
Japan
Prior art keywords
insulating resin
copper foil
printed wiring
wiring board
resin layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33663296A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Watanabe
充広 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MULTI KK
Multi Inc
Original Assignee
MULTI KK
Multi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MULTI KK, Multi Inc filed Critical MULTI KK
Priority to JP33663296A priority Critical patent/JPH10178241A/en
Publication of JPH10178241A publication Critical patent/JPH10178241A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/386Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a flat board which can be manufactured by a simple processing at low cost, and has accuracy of circuit position and high reliability, and further a printed wiring board is wide applicability to not only a multilayer board but also a metal core board. SOLUTION: A printed wiring board has copper foils 4, semi-cured or cured insulating resin layers 11 thicker than the copper foil 4 not including inorganic fiber etc., and an insulating core material 10 consisting of fillers such as a wring insulating resin and an inorganic fiber or an inorganic powder etc. The insulating resin layers 11 and the insulating core material 10 are formed sequentially on the copper foils 4, and desired circuits 6 are formed on the copper foils 4 using etching etc. Thereafter the insulating resin layer 11 are heated and pressed using a hot press etc., at the curing temperature higher than the softening temperature of the insulating resin layers 11 to embed the circuits 6 in the insulating resin layers 11 and form fla surfaces of the circuits 6 and the insulating resin layers 11.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、プリント配線板
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed wiring board.

【0002】[0002]

【従来の技術】プリント配線板は、絶縁材と、該絶縁材
の表面に接着された銅箔とを有し(銅張積層板とい
う)、前記銅箔によって回路が形成されており、その回
路形成方法は前記銅箔または該銅箔とその上の銅めっき
皮膜とをエッチング等の方法により除去して形成するの
が一般的で、そのため外層は回路と絶縁材との間に段差
が生じ、絶縁特性や部品搭載上等の信頼性を欠きやすい
ため回路間の絶縁層表面および部品搭載に不要な回路表
面にソルダーレジストやカバーレイが施されるのが通例
である。また、多層プリント配線板の場合も内層は基本
的には外層と同じ方法で形成され、その後プリプレグと
の積層で内層回路と絶縁材との段差および回路間の絶縁
確保はプリプレグの軟化埋め込みで解消され、次いで外
層を前記同様エッチング等の方法で形成するというのが
通例である。そのため、外層形成に対して、段差のない
ように形成された基板、いわゆる平滑プリント配線板が
求められていた。
2. Description of the Related Art A printed wiring board has an insulating material and a copper foil adhered to the surface of the insulating material (referred to as a copper-clad laminate), and a circuit is formed by the copper foil. The formation method is generally formed by removing the copper foil or the copper foil and the copper plating film thereon by etching or the like, so that the outer layer has a step between the circuit and the insulating material, Since the insulation characteristics and reliability of component mounting are likely to be lost, it is customary to apply a solder resist or coverlay to the surface of the insulating layer between circuits and the surface of the circuit unnecessary for component mounting. Also in the case of multilayer printed wiring boards, the inner layer is basically formed in the same way as the outer layer, and then the lamination with the prepreg eliminates the step between the inner layer circuit and the insulating material and the insulation between the circuits by softening and embedding the prepreg Then, the outer layer is usually formed by a method such as etching in the same manner as described above. Therefore, there has been a demand for a substrate formed so as to have no step, that is, a so-called smooth printed wiring board, for forming the outer layer.

【0003】そこで、従来の平滑なプリント配線板は、
図5〜11に示すような転写法によって得られるものが一
般的である。すなわち、(A)薄い金属板2(一般にス
テンレス板)の片面に電気めっき、または無電解銅めっ
きによって、または薄い銅箔3(薄付銅3)を接着させ
ることによって銅皮膜4を薄く形成した後、その銅皮膜
4の表面上に回路形成のためのめっきレジスト5を印刷
や写真法等の方法で形成し、該レジスト5間に電気銅め
っきまたは無電解銅めっきによって、回路6を析出させ
たのち、めっきレジスト5を薬品等で除去し回路6の表
面に絶縁層との接着強度を良くするための黒化処理等に
よる接着前処理を施して回路板7を形成し、次に両面板
にする場合は、同様にして得られた回路板7′の間にガ
ラス繊維等無機質充填物を含有しているプリプレグ材8
を必要枚数重ねて挿入し、加熱加圧プレス機などを用い
て加熱加圧して、積層することによって回路6をプリプ
レグ材8の中に埋め込み、次いでステンレス等の薄い金
属板2を薬品等で除去した後、薄い銅箔3を薬品等でエ
ッチング除去することによって、回路6の表面と絶縁層
としてのプリプレグ材8の表面とを平滑にするという、
いわゆる転写法と呼ばれる工程によってプリント配線板
1″を形成するものである。
Therefore, a conventional smooth printed wiring board is:
What is generally obtained by a transfer method as shown in FIGS. That is, (A) the copper film 4 was formed thin by electroplating or electroless copper plating on one side of a thin metal plate 2 (generally a stainless steel plate), or by bonding a thin copper foil 3 (copper 3). Thereafter, a plating resist 5 for forming a circuit is formed on the surface of the copper film 4 by a method such as printing or photographic method, and a circuit 6 is deposited between the resists 5 by electrolytic copper plating or electroless copper plating. Thereafter, the plating resist 5 is removed with a chemical or the like, and the surface of the circuit 6 is subjected to a pre-adhesion treatment such as a blackening treatment for improving the adhesion strength with the insulating layer, thereby forming a circuit board 7. In this case, the prepreg material 8 containing an inorganic filler such as glass fiber is placed between the circuit boards 7 'obtained in the same manner.
The circuit 6 is embedded in the prepreg material 8 by laminating and inserting the required number of sheets, and then heated and pressed using a heating and pressing press machine or the like, and then the thin metal plate 2 such as stainless steel is removed with a chemical or the like. After that, the surface of the circuit 6 and the surface of the prepreg material 8 as an insulating layer are smoothed by etching away the thin copper foil 3 with a chemical or the like.
The printed wiring board 1 ″ is formed by a process called a so-called transfer method.

【0004】また、前記より簡単な方法としては、図示
しないが、(B)銅張積層板をエッチング等により回路
形成したのち、電気絶縁性、及び回路保護性を付与する
ための樹脂(液状)をコーティングして、乾燥硬化さ
せ、次いで、回路面より突出した部分の樹脂を機械研磨
等によって除去して、平滑なプリント配線板とする、い
わゆるコーティング研磨法によって平滑プリント配線板
を形成するものである。
[0004] As a simpler method, although not shown, (B) a resin (liquid) for providing electrical insulation and circuit protection after forming a circuit by etching a copper clad laminate. Is coated and dried and cured, and then, the resin protruding from the circuit surface is removed by mechanical polishing or the like to form a smooth printed wiring board, that is, a smooth printed wiring board is formed by a so-called coating polishing method. is there.

【0005】[0005]

【発明が解決しようとする課題】各プリント配線板メー
カは、前記のような従来の平滑プリント配線板を信頼性
よく効率的にかつ安価に製作提供するには、これら従来
の工法並びにそれによって得られる基板に対しては多く
の問題を抱えていた。すなわち、(A)の転写法では、
(1)工程が多く複雑なため加工工数がかかり、(2)
金属板や薄付銅など最終品には不要なものを用いたりそ
れらをエッチング等による除去のためのコストがかかり
原価高であり、(3)一般にプリプレグ材の絶縁樹脂中
にはガラス繊維等無機質充填物を含有しているため、こ
れら充填物が邪魔して、すなわち、一体に形成する際の
加圧力によって、回路パターン間にそれらが圧入される
際に、前記無機繊維質等の剛性によってプリント配線板
の面方向に力がかかって、回路の位置ずれや変形が生じ
やすく、(4)したがって両面の回路の層間合わせの精
度が悪く歩留まりが悪く、(5)平滑多層板をこの方法
で製作しようとすると両面平面基板1枚以上をコア基板
として多層化する場合、このコア基板の回路が上記
(3)と同様の理由によりずれや変形を生じやすく、ま
た前記多層板の外層回路と内層回路とのずれや変形も
(3)の理由により生じやすいため、層間の回路ずれの
危険が増幅し、精度・信頼性を欠き、(6)ステンレス
等金属板と薄付銅との密着性は後工程の金属板除去を考
えたとき強固な密着ではなくほどほどの適度な密着力が
望ましいがその強度加減を保持するのが難しいといった
原価面、品質面、技術面および管理面で大きな問題があ
る。
In order to manufacture and provide the above-mentioned conventional smooth printed wiring board with high reliability and efficiency at a low cost, each of the conventional printed circuit board manufacturers and the conventional methods have been proposed. There were many problems with the substrates that were used. That is, in the transfer method of (A),
(1) Since many steps are involved, processing man-hours are required, and (2)
Unnecessary materials such as metal plates and thin copper are used and unnecessary to remove them by etching or the like, and the cost is high. (3) In general, the insulating resin of the prepreg material contains inorganic materials such as glass fiber. Because they contain fillers, these fillers hinder, that is, when they are press-fitted between circuit patterns by the pressing force when they are integrally formed, the rigidity of the inorganic fiber etc. prints them. A force is applied in the direction of the surface of the wiring board, and the circuit is likely to be displaced or deformed. (4) Therefore, the accuracy of interlayer alignment of the circuits on both sides is poor and the yield is poor. (5) A smooth multilayer board is manufactured by this method. If one or more double-sided flat substrates are used as a core substrate to form a multilayer, the circuit of the core substrate is likely to be displaced or deformed for the same reason as in (3) above. (3), the risk of circuit displacement between layers is amplified, the accuracy and reliability are lacking, and (6) adhesion between a metal plate such as stainless steel and thin copper When considering the metal plate removal in the subsequent process, it is desirable to have moderate moderate adhesion instead of strong adhesion, but it is difficult to maintain the strength, but it is a major problem in terms of cost, quality, technology and management There is.

