JPH10107170A - Resin-molded electronic apparatus and its manufacture - Google Patents

Resin-molded electronic apparatus and its manufacture

Info

Publication number
JPH10107170A
JPH10107170A JP25567496A JP25567496A JPH10107170A JP H10107170 A JPH10107170 A JP H10107170A JP 25567496 A JP25567496 A JP 25567496A JP 25567496 A JP25567496 A JP 25567496A JP H10107170 A JPH10107170 A JP H10107170A
Authority
JP
Japan
Prior art keywords
resin
lead frame
lid
leads
molding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25567496A
Other languages
Japanese (ja)
Inventor
Masashi Goto
真史 後藤
Jitsuo Kanazawa
実雄 金沢
Kenji Honda
賢司 本田
Shuichiro Yamamoto
修一郎 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP25567496A priority Critical patent/JPH10107170A/en
Publication of JPH10107170A publication Critical patent/JPH10107170A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Abstract

PROBLEM TO BE SOLVED: To prevent a resin from flowing to an element mounting face in a resin molding operation by a method wherein gaps between leads in a molding region at a lead frame are filled with the resin in advance so as to be hardened, the gaps between the leads are blocked up, a lid is put on an element and the opening edge of the lid is bonded and fixed to the lead frame. SOLUTION: In a resin-molded electronic component, an element 1 is placed on an electrode part 2a in the center, electrodes on the element 1 are connected to an input lead part 2b, an output lead part 2c and a grounding conductor 2d in the center by means of bonding wires 6, the opening edge 5c of a lid 5 of a one-face opening structure is bonded to faces, on one side, of the conductors 2 so as to cover the element 1, and the lid 5 as well as the front and the rear of the conductors 2 in its peripheral region are molded with a resin. Thereby, it is possible to prevent a molding resin from creeping to an element mounting face on the lid mounting side in a molding operation, and it is possible to prevent the molding resin from being stuck to the element. In addition, when gaps between leads at a lead frame are blocked up by the resin, the element mounting face can be made uniform.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、気密封止の必要が
ある樹脂モールド型電子部品とその製造方法に係り、特
に弾性表面波フィルタ(SAWフィルタ)等に適用する
に好適なものに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin-molded electronic component which needs to be hermetically sealed and a method of manufacturing the same, and more particularly to a component suitable for application to a surface acoustic wave filter (SAW filter) and the like.

【0002】[0002]

【従来の技術】SAWフィルタを樹脂モールドにより気
密封止して1つの電子部品として構成する構造として、
特開平2−305013号公報に開示されているものが
ある。この樹脂モールド型電子部品は、素子の電極形成
面が成形樹脂により覆われることを防止するため、電極
形成面のみを蓋により覆い、リードを外部に延出させた
状態で樹脂によりモールドしてなるものである。
2. Description of the Related Art As a structure in which a SAW filter is hermetically sealed with a resin mold to constitute one electronic component,
There is one disclosed in Japanese Patent Application Laid-Open No. 2-305013. This resin-molded electronic component is obtained by molding only the electrode forming surface with a lid and molding the resin with the lead extended outside in order to prevent the electrode forming surface of the element from being covered with the molding resin. Things.

【0003】[0003]

【発明が解決しようとする課題】このような従来構造に
よれば、素子が直接モールドされているため、成形樹脂
の応力を素子が直接受け、特性低下や破損を生じてしま
うおそれもある。
According to such a conventional structure, since the element is directly molded, there is a possibility that the element is directly subjected to the stress of the molding resin, resulting in deterioration of characteristics and breakage.

【0004】本発明はこのような問題点を解決するた
め、素子全体を密封し、しかもリードフレームを使用し
て安価に生産できる樹脂モールド型電子部品とその製造
方法を提供することを目的とする。
An object of the present invention is to provide a resin-molded electronic component which can be produced at a low cost by using a lead frame while sealing the entire device, and a method of manufacturing the same. .

【0005】[0005]

【課題を解決するための手段】リードフレームを用いて
樹脂モールド型電子部品を構成する場合、成形樹脂が素
子の電極面に付着することを防止するには、蓋を使用す
るが、単にリードフレームの片面に素子を取付けて蓋に
より素子を覆い、蓋全体をリードフレームと共に樹脂に
よりモールドしたのでは、リードフレームの溝の部分よ
り樹脂が素子搭載面に浸入し、素子の電極が樹脂により
覆われて特性を低下させる事態が生じる。
When a resin-molded electronic component is formed using a lead frame, a lid is used to prevent the molding resin from adhering to the electrode surface of the element. If the element is mounted on one side of the device and the element is covered with a lid, and the entire lid is molded with resin together with the lead frame, the resin will enter the element mounting surface from the groove of the lead frame, and the element electrodes will be covered with resin. And the characteristics are degraded.

