JPS63137498A - Manufacture of through-hole printed board - Google Patents

Manufacture of through-hole printed board

Info

Publication number
JPS63137498A
JPS63137498A JP28544486A JP28544486A JPS63137498A JP S63137498 A JPS63137498 A JP S63137498A JP 28544486 A JP28544486 A JP 28544486A JP 28544486 A JP28544486 A JP 28544486A JP S63137498 A JPS63137498 A JP S63137498A
Authority
JP
Japan
Prior art keywords
hole
copper
plating
circuit
electrode plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28544486A
Other languages
Japanese (ja)
Inventor
小寺 孝兵
正志 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP28544486A priority Critical patent/JPS63137498A/en
Publication of JPS63137498A publication Critical patent/JPS63137498A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は、その上に半導体素子、抵抗、コンデンサ等の
電子部品を搭載し、種々の電子、電気機器を構成するた
めに用いるプリント配線回路板に関し、特に回路が多層
に構成され、層間の電気的接続の為のスルーホール接続
が必要なプリント配線板に関する。
[Detailed Description of the Invention] [Technical Field] The present invention relates to a printed wiring circuit board on which electronic components such as semiconductor elements, resistors, and capacitors are mounted and used to configure various electronic and electrical devices. In particular, the present invention relates to printed wiring boards in which circuits are configured in multiple layers and require through-hole connections for electrical connections between layers.

〔背景技術〕[Background technology]

近年、電子機器は、小型化、高性能化が一層進むと共に
、低コスト化が追求されている。これに伴いプリント配
線には高密度化、高信頼性化、低コスト化等が強く要求
されてきている。
In recent years, electronic devices have become smaller and more sophisticated, and lower costs are being pursued. Along with this, printed wiring has been strongly required to have higher density, higher reliability, lower cost, and the like.

プリント配線板の高密度化は、配線の微細化及び配線の
多層化によって行われるが、現実には、多層回路間のス
ルーホール接続法には、次の様な欠点がある。
The density of printed wiring boards can be increased by making the wiring finer and multilayering the wiring, but in reality, the through-hole connection method between multilayer circuits has the following drawbacks.

(1)  スルーホール部にメッキを行う為に、無電解
メッキ、電解メッキを併用しなければならず工程数が多
く複雑である。
(1) In order to plate through-hole portions, electroless plating and electrolytic plating must be used in combination, which requires a large number of steps and is complicated.

又、表面回路の形成をスルーホールメッキの後に実施す
る為に、エツチングする銅層の厚さく銅箔厚さ十メッキ
厚さ)が厚く、微細な回路が形成できない。
Furthermore, since the surface circuit is formed after through-hole plating, the thickness of the copper layer to be etched (copper foil thickness (ten plating thickness)) is thick, making it impossible to form fine circuits.

(2)一方、フルアディティブ法と呼ばれる方法は、ス
ルーホール部のメンキと表面回路の形成を厚付は無電解
メッキにより一度に形成できる為、工程が少な(有利で
あるが、無電解メッキにょるメッキ銅の物性が不安定で
あり、スルーホール接続の信頼性が低い。
(2) On the other hand, a method called the full additive method requires fewer steps because it is possible to form through-hole areas and surface circuits at the same time by electroless plating. The physical properties of plated copper are unstable, and the reliability of through-hole connections is low.

〔発明の目的〕[Purpose of the invention]

本発明は、前記の欠点を解消する為になされたものであ
り、スルーホール接続の信頼性が高く、プリント配線板
を簡単な工程で低コストに製造する方法を提供すること
を目的とする。
The present invention has been made in order to eliminate the above-mentioned drawbacks, and an object of the present invention is to provide a method of manufacturing a printed wiring board with high reliability of through-hole connections and a simple process at a low cost.

〔発明の開示〕[Disclosure of the invention]

本発明は、スルーホール穴を形成した回路用基板の片面
に、他面を絶縁物でシールした金属電極板を少なくとも
スルーホール穴が金属電極板にて覆われる様に密着させ
、次いで該金属電極板を陰電極として電解メッキを行い
、スルーホール内にメッキ金属を析出させることを特徴
とするスルーホールプリント板の製法を提供するもので
ある。
In the present invention, a metal electrode plate whose other side is sealed with an insulator is closely attached to one side of a circuit board in which through-hole holes are formed so that at least the through-hole holes are covered with the metal electrode plate, and then the metal electrode plate is The present invention provides a method for manufacturing a through-hole printed board, characterized in that electrolytic plating is performed using the board as a negative electrode, and plating metal is deposited in the through-holes.

