JPH10163463A5 - - Google Patents

Info

Publication number
JPH10163463A5
JPH10163463A5 JP1996321566A JP32156696A JPH10163463A5 JP H10163463 A5 JPH10163463 A5 JP H10163463A5 JP 1996321566 A JP1996321566 A JP 1996321566A JP 32156696 A JP32156696 A JP 32156696A JP H10163463 A5 JPH10163463 A5 JP H10163463A5
Authority
JP
Japan
Prior art keywords
electrode
charge collector
insulating film
layer
drain electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996321566A
Other languages
English (en)
Japanese (ja)
Other versions
JP3729953B2 (ja
JPH10163463A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP32156696A priority Critical patent/JP3729953B2/ja
Priority claimed from JP32156696A external-priority patent/JP3729953B2/ja
Publication of JPH10163463A publication Critical patent/JPH10163463A/ja
Publication of JPH10163463A5 publication Critical patent/JPH10163463A5/ja
Application granted granted Critical
Publication of JP3729953B2 publication Critical patent/JP3729953B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP32156696A 1996-12-02 1996-12-02 Ｔｆｔアレイ基板とその製法 Expired - Fee Related JP3729953B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32156696A JP3729953B2 (ja) 1996-12-02 1996-12-02 Ｔｆｔアレイ基板とその製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32156696A JP3729953B2 (ja) 1996-12-02 1996-12-02 Ｔｆｔアレイ基板とその製法

Publications (3)

Publication Number Publication Date
JPH10163463A JPH10163463A (ja) 1998-06-19
JPH10163463A5 true JPH10163463A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2004-11-18
JP3729953B2 JP3729953B2 (ja) 2005-12-21

Family

ID=18134006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32156696A Expired - Fee Related JP3729953B2 (ja) 1996-12-02 1996-12-02 Ｔｆｔアレイ基板とその製法

Country Status (1)

Country Link
JP (1) JP3729953B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6501098B2 (en) 1998-11-25 2002-12-31 Semiconductor Energy Laboratory Co, Ltd. Semiconductor device
KR100577410B1 (ko) 1999-11-30 2006-05-08 엘지.필립스 엘시디 주식회사 엑스레이 영상 감지소자 및 그 제조방법
US6559506B1 (en) * 2002-04-03 2003-05-06 General Electric Company Imaging array and methods for fabricating same
US6740884B2 (en) * 2002-04-03 2004-05-25 General Electric Company Imaging array and methods for fabricating same
WO2006030937A1 (en) * 2004-09-15 2006-03-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
TWI285929B (en) * 2006-02-15 2007-08-21 Au Optronics Corp Manufacturing method of pixel structure
KR101994632B1 (ko) 2009-12-25 2019-07-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
JP6345544B2 (ja) * 2013-09-05 2018-06-20 株式会社半導体エネルギー研究所 半導体装置の作製方法
CN105789324B (zh) * 2016-04-15 2019-05-03 京东方科技集团股份有限公司 传感器及其制造方法、电子设备

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