JPH10313177A - Manufacture of multilayered printed wiring board - Google Patents

Manufacture of multilayered printed wiring board

Info

Publication number
JPH10313177A
JPH10313177A JP12396697A JP12396697A JPH10313177A JP H10313177 A JPH10313177 A JP H10313177A JP 12396697 A JP12396697 A JP 12396697A JP 12396697 A JP12396697 A JP 12396697A JP H10313177 A JPH10313177 A JP H10313177A
Authority
JP
Japan
Prior art keywords
hole
copper
multilayer
metal foil
laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12396697A
Other languages
Japanese (ja)
Other versions
JP3071722B2 (en
Inventor
Seiki Hirota
清貴 広田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Toppan Circuit Solutions Toyama Inc
Original Assignee
NEC Toppan Circuit Solutions Toyama Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Toppan Circuit Solutions Toyama Inc filed Critical NEC Toppan Circuit Solutions Toyama Inc
Priority to JP12396697A priority Critical patent/JP3071722B2/en
Publication of JPH10313177A publication Critical patent/JPH10313177A/en
Application granted granted Critical
Publication of JP3071722B2 publication Critical patent/JP3071722B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a multilayered printed wiring board, possessed of a part mounting pad which is located on a blind through-hole and high in electric connection reliability after a part is mounted on it. SOLUTION: Outer boards 8 each provided with through-holes (via holes), metal foils 11 each with a roughened surface, release films 12, and plates 13 as outermost layers are provided to each surface of an inner circuit board through the intermediary of a prepreg for the formation of a press target body, and the metal foil 11 and the release film 12 are made to encroach into the through-holes (via holes) provided to the outer boards 8 in an initial laminating press stage. By this setup, in this press laminating process, prepreg molten resin injected into the through-holes (via holes) is set back from the outer surface, and the roughened surface of the metal foil 11 is transferred onto the surface of the prepreg molten resin.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、多層印刷配線板の
製造方法に関し、特にバイアホール(以下、BVHと称
す)上に部品実装用のパッドを有する多層印刷配線板の
製造に関するものである。
The present invention relates to a method for manufacturing a multilayer printed wiring board, and more particularly to a method for manufacturing a multilayer printed wiring board having a component mounting pad on a via hole (hereinafter, referred to as BVH).

【0002】[0002]

【従来の技術】BVH上に部品実装用のパッドを有する
多層印刷配線板はチップ電子部品等が高密度実装できる
ために、その使用が増加している。
2. Description of the Related Art The use of multilayer printed wiring boards having pads for component mounting on a BVH is increasing because chip electronic components can be mounted at a high density.

【0003】従来、BVH上に部品実装用のパッドを有
する多層印刷配線板の製造方法は、まず、銅張積層基板
の所定の位置にドリルで貫通孔を形成し、公知の化学銅
めっき及び電気銅めっきによって銅張積層基板の全面に
銅めっきを施した後、エッチングを行い、所定のパター
ンを該基板の片側に形成し、スルーホールを有する印刷
配線板(外層用基板)を得る。次にこの外層用基板を予
め所望のパターンを形成済みの内層基板の両側にプリプ
レグを介して配置し、さらに該外層板用基板の外側に離
型フィルム、積層プレートを順次配して被圧体を構成す
る。この被圧体を加熱加圧し積層一体化して多層印刷配
線板を得る。この被圧体を加熱加圧成形する時、外層用
基板のスルーホール内部は溶融したプリブレグ樹脂で完
全に充填され、外層用基板のスルーホールはBVHとな
る。
Conventionally, a method of manufacturing a multilayer printed wiring board having a pad for component mounting on a BVH is to first form a through hole at a predetermined position of a copper-clad laminate by a drill, and then to use a known chemical copper plating and electric After copper plating is applied to the entire surface of the copper-clad laminate by copper plating, etching is performed to form a predetermined pattern on one side of the substrate, and a printed wiring board (substrate for an outer layer) having through holes is obtained. Next, the outer layer substrate is arranged via prepregs on both sides of the inner layer substrate on which a desired pattern has been formed in advance, and a release film and a laminated plate are sequentially arranged outside the outer layer substrate to form a pressure-receiving body. Is configured. The pressure-receiving body is heated and pressurized and laminated and integrated to obtain a multilayer printed wiring board. When the pressure-receiving body is heated and pressed, the inside of the through hole of the outer layer substrate is completely filled with the molten prepreg resin, and the through hole of the outer layer substrate becomes BVH.