【0006】また、(B)のコーティング研磨法では、
(1)回路表面と銅箔エッチアウト後の絶縁樹脂表面と
の間の段差が生じるために、全体に対して均一な樹脂
(液状)コーティングを施すのが技術的にも管理面でも
難しく、(2)コーティング樹脂硬化後の回路面上の余
分な樹脂を銅回路表面を痛めることなどの問題がある。
[0006] In the coating polishing method of (B),
(1) Since a step is generated between the circuit surface and the insulating resin surface after the copper foil is etched out, it is difficult to apply a uniform resin (liquid) coating to the whole in terms of technical and management aspects. 2) There is a problem that excess resin on the circuit surface after curing of the coating resin damages the copper circuit surface.

【0007】そこで、プリント基板業界およびそのユー
ザからは以前から、これらの諸問題を解消するために、
これら従来のプリント配線板に代わるものとして、
(1)信頼性が高く、(2)簡単な製造工程で、(3)
安価で歩留まりがよく、(4)片面・両面基板だけでな
く、とりわけ多層基板に適用することができて、(5)
メタルコア基板にも応用でき、さらに、(6)ビルドア
ップ工法や連続ラミネート工法にも適用できる平滑プリ
ント配線板が強く求められていた。
Accordingly, the printed circuit board industry and its users have long been trying to solve these problems.
As an alternative to these conventional printed wiring boards,
(1) High reliability, (2) Simple manufacturing process, (3)
(4) It can be applied not only to single-sided / double-sided boards but also to multilayer boards in particular, and (5)
There has been a strong demand for a smooth printed wiring board that can be applied to a metal core substrate and (6) a build-up method or a continuous laminating method.

【0008】そこでこの発明の目的は、前記従来の平滑
プリント配線板のもつ問題を解消し、簡単な工程で製造
することができて、安価であり、回路の位置精度、及び
信頼性が高い平滑基板を提供するにある。さらには多層
基板だけでなくメタルコア基板にも適用できる応用性が
広くて平滑なプリント配線板を提供するにある。
SUMMARY OF THE INVENTION An object of the present invention is to solve the problems of the conventional smooth printed wiring board, to manufacture it by a simple process, to be inexpensive, to obtain a circuit with high positional accuracy and high reliability. Providing a substrate. Another object of the present invention is to provide a printed wiring board having a wide applicability that can be applied not only to a multilayer substrate but also to a metal core substrate.

【0009】[0009]

【課題を解決するための手段】この発明は、前記のよう
な目的を達成するために、平滑プリント配線板であっ
て、請求項1に記載の発明は、銅箔と、その銅箔の厚さ
よりも厚い半硬化ないしは硬化状態の無機繊維質等を含
有しない絶縁樹脂層と、硬化性絶縁樹脂、及び無機繊維
質または無機粉末等の充填材からなる絶縁コア材とを有
し、前記銅箔に絶縁樹脂層と絶縁コア材とを順次積層し
て、前記銅箔に所望の回路をエッチング等によって形成
した後、加熱加圧プレス機等によって絶縁樹脂層の軟化
温度以上の温度の硬化温度で加熱加圧して前記回路を絶
縁樹脂層の中に埋め込み、回路と絶縁樹脂層との表面が
平滑となるように形成したことを特徴とするものであ
る。
SUMMARY OF THE INVENTION The present invention is directed to a smooth printed wiring board for achieving the above-mentioned object, and the invention according to claim 1 comprises a copper foil and a thickness of the copper foil. An insulating resin layer that does not contain a semi-cured or cured inorganic fiber or the like that is thicker than the insulating resin, a curable insulating resin, and an insulating core material made of a filler such as an inorganic fiber or an inorganic powder; An insulating resin layer and an insulating core material are sequentially laminated, a desired circuit is formed on the copper foil by etching or the like, and then a heat-pressing machine or the like is used at a curing temperature equal to or higher than the softening temperature of the insulating resin layer. The circuit is embedded in the insulating resin layer by heating and pressing, and the surfaces of the circuit and the insulating resin layer are formed to be smooth.

【0010】請求項2に記載の発明は、請求項1に記載
の発明において、銅箔に、絶縁樹脂層が予めコーティン
グ接着されていることを特徴とするものである。
According to a second aspect of the present invention, in the first aspect of the present invention, an insulating resin layer is previously coated and adhered to the copper foil.

【0011】請求項3に記載の発明は、請求項1に記載
の発明において、絶縁樹脂層が、絶縁樹脂からなるフィ
ルムであることを特徴とするものである。
According to a third aspect of the present invention, in the first aspect of the present invention, the insulating resin layer is a film made of an insulating resin.

【0012】請求項4に記載の発明は、請求項1に記載
の発明において、絶縁コア材が、片面または両面銅張積
層板から銅箔のみをエッチングして溶解除去したものま
たは物理的に引き剥がしたものであることを特徴とする
ものである。
According to a fourth aspect of the present invention, in the first aspect of the present invention, the insulating core material is obtained by etching only a copper foil from a single-sided or double-sided copper-clad laminate, and dissolving or removing the same. It is characterized by being peeled off.

【0013】請求項5に記載の発明は、請求項1に記載
の発明において、絶縁コア材が、銅箔を有しないアンク
ラッド板であることを特徴とするものである。
According to a fifth aspect of the present invention, in the first aspect of the present invention, the insulating core material is an unclad plate having no copper foil.

【0014】請求項6に記載の発明は、請求項1に記載
の発明において、絶縁コア材が、プリント配線板として
の絶縁性能を保持する厚さを有する絶縁樹脂層であるこ
とを特徴とするものである。
According to a sixth aspect of the present invention, in the first aspect of the present invention, the insulating core material is an insulating resin layer having a thickness that maintains insulation performance as a printed wiring board. Things.

【0015】請求項7に記載の発明は、請求項1に記載
の発明において、絶縁コア材が、プリプレグ材であるこ
とを特徴とするものである。
According to a seventh aspect of the present invention, in the first aspect, the insulating core material is a prepreg material.

【0016】請求項8に記載の発明は、請求項1に記載
の発明において、平滑基板を複数積層して多層プリント
配線板を形成したことを特徴とするものである。
According to an eighth aspect of the present invention, in the first aspect, a multilayer printed wiring board is formed by laminating a plurality of smooth substrates.

【0017】請求項9に記載の発明は、請求項1または
8に記載の発明において、絶縁コア材が、片面または、
両面銅張り積層板に回路形成されたもの、または、樹脂
付き銅箔の樹脂面を対向接着させたものに回路形成され
たもの、または、転写法または樹脂をコーテイングした
後研磨して形成した平滑基板からなることを特徴とする
ものである。
According to a ninth aspect of the present invention, in the first or the eighth aspect of the present invention, the insulating core material has one surface or
A circuit formed on a double-sided copper-clad laminate, or a circuit formed on a resin foil with resin surfaces facing each other, or a transfer method or a smooth surface formed by polishing after coating with resin It is characterized by comprising a substrate.