以下、本発明を図面に基づき説明する。第1図は、本発
明の詳細な説明するための略図であり、第1図(a)は
、電解メッキ前の状態を表し、(b)は電解メッキ後の
状態を示している。この図で1は回路用基板、2は導体
回路、3は電極基板、4は電極基板に付着させた絶縁シ
ール、5はスルホール、6はメブキ金属柱である。これ
らの図に示されているように、スルホール5内に導体と
しての金属柱6を形成するために、電解メッキを行うの
が、この発明の趣旨であり、そのためにスルホール5の
周囲に形成されているW体回路2に、電極基板3を密着
させてメッキを行い、スルホル5内に金属柱を析出させ
るのである。その場合に使用する電極基板3には、スル
ホール5の側とは反対側の面には絶縁シール4を施して
おき、その面への金属の析出を防止する。
Hereinafter, the present invention will be explained based on the drawings. FIG. 1 is a schematic diagram for explaining the present invention in detail. FIG. 1(a) shows the state before electrolytic plating, and FIG. 1(b) shows the state after electrolytic plating. In this figure, 1 is a circuit board, 2 is a conductor circuit, 3 is an electrode substrate, 4 is an insulating seal attached to the electrode substrate, 5 is a through hole, and 6 is a metal pillar. As shown in these figures, the gist of the present invention is to perform electrolytic plating to form metal pillars 6 as conductors within the through holes 5, and for this purpose, the metal pillars 6 formed around the through holes 5 are The electrode substrate 3 is brought into close contact with the W-body circuit 2, and plating is performed to deposit a metal column within the through hole 5. The electrode substrate 3 used in this case is provided with an insulating seal 4 on the surface opposite to the through-hole 5 side to prevent metal deposition on that surface.

以上のようにすることにより、回路用基板の両面が導体
で連結できるようになる。
By doing the above, both sides of the circuit board can be connected with the conductor.

なお、本発明は以下の態様のようなものを包含する。Note that the present invention includes the following embodiments.

すなわち、スルーホール穴を形成した回路用基板とは、
基板の少なく共片面に、回路形成に必要な金属層若しく
は、既に回路形成がなされているものである。
In other words, a circuit board with through-holes is
A metal layer necessary for forming a circuit or a circuit has already been formed on at least one side of the substrate.

金属電極板とは、単−若しくは複層に形成されたもので
も、また、表面が部分的に導電性を持つ様に形成された
ものでも良い。又、金属電極板はメッキ層との剥離性向
上のために、表面処理がなされていても良い。
The metal electrode plate may be formed in a single layer or in multiple layers, or may be formed so that its surface is partially conductive. Further, the metal electrode plate may be surface-treated to improve releasability from the plating layer.

さらに、金属電極板は、その一部が最終的にプリント配
線板の一部を構成する様に意図されている場合も含む。
Furthermore, the metal electrode plate may include a case in which a part of the metal electrode plate is intended to ultimately constitute a part of a printed wiring board.

スルーホール穴と金属電極板との密着は、機械的に密着
させ或いは、接着剤、粘着剤等を用いて、一時的若しく
は半永久的に接合させる場合を含む。
The through-holes and the metal electrode plate may be brought into close contact with each other mechanically or temporarily or semi-permanently by using an adhesive, an adhesive, or the like.

以下、実施例に基づき詳細に説明する。Hereinafter, a detailed explanation will be given based on examples.

(実施例1) 第2図はこの実施例の工程図を示している。以下、この
図に従って説明する。
(Example 1) FIG. 2 shows a process diagram of this example. The explanation will be given below according to this figure.