【0004】次に、外層用基板のBVHからプリプレグ
の溶融で吹き出した余分な樹脂をべルトサンダー研磨等
により平面研磨し、除去する。この後、外層用基板のス
ルーホール(BVH)に充填された樹脂(以下BVH樹
脂と称す)様に得られた多層積層体に、ドリルによって
貫通孔を形成した後、貫通孔を含む多層積層体全面に銅
めっきを行う。次いでエッチング処理により、BVH上
に部品実装用パッドを有する多層印刷配線板を得てい
た。
[0004] Next, excess resin blown out of the BVH of the outer layer substrate by melting of the prepreg is planar-polished by belt sander polishing or the like and removed. Thereafter, a through-hole is formed by a drill in the multilayer laminate obtained in a resin (hereinafter referred to as BVH resin) filled in the through-hole (BVH) of the outer layer substrate, and then the multilayer laminate including the through-hole is formed. Copper plating is performed on the entire surface. Then, a multilayer printed wiring board having component mounting pads on the BVH was obtained by etching.

【0005】[0005]

【発明が解決しようとする課題】しかし、この従来技術
では、BVH上に形成したパッドの密着が悪く、電子部
品を該多層印刷配線板に実装する際のはんだ付けの熱ス
トレスでパッドが膨れる現象が多々発生していた。この
膨れはBVHの径が大きい程、発生しやすい。
However, in this prior art, the pad formed on the BVH has poor adhesion, and the pad expands due to the thermal stress of soldering when mounting an electronic component on the multilayer printed wiring board. Had occurred frequently. This swelling is more likely to occur as the diameter of the BVH increases.

【0006】BVH樹脂の表面を粗化し、樹脂と銅めっ
きの密着性を向上させる方法としては、液体ホーニング
処理や過マンガン酸塩処理する方法(特開平5−829
77号公報)や片面が粗化された金属箔の粗化面をBV
H樹脂表面に押圧し、樹脂表面に粗化面を転写する技術
(特開平7−226575号公報)が開示されている
が、前者の方法では良好な粗化面が得られにくく、また
後者方法ではめっき前処理の機械的研磨で粗化面が消去
される等で、樹脂はんだ付けにおけるBVH上のパッド
膨れを防止することは難しかった。
As a method of roughening the surface of the BVH resin and improving the adhesion between the resin and the copper plating, a method of liquid honing or permanganate treatment (Japanese Patent Laid-Open No. 5-829)
No. 77 gazette) and the roughened surface of a metal foil having one roughened surface
A technique of transferring a roughened surface to a resin surface by pressing the resin surface (Japanese Patent Laid-Open No. Hei 7-226575) is disclosed. However, the former method is difficult to obtain a good roughened surface, and the latter method is difficult. Thus, it was difficult to prevent pad swelling on the BVH during resin soldering because the roughened surface was erased by mechanical polishing in the plating pretreatment.

【0007】前記BVH上のパッドのはんだ付けにおけ
る膨れを防止する方法として、特開平5−327216
号公報に開示されている技術を使用して、BVH樹脂表
面の形状を凹状にし、且つ前記金属箔の粗化面を凹状B
VH樹脂表面に転写し、めっき前の機械的研磨によるB
VH樹脂表面の粗化面の消去を防止すると同時に、BV
Hコーナーにおけるはだ付け熱ストレスを拡散させ、B
VH上のパッドのはんだ付けの膨れを防止しようとする
方法が考えられている。しかし、この方法では、凹状B
VH樹脂表面に銅箔の粗化面を効果的に転写することが
難しく、はんだ付けにおけるBVH上のパッドの膨れを
完全に防止するに至っていない。
As a method for preventing swelling of the pad on the BVH during soldering, Japanese Patent Application Laid-Open No. 5-327216 discloses a method.
Using the technique disclosed in Japanese Patent Application Laid-Open Publication No. H10-260, the surface of the BVH resin is made concave and the roughened surface of the metal foil is made concave B
Transfer to VH resin surface, B by mechanical polishing before plating
At the same time as preventing the erasure of the roughened surface of the VH resin surface,
Diffusion of heat stress at H corner, B
Methods have been considered to prevent solder bulging of pads on the VH. However, in this method, the concave B
It is difficult to effectively transfer the roughened surface of the copper foil to the surface of the VH resin, and the swelling of pads on the BVH during soldering has not been completely prevented.

