JPH10158035A5 - - Google Patents

Info

Publication number
JPH10158035A5
JPH10158035A5 JP1997265242A JP26524297A JPH10158035A5 JP H10158035 A5 JPH10158035 A5 JP H10158035A5 JP 1997265242 A JP1997265242 A JP 1997265242A JP 26524297 A JP26524297 A JP 26524297A JP H10158035 A5 JPH10158035 A5 JP H10158035A5
Authority
JP
Japan
Prior art keywords
optical element
producing
ultraviolet
ultraviolet optical
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997265242A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10158035A (ja
JP4032462B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26524297A priority Critical patent/JP4032462B2/ja
Priority claimed from JP26524297A external-priority patent/JP4032462B2/ja
Publication of JPH10158035A publication Critical patent/JPH10158035A/ja
Publication of JPH10158035A5 publication Critical patent/JPH10158035A5/ja
Application granted granted Critical
Publication of JP4032462B2 publication Critical patent/JP4032462B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP26524297A 1996-09-30 1997-09-30 紫外用光学素子 Expired - Lifetime JP4032462B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26524297A JP4032462B2 (ja) 1996-09-30 1997-09-30 紫外用光学素子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP25994896 1996-09-30
JP8-259948 1996-09-30
JP26524297A JP4032462B2 (ja) 1996-09-30 1997-09-30 紫外用光学素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007177847A Division JP4650460B2 (ja) 1996-09-30 2007-07-06 紫外用光学素子の製造方法

Publications (3)

Publication Number Publication Date
JPH10158035A JPH10158035A (ja) 1998-06-16
JPH10158035A5 true JPH10158035A5 (enExample) 2005-06-16
JP4032462B2 JP4032462B2 (ja) 2008-01-16

Family

ID=26544373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26524297A Expired - Lifetime JP4032462B2 (ja) 1996-09-30 1997-09-30 紫外用光学素子

Country Status (1)

Country Link
JP (1) JP4032462B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000203678A (ja) * 1999-01-13 2000-07-25 Nikon Corp 露光装置本体の梱包方法および梱包構造、並びにその方法または構造で梱包される露光装置
WO2004050266A1 (ja) 2002-12-03 2004-06-17 Nikon Corporation 汚染物質除去方法及び装置、並びに露光方法及び装置
JP2011170092A (ja) * 2010-02-18 2011-09-01 Fujifilm Corp 光学素子及び光学素子製造方法
JP2017216389A (ja) * 2016-06-01 2017-12-07 信越石英株式会社 紫外線ｓｍｄ型ｌｅｄ素子の気密封止用シリカガラス部材
KR102337364B1 (ko) * 2016-06-01 2021-12-09 신에쯔 세끼에이 가부시키가이샤 자외선ｓｍｄ형 ｌｅｄ소자의 기밀봉지용 석영유리 부재 및 자외선ｌｅｄ용 석영유리 부재의 제조방법
JP6623968B2 (ja) * 2016-08-03 2019-12-25 信越化学工業株式会社 光学素子パッケージ用窓材、光学素子パッケージ、それらの製造方法、及び光学素子用パッケージ

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