【0006】このような問題点を解決し、リードフレー
ムに蓋を設けて樹脂モールドする構造を実現するため、
本発明は、リードフレームのモールド領域におけるリー
ド間(溝)の部分に予め樹脂を充填し硬化させてリード
間を閉塞しておき、素子に蓋を被せてその蓋の開口縁を
リードフレームに接着固定することにより、樹脂モール
ドする際における素子搭載面への樹脂の流れを防止した
ものである。
In order to solve such a problem and to realize a structure in which a lid is provided on a lead frame and resin molding is performed,
According to the present invention, a resin is filled in advance in a space between leads (grooves) in a mold region of a lead frame, and the resin is cured to close the space between leads. By fixing, the flow of resin to the element mounting surface during resin molding is prevented.

【0007】すなわち本発明の樹脂モールド型電子部品
は、リードフレームに素子を搭載し樹脂モールドされた
電子部品において、リードフレームの素子搭載面の裏側
より、該リードフレームのリード間に一旦樹脂を充填硬
化させ、リードフレームの表面に素子を搭載し、該素子
全体を片面開口構造の蓋により覆って接着密封し、更に
成形樹脂により素子搭載面および裏面をモールドしてな
ることを特徴とする(請求項1)。
That is, in the resin-molded electronic component of the present invention, in a resin-molded electronic component in which an element is mounted on a lead frame, a resin is temporarily filled between the leads of the lead frame from behind the element mounting surface of the lead frame. After curing, the device is mounted on the surface of the lead frame, the entire device is covered and sealed with a lid having a single-sided opening structure, and the device mounting surface and the back surface are molded with molding resin. Item 1).

【0008】本発明による樹脂モールド型電子部品の製
造方法は、リードフレームの素子搭載面に閉塞部材を設
け、素子搭載面の裏側よりリードフレームのリード間に
一旦樹脂を充填硬化させ、素子搭載面の閉塞部材を外
し、表面に素子を搭載し、素子全体を片面開口構造の蓋
により覆って接着密封し、更に成形樹脂にて素子搭載面
および裏面をモールドすることを特徴とする(請求項
2)。
In the method of manufacturing a resin-molded electronic component according to the present invention, a sealing member is provided on an element mounting surface of a lead frame, and a resin is temporarily filled and cured between leads of the lead frame from the back side of the element mounting surface. The element is mounted on the front surface, the entire element is covered with a lid having a single-sided opening structure, adhesively sealed, and the element mounting surface and the back surface are molded with a molding resin. ).

【0009】また、本発明は、前記リード間に充填する
成形樹脂として、熱硬化型樹脂、光硬化型樹脂、光硬化
型でかつ熱硬化型樹脂、または成形樹脂の成形温度以上
の融点を持つ熱可塑性樹脂を用いることを特徴とする
(請求項3)。
Further, the present invention provides, as the molding resin to be filled between the leads, a thermosetting resin, a photocurable resin, a photocurable and thermosetting resin, or a melting point higher than the molding temperature of the molding resin. A thermoplastic resin is used (claim 3).

【0010】[0010]

【作用】本発明においては、リードフレームのリード間
に樹脂を充填硬化させた状態で素子をリードフレームに
固定し、素子に蓋を被せて接着し、蓋をリードフレーム
も含めてモールドするが、リード間が樹脂により閉塞さ
れているので、モールドの際に、成形樹脂が蓋取付け側
の素子搭載面に浸入することが防止されて素子に成形樹
脂が付着することが防止される。また、リード間に樹脂
を充填する際には、素子搭載面は閉塞部材により覆って
いるので、この閉塞部材を外した状態においては、素子
搭載面は均一な面となる。また、リード間埋め用樹脂を
硬化させるために加熱するが、その際に発生するガスが
閉塞部材により阻まれ、素子搭載面へガスが付着するこ
とも防止できるため、素子接続の妨げとならない。
In the present invention, the element is fixed to the lead frame in a state in which the resin is filled and cured between the leads of the lead frame, the element is covered and adhered, and the lid is molded including the lead frame. Since the space between the leads is closed by the resin, the molding resin is prevented from entering the element mounting surface on the side where the lid is attached during molding, and the molding resin is prevented from adhering to the element. Further, when the resin is filled between the leads, the element mounting surface is covered with the closing member, so that the element mounting surface is uniform when the closing member is removed. Heating is performed to cure the resin for filling between leads, but the gas generated at that time is blocked by the closing member, and the gas can be prevented from adhering to the element mounting surface, so that the connection of the elements is not hindered.