【0008】本発明の目的は、この様な従来方法の問題
点を解決した、多層印刷配線板の製造方法を提供するこ
とにある。
An object of the present invention is to provide a method of manufacturing a multilayer printed wiring board which solves the problems of the conventional method.

【0009】[0009]

【課題を解決するための手段】本発明の多層印刷配線板
の製造方法は下記工程(A)〜(D)から成ることを特
徴とする。 (A)両面銅張積層基板に貫通孔を形成し、前記貫通孔
にめっきを施しスルーホール形成する工程。 (B)前記めっきした両面銅張積層基板の片面に導電回
路を形成する工程。 (C)前記銅張積層基板を両面に導電回路を有する内層
基板の両側にプリプレグを介して、前記銅張積層基板の
導電回路面を対向させて配置し被圧体を形成し、さらに
前記被圧体の両側に両面に粗化面を具備する金属箔と離
型フィルムを順次配置し、加熱加圧して前記被圧体の前
記銅張積層基板の外側から前記銅張積層基板のスルーホ
ールに前記金属箔及び離型フィルムを食い込ませるとと
もに、被圧体を積層一体化し、多層積層体を形成する工
程。 (D)前記多層積層体から前記金属箔および離型フィル
ムを剥離し、前記多層積層体に貫通孔を形成後、前記貫
通孔を含む前記多層積層体の全面にめっきを施した後エ
ッチングし、所望の外層回路を形成する工程。
The method for manufacturing a multilayer printed wiring board according to the present invention is characterized by comprising the following steps (A) to (D). (A) A step of forming a through-hole in a double-sided copper-clad laminate, plating the through-hole, and forming a through-hole. (B) forming a conductive circuit on one side of the plated double-sided copper-clad laminate; (C) The copper-clad multilayer substrate is disposed on both sides of an inner layer substrate having conductive circuits on both sides, with the conductive circuit surfaces of the copper-clad multilayer substrate facing each other via prepregs to form a pressure-receiving body. A metal foil having a roughened surface on both sides and a release film are sequentially disposed on both sides of the pressure body, and heated and pressed to a through hole of the copper-clad laminated substrate from outside the copper-clad laminated substrate of the pressure-receiving body. A step of forming the multi-layer laminate by making the metal foil and the release film penetrate, and laminating and integrating the pressure-receiving bodies. (D) removing the metal foil and the release film from the multilayer laminate, forming a through hole in the multilayer laminate, plating the entire surface of the multilayer laminate including the through hole, and etching. Step of forming a desired outer layer circuit.

【0010】本発明では、多層印刷配線板の製造におい
て、被圧体の外側に両面に粗化面を有する金属箔と離型
フィルムを配置後、加熱加圧を行うことで、加圧時の離
型フィルムと金属箔の滑りを減少させ、BVH樹脂表面
を凹状に形成できるとともに凹状面に金属箔の粗化面形
状を効果的に転写することができ、BVH上のめっきパ
ッドの密着性を向上できることが判明した。
According to the present invention, in the production of a multilayer printed wiring board, a metal foil having a roughened surface on both sides and a release film are arranged on the outer side of a pressure-receiving body, and then heated and pressed, so that the pressure at the time of pressing is reduced. The slip between the release film and the metal foil is reduced, the surface of the BVH resin can be formed in a concave shape, and the roughened surface shape of the metal foil can be effectively transferred to the concave surface, thereby improving the adhesion of the plating pad on the BVH. It has been found that it can be improved.

