JPH10142501A5 - - Google Patents

Info

Publication number
JPH10142501A5
JPH10142501A5 JP1996309976A JP30997696A JPH10142501A5 JP H10142501 A5 JPH10142501 A5 JP H10142501A5 JP 1996309976 A JP1996309976 A JP 1996309976A JP 30997696 A JP30997696 A JP 30997696A JP H10142501 A5 JPH10142501 A5 JP H10142501A5
Authority
JP
Japan
Prior art keywords
optical system
projection optical
lens
inclination angle
lens group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996309976A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10142501A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8309976A priority Critical patent/JPH10142501A/ja
Priority claimed from JP8309976A external-priority patent/JPH10142501A/ja
Publication of JPH10142501A publication Critical patent/JPH10142501A/ja
Publication of JPH10142501A5 publication Critical patent/JPH10142501A5/ja
Pending legal-status Critical Current

Links

JP8309976A 1996-11-06 1996-11-06 投影露光装置および該投影露光装置を用いた半導体デバイスの製造方法 Pending JPH10142501A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8309976A JPH10142501A (ja) 1996-11-06 1996-11-06 投影露光装置および該投影露光装置を用いた半導体デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8309976A JPH10142501A (ja) 1996-11-06 1996-11-06 投影露光装置および該投影露光装置を用いた半導体デバイスの製造方法

Publications (2)

Publication Number Publication Date
JPH10142501A JPH10142501A (ja) 1998-05-29
JPH10142501A5 true JPH10142501A5 (enExample) 2004-12-24

Family

ID=17999644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8309976A Pending JPH10142501A (ja) 1996-11-06 1996-11-06 投影露光装置および該投影露光装置を用いた半導体デバイスの製造方法

Country Status (1)

Country Link
JP (1) JPH10142501A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001023933A1 (en) 1999-09-29 2001-04-05 Nikon Corporation Projection optical system
EP1139138A4 (en) 1999-09-29 2006-03-08 Nikon Corp PROJECTION EXPOSURE PROCESS, DEVICE AND OPTICAL PROJECTION SYSTEM
US6710930B2 (en) 1999-12-01 2004-03-23 Nikon Corporation Illumination optical system and method of making exposure apparatus
JP2002287023A (ja) 2001-03-27 2002-10-03 Nikon Corp 投影光学系、該投影光学系を備えた投影露光装置及び投影露光方法
JP4261275B2 (ja) * 2002-11-28 2009-04-30 Ｈｏｙａ株式会社 像シフト装置
JP5118407B2 (ja) * 2007-07-31 2013-01-16 キヤノン株式会社 光学系、露光装置及びデバイス製造方法
CN113835209B (zh) * 2021-11-19 2024-04-26 中导光电设备股份有限公司 一种大视场duv物镜

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