JPH10135470A5 - - Google Patents

Info

Publication number
JPH10135470A5
JPH10135470A5 JP1996305958A JP30595896A JPH10135470A5 JP H10135470 A5 JPH10135470 A5 JP H10135470A5 JP 1996305958 A JP1996305958 A JP 1996305958A JP 30595896 A JP30595896 A JP 30595896A JP H10135470 A5 JPH10135470 A5 JP H10135470A5
Authority
JP
Japan
Prior art keywords
thin film
channel thin
film transistor
source
drain regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996305958A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10135470A (ja
JP3841897B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP30595896A priority Critical patent/JP3841897B2/ja
Priority claimed from JP30595896A external-priority patent/JP3841897B2/ja
Publication of JPH10135470A publication Critical patent/JPH10135470A/ja
Publication of JPH10135470A5 publication Critical patent/JPH10135470A5/ja
Application granted granted Critical
Publication of JP3841897B2 publication Critical patent/JP3841897B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP30595896A 1996-10-30 1996-10-30 半導体装置の作製方法 Expired - Fee Related JP3841897B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30595896A JP3841897B2 (ja) 1996-10-30 1996-10-30 半導体装置の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30595896A JP3841897B2 (ja) 1996-10-30 1996-10-30 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JPH10135470A JPH10135470A (ja) 1998-05-22
JPH10135470A5 true JPH10135470A5 (OSRAM) 2004-10-21
JP3841897B2 JP3841897B2 (ja) 2006-11-08

Family

ID=17951351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30595896A Expired - Fee Related JP3841897B2 (ja) 1996-10-30 1996-10-30 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP3841897B2 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001051661A (ja) 1999-08-16 2001-02-23 Semiconductor Energy Lab Co Ltd Ｄ／ａ変換回路および半導体装置
US7829394B2 (en) 2005-05-26 2010-11-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method of the same

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