【0011】[0011]

【発明の実施の形態】以下、本発明の実施の形態につい
て、6層多層印刷配線板を例に図1〜4を参照して説明
する。図1(a)〜(e)は、多層印刷配線板の外層用
基板の内層面回路を形成する工程を説明する図である。
まず、エポキシ絶縁性樹脂材等をべースとし、この絶縁
性樹脂材の両面に導電体層として12〜70μm厚さの
銅箔3を接着した銅張積層基板1を準備し、銅張積層基
板1の所定位置に貫通孔2をドリルにより設ける(図1
(a))。なお、銅張積層基板1は板厚としては0.1
mm〜1.6mのものが使用され、また、ドリルは直径
0.15〜0.8mmのものを使用した。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to FIGS. 1 (a) to 1 (e) are diagrams illustrating a process of forming an inner layer surface circuit of an outer layer substrate of a multilayer printed wiring board.
First, a copper-clad laminated substrate 1 is prepared by using an epoxy insulating resin material or the like as a base and bonding a copper foil 3 having a thickness of 12 to 70 μm as a conductor layer to both surfaces of the insulating resin material. A through hole 2 is provided at a predetermined position of the substrate 1 by a drill (FIG. 1).
(A)). The thickness of the copper-clad laminated substrate 1 is 0.1.
A drill having a diameter of 0.15 to 0.8 mm was used, and a drill having a diameter of 0.15 to 0.8 mm was used.

【0012】次に図1(b)に示す様に、貫通孔2を形
成済みの銅張積層板1の全面に公知の化学銅めっき及び
電気銅めっきによって銅めっき膜4を形成し、スルーホ
ール5を形成する。
Next, as shown in FIG. 1B, a copper plating film 4 is formed on the entire surface of the copper-clad laminate 1 in which the through holes 2 have been formed by known chemical copper plating and electrolytic copper plating. 5 is formed.

【0013】次に銅張積層板1の両面にエッチングレジ
ストとしてネガ硬化型の感光性樹脂シートをラミネート
し、公知の露光、現像技術により、銅張積層板1上にエ
ッチングレジスト層6を形成する(図1(c))。次
に、銅張積層板1に塩化第2銅水溶液や塩化第2鉄水溶
液等のエッチング液を使用してエッチングを行い、露出
した導体層(銅)を除去して、銅張積層板1の片面に内
層回路7を形成する(図1(d))。この後、図1
(e)に示す様に、銅張積層板1に水酸化ナトリウム水
溶液等の剥離液をスプレイしてエッチングレジスト層6
を剥離し、片面に内層回路7の形成されたスルーホール
5(積層後BVHとなる)を有する外層用基板8を得
る。
Next, a photosensitive resin sheet of a negative curing type is laminated on both sides of the copper clad laminate 1 as an etching resist, and an etching resist layer 6 is formed on the copper clad laminate 1 by a known exposure and development technique. (FIG. 1 (c)). Next, the copper-clad laminate 1 is etched using an etching solution such as an aqueous solution of cupric chloride or an aqueous solution of ferric chloride to remove the exposed conductor layer (copper). An inner layer circuit 7 is formed on one side (FIG. 1D). After this, FIG.
As shown in (e), a stripping solution such as an aqueous solution of sodium hydroxide is sprayed on the copper-clad laminate 1 to form an etching resist layer 6.
Is peeled off to obtain an outer layer substrate 8 having a through hole 5 (which becomes BVH after lamination) in which an inner layer circuit 7 is formed on one side.

【0014】次に通常の印刷エッチング技術により銅箔
厚35μm、板厚0.8mmの銅張積層基板を使用し、
内層電源・グランド層を有する内層回路板を形成する。
Next, using a copper-clad laminated board having a copper foil thickness of 35 μm and a plate thickness of 0.8 mm by a normal printing etching technique,
An inner circuit board having an inner power / ground layer is formed.

【0015】次に積層工程としては、まず図2に示す被
圧体を構成する。すなわち、上記工程で得られた内層回
路板9の両面に絶縁接着層となるプリプレグ10を配
し、このプリプレグ10を介して外側にスルーホール5
を有する外層用基板8を内層回路7を内層回路板9側に
して配し、更にその外側に両面に粗化面を具備する金属
箔11、離型フィルム12の順序で配し、最外層にプレ
ート13を配して被圧体を構成する。
Next, as a laminating step, first, a pressure-receiving body shown in FIG. 2 is formed. That is, prepregs 10 serving as an insulating adhesive layer are arranged on both surfaces of the inner circuit board 9 obtained in the above step, and the through holes 5 are provided outside through the prepregs 10.
The outer layer substrate 8 having the inner layer circuit 7 on the inner layer circuit board 9 side, the metal foil 11 having a roughened surface on both sides, and the release film 12 on the outer surface are further arranged in this order. The plate 13 is arranged to form a pressure-receiving body.