【0011】[0011]

【発明の実施の形態】図1は本発明による樹脂モールド
型電子部品の一実施例を示すもので、(A)は成形樹脂
を2点鎖線で示す平面図、(B)、(C)はそれぞれ
(A)の右側面図、正面図、(D)、(E)はそれぞれ
(A)のE−E、F−F断面図である。
1A and 1B show an embodiment of a resin-molded electronic component according to the present invention, wherein FIG. 1A is a plan view showing a molding resin by a two-dot chain line, and FIGS. (A) is a right side view, a front view, and (D) and (E) are EE and FF sectional views of (A), respectively.

【0012】図1において、1はSAWフィルタを構成
する素子、2a〜2cはリードフレームから作製される
導体であり、該中央の導体2aは、中央のアース導体で
あり、その両側の導体2b、2cはそれぞれ入力リード
部、出力リード部2cである。中央のアース導体2aと
両側のリード部2b、2cとの間3には、リード間埋め
用樹脂4が充填硬化される。
In FIG. 1, reference numeral 1 denotes an element constituting a SAW filter, 2a to 2c denote conductors formed from a lead frame, the center conductor 2a is a center ground conductor, and conductors 2b, 2c is an input lead part and an output lead part 2c, respectively. The space 3 between the center ground conductor 2a and the lead portions 2b, 2c on both sides is filled with a lead filling resin 4 and hardened.

【0013】中央のアース導体2aには、互いに反対コ
ーナー部に位置する箇所にアース端子2d、2eを有
し、両側の入出力リード部2b、2cにはそれぞれ2本
ずつの端子2f、2gが形成される。
The center ground conductor 2a has ground terminals 2d and 2e at opposite corners, and two input / output leads 2b and 2c have two terminals 2f and 2g, respectively. It is formed.

【0014】5は素子1を保護するための蓋であり、該
蓋5は素子1に対するシールド効果を得るために金属製
または樹脂成形体に金属膜を一体に設けた片面開口側の
ものでなり、該蓋5は、対角線方向に対向する2つのコ
ーナー部に、基板(図示せず)上のアース導体に接続す
るための接地用端子5a、5bを形成してなる。
Reference numeral 5 denotes a lid for protecting the element 1, and the lid 5 is a one-side opening side provided integrally with a metal film or a resin molded body in order to obtain a shielding effect on the element 1. The lid 5 has grounding terminals 5a and 5b formed at two diagonally opposite corners for connection to a ground conductor on a substrate (not shown).

【0015】この実施例の樹脂モールド型電子部品は、
中央の電極部2a上に素子1を載せ、素子1上の電極を
それぞれ入力リード部2b、出力リード部2c、中央の
アース導体2aにそれぞれボンディングワイヤ6により
接続し、該素子1を覆うように、これらの導体2の片面
に、片面開口構造の蓋5の開口縁5cを接着し、該蓋5
およびその周囲の領域の導体2の表面および裏面を樹脂
7によりモールドする。なお、前記リード間3に充填硬
化する樹脂4としては、熱硬化型樹脂、光硬化型樹脂、
光硬化型でかつ熱硬化型樹脂、または成形樹脂の成形温
度以上の融点を持つ熱可塑性樹脂(テクノアルファ
(株)製301)を用いる。
The resin-molded electronic component of this embodiment is:
The element 1 is placed on the central electrode 2a, and the electrodes on the element 1 are connected to the input lead 2b, the output lead 2c, and the center ground conductor 2a by bonding wires 6, respectively, so as to cover the element 1. An opening edge 5c of a lid 5 having a single-sided opening structure is adhered to one surface of each of the conductors 2.
Then, the surface and the back surface of the conductor 2 in the region around it are molded with the resin 7. In addition, as the resin 4 that fills and cures between the leads 3, a thermosetting resin, a photocurable resin,
A photo-setting thermosetting resin or a thermoplastic resin having a melting point equal to or higher than the molding temperature of the molding resin (301 manufactured by Techno Alpha Co., Ltd.) is used.