厚さ0.4 mの両面銅張り板7の両面に粘着シート1
0を貼り、ガラス基材−エポキシ樹脂積層板(図示され
ていない)を合わせた後、0.5 wΦのスルーホール
9をドリル加工により形成し、つぎに片面を絶縁シール
14し、他面に2〜3μの銅メッキ12を施したステン
レス板13を片面に貼り合わせた。第2図(a)がこの
状態を示している。なお、ここで8は銅箔、11は電極
板を示している。
Adhesive sheet 1 is placed on both sides of a double-sided copper clad plate 7 with a thickness of 0.4 m.
After attaching the glass base material and the epoxy resin laminate (not shown), a through hole 9 of 0.5 wΦ is formed by drilling, and then one side is insulated and sealed 14, and the other side is sealed. A stainless steel plate 13 plated with 2 to 3 μm of copper plating 12 was bonded to one side. FIG. 2(a) shows this state. Note that here, 8 indicates a copper foil, and 11 indicates an electrode plate.

次いでこの積層物をピロリン酸銅メツキ浴中で2、 5
 A/ 100cm”の条件で、前記電極板11を使用
して、スルーホール9の開口面までメッキ銅柱15が達
するまで電解メッキした。第2図(b)がこの状態を示
している。
This laminate was then heated in a copper pyrophosphate plating bath for 2 to 5 minutes.
Electrolytic plating was performed using the electrode plate 11 under the condition of "A/100 cm" until the plated copper pillar 15 reached the opening surface of the through hole 9. FIG. 2(b) shows this state.

水洗後、電極板11を銅メッキ層12との界面で剥離し
た後、ソフトエツチング、粘着シートIOの剥離を実施
し、スルーホール接続の完了した両面銅張り板16を得
た。第2図(C)がこの状態を示している。
After washing with water, the electrode plate 11 was peeled off at the interface with the copper plating layer 12, and then soft etching and peeling of the adhesive sheet IO were performed to obtain a double-sided copper-clad plate 16 with completed through-hole connections. FIG. 2(C) shows this state.

次いで、両面を常法によりエツチングし回路形成18を
行った。第2図(f)がこの状態を示している。・ 得られたプリント板のスルーホール信頼性は良好であっ
た。工・ノチングすべき銅厚は18μで良く、50μ幅
回路の形成が可能であった。
Next, both sides were etched using a conventional method to form a circuit 18. FIG. 2(f) shows this state. - The through-hole reliability of the obtained printed board was good. The copper thickness to be machined and notched was sufficient to be 18μ, making it possible to form a circuit with a width of 50μ.

(実施例2) この実施例の工程を第3図が説明している。ここで19
は紙基材−フエノール樹脂片面銅張り板、20は銅箔、
21は粘着シート、22はエポキシ樹脂接着剤、23は
密着強化処理銅箔、24はメッキ銅柱である。以下、説
明する。
(Example 2) FIG. 3 explains the process of this example. here 19
20 is paper base-phenolic resin single-sided copper clad plate, 20 is copper foil,
21 is an adhesive sheet, 22 is an epoxy resin adhesive, 23 is a copper foil treated to strengthen adhesion, and 24 is a plated copper pillar. This will be explained below.

厚さ0.8鶴の紙基材−フエノール樹脂片面銅張り板(
銅箔18μ)の樹脂基板面を粗面化した後、エポキシ樹
脂接着剤を表面にコートし、Bステージまで硬化させた
。次いで銅箔上に耐メッキ性の粘着シートを張り合わせ
た後、0.8nΦスルーホールをドリル加工で形成した
後、片面を密着強化処理をした35μ銅箔を、処理面が
接着剤面に重なる様に積層し、低圧加熱プレスによりス
ルーホール穴加工を施した片面銅箔り板と銅箔を接着し
た。次に、接着した35μ銅箔表面上にも前記粘着シー
トを貼り合わせた後、該銅箔を電極とし、実施例1と同
様にスルーホール開口面までメッキ銅が達するまで電解
メッキした。
Paper base material with a thickness of 0.8 mm - phenolic resin single-sided copper clad board (
After roughening the resin substrate surface of the copper foil (18μ), an epoxy resin adhesive was coated on the surface and cured to B stage. Next, after laminating a plating-resistant adhesive sheet on the copper foil, a 0.8nΦ through hole was formed by drilling, and then a 35μ copper foil with one side treated to strengthen adhesion was placed so that the treated side overlapped the adhesive side. The copper foil was bonded to a single-sided copper foil plate that had been laminated with through-holes using a low-pressure hot press. Next, the adhesive sheet was laminated onto the surface of the bonded 35 μm copper foil, and then the copper foil was used as an electrode, and electrolytic plating was performed in the same manner as in Example 1 until the plated copper reached the opening surface of the through hole.