【0018】請求項10に記載の発明は、平滑プリント配
線板の製造方法であって、銅箔と、その銅箔の厚さより
も厚い半硬化ないしは硬化状態の無機繊維質等を含有し
ない絶縁樹脂層と、硬化性絶縁樹脂と無機繊維質あるい
は無機粉末等の充填材とからなる絶縁コア材とを有し、
前記銅箔に絶縁樹脂層と絶縁コア材とを順次積層して、
前記銅箔に所望の回路をエッチング等によって形成した
後、加熱加圧プレス機等によって絶縁樹脂層の軟化温度
以上の温度の硬化温度で加熱加圧して前記回路を絶縁樹
脂層の中に埋め込み、回路と絶縁樹脂層との表面が平滑
となるようにして平滑プリント配線板を形成することを
特徴とするものである。
The invention according to claim 10 is a method for manufacturing a smooth printed wiring board, wherein the insulating resin does not contain a copper foil and a semi-cured or cured inorganic fiber thicker than the thickness of the copper foil. Layer, having an insulating core material composed of a curable insulating resin and a filler such as inorganic fiber or inorganic powder,
An insulating resin layer and an insulating core material are sequentially laminated on the copper foil,
After a desired circuit is formed on the copper foil by etching or the like, the circuit is embedded in the insulating resin layer by heating and pressing at a curing temperature equal to or higher than the softening temperature of the insulating resin layer by a heating / pressing press or the like, A smooth printed wiring board is formed so that the surfaces of the circuit and the insulating resin layer are smooth.

【0019】[0019]

【発明の実施の形態】図面に示すこの発明の実施形態に
おいて、前記従来と同様の部分については同一の符号を
引用して説明を省略し、主として異なる部分について説
明する。この発明の第1実施形態は、図1,2に示すよ
うであって、銅箔4と、その銅箔4の厚さよりも厚い半
硬化ないしは硬化状態の無機繊維質等を含有しない絶縁
樹脂層11と、硬化性絶縁樹脂、及び無機繊維質または無
機粉末等の充填材からなる絶縁コア材10とを有し、銅箔
4に所望の回路6をエッチング等によって形成した後、
銅箔4に絶縁樹脂層11と絶縁コア材10とを順次積層し
て、加熱加圧プレス機等によって絶縁樹脂層11の軟化温
度以上の温度の硬化温度で加熱加圧して回路6を絶縁樹
脂層11の中に埋め込み、回路6と絶縁樹脂層11との表面
が平滑となるようにして平滑プリント配線板1を形成し
たものである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the embodiment of the present invention shown in the drawings, the same parts as those of the prior art are referred to by the same reference numerals, and description thereof will be omitted. The first embodiment of the present invention is as shown in FIGS. 1 and 2, in which a copper foil 4 and an insulating resin layer containing no semi-cured or cured inorganic fiber or the like that is thicker than the thickness of the copper foil 4. 11 and a hardening insulating resin, and an insulating core material 10 made of a filler such as an inorganic fiber or an inorganic powder. After a desired circuit 6 is formed on the copper foil 4 by etching or the like,
The insulating resin layer 11 and the insulating core material 10 are sequentially laminated on the copper foil 4, and the circuit 6 is heated and pressed at a curing temperature higher than the softening temperature of the insulating resin layer 11 by a heating / pressing press or the like to form the circuit 6 with the insulating resin. The smooth printed wiring board 1 is formed by embedding in the layer 11 so that the surfaces of the circuit 6 and the insulating resin layer 11 become smooth.

【0020】また、回路6が形成された絶縁コア材10
と、絶縁樹脂層11とを積層する場合、絶縁コア材10の両
面に回路6を形成して、回路6が形成された両面にそれ
ぞれ絶縁樹脂層11を設けるような構成としてもよい。
The insulating core material 10 on which the circuit 6 is formed
When the insulating resin layer 11 and the insulating resin layer 11 are laminated, the circuit 6 may be formed on both surfaces of the insulating core material 10 and the insulating resin layer 11 may be provided on both surfaces on which the circuit 6 is formed.

【0021】このようなものにあって、絶縁コア材10上
に回路6を形成したプリント配線板1(硬化性絶縁樹
脂、及び無機繊維質または無機充填材を含有する硬化性
絶縁樹脂基板)に、無機繊維質等を含有しない半硬化〜
硬化状態の絶縁樹脂層11を回路6の導体厚み以上に形成
させ、その表層に銅箔4を接着させた基材(片面又は両
面)を作成し用いる。なお、半硬化〜硬化状態の硬化性
絶縁樹脂11は、所定の条件下でパターンを埋め込む際
に、パターン位置精度やパターン変形に影響を与えない
範囲の状態であることが好ましく、各々の樹脂系により
その硬化度合を適宜調整することが重要である。
In such a device, a printed wiring board 1 (a curable insulating resin substrate containing a curable insulating resin and an inorganic fiber or an inorganic filler) in which a circuit 6 is formed on an insulating core material 10 is used. , Semi-cured that does not contain inorganic fibers, etc.
A hardened insulating resin layer 11 is formed to have a thickness equal to or greater than the conductor thickness of the circuit 6, and a substrate (one or both surfaces) having a copper foil 4 adhered to the surface layer is prepared and used. Note that the curable insulating resin 11 in the semi-cured to cured state is preferably in a state that does not affect pattern position accuracy or pattern deformation when embedding a pattern under predetermined conditions. It is important to appropriately adjust the degree of curing.

【0022】第2実施形態は、第1実施形態において、
図示しないが、銅箔4に、絶縁樹脂層11が予めコーティ
ング接着されているものである。
The second embodiment is different from the first embodiment in that
Although not shown, the insulating resin layer 11 is coated and adhered to the copper foil 4 in advance.

【0023】第3実施形態は、第1実施形態において、
図示しないが、絶縁樹脂層11が、絶縁樹脂からなるフィ
ルムである。
The third embodiment is different from the first embodiment in that
Although not shown, the insulating resin layer 11 is a film made of an insulating resin.

【0024】第4実施形態は、第1実施形態において、
図示しないが、絶縁コア材10が、片面あるいは両面銅張
積層板から銅箔4のみをエッチングして溶解除去したも
の、または物理的に引き剥がしたものである。
The fourth embodiment is different from the first embodiment in that
Although not shown, the insulating core material 10 is obtained by dissolving and removing only the copper foil 4 from a single-sided or double-sided copper-clad laminate, or by physically peeling it off.

【0025】第5実施形態は、第1実施形態において、
図示しないが、絶縁コア材10が、銅箔4を有しないアン
クラッド板であってもよい。
The fifth embodiment is different from the first embodiment in that
Although not shown, the insulating core material 10 may be an unclad plate having no copper foil 4.

【0026】第6実施形態は、第1実施形態において、
図示しないが、絶縁コア材10が、プリント配線板として
の絶縁性能を保持する厚さを有する絶縁樹脂層11であ
る。
The sixth embodiment is different from the first embodiment in that
Although not shown, the insulating core material 10 is an insulating resin layer 11 having a thickness that maintains insulation performance as a printed wiring board.

【0027】第7実施形態は、第1実施形態において、
図示しないが、絶縁コア材10が、片面または、両面銅張
り積層板に回路形成されたもの、または、樹脂付き銅箔
の樹脂面どうしを接着させたものに回路形成されたも
の、または、転写法または樹脂をコーテイングした後研
磨して形成した平滑プリント配線板を用いてもよい。
The seventh embodiment is different from the first embodiment in that
Although not shown, the insulating core material 10 is a circuit formed on a single-sided or double-sided copper-clad laminate, or a circuit formed on a resin-coated copper foil bonded to each other, or is transferred. Alternatively, a smooth printed wiring board formed by polishing after coating a resin or a resin may be used.

【0028】その製造方法は、銅箔4と、その銅箔4の
厚さよりも厚い半硬化ないしは硬化状態の無機繊維質等
を含有しない絶縁樹脂層11と、硬化性絶縁樹脂と無機繊
維質あるいは無機粉末等の充填材とからなる絶縁コア材
10とを有し、銅箔4上に絶縁樹脂層11と絶縁コア材10と
を順次積層して、銅箔4に所望の回路6をエッチング等
によって形成した後、加熱加圧プレス機等によって絶縁
樹脂層11の軟化温度以上の温度の硬化温度で加熱加圧し
て、回路6を絶縁樹脂層11の中に埋め込み、回路6と絶
縁樹脂層11との表面が平滑となるようにして平滑プリン
ト配線板を形成するものである。
The manufacturing method is as follows: a copper foil 4, an insulating resin layer 11 containing no semi-cured or cured inorganic fiber thicker than the thickness of the copper foil 4, a curable insulating resin and an inorganic fiber or Insulating core material consisting of filler such as inorganic powder
After the insulating resin layer 11 and the insulating core material 10 are sequentially laminated on the copper foil 4 and a desired circuit 6 is formed on the copper foil 4 by etching or the like, a heating / pressing machine or the like is used. The circuit 6 is embedded in the insulating resin layer 11 by heating and pressurizing at a curing temperature higher than the softening temperature of the insulating resin layer 11, and the surface of the circuit 6 and the insulating resin layer 11 is smoothed so as to be smooth. It forms a wiring board.