【0016】図2は本実施例の樹脂モールド型電子部品
の製造工程を示す図である。図2(A)はリードフレー
ム2Xを示し、2a〜2cはそれぞれ図1に示したアー
ス導体、入力リード部、出力リード部となる部分を示
す。リードフレーム2Xは、図3(A)に示すように、
両側の帯状部aに送り孔bを有し、最終的に図1に示し
たアース導体2aや入出力リード部2b、2cとなる元
の部分を打ち抜きにより形成してなるものである。図3
(B)は、前記成形樹脂7を形成する領域を示す。
FIG. 2 is a diagram showing a manufacturing process of the resin-molded electronic component of this embodiment. FIG. 2A shows a lead frame 2X, and reference numerals 2a to 2c denote portions serving as a ground conductor, an input lead portion, and an output lead portion shown in FIG. The lead frame 2X is, as shown in FIG.
The belt-like portions a on both sides have feed holes b, and the original portions that eventually become the ground conductors 2a and the input / output lead portions 2b and 2c shown in FIG. 1 are formed by punching. FIG.
(B) shows a region where the molding resin 7 is formed.

【0017】図2(B)に示すように、このようなリー
ドフレーム2Xにおける前記樹脂7のモールド部に相当
するリード間3の片面に閉塞部材としてマスキングテー
プ8を貼り付けてリード間3を塞ぐ。なお、マスキング
テープ8として、実施例においては、寺岡製作所社製の
品名650Sのものを使用した。このマスキングテープ
8は、樹脂加熱に耐える特性を持たせるため、基材とし
てポリイミド系の樹脂を用い、粘着剤としてシリコーン
系のものを用いたものである。
As shown in FIG. 2 (B), a masking tape 8 is applied as a closing member to one side of the space 3 between the leads corresponding to the molded portion of the resin 7 in such a lead frame 2X to close the space 3 between the leads. . In this example, the masking tape 8 having a product name of 650S manufactured by Teraoka Seisakusho Co., Ltd. was used. The masking tape 8 uses a polyimide-based resin as a base material and a silicone-based adhesive as a pressure-sensitive adhesive in order to have a property of resisting resin heating.

【0018】次に、図2(C)に示すように、リードフ
レーム2Xの前記リード間3に、前記マスキングテープ
8を貼り付けた面の反対側より樹脂4を印刷により充填
して硬化させる。実施例においては、このリード間3を
埋める樹脂4として、日本エイブルスティック社製の熱
硬化性樹脂である品名968−2のエポキシ樹脂を用
い、125℃、2時間で硬化を行った。
Next, as shown in FIG. 2C, the resin 4 is filled in between the leads 3 of the lead frame 2X by printing from the side opposite to the surface on which the masking tape 8 is attached, and is cured. In the example, as the resin 4 for filling the space 3 between the leads, an epoxy resin of product name 968-2, which is a thermosetting resin manufactured by Ablestick Japan, was cured at 125 ° C. for 2 hours.

【0019】マスキングテープ8は、この樹脂4が素子
実装面に浸入することを防止する。また、樹脂4を加熱
して硬化させる時に発生するガスがリードフレーム2X
に付着することを防止し、これによりワイヤボンディン
グ強度を確保する。また、ハンドリング時の汚染も防止
できる。
The masking tape 8 prevents the resin 4 from entering the element mounting surface. Further, gas generated when the resin 4 is heated and cured is generated by the lead frame 2X.
Is prevented from adhering to the wire, thereby ensuring wire bonding strength. Also, contamination during handling can be prevented.

【0020】また、マスキングテープ8により、リード
フレーム2Xと樹脂4とが同面をなすため、蓋5を接着
する時の気密構造を作り易くなる。マスキングテープ8
がない時は、はみ出し、目減り、もり上がり等ができ、
気密構造にできない。
Further, the masking tape 8 allows the lead frame 2X and the resin 4 to be on the same surface, so that an airtight structure can be easily formed when the lid 5 is bonded. Masking tape 8
When there is no, it can protrude, lose weight, rise, etc.,
Cannot be airtight.

【0021】次に、図2(D)に示すように、リードフ
レーム2Xから前記マスキングテープ8を外し、図2
(E)に示すように、該テープ8を外した面を上とし、
反転したリードフレーム2X上にSAWフィルタでなる
素子1を、その電極面を上にしてボンディングワイヤ6
によりリードフレーム2Xと電気的に接続して取付け
る。
Next, as shown in FIG. 2D, the masking tape 8 is removed from the lead frame 2X, and
(E) As shown in FIG.
An element 1 made of a SAW filter is placed on an inverted lead frame 2X with a bonding wire 6 with its electrode face up.
And electrically connected to the lead frame 2X.