水洗後、両銅箔表面上の粘着シートを剥離し、スルーホ
ール接続の完了した両面銅張り板を得た。次いで、両面
の銅箔を常法によりエツチングし、プリント配線板を得
た。
After washing with water, the adhesive sheets on the surfaces of both copper foils were peeled off to obtain a double-sided copper-clad plate with completed through-hole connections. Next, the copper foils on both sides were etched using a conventional method to obtain a printed wiring board.

(実施例3) この実施例の概略を第4図が説明している。ここで25
はガラス基材−エポキシ樹脂片面銅張り板、26は銅箔
、27は粘着シート、28は接着シート、29はステン
レス板、3oは銅メッキ層、31はメッキ銅柱である。
(Example 3) FIG. 4 outlines this example. here 25
26 is a copper foil, 27 is an adhesive sheet, 28 is an adhesive sheet, 29 is a stainless steel plate, 3o is a copper plating layer, and 31 is a plated copper pillar.

以下、説明する。This will be explained below.

厚さ0.411のガラス基材−エポキシ樹脂片面銅張り
板(銅箔18μ)の、銅箔面上に耐メッキ性の粘着シー
トを、一方、基板面上にエポキシ系の接着シートを張り
合わせた後、ドリルにより0.8mmΦのスルーホール
を加工を施した。
A glass base material with a thickness of 0.411 mm - an epoxy resin single-sided copper-clad board (copper foil 18 μm), a plating-resistant adhesive sheet was pasted on the copper foil surface, and an epoxy adhesive sheet was pasted on the substrate surface. After that, a through hole with a diameter of 0.8 mm was processed using a drill.

片面を粘着シートにより絶縁シールし、他面に約10μ
の銅メッキを施し、その表面を黒化処理したステンレス
板の銅メツキ面上に、前記銅張り板の接着シート面が対
向する様に積層し、低圧加熱プレスして、両者を接着し
た。次いで該積層物をメッキ液中で実施例1と同様に電
解メッキした後、ステンレス板を銅メッキ層(10μ)
との界面で剥離し、スルーホール接続の完了した両面銅
張り板を得た。両面の銅箔を常法によりエツチングし、
プリント配線板を得た。
One side is insulated and sealed with an adhesive sheet, and the other side is approximately 10μ
The copper-plated plate was laminated on the copper-plated surface of a stainless steel plate whose surface had been blackened so that the adhesive sheet surfaces faced each other, and the two were bonded together by low-pressure hot pressing. Next, the laminate was electrolytically plated in a plating solution in the same manner as in Example 1, and then the stainless steel plate was coated with a copper plating layer (10μ).
A double-sided copper-clad board with completed through-hole connections was obtained. Etch the copper foil on both sides using a conventional method,
A printed wiring board was obtained.

(実施例4) 第5図(a)、(b)、(C)、(d)は、この実施例
の工程を説明する図である。ここで32はガラス基材−
エポキシ樹脂片面銅張り板、33は導体回路、34は接
着シート、35はスルーホール穴、36はステンレス板
、37は銅メッキ層、38は耐メツキ性粘着シート、3
9は感光性レジスト像、40はメッキ回路、41はソル
ダーレジスト、42はメッキ銅柱である。以下、説明す
る。
(Example 4) FIGS. 5(a), (b), (C), and (d) are diagrams explaining the steps of this example. Here, 32 is the glass base material -
Epoxy resin single-sided copper clad plate, 33 conductor circuit, 34 adhesive sheet, 35 through hole, 36 stainless steel plate, 37 copper plating layer, 38 plating-resistant adhesive sheet, 3
9 is a photosensitive resist image, 40 is a plating circuit, 41 is a solder resist, and 42 is a plated copper pillar. This will be explained below.