【0029】加熱加圧の方法は、(1)銅箔4に絶縁樹
脂層11と絶縁コア材10とを順次積層した後、銅箔4にエ
ッチング等で回路を形成したものを常温から除々に加熱
しながら、5kg/cm2以上で、170℃×60分加圧する方
法、または、(2)銅箔4上に絶縁樹脂層11と絶縁コア
材10とを順次積層したものを硬化温度170℃にまで加熱
してから、5kg/cm2以上、170℃×60分加圧する方法等
がある。
The method of heating and pressurizing is as follows: (1) After laminating the insulating resin layer 11 and the insulating core material 10 on the copper foil 4 in order, and forming a circuit on the copper foil 4 by etching or the like, the copper foil 4 is gradually cooled from room temperature. A method of pressing at 170 ° C. × 60 minutes at 5 kg / cm 2 or more while heating, or (2) a method in which an insulating resin layer 11 and an insulating core material 10 are sequentially laminated on a copper foil 4 at a curing temperature of 170 ° C. , And then pressurizing at 5 kg / cm 2 or more at 170 ° C. for 60 minutes.

【0030】加熱加圧に際しては、銅箔4と絶縁樹脂層
11と絶縁コア材10とを順次積層して、銅箔4に所望の回
路6をエッチング等によって形成した後のものの両面に
それぞれ順次、離型フィルム12、ステンレス板13を載置
し、加熱加圧プレス機の熱板15と、前記ステンレス板13
との間にクッション材14を挟んで加熱加圧する。
When heating and pressing, the copper foil 4 and the insulating resin layer
After the desired circuit 6 is formed on the copper foil 4 by etching or the like, the release film 12 and the stainless steel plate 13 are placed on the copper foil 4 and the stainless steel plate 13 respectively. The hot plate 15 of the pressure press machine and the stainless plate 13
Is heated and pressed with the cushion material 14 interposed therebetween.

【0031】[0031]

【第1実施例】0.3tガラスエポキシ基板(銅箔を有し
ないアンクラッド材)に、熱硬化性エポキシ樹脂付銅箔
(銅厚18μm、樹脂厚50μm)を130℃×10分、20kg/cm2
にて接着成形した材料を用いる。
[First Embodiment] A thermosetting epoxy resin-coated copper foil (copper thickness: 18 μm, resin thickness: 50 μm) is applied to a 0.3-t glass epoxy substrate (unclad material having no copper foil) at 130 ° C. for 10 minutes, 20 kg / cm. Two
Use a material that has been adhesively molded.

【0032】この第1実施例において、多層基板用シー
ルド板を製作するに当たり、0.2mmtガラスエポキシ基
板に、50μm熱硬化性エポキシ樹脂付18μm銅箔を両面に
所定の条件下で接着し、エッチングにより回路を形成し
た後、所定の条件下で平滑化を行い、その平滑化された
銅回路に接着前処理を施したものをコア材とし、これに
50μm熱硬化性エポキシ樹脂付18μm銅箔を所定の条件下
にてプレス成形を実施した。接着層である絶縁層の厚み
は回路がすでに平滑であるために、エッチング後の回路
の凹凸の影響が全くなくなり、非常に高い均一性を得る
ことができた。比較として、0.2mmtの18μm両面銅張積
層板にエッチングにより回路を形成したものをコア材に
用い、その上に同様の樹脂付銅箔を用いて、多層化を行
ったが、前記のものに比べ回路が基材に対して凹凸があ
るため、絶縁層の厚みの均一性という点では非常に劣っ
ていた。
In the first embodiment, when manufacturing a shield board for a multilayer board, a 50 μm 18 μm copper foil with a thermosetting epoxy resin was adhered to both sides of a 0.2 mm glass epoxy board under predetermined conditions, and etching was performed by etching. After the circuit is formed, smoothing is performed under predetermined conditions, and the smoothed copper circuit that has been subjected to pre-adhesion treatment is used as a core material.
Press molding of a 50 μm thermosetting epoxy resin-attached 18 μm copper foil was performed under predetermined conditions. Since the circuit was already smooth, the thickness of the insulating layer, which is the adhesive layer, was completely free from the influence of the unevenness of the circuit after etching, and very high uniformity could be obtained. As a comparison, a core was formed by etching a 0.2 mmt 18 μm double-sided copper-clad double-sided laminated board as a core material, and a similar resin-coated copper foil was used thereon to perform multilayering. In comparison, since the circuit had irregularities with respect to the base material, the uniformity of the thickness of the insulating layer was very poor.

【0033】[0033]

【第2実施例】0.3tガラスエポキシ基板(アンクラッ
ド材)上に、熱硬化性エポキシ樹脂フィルム(50μm)
と18μm銅箔を130℃×10分、20kg/cm2にて接着成形した
材料を用いる。
[Second Embodiment] A thermosetting epoxy resin film (50 μm) on a 0.3 t glass epoxy substrate (unclad material)
And a 18 μm copper foil bonded and molded at 130 ° C. × 10 minutes at 20 kg / cm 2 .

【0034】この第2実施例において、多層基板用シー
ルド板を製作するに当たり、0.2mmtガラスエポキシ基
板に、50μm熱硬化性エポキシ樹脂付18μm銅箔を両面に
所定の条件下で接着し、エッチングにより回路を形成し
た後、所定の条件下で平滑化を行い、これをコア材とし
て接着前処理後、50μm熱硬化性エポキシ樹脂付18μm銅
箔を真空ラミネートを用い成形処理を実施したところ、
樹脂の下塗りを実施していないにもかかわらず、実用上
問題のない4層シールド板を得ることができた。
In the second embodiment, when manufacturing a shield board for a multilayer board, a 50 μm thermosetting epoxy resin-coated 18 μm copper foil was adhered to both sides of a 0.2 mmt glass epoxy board under predetermined conditions, and etching was performed by etching. After forming the circuit, smoothing was performed under predetermined conditions, and after performing pre-adhesion treatment using this as a core material, a molding process was performed using a vacuum laminating of 18 μm copper foil with 50 μm thermosetting epoxy resin,
A four-layer shield plate having no practical problem was obtained despite the fact that the resin was not undercoated.

【0035】[0035]

【第3実施例】第2実施例において、樹脂厚を80μm、
銅箔厚を35μmに変更し、130℃×10分、20kg/cm2にて接
着成形した材料を用いる。
Third Embodiment In the second embodiment, the resin thickness is set to 80 μm,
A material obtained by changing the copper foil thickness to 35 μm and bonding at 130 ° C. × 10 minutes at 20 kg / cm 2 is used.

【0036】[0036]

【第4実施例】第1実施例において、熱硬化性エポキシ
樹脂付銅箔を樹脂厚80μm、銅箔厚を18μmとし、130℃
×10分、20kg/cm2にて接着成形した材料を用いる。
Fourth Embodiment In the first embodiment, a copper foil with a thermosetting epoxy resin is set to a resin thickness of 80 μm, a copper foil thickness of 18 μm, and a temperature of 130 ° C.
A material formed by adhesive molding at 20 kg / cm 2 for 10 minutes is used.

【0037】[0037]

【第5実施例】熱硬化性エポキシ樹脂付銅箔(樹脂厚80
μm、銅箔厚18μm)を2枚対向させ、130℃×10分、20k
g/cm2にて接着成形した材料を用いる。
Fifth Embodiment Copper foil with a thermosetting epoxy resin (resin thickness 80
μm, copper foil thickness 18μm) facing each other, 130 ℃ × 10min, 20k
A material adhesively molded at g / cm 2 is used.

【0038】[0038]

【第6実施例】第5実施例を170℃×60分、20kg/cm2
硬化させた材料を用いる。
Sixth Embodiment A material obtained by curing the fifth embodiment at 170 ° C. for 60 minutes at 20 kg / cm 2 is used.

【0039】[0039]

【第7実施例】第4実施例を170℃×60分、20kg/cm2
硬化させた材料を用いる。
Seventh Embodiment A material obtained by curing the fourth embodiment at 170 ° C. for 60 minutes at 20 kg / cm 2 is used.

【0040】[0040]

【比較例1】0.3t 18μm両面ガラスエポキシ両面板
(市販品)を用いる。
Comparative Example 1 A 0.3 t 18 μm double-sided glass epoxy double-sided board (commercially available) is used.

【0041】[0041]

【比較例2】0.3t 35μm両面ガラスエポキシ両面板
(市販品)を用いる。
Comparative Example 2 A 0.3 t 35 μm double-sided glass epoxy double-sided board (commercially available) is used.