【0016】この被圧体を加熱・加圧して積層―体化し
て多層積層板とする加熱・加圧の初期段階で、両面に粗
化面を具備する金属箔11及び離型フィルム12を外層
用基板8のスルーホール5に食い込ませ、スルーホール
5を閉塞させる様にする。
In the initial stage of heating and pressing, the metal foil 11 having the roughened surfaces on both sides and the release film 12 are heated and pressed to form a multilayer laminate. The through-hole 5 of the substrate 8 is cut into the through-hole 5 so that the through-hole 5 is closed.

【0017】両面粗化面を具備する金属箔を使用し、加
熱加圧の初期の段階で離型フィルムと金属箔との滑りを
抑制し、金属箔11及び離型フィルム12を効果的にス
ルーホール5に食い込ますことができる。
Using a metal foil having a roughened surface on both sides, the slip between the release film and the metal foil is suppressed in the initial stage of heating and pressing, and the metal foil 11 and the release film 12 are effectively passed through. You can cut into hole 5.

【0018】ここで、図3に示す如く積層プレスに於け
る加熱加圧の初期段階でスルーホール3を閉塞させる
為、離型フィルム12が求められる特性としては次の項
目が挙げられる。すなわち150〜200℃の積層成
形温度でもフィルム自体が伸びる傾向を示し、上記の
積層成形温度への耐熱性、離型性を備えたものでなくて
はならない。また離型フィルム12の構成としては単
層、複層いずれでも構わないが、スルーホール5への押
さえ込む力を強くする為、5O〜150μmの膜厚は必
要である。
Here, as shown in FIG. 3, since the through-hole 3 is closed at the initial stage of heating and pressurizing in the laminating press, the following items are required as characteristics required for the release film 12. That is, the film itself tends to elongate even at a lamination temperature of 150 to 200 ° C., and must have heat resistance and releasability to the lamination temperature described above. The release film 12 may be composed of a single layer or multiple layers, but needs to have a thickness of 50 to 150 μm in order to increase the pressing force into the through hole 5.

【0019】また、本発明に使用する金属箔11は、特
にその種類を限定するものでなく、単一の金属から形成
された箔の他、2種類以上の金属層から成る複合箔でも
良い。例えば、金属箔には、Cu、Alの単金属やCu
とAlを張り合わせた複合金属箔を薬品処理又は電解処
理して粗面化したものや、CuやAlにNiの凸面状め
っきした複合金属箔等が使用できる。金属箔11の厚み
としては、積層プレスの際、BVHへの埋め込み性を考
慮して、12〜35μmのものが良好である。また、金
属箔11の粗化面は、十点平均粗さ(Rz)が5〜15
μm、中心線平均粗さ(Ra)が0.8〜2.0μmの範
囲内にあることが望ましい(Rz、Raは日本工業規格
JlSB0601「表面粗さの定義と表示」に於ける表
面粗さの表示法に於けるパラメータである。)。尚、本
実施例では、通常銅張積層板用として用いている両面粗
面化した銅箔を使用した。
The type of the metal foil 11 used in the present invention is not particularly limited, and may be a foil formed of a single metal or a composite foil composed of two or more metal layers. For example, the metal foil includes a single metal of Cu or Al or Cu
A composite metal foil obtained by laminating a composite metal foil obtained by laminating Al and Al with a chemical treatment or an electrolytic treatment, or a composite metal foil in which Cu or Al is plated with a convex surface of Ni can be used. The thickness of the metal foil 11 is preferably 12 to 35 μm in consideration of the embedding property in the BVH at the time of laminating press. The roughened surface of the metal foil 11 has a ten-point average roughness (Rz) of 5 to 15
μm, and the center line average roughness (Ra) is desirably in the range of 0.8 to 2.0 μm (Rz and Ra are surface roughness in Japanese Industrial Standard JlSB0601 “Definition and Display of Surface Roughness”). This is a parameter in the notation method.) In this example, a copper foil having a roughened surface on both sides, which is usually used for a copper-clad laminate, was used.