0.4 mm厚のガラス基材−エポキシ樹脂片面銅張り
板(銅箔18μ)を常法によりエツチングし、導体回路
の形成を行った後、基板面にエポキシ樹脂系接着シート
を貼り合わせた後、ドリル加工してスルーホール穴(0
,5鶴Φ)を形成した(図a)。
After etching a 0.4 mm thick glass substrate-epoxy resin single-sided copper-clad board (copper foil 18μ) to form a conductor circuit, an epoxy resin adhesive sheet was pasted on the board surface. , drill through-hole hole (0
, 5 cranes Φ) were formed (Figure a).

一方、片面を耐メツキ性粘着シートで絶縁シールし、他
面に2〜3μの銅メッキ層を形成したステンレス板(1
0,7m■厚)の銅メツキ層上に、常法により所望回路
パターンとは逆パターンの感光性レジスト像を形成した
。次いで、該ステンレス板をメッキ浴中で電解メッキを
行いレジスト像厚とほぼ同じ厚さのメッキ回路を形成し
た(図b)。
On the other hand, a stainless steel plate (1
A photosensitive resist image having a pattern opposite to the desired circuit pattern was formed by a conventional method on a copper plating layer having a thickness of 0.7 m. Next, the stainless steel plate was subjected to electrolytic plating in a plating bath to form a plating circuit having approximately the same thickness as the resist image thickness (Figure b).

ステンレス板上のメッキ回路表面を黒化処理した後、こ
の上に前記回路板を、その接着シート面のスルーホール
部がメッキ回路と対向する様に積層し、位置合わせし、
低圧加熱により両者を接着した。次いで、表面のエツチ
ング回路上に、少なくともスルーホール部を除いてソル
ダーレジストを塗布、硬化させた後、再度、ステンレス
基板を電極として、該積層物をメッキ浴中で同様な条件
にて、電解メッキし、スルーホール穴内にメッキ柱を表
面のエツチング回路と一体化するまで形成した(図C)
After blackening the surface of the plated circuit on the stainless steel plate, the circuit board is laminated and aligned so that the through-hole part of the adhesive sheet surface faces the plated circuit,
Both were bonded together by low pressure heating. Next, a solder resist is applied onto the etched circuit on the surface except for at least the through-hole areas, and after hardening, the laminate is electrolytically plated again in a plating bath under the same conditions using the stainless steel substrate as an electrode. Then, a plated column was formed inside the through hole until it was integrated with the etched circuit on the surface (Figure C).
.

水洗後、ステンレス板を銅メッキ層との界面で剥離した
後、ソフトエツチングすることによって両面に回路を形
成したスルーホールプリント配線板を得た(図d)。
After washing with water, the stainless steel plate was peeled off at the interface with the copper plating layer, and then soft etched to obtain a through-hole printed wiring board with circuits formed on both sides (Figure d).

(実施例5) 実施例4において、スルーホール内を電解メッキする条
件として、レーザメッキを行った以外は、実施例4と同
様のプロセスでスルーホールプリント配!aviを得た
(Example 5) Through-hole printing was performed in the same process as in Example 4, except that laser plating was performed as a condition for electrolytic plating inside the through-holes! I got avi.

実施例1〜5で得られたプリント配線板はいずれも、熱
衝撃試験において、良好なスルーホール接続信頼性を有
していた。
All of the printed wiring boards obtained in Examples 1 to 5 had good through-hole connection reliability in the thermal shock test.

又、表面の回路形成として、実施例1〜3では50μ幅
のエツチング回路、実施例4〜5では30μ幅の微細な
メッキ回路形成ができた。
Further, as for circuit formation on the surface, an etching circuit with a width of 50 μm was formed in Examples 1 to 3, and a fine plating circuit with a width of 30 μm was formed in Examples 4 to 5.