【0022】一方、図2(F)に示すように、金属製あ
るいは樹脂成形体に導電膜を形成した蓋5の開口縁に接
着剤9を印刷により付けておき、図2(G)に示すよう
に、素子1を取付けたリードフレーム面に、素子1を覆
うように、蓋5を被せ、蓋5をリードフレーム2Xに押
しつけ、150℃、1時間で硬化させ、その蓋5の開口
縁5cをリードフレーム2Xに接着する。実施例におい
ては、接着剤9として、日本ペルノックス社製、品名Z
C−106−2のものを用いた。
On the other hand, as shown in FIG. 2 (F), an adhesive 9 is applied by printing to the opening edge of the lid 5 in which a conductive film is formed on a metal or resin molded body, and as shown in FIG. 2 (G). Thus, the lid 5 is put on the lead frame surface on which the element 1 is mounted so as to cover the element 1, and the lid 5 is pressed against the lead frame 2X, cured at 150 ° C. for one hour, and the opening edge 5c of the lid 5 is formed. To the lead frame 2X. In the embodiment, the adhesive 9 is manufactured by Nippon Pernox Co., Ltd., product name Z.
C-106-2 was used.

【0023】そして、図2(H)に示すように、該蓋5
およびその周囲の領域のリードフレーム2Xの表面およ
び裏面を樹脂7により175℃でモールドした。成形樹
脂7としては、東芝ケミカル社製、品名KE−300−
TS1の熱硬化性エポキシ樹脂を用いた。
Then, as shown in FIG.
The front and back surfaces of the lead frame 2X in the surrounding area were molded with the resin 7 at 175 ° C. As the molding resin 7, KE-300- manufactured by Toshiba Chemical Co., Ltd.
The thermosetting epoxy resin of TS1 was used.

【0024】その後、リードフレームのモールド部分の
周囲をカットフォーミングして端子2d〜2gを形成す
る。
Thereafter, the periphery of the mold portion of the lead frame is cut formed to form terminals 2d to 2g.

【0025】このように、マスキングテープ8によりリ
ードフレーム2Xのリード間3を樹脂4により充填し、
図2(G)に示すように、リード間3における蓋5の取
付け面dをリード間以外の素子搭載面cと樹脂4により
面一にしておけば、蓋5の開口縁5cとリード間3との
間を接着剤9により完全に封じることができる。
As described above, the space 3 between the leads of the lead frame 2X is filled with the resin 4 by the masking tape 8,
As shown in FIG. 2 (G), if the mounting surface d of the lid 5 between the leads 3 is made flush with the element mounting surface c other than between the leads and the resin 4, the opening edge 5 c of the lid 5 and the lead 3 Can be completely sealed by the adhesive 9.

【0026】図4は本発明による製造方法の他の実施例
であり、本実施例は、素子1の実装面の反対側の面にも
樹脂4が覆わないように構成することにより、モールド
後の全体の厚みを薄くできるようにしたものである。
FIG. 4 shows another embodiment of the manufacturing method according to the present invention. This embodiment is configured such that the surface opposite to the mounting surface of the element 1 is not covered with the resin 4 so that after molding, Is designed to be able to reduce the overall thickness.

【0027】本実施例は、図4(A)に示すリードフレ
ーム2Xに対し、図4(B)に示すように、リード間3
の片面をマスキングテープ8により塞ぎ、図4(C)に
示すように、感光性樹脂4をリード間3に印刷する。本
実施例においては、この樹脂4として、太陽インキ社製
の品名PSR−4000の熱硬化性と光硬化性を併せも
つ樹脂を用いた。この樹脂4を75℃で20分仮乾燥し
た後、図4(D)に示すように、リード間3にUV硬化
炉において露光(e)し、次に1重量%の炭酸ナトリウ
ム液でエッチング(現像)することにより、図4(E)
に示すように、リード間3に埋め込まれた樹脂4のみを
残して素子実装面の反対側の面の樹脂4を除去し、その
後、150℃、30分の加熱を行うことにより、リード
間3内の樹脂4を硬化した。その後、蓋5の接着に日本
ペルノックス社製の品名ZC−106−2のエポキシ樹
脂を用い、150℃、2時間で硬化を行った。その後の
工程は前述の通りである。
In this embodiment, as shown in FIG. 4B, the lead frame 2X shown in FIG.
Is covered with a masking tape 8, and a photosensitive resin 4 is printed between the leads 3 as shown in FIG. In the present embodiment, as the resin 4, a resin having a thermosetting property and a photosetting property, which is a product name PSR-4000 manufactured by Taiyo Ink Co., Ltd., was used. After the resin 4 was temporarily dried at 75 ° C. for 20 minutes, as shown in FIG. 4D, the space between the leads 3 was exposed (e) in a UV curing furnace, and then etched with a 1% by weight sodium carbonate solution ( (E) is developed as shown in FIG.
As shown in the figure, the resin 4 on the surface opposite to the element mounting surface is removed while leaving only the resin 4 embedded in the space 3 between the leads, and thereafter, heating is performed at 150 ° C. for 30 minutes. The resin 4 inside was cured. Thereafter, the lid 5 was adhered using an epoxy resin (product name: ZC-106-2 manufactured by Pernox Japan Limited) and cured at 150 ° C. for 2 hours. Subsequent steps are as described above.