【0020】上記の積層工程で、外層用基板8のスルー
ホール5内はプリプレグ11が溶融しBVH内に吹き出
してきたBVH樹脂14で充填され、外層用基板8のス
ルーホール5はBVH15となる。次にプレス成形後、
前記金属箔11の除去し、多層積層体17を得る。尚、
外層用基板8、内層回路板9、プリプレグ10の樹脂と
しては、本実施例ではエポキシ樹脂を用いたが、その他
ポリイミド樹脂、フッ素樹脂、フェノール樹脂、不飽和
ポリエステル樹脂等の単独、またはこれらをべース樹脂
とした変性樹脂やこれら樹脂の混合した樹脂などを用い
ることもできる。ここで本発明に於いて最も注意すべき
点はBVH樹脂表面の凹み深さは外層体から10〜30
μmの範囲となる様に銅箔厚み及び離型フィルム厚みの
組み合わせを調整することである。凹みが10μm未満
の場合、積層プレス成形後の平面研磨作業で粗化面が除
去される可能性が高くなる。また、凹み深さが30μm
を越える場合、BVH外層コーナー部に於けるコーナー
部断線の原因となる。
In the above-described laminating step, the inside of the through hole 5 of the outer layer substrate 8 is filled with the BVH resin 14 that has melted and blown out into the BVH, and the through hole 5 of the outer layer substrate 8 becomes the BVH 15. Next, after press molding,
The multilayer foil 17 is obtained by removing the metal foil 11. still,
As the resin of the outer layer substrate 8, the inner layer circuit board 9, and the prepreg 10, an epoxy resin was used in the present embodiment, but other resins such as a polyimide resin, a fluororesin, a phenolic resin, an unsaturated polyester resin, or the like may be used. A modified resin as a base resin, a resin obtained by mixing these resins, and the like can also be used. Here, the most remarkable point in the present invention is that the depth of the dent on the surface of the BVH resin is 10 to 30 from the outer layer body.
The purpose is to adjust the combination of the thickness of the copper foil and the thickness of the release film so as to be in the range of μm. When the dent is less than 10 μm, there is a high possibility that the roughened surface will be removed by the planar polishing operation after the lamination press molding. In addition, dent depth is 30μm
In the case of exceeding, the corner portion of the outer layer corner portion of the BVH may be disconnected.

【0021】これらを考慮した上で、本実施例では離型
フィルム12として7Oμm厚のセルロースフィルム
を、金属箔11としては18μm厚銅箔を使用し、積層
プレス条件としては170℃で2時間加熱加圧して積層
―体化処理を行った。
Taking these factors into consideration, in the present embodiment, a cellulose film having a thickness of 70 μm is used as the release film 12, a copper foil having a thickness of 18 μm is used as the metal foil 11, and the laminate is pressed at 170 ° C. for 2 hours. The laminate-body treatment was performed by applying pressure.

【0022】ここで、上記のプレス成形後の多層基板の
断面観察を行った結果、BVH樹脂部の凹み深さは外層
面から、15μmであり、銅箔のマット面がDVH樹脂
表面上に一様に転写していることを確認した。
Here, as a result of observing the cross section of the multilayer substrate after the above-mentioned press molding, the depth of the recess of the BVH resin portion was 15 μm from the outer layer surface, and the matte surface of the copper foil was one level above the DVH resin surface. It was confirmed that transcription was performed in the same manner.

【0023】次に、図4(a)に示す様に、多層積層体
17の所望位置にドリルで貫通孔16を穴あけする。次
に図4(b)に示す様に、多層積層体17に化学銅めっ
き及び電気銅めっきを施してスルーホール18を形成し
た後、図4(c)の如く多層積層体17板に対してエッ
チング処理を施すことで、所定の外層回路19と、BV
H上の部品実装用パッド20を形成して、本発明による
多層印刷配線板21が得られる。
Next, as shown in FIG. 4A, a through hole 16 is drilled at a desired position of the multilayer laminate 17 with a drill. Next, as shown in FIG. 4 (b), the multilayer laminate 17 is subjected to chemical copper plating and electrolytic copper plating to form through-holes 18, and then, as shown in FIG. By performing the etching process, the predetermined outer layer circuit 19 and the BV
By forming the component mounting pads 20 on H, a multilayer printed wiring board 21 according to the present invention is obtained.