[発明の効果] この発明は、スルーホール穴を形成した回路用基板の片
面に、他面を絶縁物でシールした金属電極板を少なくと
もスルーホール穴が金属電極板にて覆われる様に密着さ
せ、次いで該金属電極板を陰電極として電解メッキを行
い、スルーホール内にメッキ金属を析出させることを特
徴とするので、スルーホール接続の信頼性を高めること
ができ、プリント配線板を簡単な工程で低コストに製造
できる効果がある。
[Effects of the Invention] The present invention is characterized in that a metal electrode plate, the other side of which is sealed with an insulator, is tightly attached to one side of a circuit board in which through-hole holes are formed so that at least the through-hole holes are covered with the metal electrode plate. Then, electrolytic plating is performed using the metal electrode plate as a negative electrode, and the plated metal is deposited in the through holes. Therefore, the reliability of the through hole connections can be increased, and the printed wiring board can be manufactured using a simple process. It has the effect of being able to be manufactured at low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の工程の概略を説明する図、第2図、
第3図、第4図、第5図はこの発明の詳細な説明するた
めの図である。 1・・・回路用基板 2・・・導体回路 3・・・電極基板 4・・・絶縁シール 5・・・スルーホール 6・・・メッキ金属柱
Figure 1 is a diagram explaining the outline of the process of this invention, Figure 2,
FIG. 3, FIG. 4, and FIG. 5 are diagrams for explaining the present invention in detail. 1...Circuit board 2...Conductor circuit 3...Electrode substrate 4...Insulating seal 5...Through hole 6...Plated metal column

Claims (1)

【特許請求の範囲】[Claims] (1)スルーホールプリント板の製法において、スルー
ホール穴を形成した回路用基板の片面に、他面を絶縁物
でシールした金属電極板を少なくともスルーホール穴が
金属電極板にて覆われる様に密着させ、次いで該金属電
極板を陰電極として電解メッキを行い、スルーホール内
にメッキ金属を析出させる工程を含ませたことを特徴と
するスルーホールプリント板の製法。
(1) In the method of manufacturing a through-hole printed board, a metal electrode plate whose other side is sealed with an insulator is placed on one side of a circuit board with through-hole holes formed so that at least the through-hole holes are covered with the metal electrode plate. 1. A method for manufacturing a through-hole printed board, comprising the steps of bringing the metal electrode plate into close contact with each other, and then performing electrolytic plating using the metal electrode plate as a negative electrode to deposit plating metal within the through-hole.
JP28544486A 1986-11-28 1986-11-28 Manufacture of through-hole printed board Pending JPS63137498A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28544486A JPS63137498A (en) 1986-11-28 1986-11-28 Manufacture of through-hole printed board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28544486A JPS63137498A (en) 1986-11-28 1986-11-28 Manufacture of through-hole printed board

Publications (1)

Publication Number Publication Date
JPS63137498A true JPS63137498A (en) 1988-06-09

Family

ID=17691594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28544486A Pending JPS63137498A (en) 1986-11-28 1986-11-28 Manufacture of through-hole printed board

Country Status (1)

Country Link
JP (1) JPS63137498A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244635A (en) * 2000-03-01 2001-09-07 Ibiden Co Ltd Method for manufacturing printed circuit board
JP2001244636A (en) * 2000-03-01 2001-09-07 Ibiden Co Ltd Printed wiring board
US7772118B2 (en) 2004-11-08 2010-08-10 Shinko Electric Industries Co., Ltd. Substrate having high electrical connection reliability of a penetrating via connected to wirings and a method for manufacturing the same
JP4526747B2 (en) * 2001-08-17 2010-08-18 株式会社アドバンテスト Wiring board manufacturing method
JP2011035212A (en) * 2009-08-03 2011-02-17 Nec Corp Method of manufacturing multilayer wiring substrate, and laminated multilayer wiring substrate

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244635A (en) * 2000-03-01 2001-09-07 Ibiden Co Ltd Method for manufacturing printed circuit board
JP2001244636A (en) * 2000-03-01 2001-09-07 Ibiden Co Ltd Printed wiring board
JP4526747B2 (en) * 2001-08-17 2010-08-18 株式会社アドバンテスト Wiring board manufacturing method
US7772118B2 (en) 2004-11-08 2010-08-10 Shinko Electric Industries Co., Ltd. Substrate having high electrical connection reliability of a penetrating via connected to wirings and a method for manufacturing the same
TWI402956B (en) * 2004-11-08 2013-07-21 Shinko Electric Ind Co A method of manfuacturing a substrate
JP2011035212A (en) * 2009-08-03 2011-02-17 Nec Corp Method of manufacturing multilayer wiring substrate, and laminated multilayer wiring substrate

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