【0042】[0042]

【比較例3】0.1tガラスエポキシプリプレグ(市販
品)、18μm銅箔を130℃×10分、20kg/cm2で仮成形した
基材を用いる。
Comparative Example 3 A base material obtained by temporarily forming 0.1 t glass epoxy prepreg (commercially available) and 18 μm copper foil at 130 ° C. for 10 minutes at 20 kg / cm 2 was used.

【0043】平滑化の方法について以下に説明する。半
硬化〜硬化状態に調整された熱硬化性絶縁樹脂層上の銅
箔にエッチング法等により回路形成を行った後、加圧加
熱(樹脂の軟化温度以上かつ硬化温度を要する)下で、
樹脂が軟化することを利用し回路を変形させることな
く、樹脂層中に埋め込み、平滑基板とする。埋め込む過
程の中で、樹脂層にガラスクロス等に代表される無機繊
維質が存在すると、回路が沈み込む際に障害となり、十
分な平滑性が得られないばかりか、回路の変形をも引き
起こすことが確認された。
The method of smoothing will be described below. After forming a circuit on the copper foil on the thermosetting insulating resin layer adjusted to a semi-cured to a cured state by an etching method or the like, under pressure and heating (which requires a resin softening temperature or higher and requires a curing temperature),
Utilizing the softening of the resin, the circuit is buried in the resin layer without deforming the circuit to form a smooth substrate. In the process of embedding, if inorganic fiber typified by glass cloth etc. is present in the resin layer, it will be an obstacle when the circuit sinks, not only will not obtain sufficient smoothness, but also cause deformation of the circuit Was confirmed.

【0044】また、平滑化と同時に樹脂を硬化させるこ
ともできる。これは、先に述べた実施例及び比較例の材
料について平滑化を実施検討した。この加圧、加熱条件
は5kg/cm2以上、170℃×60分で、図3に示す方法でプ
レス成形を行った。なお、テストパターンは、ラインア
ンドスペース50,100,200μm及び1mmφ,5mmφ,100
mm角のパターンをエッチング法により形成したものを用
いた。
The resin can be cured simultaneously with the smoothing. For this, the materials of the above-mentioned Examples and Comparative Examples were examined for smoothing. The pressurizing and heating conditions were 5 kg / cm 2 or more, 170 ° C. × 60 minutes, and press molding was performed by the method shown in FIG. The test patterns were line and space 50, 100, 200 μm and 1 mmφ, 5 mmφ, 100 mm
A pattern in which a mm-square pattern was formed by an etching method was used.

【0045】第1,2,4実施例の場合について考察す
ると、加圧5kg/cm2で実施した結果、平滑性を達成する
ことができ、かつパターンのゆがみ、変形等は見られ
ず、全体の寸法収縮としては一般的FR−4多層と同レ
ベルであった。なお、加圧20kg/cm2の場合、及び加圧30
kg/cm2の場合、上記と同様である。
Considering the case of the first, second, and fourth embodiments, as a result of performing the test at a pressure of 5 kg / cm 2 , it was possible to achieve smoothness, and no distortion or deformation of the pattern was observed. Was at the same level as the general FR-4 multilayer. In the case of pressurized 20 kg / cm 2 and pressurized 30 kg / cm 2
In the case of kg / cm 2 , it is the same as above.

【0046】第3実施例を考察すると、加圧5kg/cm2
場合は、完全な平滑性は達成できないものの5〜8μm
の突出であった。また、加圧20kg/cm2の場合は、完全な
平滑性は達成できないものの5μm以下の突出であっ
た。加圧30kg/cm2の場合は、平滑性を達成できており、
ほぼ問題のないレベルであった。
Considering the third embodiment, when the pressure is 5 kg / cm 2 , perfect smoothness cannot be achieved, but 5 to 8 μm
It was a protrusion. When the pressure was 20 kg / cm 2 , complete smoothness could not be achieved, but the protrusion was 5 μm or less. In the case of pressurized 30 kg / cm 2 , smoothness can be achieved,
It was almost no problem.

【0047】第5実施例を考察すると、加圧5kg/cm2
30kg/cm2において平滑性は良好であるが、寸法収縮が一
般FR−4に比べ若干大きめであるが、ほぼ問題のない
レベルである。
Considering the fifth embodiment, the pressure is 5 kg / cm 2-
Although the smoothness is good at 30 kg / cm 2 , the dimensional shrinkage is slightly larger than that of general FR-4, but at a level that does not cause any problem.

【0048】第6,7実施例を考察すると、加圧5kg/c
m2においては5μm前後の突出が見られるが、20kg/cm2
からは突出は見られず平滑性を得ることができた。しか
しながら、若干ではあるがパターンのつぶれ変形が見ら
れる。寸法変化においてはFR−4多層化成形時とほぼ
同じであった。
Considering the sixth and seventh embodiments, the pressure is 5 kg / c.
In m 2 , a protrusion of about 5 μm is seen, but 20 kg / cm 2
No protrusion was observed from the sample, and smoothness could be obtained. However, a slight deformation of the pattern is observed. The dimensional change was almost the same as in the FR-4 multilayer molding.

【0049】比較例1,2,3を考察すると、完全な平
滑性を達成することはできず、パターンの変形等が見ら
れる。これは銅厚が35μmと厚くなるにつれつぶれ変形
の度合いは増すためと判断される。なお比較例3は比較
例1に比べ軽度であった。
Considering Comparative Examples 1, 2, and 3, complete smoothness cannot be achieved, and pattern deformation and the like are observed. This is considered to be because the degree of crushing deformation increases as the copper thickness increases to 35 μm. Comparative Example 3 was milder than Comparative Example 1.

【0050】第8実施形態は、図3,4に示すように、
第1実施形態の平滑プリント配線板を複数枚積層して多
層プリント配線板を形成したものである。なお、多層化
する場合、回路が向き合っている状態においては、絶縁
樹脂層を絶縁コア材の代わりをさせて、図4に示すよう
に絶縁コア材を省略して、加熱加圧して多層平滑プリン
ト配線板1′を形成してもよい。
In the eighth embodiment, as shown in FIGS.
A multilayer printed wiring board is formed by laminating a plurality of smooth printed wiring boards according to the first embodiment. In the case of multilayering, when the circuits are facing each other, the insulating resin layer is substituted for the insulating core material, and the insulating core material is omitted as shown in FIG. The wiring board 1 'may be formed.

【0051】このようなものは、前記した手法で得られ
た平滑プリント配線板を内層に用いることにより、一般
的な多層成形にのみならず、ビルドアップ工法、連続ラ
ミネート工法による多層化においても、回路ずれ等が生
じない高品位、かつ薄板化された多層プリント配線板を
えることができる。
By using the smooth printed wiring board obtained by the above-described method as an inner layer, not only general multi-layer molding but also multi-layering by a build-up method and a continuous laminating method can be used. It is possible to obtain a high-quality and thinned multilayer printed wiring board in which circuit displacement and the like do not occur.

【0052】多層基板における内層板として平滑プリン
ト配線板1を用いた場合、次のようなメリットが得られ
る。すなわちパターンの銅厚に影響されることなく、
ローフロー、ノンフロータイプのプリプレグ又は接着シ
ート(フィルム)等が使用できる。低圧成形が可能で
あり、接着層厚の均一化、多層成形時のストレス低減に
効果があり高品位な基板が得られる。接着層の厚さを
一般的な仕様よりも薄くすることができるため、薄板化
が可能である。ビルドアップ多層法において内層パタ
ーン面上に絶縁樹脂コートを行う場合、パターンの凹凸
の影響を受けることなく平坦で均一な厚みの絶縁層を形
成でき、又、樹脂付銅箔や樹脂フィルム等を用い、ビル
ドアップ多層成形を行う際においてもパターン埋め込み
不足等といったトラブルを解消でき、一層均一な厚みの
絶縁層を形成することが可能である。又、樹脂付銅箔や
樹脂フィルム等を用い、連続ラミネート成形を行う際に
おいても同様の効果を得ることができる。
When the smooth printed wiring board 1 is used as the inner layer board in the multilayer board, the following advantages can be obtained. That is, without being affected by the copper thickness of the pattern,
Low-flow and non-flow prepregs or adhesive sheets (films) can be used. Low-pressure molding is possible, and it is effective in making the thickness of the adhesive layer uniform and reducing stress in multilayer molding, and a high-quality substrate can be obtained. Since the thickness of the adhesive layer can be made thinner than a general specification, the thickness can be reduced. When applying an insulating resin coat on the inner layer pattern surface in the build-up multilayer method, an insulating layer with a flat and uniform thickness can be formed without being affected by the unevenness of the pattern, and using a resin-coated copper foil or resin film etc. In addition, troubles such as insufficient pattern embedding can be resolved even when performing build-up multilayer molding, and an insulating layer having a more uniform thickness can be formed. Similar effects can be obtained when performing continuous laminating using a resin-coated copper foil or a resin film.