【0028】図4の実施例の場合、樹脂4としては光硬
化のみで硬化する樹脂を用いてもよいが、光硬化性と熱
硬化性を兼ね備えたものを用いることにより、樹脂4の
強度がさらに大となり、成形樹脂7によるモールドの際
に、樹脂7の成形圧を高くしても、蓋5内に樹脂7が浸
入することを防ぐことができる。
In the case of the embodiment shown in FIG. 4, the resin 4 may be a resin that can be cured only by photo-curing. However, by using a resin having both photo-curing and thermo-curing properties, the strength of the resin 4 can be reduced. Even if the molding pressure of the resin 7 is increased during molding with the molding resin 7, it is possible to prevent the resin 7 from entering the lid 5.

【0029】図5は前記マスキングテープ8の代わりに
治具10を用いてリードフレーム2Xのリード間3を塞
ぎ、樹脂4をリード間3に埋めた後、治具10を外すよ
うにしたものであり、本実施例によっても素子実装面側
への樹脂4の浸入を防止することができる。また、マス
キングテープ8はリードフレーム2Xに張り付け、樹脂
4でリード間3を埋めた後はマスキングテープ8を容易
に引きはがすことができ、生産性良く樹脂4の埋め込み
作業を行うことができる。
FIG. 5 shows a state in which the jig 10 is used instead of the masking tape 8 to close the lead 3 of the lead frame 2X, the resin 4 is buried in the lead 3, and then the jig 10 is removed. In addition, the present embodiment can also prevent the resin 4 from entering the element mounting surface. After the masking tape 8 is attached to the lead frame 2X and the space between the leads 3 is filled with the resin 4, the masking tape 8 can be easily peeled off, and the embedding work of the resin 4 can be performed with high productivity.

【0030】本発明は、SAWフィルタのみならず、気
密封止を要する他の電子部品にも適用することができ
る。
The present invention can be applied not only to SAW filters but also to other electronic components that require hermetic sealing.

【0031】[0031]

【発明の効果】請求項1によれば、成形樹脂によって素
子表面を覆うことのできないSAWフィルタ等の素子を
気密封止を行う場合、リードフレームのリード間を樹脂
によって塞ぐことにより、素子搭載面を均一にでき、蓋
との間の素子収容空間を気密封止構造として実現したも
のである。また、このようにしてリードフレームを用い
ることが可能となるから、生産性が向上し、量産により
安価に樹脂モールド型電子部品を提供することができ
る。また、素子全体を蓋によって覆った構造により、素
子にかかる応力を無くすることが可能となり、素子の特
性を安定させることができる。
According to the first aspect, when an element such as a SAW filter whose element surface cannot be covered with a molding resin is hermetically sealed, the space between the leads of the lead frame is closed by the resin, thereby providing an element mounting surface. And the element accommodating space between the lid and the cover is realized as a hermetically sealed structure. In addition, since a lead frame can be used in this manner, productivity can be improved, and a resin-molded electronic component can be provided at low cost by mass production. In addition, the structure in which the entire element is covered with the lid makes it possible to eliminate stress applied to the element, and to stabilize the characteristics of the element.