【0024】尚、以上の様に形成された多層印刷配線板
は吸湿耐熱評価に於いて、BVH樹脂と部品実装パッド
間に膨れは確認されず、高い接続信頼性の結果が得られ
た。
In the multilayer printed wiring board formed as described above, no swelling was observed between the BVH resin and the component mounting pads in the evaluation of moisture absorption and heat resistance, and high connection reliability was obtained.

【0025】[0025]

【発明の効果】以上、説明した様に、本発明によれば、
BVHを有する多層積層板の積層形成に於いて、金属
箔粗化面の転写によるBVH樹脂表面への有用且つ均―
な粗化面の付与があり、BVH樹脂の表面を凹ますこ
とにより、の粗化面が後工程の研磨作業によっても侵
されないことから、BVH表面樹脂と銅めっきの密着性
に優れた多層印刷配線板の製造が可能となる。特に、太
径化BVH、穴数の多いBVH設計品の製造対応が可能
となる。
As described above, according to the present invention,
In the formation of a multilayer laminate having BVH, transfer of the roughened surface of the metal foil to the surface of the BVH resin is effective and uniform.
Multi-layer printing with excellent adhesion between the BVH surface resin and copper plating because the roughened surface is not affected by polishing work in the subsequent process by providing a rough surface and denting the surface of the BVH resin. Production of wiring boards becomes possible. In particular, it is possible to cope with a BVH with a large diameter and a BVH designed product having a large number of holes.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態の多層印刷配線板の外層用
基板の内層面回路を形成する工程を説明する図である。
FIG. 1 is a diagram illustrating a process of forming an inner layer surface circuit of an outer layer substrate of a multilayer printed wiring board according to an embodiment of the present invention.

【図2】本発明の実施の形態の多層積層板の被圧体の構
成を説明する断面図である。
FIG. 2 is a cross-sectional view illustrating a configuration of a pressed body of the multilayer laminate according to the embodiment of the present invention.

【図3】本発明の実施の形態の積層プレス初期段階に於
ける外層用基板のスルホール部分を示す断面図である。
FIG. 3 is a cross-sectional view showing a through hole portion of an outer layer substrate in an initial stage of a lamination press according to an embodiment of the present invention.

【図4】本発明の実施の形態の積層工程以降の製造工程
順を説明する基板要部の断面図である。
FIG. 4 is a cross-sectional view of a main part of the substrate, illustrating a manufacturing process sequence after the laminating process according to the embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 銅張積層基板 2、16 貫通孔 3 銅箔 4 銅めっき膜 5、18 スルーホール 6 エッチングレジスト層 7 内層回路 8 外層用基板 9 内層回路板 10 プリプレグ 11 金属箔 12 離型フィルム 13 プレート 14 BVH樹脂 15 BVH 17 多層積層体 19 外層回路 20 BVH上部品実装用パッド 21 多層印刷配線板 DESCRIPTION OF SYMBOLS 1 Copper-clad laminated board 2, 16 Through hole 3 Copper foil 4 Copper plating film 5, 18 Through hole 6 Etching resist layer 7 Inner layer circuit 8 Outer layer substrate 9 Inner layer circuit board 10 Prepreg 11 Metal foil 12 Release film 13 Plate 14 BVH Resin 15 BVH 17 Multilayer laminate 19 Outer circuit 20 Pad for mounting components on BVH 21 Multilayer printed wiring board