【0053】[0053]

【発明の効果】この発明は前記のようであって、平滑プ
リント配線板であって、請求項1に記載の発明は、銅箔
と、その銅箔の厚さよりも厚い半硬化ないしは硬化状態
の無機繊維質等を含有しない絶縁樹脂層と、硬化性絶縁
樹脂、及び無機繊維質または無機粉末等の充填材からな
る絶縁コア材とを有し、前記銅箔に絶縁樹脂層と絶縁コ
ア材とを順次積層して、前記銅箔に所望の回路をエッチ
ング等によって形成した後、加熱加圧プレス機等によっ
て絶縁樹脂層の軟化温度以上の温度の硬化温度で加熱加
圧して回路を絶縁樹脂層の中に埋め込み、回路と絶縁樹
脂層との表面が平滑となるように形成したので、一般的
な多層成形にのみならず、ビルドアップ工法、連続ラミ
ネート工法による多層化においても、回路ずれ等が生じ
ない高品位、かつ薄板化された多層プリント配線板が安
価にえられるという効果がある。
As described above, the present invention is directed to a smooth printed wiring board, and the invention according to claim 1 is characterized in that a copper foil and a semi-cured or cured state which is thicker than the thickness of the copper foil. An insulating resin layer containing no inorganic fiber or the like, having an insulating core material made of a curable insulating resin, and a filler such as an inorganic fiber or an inorganic powder, and an insulating resin layer and an insulating core material on the copper foil. Are sequentially laminated, a desired circuit is formed on the copper foil by etching or the like, and then the circuit is heated and pressed at a curing temperature higher than the softening temperature of the insulating resin layer by a heating and pressing press or the like to form the circuit on the insulating resin layer. It is embedded so that the surface of the circuit and the insulating resin layer is smooth, so not only in general multilayer molding, but also in circuit buildup and continuous lamination, circuit misalignment etc. High quality that does not occur, and Board processing multilayer printed wiring board there is an effect that is e inexpensively.

【0054】請求項2に記載の発明は、銅箔に、絶縁樹
脂層が予めコーティング接着されているので、工程が簡
単で、かつ薄い銅箔の取扱が容易であるという効果があ
る。
According to the second aspect of the present invention, since the insulating resin layer is coated and adhered to the copper foil in advance, the process is simple and the thin copper foil can be easily handled.

【0055】請求項3に記載の発明は、絶縁樹脂層が、
絶縁樹脂からなるフィルムであるので、一般的な多層成
形にのみならず、ビルドアップ工法、連続ラミネート工
法による多層化にも安価に、かつ容易に製造することが
できるという効果がある。
According to a third aspect of the present invention, the insulating resin layer comprises:
Since the film is made of an insulating resin, it can be easily and inexpensively manufactured not only for general multilayer molding but also for multilayering by a build-up method or a continuous laminating method.

【0056】請求項4に記載の発明は、絶縁コア材が、
片面または両面銅張積層板から銅箔のみをエッチングし
て溶解除去したものまたは物理的に引き剥がしたもので
あるので、プリント配線板の平滑プリント配線板の強度
が大であるという効果がある。
According to a fourth aspect of the present invention, the insulating core material comprises:
Since only the copper foil is dissolved and removed or physically peeled off from the single-sided or double-sided copper-clad laminate, there is an effect that the strength of the smooth printed wiring board of the printed wiring board is large.

【0057】請求項5に記載の発明は、絶縁コア材が、
銅箔を有しないアンクラッド板であるので、平滑プリン
ト配線板が安価にえられるという効果がある。
According to a fifth aspect of the present invention, the insulating core material comprises:
Since it is an unclad plate having no copper foil, there is an effect that a smooth printed wiring board can be obtained at low cost.

【0058】請求項6に記載の発明は、絶縁コア材が、
プリント配線板としての絶縁性能を保持する厚さを有す
る絶縁樹脂層であるので、電気的特性が良好であるとい
う効果がある。
According to a sixth aspect of the present invention, the insulating core material comprises:
Since it is an insulating resin layer having a thickness that maintains the insulating performance as a printed wiring board, there is an effect that electric characteristics are good.

【0059】請求項7に記載の発明は、絶縁コア材が、
プリプレグ材であるので、多層化を安価に、かつ容易に
えることができるという効果がある。
According to a seventh aspect of the present invention, the insulating core material comprises:
Since it is a prepreg material, there is an effect that multilayering can be easily and inexpensively obtained.

【0060】請求項8に記載の発明は、平滑プリント配
線板を複数積層して多層プリント配線板を形成したの
で、一般的な多層成形にのみならず、ビルドアップ工
法、連続ラミネート工法による多層化において、回路ず
れ等が生じない高品位、かつ薄板化された多層平滑プリ
ント配線板が安価にえられるという効果がある。
According to the eighth aspect of the present invention, since a multilayer printed wiring board is formed by laminating a plurality of smooth printed wiring boards, not only general multilayer molding but also multilayering by a build-up method or a continuous laminating method. In this case, there is an effect that a high-quality thinned multilayer smooth printed wiring board free from circuit displacement or the like can be obtained at low cost.

【0061】請求項9に記載の発明は、絶縁コア材が、
片面または、両面銅張り積層板に回路形成されたもの、
または、樹脂付き銅箔の樹脂面を対向接着させたものに
回路形成されたもの、または、転写法または樹脂をコー
テイングした後研磨して形成した平滑プリント配線板か
らなるので、多層平滑プリント配線板が容易にえられる
という効果がある。
According to a ninth aspect of the present invention, the insulating core material comprises:
Circuits formed on single-sided or double-sided copper-clad laminates,
Or, a circuit is formed on a resin foil of copper foil with resin facing and bonded, or a smooth printed wiring board formed by transfer method or resin coating and polished, so that multilayer smooth printed wiring board Is easily obtained.

【0062】平滑プリント配線板の製造方法であって、
請求項10に記載の発明は、銅箔と、その銅箔の厚さより
も厚い半硬化ないしは硬化状態の無機繊維質等を含有し
ない絶縁樹脂層と、硬化性絶縁樹脂と無機繊維質あるい
は無機粉末等の充填材とからなる絶縁コア材とを有し、
前記銅箔に絶縁樹脂層と絶縁コア材とを順次積層して、
前記銅箔に所望の回路をエッチング等によって形成した
後、加熱加圧プレス機等によって絶縁樹脂層の軟化温度
以上の温度の硬化温度で加熱加圧して回路を絶縁樹脂層
の中に埋め込み、回路と絶縁樹脂層との表面が平滑とな
るように形成するので、一般的な多層成形のみならず、
ビルドアップ工法、連続ラミネート工法による多層化に
おいても、回路ずれ等が生じない高品位、かつ薄板化さ
れた多層板を容易に、かつ安価に製造することができる
という効果がある。
A method for manufacturing a smooth printed wiring board, comprising:
The invention according to claim 10 is a copper foil, a semi-cured or cured insulating resin layer containing no inorganic fiber or the like thicker than the thickness of the copper foil, a curable insulating resin and an inorganic fiber or inorganic powder. And an insulating core material comprising a filler such as
An insulating resin layer and an insulating core material are sequentially laminated on the copper foil,
After a desired circuit is formed on the copper foil by etching or the like, the circuit is embedded in the insulating resin layer by heating and pressing at a curing temperature equal to or higher than the softening temperature of the insulating resin layer by a heating / pressing press or the like. And the surface of the insulating resin layer are formed so as to be smooth, so that not only general multilayer molding,
Even in the case of multi-layering by the build-up method or the continuous laminating method, there is an effect that a high-quality, thin-layered multi-layer board free from circuit displacement or the like can be easily and inexpensively manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の第1実施形態の縦断面図である。FIG. 1 is a longitudinal sectional view of a first embodiment of the present invention.

【図2】同上の第1実施形態の加熱加圧の状態を示す縦
断面図である。
FIG. 2 is a longitudinal sectional view showing a state of heating and pressing according to the first embodiment.

【図3】同上の第8実施形態のプリント配線板を重ねて
形成した状態を示す縦断面図である。
FIG. 3 is a longitudinal sectional view showing a state in which the printed wiring boards according to the eighth embodiment are formed in an overlapping manner.