【0032】請求項2によれば、リードフレームのリー
ド間を片面側で閉塞部材により塞いでおいて樹脂のリー
ド間への充填を他方の面から行うため、リード間への樹
脂充填において、素子実装面側のリード間内の樹脂を素
子実装面と面一に形成でき、蓋の取付けの際に気密性の
良い封止構造を実現できる。また、樹脂加熱の際に発生
するガスが閉塞部材によって素子搭載面に付着すること
を防止することができ、これにより素子の電気的接続強
度の低下や、成形樹脂の素子側へのリード間を通しての
浸入を防止することができる。
According to the second aspect, since the space between the leads of the lead frame is closed on one side by the closing member and the resin is filled between the leads from the other surface, the resin is filled between the leads. The resin in the space between the leads on the mounting surface side can be formed flush with the element mounting surface, and a sealing structure with good airtightness can be realized when the lid is attached. In addition, the gas generated during heating of the resin can be prevented from adhering to the element mounting surface by the closing member, thereby lowering the electrical connection strength of the element and passing between the leads of the molded resin to the element side. Can be prevented from entering.

【0033】請求項3によれば、リード間に充填する樹
脂として、閉塞部材を用いて充填する場合は熱硬化型樹
脂または成形樹脂の成形温度以上の融点を持つ熱可塑性
樹脂を用い、また、エッチングにより部品実装面の反対
側の面の樹脂を削除して充填する場合には光硬化型樹
脂、あるいは光硬化型で熱硬化型の樹脂を用いることに
より、気泡も入らず、平滑性も得られる。
According to the third aspect, as the resin to be filled between the leads, a thermosetting resin or a thermoplastic resin having a melting point equal to or higher than the molding temperature of the molding resin is used when filling with a closing member. When removing and filling the resin on the surface opposite to the component mounting surface by etching, use light-curing resin or light-curing and heat-curing resin to eliminate bubbles and obtain smoothness. Can be

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による樹脂モールド型電子部品の一実施
例を示すもので、(A)は成形樹脂を2点鎖線で示す電
子部品の平面図、(B)、(C)はそれぞれ(A)の右
側面図、正面図、(D)、(E)はそれぞれ(A)のE
−E、F−F断面図である。
1A and 1B show an embodiment of a resin-molded electronic component according to the present invention, in which FIG. 1A is a plan view of an electronic component in which a molding resin is indicated by a two-dot chain line, and FIGS. ) Is a right side view, a front view, and (D) and (E) are E of (A), respectively.
It is an E and FF sectional view.

【図2】(A)〜(H)は本発明の電子部品の製造方法
の一実施例を示す工程図、(G)はそのリードフレーム
と蓋との接合部を示す拡大図である。
FIGS. 2A to 2H are process diagrams showing an embodiment of a method for manufacturing an electronic component according to the present invention, and FIG. 2G is an enlarged view showing a joint between a lead frame and a lid.

【図3】(A)はリードフレームの一例を示す平面図、
(B)は樹脂充填箇所を示すリードフレームの部分平面
図である。
FIG. 3A is a plan view illustrating an example of a lead frame.
(B) is a partial plan view of the lead frame showing a resin-filled portion.

【図4】(A)〜(E)は本発明の電子部品の製造方法
の他の実施例を示す工程図である。
FIGS. 4A to 4E are process diagrams showing another embodiment of the method for manufacturing an electronic component according to the present invention.

【図5】(A)〜(D)は本発明において、リード間を
閉塞する方法の他の例を示す工程図である。
FIGS. 5A to 5D are process diagrams showing another example of a method of closing a space between leads in the present invention.

【符号の説明】[Explanation of symbols]

1:素子、2a:アース導体、2b:入力リード部、2
c:出力リード部、2d〜2g:端子、2X:リードフ
レーム、3:リード間、4:樹脂、5:蓋、5a、5
b:端子、5c:開口縁、6:ボンディングワイヤ、
7:成形樹脂、8:マスキングテープ、9:接着剤、1
0:治具
1: element, 2a: ground conductor, 2b: input lead, 2
c: output lead portion, 2d to 2g: terminal, 2X: lead frame, 3: between leads, 4: resin, 5: lid, 5a, 5
b: terminal, 5c: opening edge, 6: bonding wire,
7: molding resin, 8: masking tape, 9: adhesive, 1
0: jig

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 FI H03H 9/25 H03H 9/25 A (72)発明者 山本 修一郎 東京都中央区日本橋一丁目13番1号 ティ −ディ−ケイ株式会社内──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 6 Identification symbol FI H03H 9/25 H03H 9/25 A (72) Inventor Shuichiro Yamamoto 1-13-1 Nihombashi, Chuo-ku, Tokyo Inside the corporation