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 下記工程(A)〜(D)から成ることを
特徴とするブラインドバイアホールを有する多層印刷配
線板の製造方法。 (A)両面銅張積層基板に貫通孔を形成し、前記貫通孔
にめっきを施しスルーホール形成する工程。 (B)前記めっきした両面銅張積層基板の片面に導電回
路を形成する工程。 (C)前記銅張積層基板を両面に導電回路を有する内層
基板の両側にプリプレグを介して、前記銅張積層基板の
導電回路面を対向させて配置し被圧体を形成し、さらに
前記被圧体の両側に両面粗化面を有する金属箔と離型フ
ィルムを順次配置し、加熱加圧して前記被圧体の前記銅
張積層基板の外側から前記銅張積層基板のスルーホール
に前記金属箔及び離型フィルムを食い込ませるととも
に、被圧体を積層一体化し、多層積層体を形成する工
程。 (D)前記多層積層体から前記金属箔及び離型フィルム
を剥離し、前記多層積層体に貫通孔を形成後、前記多層
積層体の前記貫通孔を含む前記多層積層体の全面にめっ
きを施した後エッチングし、所望の外層回路を形成する
工程。
1. A method for producing a multilayer printed wiring board having blind via holes, comprising the following steps (A) to (D). (A) A step of forming a through-hole in a double-sided copper-clad laminate, plating the through-hole, and forming a through-hole. (B) forming a conductive circuit on one side of the plated double-sided copper-clad laminate; (C) The copper-clad multilayer substrate is disposed on both sides of an inner layer substrate having conductive circuits on both sides, with the conductive circuit surfaces of the copper-clad multilayer substrate facing each other via prepregs to form a pressure-receiving body. A metal foil having a roughened surface on both sides and a release film are sequentially arranged on both sides of the pressing body, and the metal is pressed into the through-hole of the copper-clad laminated substrate from the outside of the copper-clad laminated substrate of the pressed body by heating and pressing. A step of forming a multi-layer laminate by making the foil and the release film penetrate and laminating and integrating the pressure-receiving bodies. (D) peeling off the metal foil and the release film from the multilayer laminate, forming a through hole in the multilayer laminate, and plating the entire surface of the multilayer laminate including the through hole of the multilayer laminate. And then etching to form a desired outer layer circuit.
【請求項2】前記両面に粗化面を有する金属箔が、C
u、Alまたはそれらの複合箔であることを特徴とする
請求項1の多層印刷配線板の製造方法。
2. The metal foil having a roughened surface on both surfaces is C
2. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein the method is u, Al, or a composite foil thereof.
【請求項3】前記両面に粗化面を有する金属箔が平滑な
CuまたはAlにNiの凸状めっきを施したものである
請求項1の多層印刷配線板の製造方法。
3. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein said metal foil having roughened surfaces on both sides is obtained by subjecting smooth Cu or Al to a convex plating of Ni.
JP12396697A 1997-05-14 1997-05-14 Method for manufacturing multilayer printed wiring board Expired - Lifetime JP3071722B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12396697A JP3071722B2 (en) 1997-05-14 1997-05-14 Method for manufacturing multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12396697A JP3071722B2 (en) 1997-05-14 1997-05-14 Method for manufacturing multilayer printed wiring board

Publications (2)

Publication Number Publication Date
JPH10313177A true JPH10313177A (en) 1998-11-24
JP3071722B2 JP3071722B2 (en) 2000-07-31

Family

ID=14873737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12396697A Expired - Lifetime JP3071722B2 (en) 1997-05-14 1997-05-14 Method for manufacturing multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JP3071722B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006332115A (en) * 2005-05-23 2006-12-07 Ngk Spark Plug Co Ltd Coreless wiring board and its production process
KR100948641B1 (en) * 2007-10-02 2010-03-24 삼성전기주식회사 Method for manufacturing printed circuit board
JP2010087524A (en) * 2009-12-11 2010-04-15 Ngk Spark Plug Co Ltd Method of manufacturing wiring substrate
CN107155266A (en) * 2017-06-20 2017-09-12 广州兴森快捷电路科技有限公司 Z-direction interconnection line plate and preparation method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006332115A (en) * 2005-05-23 2006-12-07 Ngk Spark Plug Co Ltd Coreless wiring board and its production process
JP4538373B2 (en) * 2005-05-23 2010-09-08 日本特殊陶業株式会社 Manufacturing method of coreless wiring substrate and manufacturing method of electronic device having the coreless wiring substrate
KR100948641B1 (en) * 2007-10-02 2010-03-24 삼성전기주식회사 Method for manufacturing printed circuit board
JP2010087524A (en) * 2009-12-11 2010-04-15 Ngk Spark Plug Co Ltd Method of manufacturing wiring substrate
JP4542201B2 (en) * 2009-12-11 2010-09-08 日本特殊陶業株式会社 Manufacturing method of coreless wiring board
CN107155266A (en) * 2017-06-20 2017-09-12 广州兴森快捷电路科技有限公司 Z-direction interconnection line plate and preparation method thereof

Also Published As

Publication number Publication date
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