【図4】同上の第8実施形態の絶縁コアー材を除去して
プリント配線板を重ねて形成した状態を示す縦断面図で
ある。
FIG. 4 is a longitudinal sectional view showing a state in which an insulating core material according to the eighth embodiment is removed and printed wiring boards are formed in an overlapping manner.

【図5】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 5 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図6】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 6 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図7】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 7 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図8】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 8 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図9】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 9 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図10】従来の平滑プリント配線板の製造工程を示す
説明図である。
FIG. 10 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図11】従来の平滑プリント配線板の製造工程を示す
説明図である。
FIG. 11 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【符号の説明】[Explanation of symbols]

1 平滑プリント配線板 4 銅皮膜 6 回路 10 絶縁コア材 11 絶縁樹脂層 Reference Signs List 1 smooth printed wiring board 4 copper film 6 circuit 10 insulating core material 11 insulating resin layer

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成9年5月28日[Submission date] May 28, 1997

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】特許請求の範囲[Correction target item name] Claims

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【特許請求の範囲】[Claims]

【手続補正2】[Procedure amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0019[Correction target item name] 0019

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0019】[0019]

【発明の実施の形態】図面に示すこの発明の実施形態に
おいて、前記従来と同様の部分については同一の符号を
引用して説明を省略し、主として異なる部分について説
明する。この発明の第1実施形態は、図1に示すようで
あって、銅箔4と、その銅箔4の厚さよりも厚い半硬化
ないしは硬化状態の無機繊維質等を含有しない絶縁樹脂
層11と、硬化性絶縁樹脂、及び無機繊維質または無機粉
末等の充填材からなる絶縁コア材10とを有し、銅箔4に
所望の回路6をエッチング等によって形成した後、銅箔
4に絶縁樹脂層11と絶縁コア材10とを順次積層して、加
熱加圧プレス機等によって絶縁樹脂層11の軟化温度以上
の温度の硬化温度で加熱加圧して回路6を絶縁樹脂層11
の中に埋め込み、回路6と絶縁樹脂層11との表面が平滑
となるようにして平滑プリント配線板1を形成したもの
である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the embodiment of the present invention shown in the drawings, the same parts as those of the prior art are referred to by the same reference numerals, and description thereof will be omitted. The first embodiment of the present invention is as shown in FIG. 1, in which a copper foil 4 and an insulating resin layer 11 containing no semi-cured or cured inorganic fiber which is thicker than the thickness of the copper foil 4 are formed. , A curable insulating resin, and an insulating core material 10 made of a filler such as an inorganic fiber or an inorganic powder. After a desired circuit 6 is formed on the copper foil 4 by etching or the like, the insulating resin is The layer 11 and the insulating core material 10 are sequentially laminated, and the circuit 6 is heated and pressed at a hardening temperature equal to or higher than the softening temperature of the insulating resin layer 11 by a heating / pressing machine or the like to form the circuit 6 on the insulating resin layer 11.
The smooth printed wiring board 1 is formed in such a manner that the surfaces of the circuit 6 and the insulating resin layer 11 are smoothed.

【手続補正3】[Procedure amendment 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0020[Correction target item name] 0020

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0020】また、回路6と絶縁樹脂層11とは、絶縁コ
ア材10の両面にそれぞれ設けるような構成としてもよ
い。
The circuit 6 and the insulating resin layer 11 may be provided on both sides of the insulating core material 10, respectively.

【手続補正4】[Procedure amendment 4]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0021[Correction target item name] 0021

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0021】半硬化〜硬化状態の硬化性絶縁樹脂11は、
所定の条件下でパターンを埋め込む際に、パターン位置
精度やパターン変形に影響を与えない条件で行われるこ
とが好ましく、各々の樹脂系によりその硬化度合を適宜
調整することが重要である。
The curable insulating resin 11 in the semi-cured to cured state is
When embedding a pattern under predetermined conditions, the embedding is preferably performed under conditions that do not affect pattern position accuracy or pattern deformation, and it is important to appropriately adjust the degree of curing according to each resin system.

【手続補正5】[Procedure amendment 5]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0029[Correction target item name] 0029

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0029】加熱加圧の方法は、(1)銅箔4に適度に
調整された半硬化又は硬化状態の絶縁樹脂層11と絶縁コ
ア材10とを順次積層した後、銅箔4にエッチング等で回
路を形成したものを常温から170℃まで除々に加熱しな
がら、5kg/cm2以上で60分加圧する方法、または、
(2)銅箔4上に絶縁樹脂層11と絶縁コア材10とを順次
積層したものを硬化温度170℃にまで加熱してから、5k
g/cm2以上で60分加圧する方法等がある。
The method of heating and pressurizing is as follows: (1) An insulating resin layer 11 and an insulating core material 10 which are appropriately adjusted in a semi-cured or cured state are sequentially laminated on the copper foil 4, and then the copper foil 4 is etched or the like. A method in which a circuit is formed at a pressure of 5 kg / cm 2 or more for 60 minutes while gradually heating from room temperature to 170 ° C., or
(2) After the insulating resin layer 11 and the insulating core material 10 are sequentially laminated on the copper foil 4 and heated to a curing temperature of 170 ° C.,
For example, there is a method of applying a pressure of g / cm 2 or more for 60 minutes.

【手続補正6】[Procedure amendment 6]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0030[Correction target item name] 0030

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0030】加熱加圧に際しては、図2に示すように、
銅箔4と絶縁樹脂層11と絶縁コア材10とを順次積層し
て、銅箔4に所望の回路6をエッチング等によって形成
した後のものの両面にそれぞれ順次、離型フィルム12、
ステンレス板13を載置し、加熱加圧プレス機の熱板15
と、前記ステンレス板13との間にクッション材14を挟ん
で加熱加圧する。
At the time of heating and pressurizing, as shown in FIG.
The copper foil 4, the insulating resin layer 11, and the insulating core material 10 are sequentially laminated, and a desired film 6 is formed on the copper foil 4 by etching or the like.
The stainless steel plate 13 is placed, and the hot plate 15
Then, heating and pressurization are performed with the cushion material 14 interposed between the stainless steel plate 13.

【手続補正7】[Procedure amendment 7]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0050[Correction target item name] 0050

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0050】第8実施形態は、図3,4に示すように、
第1実施形態の平滑プリント配線板を複数枚積層して形
成された多層プリント配線板であって、図3には4層
板、図4には6層板が示されている。なお、多層化する
場合、回路が向き合っている状態においては、絶縁樹脂
層を絶縁コア材の代わりをさせて、図4に示すように絶
縁コア材を省略して、加熱加圧して多層平滑プリント配
線板1′を形成してもよい。また絶縁樹脂層11の外側に
絶縁樹脂層11と同質又は無機質充填材を含有する絶縁樹
脂層11′を形成してもよい。
In the eighth embodiment, as shown in FIGS.
FIG. 3 shows a four-layer board and FIG. 4 shows a six-layer board, which is a multilayer printed wiring board formed by laminating a plurality of smooth printed wiring boards of the first embodiment. In the case of multilayering, when the circuits are facing each other, the insulating resin layer is substituted for the insulating core material, and the insulating core material is omitted as shown in FIG. The wiring board 1 'may be formed. Further, an insulating resin layer 11 'containing the same or inorganic filler as the insulating resin layer 11 may be formed outside the insulating resin layer 11.

【手続補正8】[Procedure amendment 8]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図面の簡単な説明[Correction target item name] Brief description of drawings

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の第1実施形態の縦断面図である。FIG. 1 is a longitudinal sectional view of a first embodiment of the present invention.

【図2】同上の第1実施形態の加熱加圧の状態を示す縦
断面図である。
FIG. 2 is a longitudinal sectional view showing a state of heating and pressing according to the first embodiment.

【図3】同上の第8実施形態のプリント配線板を重ねて
形成した状態を示す縦断面図である。
FIG. 3 is a longitudinal sectional view showing a state in which the printed wiring boards according to the eighth embodiment are formed in an overlapping manner.

【図4】同上の第8実施形態の絶縁コアー材を除去して
プリント配線板を重ねて形成した状態を示す縦断面図で
ある。
FIG. 4 is a longitudinal sectional view showing a state in which an insulating core material according to the eighth embodiment is removed and printed wiring boards are formed in an overlapping manner.

【図5】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 5 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図6】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 6 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図7】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 7 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図8】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 8 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図9】従来の平滑プリント配線板の製造工程を示す説
明図である。
FIG. 9 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【図10】従来の平滑プリント配線板の製造工程を示す
説明図である。
FIG. 10 is an explanatory view showing a manufacturing process of a conventional smooth printed wiring board.

【手続補正9】[Procedure amendment 9]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図1[Correction target item name] Fig. 1

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図1】 FIG.