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】リードフレームに素子を搭載し樹脂モール
ドされた電子部品において、 リードフレームの素子搭載面の裏側より、該リードフレ
ームのリード間に一旦樹脂を充填硬化させ、リードフレ
ームの表面に素子を搭載し、 該素子全体を片面開口構造の蓋により覆って接着密封
し、 更に成形樹脂により素子搭載面および裏面をモールドし
てなることを特徴とする樹脂モールド型電子部品。
An electronic component mounted with a device on a lead frame and resin-molded, a resin is temporarily filled and cured between the leads of the lead frame from the back side of the device mounting surface of the lead frame, and the device is mounted on the surface of the lead frame. A resin-molded electronic component, wherein the whole of the element is covered with a lid having a single-sided opening structure, and the element is mounted and sealed with a molding resin.
【請求項2】リードフレームの素子搭載面に閉塞部材を
設け、 素子搭載面の裏側よりリードフレームのリード間に一旦
樹脂を充填硬化させ、 素子搭載面の閉塞部材を外し、 表面に素子を搭載し、 素子全体を片面開口構造の蓋により覆って接着密封し、 更に成形樹脂にて素子搭載面および裏面をモールドする
ことを特徴とする樹脂モールド型電子部品の製造方法。
2. A closing member is provided on an element mounting surface of a lead frame, a resin is temporarily filled and cured between leads of the lead frame from the back side of the element mounting surface, the closing member on the element mounting surface is removed, and an element is mounted on the surface. A method of manufacturing a resin-molded electronic component, wherein the entire element is covered and sealed with a lid having a single-sided opening structure, and the element mounting surface and the back surface are molded with a molding resin.
【請求項3】請求項2において、 前記リード間に充填する成形樹脂として、熱硬化型樹
脂、光硬化型樹脂、光硬化型でかつ熱硬化型樹脂、また
は成形樹脂の成形温度以上の融点を持つ熱可塑性樹脂を
用いることを特徴とする樹脂モールド型電子部品の製造
方法。
3. The thermosetting resin, the photocurable resin, the photocurable and thermosetting resin, or a melting point higher than the molding temperature of the molding resin as the molding resin to be filled between the leads. A method for manufacturing a resin-molded electronic component, characterized by using a thermoplastic resin.
JP25567496A 1996-09-27 1996-09-27 Resin-molded electronic apparatus and its manufacture Pending JPH10107170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25567496A JPH10107170A (en) 1996-09-27 1996-09-27 Resin-molded electronic apparatus and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25567496A JPH10107170A (en) 1996-09-27 1996-09-27 Resin-molded electronic apparatus and its manufacture

Publications (1)

Publication Number Publication Date
JPH10107170A true JPH10107170A (en) 1998-04-24

Family

ID=17282051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25567496A Pending JPH10107170A (en) 1996-09-27 1996-09-27 Resin-molded electronic apparatus and its manufacture

Country Status (1)

Country Link
JP (1) JPH10107170A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110884A (en) * 2000-10-02 2002-04-12 Nitto Denko Corp Lead frame laminate
JP2007053378A (en) * 2005-08-17 2007-03-01 Robert Bosch Gmbh Micromechanical component
JP2007234977A (en) * 2006-03-02 2007-09-13 Citizen Electronics Co Ltd Semiconductor package
JP2013197521A (en) * 2012-03-22 2013-09-30 Nec Corp Manufacturing method of hollow package and hollow package
JP2013193388A (en) * 2012-03-22 2013-09-30 Nec Corp Injection molding machine, mold, and method of manufacturing hollow sealing structure
WO2015068585A1 (en) * 2013-11-07 2015-05-14 ダイセル・エボニック株式会社 Sealing member, sealed substrate sealed by sealing member, and method for manufacturing same
JP2015130492A (en) * 2013-12-05 2015-07-16 ローム株式会社 semiconductor module

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110884A (en) * 2000-10-02 2002-04-12 Nitto Denko Corp Lead frame laminate
JP2007053378A (en) * 2005-08-17 2007-03-01 Robert Bosch Gmbh Micromechanical component
JP2007234977A (en) * 2006-03-02 2007-09-13 Citizen Electronics Co Ltd Semiconductor package
JP2013197521A (en) * 2012-03-22 2013-09-30 Nec Corp Manufacturing method of hollow package and hollow package
JP2013193388A (en) * 2012-03-22 2013-09-30 Nec Corp Injection molding machine, mold, and method of manufacturing hollow sealing structure
WO2015068585A1 (en) * 2013-11-07 2015-05-14 ダイセル・エボニック株式会社 Sealing member, sealed substrate sealed by sealing member, and method for manufacturing same
JP2015130492A (en) * 2013-12-05 2015-07-16 ローム株式会社 semiconductor module

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