JPH09312259A5 - - Google Patents

Info

Publication number
JPH09312259A5
JPH09312259A5 JP1996327978A JP32797896A JPH09312259A5 JP H09312259 A5 JPH09312259 A5 JP H09312259A5 JP 1996327978 A JP1996327978 A JP 1996327978A JP 32797896 A JP32797896 A JP 32797896A JP H09312259 A5 JPH09312259 A5 JP H09312259A5
Authority
JP
Japan
Prior art keywords
silicon film
semiconductor device
thermal oxide
crystalline silicon
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996327978A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09312259A (ja
JP3645381B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP32797896A priority Critical patent/JP3645381B2/ja
Priority claimed from JP32797896A external-priority patent/JP3645381B2/ja
Publication of JPH09312259A publication Critical patent/JPH09312259A/ja
Publication of JPH09312259A5 publication Critical patent/JPH09312259A5/ja
Application granted granted Critical
Publication of JP3645381B2 publication Critical patent/JP3645381B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP32797896A 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 Expired - Fee Related JP3645381B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32797896A JP3645381B2 (ja) 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
JP2621096 1996-01-19
JP2603796 1996-01-20
JP3287496 1996-01-26
JP3287596 1996-01-26
JP3298196 1996-01-27
JP5833496 1996-02-20
JP8-88759 1996-03-17
JP8-32874 1996-03-17
JP8875996 1996-03-17
JP8-58334 1996-03-17
JP8-32875 1996-03-17
JP8-32981 1996-03-17
JP8-26210 1996-03-17
JP8-26037 1996-03-17
JP32797896A JP3645381B2 (ja) 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置

Publications (3)

Publication Number Publication Date
JPH09312259A JPH09312259A (ja) 1997-12-02
JPH09312259A5 true JPH09312259A5 (cg-RX-API-DMAC7.html) 2004-11-11
JP3645381B2 JP3645381B2 (ja) 2005-05-11

Family

ID=27572022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32797896A Expired - Fee Related JP3645381B2 (ja) 1996-01-19 1996-11-22 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置

Country Status (1)

Country Link
JP (1) JP3645381B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4646343B2 (ja) * 1998-11-27 2011-03-09 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2002124678A (ja) * 2000-10-13 2002-04-26 Sony Corp 薄膜トランジスタの製造方法
KR100623229B1 (ko) * 2003-11-29 2006-09-18 삼성에스디아이 주식회사 유기 전계 발광 표시 장치 및 그의 제조 방법

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