【手続補正10】[Procedure amendment 10]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図2[Correction target item name] Figure 2

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図2】 FIG. 2

【手続補正11】[Procedure amendment 11]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図3[Correction target item name] Figure 3

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図3】 FIG. 3

【手続補正12】[Procedure amendment 12]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図4[Correction target item name] Fig. 4

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図4】 FIG. 4

【手続補正13】[Procedure amendment 13]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図10[Correction target item name] FIG.

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図10】 FIG. 10

【手続補正14】[Procedure amendment 14]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図11[Correction target item name] FIG.

【補正方法】削除[Correction method] Deleted

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 銅箔と、その銅箔の厚さよりも厚い半硬
化ないしは硬化状態の無機繊維質等を含有しない絶縁樹
脂層と、硬化性絶縁樹脂、及び無機繊維質または無機粉
末等の充填材からなる絶縁コア材とを有し、前記銅箔に
絶縁樹脂層と絶縁コア材とを順次積層して、前記銅箔に
所望の回路をエッチング等によって形成した後、加熱加
圧プレス機等によって絶縁樹脂層の軟化温度以上の温度
の硬化温度で加熱加圧して前記回路を絶縁樹脂層の中に
埋め込み、回路と絶縁樹脂層との表面が平滑となるよう
に形成したことを特徴とするプリント配線板。
1. A copper foil, a semi-cured or cured insulating resin layer containing no inorganic fiber or the like thicker than the thickness of the copper foil, a curable insulating resin, and filling with an inorganic fiber or inorganic powder. An insulating core material made of a material, an insulating resin layer and an insulating core material are sequentially laminated on the copper foil, and a desired circuit is formed on the copper foil by etching or the like, and then, a heating press machine or the like is used. The circuit is embedded in the insulating resin layer by heating and pressurizing at a curing temperature equal to or higher than the softening temperature of the insulating resin layer, so that the surfaces of the circuit and the insulating resin layer are formed to be smooth. Printed wiring board.
【請求項2】 銅箔に、絶縁樹脂層が予めコーティング
接着されていることを特徴とする請求項1に記載のプリ
ント配線板。
2. The printed wiring board according to claim 1, wherein an insulating resin layer is previously coated and adhered to the copper foil.
【請求項3】 絶縁樹脂層が、絶縁樹脂からなるフィル
ムであることを特徴とする請求項1に記載のプリント配
線板。
3. The printed wiring board according to claim 1, wherein the insulating resin layer is a film made of an insulating resin.
【請求項4】 絶縁コア材が、片面または両面銅張積層
板から銅箔のみをエッチングして溶解除去したものまた
は物理的に引き剥がしたものであることを特徴とする請
求項1に記載のプリント配線板。
4. The method according to claim 1, wherein the insulating core material is obtained by etching only the copper foil from the single-sided or double-sided copper-clad laminate, dissolving and removing the copper foil, or physically peeling the copper foil. Printed wiring board.
【請求項5】 絶縁コア材が、銅箔を有しないアンクラ
ッド板であることを特徴とする請求項1に記載のプリン
ト配線板。
5. The printed wiring board according to claim 1, wherein the insulating core material is an unclad board having no copper foil.
【請求項6】 絶縁コア材が、プリント配線板としての
絶縁性能を保持する厚さを有する絶縁樹脂層であること
を特徴とする請求項1に記載のプリント配線板。
6. The printed wiring board according to claim 1, wherein the insulating core material is an insulating resin layer having a thickness that maintains insulation performance as the printed wiring board.
【請求項7】 絶縁コア材が、プリプレグ材であること
を特徴とする請求項1に記載のプリント配線板。
7. The printed wiring board according to claim 1, wherein the insulating core material is a prepreg material.
【請求項8】 平滑基板を複数積層して多層プリント配
線板を形成したことを特徴とする請求項1に記載のプリ
ント配線板。
8. The printed wiring board according to claim 1, wherein a plurality of smooth substrates are laminated to form a multilayer printed wiring board.
【請求項9】 絶縁コア材が、片面または、両面銅貼り
積層板に回路形成されたもの、または、樹脂付き銅箔の
樹脂面を対向接着させたものに回路形成されたもの、ま
たは、転写法または樹脂をコーテイングした後研磨して
形成した平滑基板からなることを特徴とする請求項1ま
たは8に記載のプリント配線板。
9. An insulating core material having a circuit formed on a single-sided or double-sided copper-clad laminate, or having a circuit formed on a resin foil of a resin-coated copper foil opposed to and adhered thereto, or transferred. The printed wiring board according to claim 1, wherein the printed wiring board is made of a smooth substrate formed by polishing a method or a resin and then polishing the resin.
【請求項10】 銅箔と、その銅箔の厚さよりも厚い半
硬化ないしは硬化状態の無機繊維質等を含有しない絶縁
樹脂層と、硬化性絶縁樹脂と無機繊維質あるいは無機粉
末等の充填材とからなる絶縁コア材とを有し、銅箔上に
絶縁樹脂層と絶縁コア材とを順次積層して、前記銅箔に
所望の回路をエッチング等によって形成した後、加熱加
圧プレス機等によって絶縁樹脂層の軟化温度以上の温度
の硬化温度で加熱加圧して前記回路を絶縁樹脂層の中に
埋め込み、回路と絶縁樹脂層との表面が平滑となるよう
に形成することを特徴とするプリント配線板の製造方
法。
10. A copper foil, an insulating resin layer containing no semi-cured or cured inorganic fiber thicker than the thickness of the copper foil, and a curable insulating resin and a filler such as inorganic fiber or inorganic powder. And an insulating resin layer and an insulating core material are sequentially laminated on a copper foil, and a desired circuit is formed on the copper foil by etching or the like, and then a heating and pressing press machine or the like is used. The circuit is embedded in the insulating resin layer by heating and pressurizing at a curing temperature higher than the softening temperature of the insulating resin layer, so that the surfaces of the circuit and the insulating resin layer are formed to be smooth. Manufacturing method of printed wiring board.
JP33663296A 1996-12-17 1996-12-17 Printed wiring board and method for manufacturing the same Pending JPH10178241A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33663296A JPH10178241A (en) 1996-12-17 1996-12-17 Printed wiring board and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33663296A JPH10178241A (en) 1996-12-17 1996-12-17 Printed wiring board and method for manufacturing the same

Publications (1)

Publication Number Publication Date
JPH10178241A true JPH10178241A (en) 1998-06-30

Family

ID=18301175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33663296A Pending JPH10178241A (en) 1996-12-17 1996-12-17 Printed wiring board and method for manufacturing the same

Country Status (1)

Country Link
JP (1) JPH10178241A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261447A (en) * 2001-03-02 2002-09-13 Hitachi Chem Co Ltd Wiring board, its manufacturing method, substrate for mounting semiconductor using it, its manufacturing method, semiconductor package, and its manufacturing method
JP2002353634A (en) * 2001-05-30 2002-12-06 Kyocera Corp Multi-layer wiring board
JP2003101241A (en) * 2001-09-25 2003-04-04 Kyocera Corp Insulating film and multilayer wiring board using the same
JP2005353660A (en) * 2004-06-08 2005-12-22 Shinko Seisakusho:Kk Multilayer printed circuit board and its manufacturing method
JP2011040530A (en) * 2009-08-10 2011-02-24 Yonezawa Dia Electronics Kk Printed wiring board and method of manufacturing the same
CN113365430A (en) * 2021-06-15 2021-09-07 西安微电子技术研究所 Processing method of circuit flush printed board

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261447A (en) * 2001-03-02 2002-09-13 Hitachi Chem Co Ltd Wiring board, its manufacturing method, substrate for mounting semiconductor using it, its manufacturing method, semiconductor package, and its manufacturing method
JP2002353634A (en) * 2001-05-30 2002-12-06 Kyocera Corp Multi-layer wiring board
JP4508472B2 (en) * 2001-05-30 2010-07-21 京セラ株式会社 Multilayer wiring board
JP2003101241A (en) * 2001-09-25 2003-04-04 Kyocera Corp Insulating film and multilayer wiring board using the same
JP4508498B2 (en) * 2001-09-25 2010-07-21 京セラ株式会社 Multilayer wiring board
JP2005353660A (en) * 2004-06-08 2005-12-22 Shinko Seisakusho:Kk Multilayer printed circuit board and its manufacturing method
JP2011040530A (en) * 2009-08-10 2011-02-24 Yonezawa Dia Electronics Kk Printed wiring board and method of manufacturing the same
CN113365430A (en) * 2021-06-15 2021-09-07 西安微电子技术研究所 Processing method of circuit flush printed board

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